• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2017.05a
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• pp.93-93
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• 2017

고전력 펄스 전원공급장치를 이용한 마그네트론 스퍼터링(high-power impulse magnetron sputtering; HiPIMS)과 직류(direct current; DC) 전원공급장치를 이용한 마그네트론 스퍼터링(DC 스퍼터링)을 이용하여 제조한 티타늄 질화물(titanium nitride; TiN) 박막의 특성을 비교하였다. HiPIMS와 DC 스퍼터링 공정 중에 빗각증착을 적용하여 TiN 박막의 미세구조와 기계적 특성의 변화를 확인하였다. TiN 박막을 코팅하기 위한 기판으로 스테인리스 강판(SUS304)과 초경(cemented carbide; WC-10wt.%Co)을 사용하였다. 기판은 알코올과 아세톤으로 초음파 처리를 실시하여 기판 표면의 불순물을 제거하였다. 기판 청정 후 진공용기 내부의 기판홀더에 기판을 장착하고 $2.0{\times}10^{-5}torr$의 기본 압력까지 진공배기를 실시하였다. 진공 용기의 압력이 기본 압력에 도달하면 아르곤(Ar) 가스를 진공용기 내부로 ${\sim}10^{-2}torr$의 압력으로 주입하고 기판홀더에 라디오 주파수(radio frequency; rf) 전원공급장치를 이용하여 - 800 V의 전압을 인가하여 글로우 방전을 발생시켜 30 분간 기판 표면의 산화막을 제거하는 기판청정을 실시하였다. 기판청정이 완료되면 기본 압력까지 진공배기를 실시하고 Ar과 질소($N_2$)의 혼합 가스를 진공용기 내부로 ${\sim}10^{-3}torr$의 압력으로 주입하여 HiPIMS와 DC 스퍼터링으로 TiN 박막 제조를 실시하였다. 빗각의 크기는 $45^{\circ}$와 $-45^{\circ}$이었다. 제조된 TiN 박막은 주사전자 현미경, 비커스 경도 측정기 그리고 X-선 회절 분석기를 이용하여 특성을 분석하였다. HiPIMS로 제조한 TiN 박막은 기판 전압을 인가하지 않아도 색상이 노란색을 보이지만, DC 스퍼터링으로 제조한 TiN 박막은 기판 전압을 인가하지 않으면 노란색을 보이지 않고 어두운 갈색에 가까운 색을 보였다. TiN 박막의 경도는 HiPIMS로 제조한 TiN 박막이 DC 스퍼터링으로 제조한 TiN 박막보다 높았다. 이러한 TiN 박막의 특성 차이는 DC 스퍼터링과 비교하여 높은 HiPIMS의 이온화율에 의한 결과로 판단된다. 빗각을 적용한 TiN 박막은 미세구조 변화를 보였으며 이러한 미세구조 변화는 TiN 박막의 특성에 영향을 미치는 것을 확인하였다.

• Journal of the Korean Vacuum Society
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• v.13 no.4
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• pp.157-163
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• 2004

Dependence of residual compressive stress of diamond-like carbon (DLC) films on relative humidity was investigated. Polymeric, graphitic and diamond-like carbon films were prepared by r.f.-PACVD using methane or benzene with the negative self bias voltage of the substrate ranging from -100 to -800 V. In-situ measurements of the residual stress were carried out in an environment chamber where the relative humidity was varied from 10％ to 90％. In dense DLC film of high residual compressive stress and hardness, we could not observe any change in the residual compressive stress with relative humidity. However, in the cases of graphitic and polymeric DLC films, abrupt change in the residual stress occurred by changing the relative humidity. The quantity of the stress change was inversely proportional to the film thickness, which means that the stress change with humidity is not due to the penetration of the water molecule into the film structure, but due to surface interaction between water molecules and film surface.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.320-320
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• 2011

