• Title/Summary/Keyword: purge

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Characterization of $HfO_2 /SiON$ stack structure for gate dielectrics (ALD를 이용한 극박막 $HfO_2 /SiON$ stack structure의 특성 평가)

  • Kim, Youngsoon;Lee, Taeho;Jaemin Oh;Jinho Ahn;Jaehak Jung
    • Proceedings of the International Microelectronics And Packaging Society Conference
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    • 2002.11a
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    • pp.115-121
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    • 2002
  • In this research we have investigated the characteristics of ultra thin $HfO_2 /SiON$stack structure films using several analytical techniques. SiON layer was thermally grown on standard SCI cleaned silicon wafer at $825^{\circ}C$ for 12sec under $N_2$O ambient. $HfO_2 /SiON$$_4$/$H_2O$ as precursors and $N_2$as a carrier/purge gas. Solid HfCl$_4$was volatilized in a canister kept at $200^{\circ}C$ and carried into the reaction chamber with pure $N_2$carrier gas. $H_2O$ canister was kept at $12^{\circ}C$ and carrier gas was not used. The films were grown on 8-inch (100) p-type Silicon wafer at the $300^{\circ}C$ temperature after standard SCI cleaning, Spectroscopic ellipsometer and TEM were used to investigate the initial growth mechanism, microstructure and thickness. The electrical properties of the film were measured and compared with the physical/chemical properties. The effects of heat treatment was discussed.

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Optimum Configuration for Pressurization System of Propellant Tank (추진제 탱크 가압 시스템의 최적 구성)

  • Jung, Young-Suk;Cho, Nam-Kyung;Oh, Seung-Hyub
    • Aerospace Engineering and Technology
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    • v.9 no.1
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    • pp.133-142
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    • 2010
  • Propulsion system of launch vehicle is composed with subsystems as propellant tank, pressurization system, propellant fill/drain system, valve operating system, purge system and so on. Among others, pressurization system is the most important subsystem, because of the real-time control part for pressure control of propellant tank. Therefore, it is the subsystem that must be primarily considered on conceptual design process. In this paper, the data of the previously developed pressurization systems were collected and the optimum configuration was selected by analysis of advantage and disadvantage of the systems.

Headspace Volatile Compounds of Steamed Liriopis Tuber Tea Affected by Steaming Frequency

  • Park, Jin-Yong;Park, So-Hae;Lee, Heeseob;Lee, Yang-Bong
    • Preventive Nutrition and Food Science
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    • v.19 no.4
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    • pp.314-320
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    • 2014
  • Flavor quality of Liriopis tuber tea that was made using a steaming process was studied by measuring changes in headspace volatile compounds. Headspace volatile compounds of the prepared samples were isolated, separated and identified by the combined system of purge & trap, automatic thermal desorber, gas chromatography, and mass selective detector. As steaming frequencies were increased, the area percent of aldehydes decreased from 32.01% to 3.39% at 1 and 9 steaming frequency times, respectively. However, furans and ketones increased from 18.67% to 33.86% and from 9.60% to 17.40% at 1 and 9 times, respectively. The savory flavor of Liriopis tuber tea was due to a decrease in aldehydes contributing a fresh flavor at the 1st steaming process and newly generated furans from nonenzymatic browning with repeated steaming frequencies. These results will provide basic information for quality control of the newly developed Liriopis tuber tea.

ZnO thin films used in the piezoelectric layer of FBAR devices were deposited by 2-step methods using ALD equipment (FBAR 소자의 압전층으로 사용되는 ZnO 박막의 증착시 ALD틀 이용한 2-step 법 적용에 관한 연구)

  • Lee, Soon-Bum;Park, Sung-Hyun;Lee, Neung-Heon;Shin, Young-Hwa
    • Proceedings of the KIEE Conference
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    • 2006.07c
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    • pp.1651-1652
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    • 2006
  • In this study, the 2-step methode by ALD equipment was used to improve the characteristics of ZnO thin films used in a piezoelectric layer when the FBAR devices of a SMR type are fabricated. The Height of formed buffer layer was $400{\AA}$ and ZnO thin film of $13600{\AA}$ was deposited by RF sputter on the buffer layer. When ZnO thin films are deposited, deposition conditions such as pressure, injection time of source and purge time were changed variously. The characteristics of piezoelectric layer such as a crystal orientation and micro-structure of deposited ZnO thin films were studied by SEM, AFM and XRD.

