• 제목/요약/키워드: pulsed Nd:YAG laser

검색결과 276건 처리시간 0.023초

펄스레이저 증착법의 레이저 파장변환에 의한 실리콘 나노결정의 발광특성 연구 (Study on the Luminescence of Si Nanocrystallites on Si Substrate Fabricated by Changing the Wavelength of Pulsed laser deposition)

  • 김종훈;배상혁;이상렬
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2000년도 추계학술대회 논문집 학회본부 C
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    • pp.411-412
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    • 2000
  • Si nanocrstallites on p-tyre (100) Si substrate have been fabricated by pulsed laser deposition technique using a Nd:YAG laser with the wavelength of 355, 532 and 1064 nm. The base vacuum in the chamber was down to $10^{-5}$ Torr and the pressure of the gas during deposition was varied from 1 to 3 Torr. After deposition, Si nanocrystallites have been annealed at $N_2$ gas. Nitrogen have been used as ambient gases. Strong blue and green luminescence from Si nanocrystallites has been observed in room temperature by photoluminescence and its peak energies shift to green when the wavelength is increased from 355-1064 nm

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기판 변화에 따른 ZHO 박막의 광학특성 연구 (Comparison of the optical properties of ZnO thin films grown on various substrates by pulsed laser deposition)

  • 배상혁;이상렬
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2000년도 하계학술대회 논문집
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    • pp.828-830
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    • 2000
  • Various substrates were compared for the investigation of the optical properties of ZnO thin films. ZnO thin films have been deposited on (100) p-type silicon substrates and (001) sapphire substrates by pulsed laser deposition technique using a Nd:YAG laser with the wavelength of 355 nm. Oxygen and nitrogen gases were used as ambient gases. Substrate temperatures were varied in the range of 200$^{\circ}C$ to 600$^{\circ}C$ at a fixed ambient gas pressure of 350 mTorr. ZnO films have been deposited on various substrates, such as Si and sapphire wafers. We have investigated substrate effect on the optical and structural properties of ZnO thin films using X-ray diffraction (XRD) and photoluminescence (PL).

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후열처리에 따른 실리콘 나노결정 박막의 광학적 특성 변화 연구 (Annealing Effect on the Photoluminescence of Si Nanocrystallites Thin Films)

  • 전경아;김종훈;최진백;이상렬
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제51권6호
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    • pp.236-239
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    • 2002
  • Si nanocrystallites thin films on P-type (100) Si substrate have been fabricated by pulsed laser deposition using a Nd:YAG laser. After deposition, samples were annealed in several environmental gases ;It the temperature range of 400 to $800^{\circ}C$ Hydrogen passivation was then performed in the forming gas (95 % $N_2$ + 5 % $H_2$) for 1 hr. Strong violet-indigo photoluminescence has been observed at room temperature on nitrogen ambient-annealed Si nanocrystallites. We report the variation of photoluminescence (PL) properties of Si thin films by changing annealing temperatures and by using hydrogen passivation. The results could suggest that the origin of violet-indigo PL should be related to the Quantum size effect of Si nanocrystallite.

펄스레이저 증착법으로 성장된 ZnO 박막의 어닐링 온도변화에 따른 구조적, 광학적 특성에 관한 연구 (Annealing Effect on the structural and optical properties of ZnO thin films prepared by Pulsed Laser Deposition)

  • 김재홍;이천
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2004년도 추계학술대회 논문집 전기물성,응용부문
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    • pp.54-57
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    • 2004
  • ZnO thin films on (001) sapphire substrates have been deposited by pulsed laser deposition(PLD) technique using an Nd:YAG laser with a wavelength of 266 m. During deposition, the experiment of the deposition of ZnO thin films has been performed for substrate temperatures in the range of $400^{\circ}C$ and flow rate of 350 sccm, films have been annealed at various substrate temperatures after deposition. After post-annealing treatment in the oxygen ambient, the structural properties of ZnO thin films were characterized by diffraction (XRD), SEM and the optical of the ZnO were characterized by photoluminescence (PL).

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레이저 증착법에 의해 제작된 ZnO 박막의 UV 발광특성연구 (The study of UV emission in ZnO thin films fabricated by Pulsed Laser Deposition)

  • 배상혁;이상렬;진범준;우현수;임성일
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1999년도 추계학술대회 논문집
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    • pp.95-98
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    • 1999
  • ZnO thin films on (001) sapphire substrates have been deposited by pulsed laser deposition technique using a Nd:YAG laser with the wavelength of 355 nm. In order to investigate the effect of the deposition conditions on the properties of ZnO thin films at an oxygen pressure of 350 mTorr, the experiment has been Performed at various substrate temperatures in the range of 20$0^{\circ}C$ to $700^{\circ}C$. According to XRD, (002) textured ZnO films of high crystalline quality have been obtained and the intensity of UV emission was the highest at 40$0^{\circ}C$ substrate temperature.

