• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제48권6호
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• pp.403-409
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• 1999

We fabricated diamond like carbon (DLC) thin films using pulsed laser deposition (PLD) method. Among many deposition parameters, the effects of the deposition temperature and the laser energy density were investigated. Structural properties of the films were studied by Raman spectroscopy. The surface morphologies and cross-section imagies of the films were investigated by atomic force microscopy (AFM) and scanning electron microscopy (SEM) respctively. DLC thin films fabricated at $12 J/cm^2$ of a laser energy density and $300^{\circ}C$ of a deposition temperature showed the best quality.

• Journal of Electrical Engineering and Technology
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• 제1권1호
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• pp.98-100
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• 2006

ZnO thin films were deposited at different repetition rates of 5 Hz and 10 Hz by pulsed laser deposition. X-ray diffraction (XRD) full widths at half maximum (FWHMs) of (002) ZnO peak in ZnO thin film deposited at 5 Hz and 10 Hz was 0.22 and $0.26^{\circ}$, respectively. The grain size of ZnO thin film deposited at 5 Hz was larger than that of 10 Hz. The variation of repetition rates did not have an effect on the optical property of ZnO thin films. The degradation of the crystalline quality and surface morphology in ZnO thin film deposited at 10 Hz resulted from supersaturation effect by decrease of time interval between a ZnO particle arriving on a substrate by laser shot and a ZnO particle arriving on a substrate by next laser shot.

• 대한기계학회논문집B
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• 제25권11호
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• pp.1483-1491
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• 2001

Enhancement of pulsed-laser ablation by an artificially deposited liquid film is presented. Measurements of ablation rate, ablation threshold, and surface topography arc performed. Correlation between material ablation and photoacoustic effect is examined by the optical beam deflection method. The dependence of ablation rate on liquid-film thickness and chemical composition is also examined. The results indicate that photomechanical effect in the phase explosion of liquid is responsible for the enhanced ablation. The low critical temperature of liquid induces explosive vaporization with localized photoacoustic excitation in the superheat limit and increases the ablation efficiency. Experiments were carried out utilizing a Q-swiched Nd:YAG laser at near-threshold laser fluences with negligible plasma effect (up to ∼100 MW/cm$^2$).

• 한국전기전자재료학회논문지
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• 제14권3호
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• pp.246-250
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• 2001

ZnO thin films for light emission device have been deposited on sapphire and silicon substrates by pulsed laser deposition technique(PLD). A Nd:YAG laser was used with the wavelength of355 nm. In order to investigate the emission properties of ZnO thin films, Pl measurements with an Ar ion laser a light source using an excitation wavelength of 351 nm and a power of 100 mW are used. All spectra were taken at room temperature by using a grating spectrometer and a photomultiplier detector. ZnO exhibited Pl bands centers around 390, 510 and 640 nm, labeled near ultra-violet(UV), green and orange bands. Structural properties of ZnO thin films are analyzed with X-ray diffraction(XRD).

• 대한전기학회:학술대회논문집
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• 대한전기학회 1997년도 하계학술대회 논문집 E
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• pp.1900-1902
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• 1997

In order to obtain various waveforms of current pulse applied at the flashlamp, we have fabricated a Pulsed Nd:YAG laser by PFN with multiple-mesh formed LC network. we have obtained various waveforms of current pulse by adjusting the values of L and C, compared these waveforms of current pulse with laser beam, and then analyzed the laser output energy. We have got relations for $E_{TH}$ and $E_L$ at each mesh which supplies energy with flashlamp and found that output of Pulsed Nd:YAG Laser for 2-mesh, 5-mesh coincided with computer's simulation, PSPICE.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2000년도 추계학술대회 논문집
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• pp.539-542
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• 2000

ZnO thin films for light emission device have been deposited on sapphire and silicon substrates by pulsed laser deposition technique(PLD). A Nd:YAG laser was used with the wavelength of 355 nm. In order to investigate the emission properties of ZnO thin films, PL measurements with an Ar ion laser as a light source using an excitation wavelength of 351 nm and a power of 100 mW are used. All spectra were taken at room temperature by using a grating spectrometer and a photomultiplier detector. ZnO exhibited PL bands centered around 390, 510 and 640 nm, labeled near ultra-violet (UV), green and orange bands. Structural properties of ZnO thin films are analized with X-ray diffraction (XRD).

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제48권5호
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• pp.344-348
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• 1999

Diamond like carbon(DLC) thin films possesed not only marvelous material characteristics such as large thermal conductivity, high hardness and being chemically inert, but also possesed negative electron affinity (NEA) properties. The NEA is an extremely desirable property of the material used in microelestronics and vacuum microelestronics device. DLC films were fabricated by pulsed laser deposition(PLD). Theeffect of the laser energy density and the substrate temperature on the properies of DLC films was investigated. The experiment was accomplished at temperatures in the range of room temperature to $600^{\circ}C$. The laser energy density was in the range of 6 $J/cm^2$ to 16 $J/cm^2$.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2000년도 추계학술대회 논문집
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• pp.524-527
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• 2000

In this paper, we have studied minimization of the burr which occurred after $\mu$-BGA(ball grid array) singulation process, singulation of the multilayer with a pulsed Nd:YAG(266, 532 nm) laser is used to cut the metal layer which doesn't well absorb laser beam. Especially, the photoresist and $N_2$blowing is effective to minimize of the surface demage and burr. In this experiment, the $N_2$ blowing reduces a laser energy loss by debris and suppress a surface oxidation. The SEM(scanning electron microscopes) and non-contact 3D inspector are used to measure cutting line-width and surface demage. The $\mu$-BGA singulation threshold energy is 75.0 J/cm$^2$at 30 ${\mu}{\textrm}{m}$/s scan speed.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1996년도 하계학술대회 논문집 A
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• pp.514-517
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• 1996

Zero current switching(ZCS) series resonant converter is used to control laser power density in a pulsed Nd:YAG laser power supply. The high power and high repetition rate paused Nd:YAG laser is designed and fabricated to control current pulse width and pulse repetition rate in the double elliptical laser oscillator. In order to find out operational characteristics of pulsed Nd:YAG laser, the electrical properties of driving power supply and laser output power are investigated and experimented by changing of the current pulse width from 200uS to 350uS(step 50uS) and pulse repetition rate range of 500pps(pulse per second) to 1150pps. From that result, we obtaind maximum efficiency of 1.83% and maximum laser output or 220W at the condition of 350 uS and 1150pps with one Nd:YAG rod), and obtained that of more than 400W with two laser head connecting series.

• 센서학회지
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• 제28권5호
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• pp.294-298
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• 2019

Pulsed laser-based optical sensor monitoring systems for real time microplastic particle counting are proposed and developed in this study. To develop our real time monitoring system, we used a 450 nm pulsed laser and a photomultiplier with very high quantum efficiency. First, we demonstrated that the microplastic particle counting system could detect standard micro bead samples of 100, 250, and $500{\mu}m$ in river water. We then performed research concerning pulsed laser-based optical spectral sensor systems for real time microplastic monitoring. Additionally, we demonstrated that the real time microplastic remote monitoring system using LoRa communications could detect microplastic in the tap water resource protection area.