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Theoretical and Experimental Considerations of Thermal Humidity Characteristics

  • Choi, Seok-Weon;Cho, Ju-Hyeong;Seo, Hee-Jun;Lee, Sang-Seol
    • International Journal of Aeronautical and Space Sciences
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    • v.3 no.1
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    • pp.9-18
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    • 2002
  • Thermal humidity characteristics were considered theoretically and experimentally. A Simply well-fitted correlation of a saturated vapor pressure-temperature curve of water was introduced based on Antoine equation to make theoretical prediction of relative humidity according to temperature variation. Characteristics of dew point were also examined theoretically and its relation with temperature and humidity was evaluated. The exact mass of water vapor in a specified humidity and temperature condition was estimated to provide useful insight into the idea about how much amount of water corresponds to a specified humidity and temperature condition in a confined system. A simple but well-fitting model of dehumidification process was introduced to anticipate the trend of relative humidity level during GN2(gaseous nitrogen) purge process in a humidity chamber. Well-suitedness of this model was also verified by comparison with experimental data. The overall appearance and specification of two thermal humidity chambers were introduced which were used to perform various thermal humidity tests in order to yield useful data necessary to support validity of theoretical models.

Combustion Stability Characteristics of the Model Chamber with Various Configurations of Triplet Impinging-Jet Injectors

  • Sohn Chae-Hoon;Seol Woo-Seok;Shibanov Alexander A.
    • Journal of Mechanical Science and Technology
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    • v.20 no.6
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    • pp.874-881
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    • 2006
  • Combustion stability characteristics in actual full-scale combustion chamber of a rocket engine are investigated by experimental tests with the model (sub-scale) chamber. The present hot-fire tests adopt the combustion chamber with three configurations of triplet impinging-jet injectors such as F-O-O-F, F-O-F, and O-F-O configurations. Combustion stability bound-aries are obtained and presented by the parameters of combustion-chamber pressure and mixture (oxidizer/fuel) ratio. From the experimental tests, two instability regions are observed and the pressure oscillations have the similar patterns irrespective of injector configuration. But, the O-F-O injector configuration shows broader upper-instability region than the other configurations. To verify the instability mechanism for the lower and upper instability regions, air-purge acoustic test is conducted and the photograph or the flames is taken. As a result, it is found that the pressure oscillations in the two regions can be characterized by the first impinging point of hydraulic jets and pre-blowout combustion, respectively.

Freeze/Thaw cycle effects on GDLs and MEAs of PEFC (동결/해동 열사이클이 PEFC의 GDL/MEA에 미치는 영향)

  • Lim, Nam-Yun;Park, Gu-Gon;Park, Jin-Soo;Yoon, Young-Gi;Lee, Won-Yong;Lim, Tae-Won;Kim, Chang-Soo
    • 한국신재생에너지학회:학술대회논문집
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    • 2006.06a
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    • pp.96-98
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    • 2006
  • Proper water management is vital to achieve high performance and durability of PEFC (Polymer Electrolyte Fuel Cell). The effects of the residual water from PEFC after purge in shut-down processes on GDL/MEAs were investigated with freeze/thaw cycles Freeze/thaw cycle tests were conducted with single cells which were designed from transparent acryl plates. Single cells which contain several amount of residual water were cycles from $80^{\circ}C$ to $-28^{\circ}C$. The resistance changes of the single cells which have various amount of residual water were evaluated by ac-impedance analysis with 24 times of freeze/thaw cycles. Also, after the freeze/thaw cycles, the property changes were characterized by visual methods such as SEM, EPMA. Though it was difficult to observe noticeable property changes in the visual characterizations, the resistance of cells dramatically increased with the amount of remained water.