We describe fabrication of superhydrophobic surface on non-woven fabric (NWF) having nano-hairy structures and a hydrophobic surface coating. Oxygen plasma was irradiated on NWF for nano-texuring and a precursor of HMDSO (Hexamethydisiloxane) was introduced as a surface chemical modification for obtaining superhydrophobicity using 13.56 MHz radio frequency-Plasma Enhanced Chemical Vapor Deposition (rf-PECVD). O2 plasma treatment time was varied from 1 min to 60 min at a bias voltage of 400V, which fabricated pillar-like structures with diameter of 30 nm and height of 150 nm on NWF. Subsequently, hydrophobic coating using hexamethyldisiloxane vapor was deposited with 10 nm thickness on NWF substrate at a bias voltage of 400 V. We evaluate superhydrophobicity of the modified NWF with sessile drop using goniometer and high speed camera, in which aspect ratio of nanohairy structures, contact angle and contact angle hysteresis of the surfaces were measured. With the increase of aspect ratio, the wetting angle increased from $103^{\circ}$ to $163^{\circ}$, and the contact angle hysteresis decreased dramatically below $5^{\circ}$. In addition, we had conducted experiment for nucleation and condensation of water via E-SEM. During increasing vapor pressure inside E-SEM from 3.7 Torr to over 6 Torr which is beyond saturation point at $2^{\circ}C$, we observed condensation of water droplet on the superhydropobic NWF. While the condensation of water on oxygen plasma treated NWF (superhydrophilic) occurred easily and rapidly, superhydrophobic NWF which was fabricated by oxygen and HMDSO was hardly wet even under supersaturation condition. From the result of wetting experiment and water condensation via E-SEM, it is confirmed that superhydrophobic NWF shows the grate water repellent abilities.

• Current Photovoltaic Research
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• v.3 no.3
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• pp.80-84
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• 2015

We suggest new emitter formation method using solid-phase epitaxy (SPE); solid-phase epitaxy emitter (SEE). This method expect simplification and cost reduction of process compared with furnace process (POCl3 or BBr3). The solid-phase epitaxy emitter (SEE) deposited a-Si:H layer by radio-frequency plasma-enhanced chemical vapor deposition (RF-PECVD) on substrate (c-Si), then thin layer growth solid-phase epitaxy (SPE) using rapid thermal process (RTP). This is possible in various emitter profile formation through dopant gas ($PH_3$) control at deposited a-Si:H layer. We fabricated solar cell to apply solid-phase epitaxy emitter (SEE). Its performance have an effect on crystallinity of phase transition layer (a-Si to c-Si). We confirmed crystallinity of this with a-Si:H layer thickness and annealing temperature by using raman spectroscopy, spectroscopic ellipsometry and transmission electron microscope. The crystallinity is excellent as the thickness of a-Si layer is thin (~50 nm) and annealing temperature is high (<$900^{\circ}C$). We fabricated a 16.7% solid-phase epitaxy emitter (SEE) cell. We anticipate its performance improvement applying thin tunnel oxide (<2nm).

• Textile Coloration and Finishing
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• v.6 no.3
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• pp.27-36
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• 1994

In order to produce a water repellent surface on polyester fabric, samples were treated in the atmosphere of $CF_4$ glow discharge plasma. The samples used in the study were ployester fabric and poyester film. The purpose of film treatment is for the comparison of hydrophobicity with fabric sample at same treatment condition. Radio frequency(13.56MHz) generator was used as electric source and its in put power is 100 Watt. Water repellency was evaluated by contact angle measurement. Result obtained are as follows. 1) Fiber interstice of original fabric was ana lysed as 0.43$\mu$m, and this value was sufficiently ideal for making water repellent fabric. 2) The most favorable setting position of substrate was the center area between two electrodes. 3) Fabric contact angle was higher than film contact angle at same treatment condition, and its difference was more than 50${\circ}$. And it was incapalbe of fabric contact angle measurement when the film contact angle was less than 90${\circ}$. because the fabric is susceptible to absorption of water by the capillary effect. 4) Fabric contact angle can not revealed the precise defferences of surface hydrophobicity, however, the film contact angle showed the real hydrophobic nature. 5) It was not sufficient method to evaluate the hydrophobicity of fabric surface by merely measure of the water contact angle. 6) It showed high water repellent nature at 0.06 torr of $CF_4$ plasma gas pressure and duration of 45 seconds treatment, and it can not be anticipated more improved nature if the pressure and duration of treatment time were increased.