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Off-axis'레이저 기법에 의한 고온 초전도 $Y_1Ba_2Cu_3O_{7-x}$박막의 특성 (The properties of$Y_1Ba_2Cu_3O_{7-x}$ superconducting thin films deposited by 'off-axis' pulsed laser deposition)

  • 문병무
    • E2M - 전기 전자와 첨단 소재
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    • 제8권3호
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    • pp.285-290
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    • 1995
  • High quality $Y_{1}$Ba$_{2}$Cu$_{3}$$O_{7-x}$ thin films have been fabricated by pulsed Nd:YAG laser deposition using an unusual 'off-axis' target-substrate geometry. Various properties of superconducting $Y_{1}$Ba$_{2}$Cu$_{3}$$O_{7-x}$ thin films have been studied systematically as a function of oxygen pressure during the deposition, in both 'on-axis' and the unusual 'off-axis' target substrate geometries. In the 'off-axis' geometry, one can completely eliminate the so-called 'laser droplets' from the film surface and thus obtain smooth high quality films. It is found that films with optimum structural and electrical properties are obtained at a lower oxygen pressure range during the 'off-axis' deposition when compared with that required in the 'on-axis' deposition geometry.

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Nd:YAG 레이저를 이용한 순티타늄판의 겹치기 용접성 (Lab Weldability of Pure Titanium by Nd:YAG Laser)

  • 김종도;곽명섭
    • Journal of Advanced Marine Engineering and Technology
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    • 제32권2호
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    • pp.315-322
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    • 2008
  • Titanium and its alloys have excellent corrosion resistance, high strength to weight ratios and creep properties in high temperature, which make them using many various fields of application. Especially, pure titanium, which has outstanding resistance for the stress corrosion cracking, crevice corrosion, pitting and microbiologically influenced corrosion, brings out to the best material for the heat exchanger, ballast tank, desalination facilities, and so on. Responding to these needs, welding processes for titanium are also being used GTAW, GMAW, PAW, EBW, LBW, resistance welding and diffusion bonding, etc. However, titanium is very active and highly susceptible to embrittlement by oxygen, nitrogen, hydrogen and carbon at high temperature, so it needs to shield the weld metal from the air and these gases during welding by non-active gas. In this study, it was possible to get sound beads without humping and spatter with a decrease of peak power according to increase of pulse width, change of welding speed and overlap rate for heat input control, and shield conditions at pulsed laser welding of titanium plates for Lap welding.

나노초 가시광 레이저 펄스를 이용한 사파이어 미세천공 공정의 해석 (Analysis of Sapphire Microdrilling by a Nano Second Visible Laser Pulse)

  • 오부국;정영대;김남성;김동식
    • 한국레이저가공학회지
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    • 제12권1호
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    • pp.7-13
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    • 2009
  • Engineering ceramics as sapphire are widely used in industry owing to their superior mechanical and corrosion properties. However, micromachining of sapphire is a considerable challenge due to its transparency. Recently, direct ablation of sapphire has been demonstrated with a visible laser pulse at sufficiently high laser intensity. In this work, the theoretical model for pulsed laser ablation of sapphire is suggested and numerical analysis is carried out using the model. Sapphire ablation begins with plasma generation by the laser interaction with surface defects, impurities and contaminations in the initial stage of machining. Subsequent absorption of the visible laser beam can be explained by three mechanisms: metalization of sapphire surface due to the EUV radiation from the hot plasma, increments of surface roughness and temperature-dependent absorption coefficient. Comparison of the computation results with experimental observation indicates that the proposed model of sapphire is reasonable.

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기사광선 펄스 레이저에 의해 제작된 $YBa_2{Cu_3}O_{7-X}$초전도체 박막의 특성 (Properties of $YBa_2{Cu_3}O_{7-X}$ superconducting thin films prepared by visible light pulsed laser)

  • 신현용
    • E2M - 전기 전자와 첨단 소재
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    • 제7권4호
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    • pp.289-293
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    • 1994
  • Thin films of YB $a_{2}$C $u_{3}$$O_{7-x}$ supercondYB $a_{2}$C $u_{3}$$O_{7-x}$uctor were prepared on (100) SrTi $O_{3}$ substrates by pulsed laser deposition using visible light laser. Q-switched Nd:YAG(532 nm, 30 ns) pulsed laser was used for deposition. The effects of substrate temperature and oxygen pressure during deposition on films were studied. Critical current density of 2.93*10$^{6}$ A/c $m^{2}$ at 77K and Tc(zero)=91.7K were obtained from the film prepared with Tsub=745.deg. C and $P_{02}$=200 mTorr. XRD analysis showed that the grown film has c-axis normal orientation to the substrate surface and has single phase. Surface morphology of the film has been improved by interfering the plume ejected from YB $a_{2}$C $u_{3}$$O_{7-x}$ target.arget.t.

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ZnO 기반의 투명 박막 트랜지스터 제작을 위한 Active-layer의 최적화에 대한 연구 (Optimization of active layer for the fabrication of transparent thin film transistor based on ZnO)

  • 장성필;이상규;손창완;임재현;송용원;주병권;이상렬
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2007년도 Techno-Fair 및 추계학술대회 논문집 전기물성,응용부문
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    • pp.94-95
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    • 2007
  • We have observed electrical properties of ZnO thin films for the fabrication of transparent thin film transistor. ZnO thin films were deposited on $Al_2O_3$(0001) substrate at various temperatures by pulsed laser deposition(PLD). The third of harmonic(355nm) Nd:YAG laser was used for pulsed laser deposition. X-ray diffraction(XRD), field emission-scanning electron microscope(FE-SEM), and photoluminescence were used to characterize physical and optical properties of ZnO thin film.. The results indicated the ZnO film showed good optical properties as increasing temperatures, with low FWHM of exciton-related peak and XRD(0002) peak.

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