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Deep Hydrochemical Investigations Using a Borehole Drilled in Granite in Wonju, South Korea

  • Kim, Eungyeong;Cho, Su Bin;Kihm, You Hong;Hyun, Sung Pil
    • Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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    • v.19 no.4
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    • pp.517-532
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    • 2021
  • Safe geological disposal of spent nuclear fuel (SNF) requires knowledge of the deep hydrochemical characteristics of the repository site. Here, we conducted a set of deep hydrochemical investigations using a 750-m borehole drilled in a model granite system in Wonju, South Korea. A closed investigation system consisting of a double-packer, Waterra pump, flow cell, and water-quality measurement unit was used for in situ water quality measurements and subsequent groundwater sampling. We managed the drilling water labeled with a fluorescein dye using a recycling system that reuses the water discharged from the borehole. We selected the test depths based on the dye concentrations, outflow water quality parameters, borehole logging, and visual inspection of the rock cores. The groundwater pumped up to the surface flowed into the flow cell, where the in situ water quality parameters were measured, and it was then collected for further laboratory measurements. Atmospheric contact was minimized during the entire process. Before hydrochemical measurements and sample collection, pumping was performed to purge the remnant drilling water. This study on a model borehole can serve as a reference for the future development of deep hydrochemical investigation procedures and techniques for siting processes of SNF repositories.

The Study of Transitional Justice in El Salvador (발전전략으로서의 과거청산 - 엘살바도르 이행기 정의의 특수성 사례 분석 -)

  • Noh, Yong-Seok
    • Iberoamérica
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    • v.13 no.1
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    • pp.41-67
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    • 2011
  • El Salvador had suffered some 75,000 casualties, mostly civilian, from violent civil conflict(1980-92). In 1992, after negotiations, the government and FMLN signed a historic comprehensive peace accord which brought an end to the war and instituted wide-reaching political and social reforms. Many scholars call it as Transitional Justice in El Salvador. Transitional Justice in El salvador has had two identifiable stages. In the First stage, institutional reforms, such as DDR(disarmament, demobilization, reintegration), and a truth commission were implemented. The second phase corresponds to the period subsequent to the truth commission report, with the failure to implement the commission's recommendations, including those related to reparations and justice. This essay explain how was transitional justice in El salvador different from the other cases, and what was the purpose of extraordinary transitional justice in El Salvador. In detail, the first section of this essay examines the history of the civil war and peace process in El Salvador, and then explores the relationships between cold war and transitional justice in El Salvador. Finally, this essay suggests that truth commission's mandate which investigate 'serious acts of violence that have occurred since 1980' was very important role to accomplish peace and transitional justice in El Salvador.

Real-time Contaminant Particle Monitoring for Chemical Vapor Deposition of Borophosphosilicate and Phosphosilicate Glass Film by using In-situ Particle Monitor and Particle Beam Mass Spectrometer (ISPM 및 PBMS를 이용한 BPSG 및 PSG CVD 공정 중 발생하는 오염입자의 실시간 측정)

  • Na, Jeong Gil;Choi, Jae Boong;Moon, Ji Hoon;Lim, Sung Kyu;Park, Sang Hyun;Yi, Hun Jung;Chae, Seung Ki;Yun, Ju Young;Kang, Sang Woo;Kim, Tae Sung
    • Particle and aerosol research
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    • v.6 no.3
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    • pp.139-145
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    • 2010
  • In this study, we investigated the particle formation during the deposition of borophosphosilicate glass (BPSG) and phosphosilicate glass (PSG) films in thermal chemical vapor deposition reactor using in-situ particle monitor (ISPM) and particle beam mass spectrometer (PBMS) which installed in the reactor exhaust line. The particle current and number count are monitored at set-up, stabilize, deposition, purge and pumping process step in real-time. The particle number distribution at stabilize step was measured using PBMS and compared with SEM image data. The PBMS and SEM analysis data shows the 110 nm and 80 nm of mode diameter for BPSG and PSG process, respectively.