• Journal of the Korean Society for Heat Treatment
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• v.33 no.1
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• pp.13-19
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• 2020

Annealing effects on the properties of Bi-doped ZnO thin films were investigated. Bi- doped ZnO thin films were deposited on quartzs substrates at 300℃ by using radio-frequency magnetron sputtering system. Post heat treatments at 600, 700, and 800℃ were performed to evaluate the effect of annealing temperatures on the structural, optical, and electrical properties of Bi-doped ZnO thin films. FE-SEM images showed the dramatic surface morphology changes by rearrangement of elements at high heat treatment temperature of 800℃. X-ray diffraction analysis indicated that the peaks of the Bi-doped ZnO thin films were same as the peaks of the (002) planes of ZnO peak-positioned at 2θ=34.0° and peak intensities and FWHMs were improved as the annealing temperatures increased. The optical transmittance was improved with increasing annealing temperatures and was over 80% in the wavelength region between 435 and 1100 nm at the annealing temperature of 700 and 800℃. With increasing annealing temperature, the electron concentrations and electron mobilities were increased. On the other hand, electric resistivity of the films were decreased with increasing annealing temperatures. These results showed that the heat treatment temperature is an important parameter to improve the structural, optical, and electrical properties of Bi-doped ZnO thin films.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.35 no.3B
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• pp.462-473
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• 2010

The RFID system has the security problem of location tracking and user privacy. In order to solve this problem, the cryptographic access method using hash function is difficult to in real applications. Because there is a limit of computing and storage capacity of Tag, but the safety is proved. The lightweight authentication methods like HB and LMAP guarantee the high efficiency, but the safety is not enough to use. In this paper, we use the AES for RFID Authentication, and solve the problem of using fixed key with key change step by step. The symmetric keys of the tag and server are changed by the random number generated by tag, reader and server successively. This could prevent the key exposure. As a result, the output of the tag and reader always changes. These key changes could make it possible to prevent eavesdropping, replay attack, location tracking and spoofing.

• Journal of the East Asian Society of Dietary Life
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• v.23 no.2
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• pp.153-170
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• 2013

This study examined awareness and information acquisition behavior regarding food hygiene and safety of university students to improve safe dietary practices and to get basic information to develop educational materials for food safety. It was conducted among 276 university students of Qingdao University and Liaocheng University in Shandong province, China through a self-administered questionnaire. Data were analyzed by SPSS Windows V.19.0. To describe characteristics of the respondents, frequency distributions were used. In addition, t test, one-way analysis of variance and Duncan's multiple range tests were conducted. The results were as follows: The respondents were generally interested in food hygiene and safety. However, the level of awareness regarding the food hygiene and safety system in China was not high. Almost forty-five percent of the respondents did not think that foods produced and distributed in China were safe. For the reasons for their distrust, most of the students replied that they did not trust the safety 'because of distrust for hygiene of the food process', followed by 'because of distrust for food distribution' and 'because of excess or illegal use of food additives on food process'. The respondents answered for the concern level toward food hygiene and safety foodborne disease threatened food safety the most, followed by heavy metal contamination and endocrine disruptors. The respondents acquired most information from electronic media including TV and radio. Most of the students wanted to participate in food hygiene and safety education. Finally, when they found hazardous or foreign materials in food the most frequent reaction was 'paying attention in the next purchase', followed by 'notifying others', and 'letting it go this time but never buying that product in the future'.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.18 no.7
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• pp.1634-1642
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• 2014

Mobile RFID system, that consists of the existing RFID reader mounted on the mobile devices such as smartphones, is able to provide the users a variety of services and convenience. But security of mobile RFID system is too weak like the existing RFID system. In this paper, the mobile RFID mutual authentication protocol with high level of security is proposed to overcome the troubles such as cryptographic protocols in the existing RFID system responding with the same value in every authentication procedure and the exposure in the exchange of messages. The proposed protocol exchanges messages unexposed by using the random numbers generated in the mutual authentication between the tag and the reader and making numbers coded with the symmetric key. Besides, the protocol uses the mutual authentication utilizing OTP by considering the characteristics of the reader embedded in mobile devices in the mutual authentication process between the reader and the server. Because changed message in every authentication, which produces safe from spoofing attacks and replay attacks, etc.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.33 no.2C
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• pp.208-218
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• 2008

We are sure that RFID system should be a widely used automatic identification system because of its various advantages and applications. However, many people know that invasions of privacy in RFID system is still critical problem that makes it difficult to be used. Many works for solving this problem have focused on light-weight cryptographic functioning in the RFID tag. An agent scheme is another approach that an agent device controls communications between the tag and the reader for protecting privacy. Generally an agent device has strong security modules and enough capability to process high-level cryptographic protocols and can guarantees consumer privacy. In this paper, we present an enhanced mobile agent for RFID privacy protection. In enhanced MARP, we modified some phases of the original MARP to reduce the probability of successful eavesdropping and to reduce the number of tag's protocol participation. And back-end server can authenticate mobile agents more easily using public key cryptography in this scheme. It guarantees not only privacy protection but also preventing forgery.