• 대한금속재료학회지
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• 제47권5호
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• pp.311-315
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• 2009

2-dimensional (2D) dopant profiling in semiconductor device was carried out by electron holography and scanning capacitance microscopy methods with the same multi-layered p-n junction sample. The dopant profiles obtained from two methods are in good agreement with each other. It demonstrates that reliability of dopant profile measurement can be increased through precise comparison of 2D profiles obtained from various techniques.

• 한국CDE학회논문집
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• 제17권3호
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• pp.156-163
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• 2012

Real-time three-dimensional shape measurement is becoming increasingly important in various fields, including medical sciences, high-technology industry, and microscale measurements. However, there are not so many 3D profile tools specially designed for specifically narrow space, for example, to scan the tooth shape of a human jaw. In this paper, a real-time 3D intraoral scanner is proposed for the measurement of tooth profile in the mouth cavity. The proposed system comprises a laser diode beam, a micro charge-coupled device, a graticule, a piezoelectric transducer, a set of optical lenses, and a polhemus device sensor. The phase-shifting technique is used along with an accurate calibration method for the measurement of the tooth profile. Experimental and theoretical inspection of the phase-to-coordinate relation is presented. In addition, a nonlinear system model is developed for collimating illumination that gives the more accurate mathematical representation of the system, thus improves the shape measurement accuracy. Experiment results are presented to verify the feasibility and performance of the developed system. The experimental results indicate that overall measurement error accuracy can be controlled within 0.4 mm with a variability of ${\pm}0.01$.

• 한국광학회지
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• 제18권2호
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• pp.130-134
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• 2007

광역의 자유곡면 형상을 나노미터 정밀도로 측정하기 위한 새로운 형상 측정법으로서 곡률에 근거한 형상 측정법을 제안한다. 곡률 형상 측정기는 피측정물을 일정간격으로 스캔하는 간섭계로써 각 국부영역의 형상으로부터 곡률을 획득하여, 이로부터 전 영역의 형상을 복원한다. 제안된 곡률 형상 측정기는 비구면 형상 측정을 위해 개발된 보상 광학계(Null optics)나 국부영역의 형상을 측정하고 결합하는 subaperture-slicking 법에 비해 측정 장비로부터 발생하는 시스템 오차를 근본적으로 제거하는 특징을 가진다. $80mm\times80mm\times25mm$ 작동구간을 갖는 Stewart Platform과 상용 트와이만 그린 간섭계를 이용하여 곡률간섭계를 구성하였으며, 자유곡면의 형상측정을 위한 첫 단계로서 잘 알려진 구면형상을 측정하고, 기존 장비의 측정값과 비교한 결과 32 mm영역에서 최대 56 nm의 차를 보임을 확인하였다.

• 대한기계학회논문집
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• 제17권2호
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• pp.407-415
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• 1993

This report presents an automatic measurement method of 3-dimensional profiles of free-formed surfaces, by using a touch a touch-trigger contact probe along with a conventional coordinate measuring machine. The method proceeds in three steps; The surface profile under consideration is traced by the probe in an automatic manner, and then its measured data is compensated by considering the actual probe radius. Finally the compensated data is rearranged in the form suitable for the further processings of CAD/CAM applications. Some experimental results are discussed to verify the validity of the method suggested in this study.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2001년도 추계학술대회논문집B
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• pp.42-47
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• 2001

The heat (mass) transfer characteristics on the blade surface of a first-stage turbine rotor cascade for power generation has been investigated by employing the naphthalene sublimation technique. A four-axis profile measurement system is successfully developed for the measurements of the local heat (mass) transfer coefficient on the curved blade surface. The experiment is carried out at the free-stream Reynolds number and turbulence intensity of $2.09\times10^5$ and 1.2%. The results on the blade surfaces show that the local heat (mass) transfer on the suction surface is strongly influenced by the endwall vortices, but that on the pressure surface shows a nearly two-dimensional nature. The pressure surface has a more uniform distribution of heat load than the suction one.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2000년도 춘계학술대회논문집 - 한국공작기계학회
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• pp.613-617
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• 2000

This paper descries the effect of the stylus tip size on the measuring error in surface topography measurement. To analyze the distortional effect of an actual surface geometry originating from the finite stylus size, the surface is modeled as a sinusoid and the stylus tip as a circle. the measuring error is defined as the ratio of the standard deviation of a tracing profile and an original profile. It is shown that this measuring error depends on the amplitude and wavelength of an original profile. In this paper, the spectrum analysis is applied to investigate the distortional effect due to the mechanical filtering of the stylus in the frequency domain. and, the cumulative power spectrum is applied to determinate the minimum wavelength limits to be measured with the various stylus tip radius from these results, a new method to select proper stylus tip radius is proposed.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.195-198
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• 2002

Demand for high precision measurement of large area is increasing in many industrial fields. White-light Scanning Interferometer(WSI) is a well-known method for 3D profile measurement. However WSI has some limitations in a measurement range because of the sensing mechanism. Therefore, in this paper we use a heterodyne laser interferometer to get over the limitations of a short measurement range in WSI, We suggest a new WSI system combined with heterodyne laser interferometer. This system is aimed at eliminating Abbe error with measuring the focus point directly. With the use of triggering functionality of WSI, we can use this system as a probe of a precision stage such as a probe of CMM. The suggested system gives a repeatability of 87 nm in the absolute distance measurement test under the laboratory environment.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 1998년도 제28회 추계학술대회
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• pp.300-305
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• 1998

A method of calculating wear amount which is based on digitally measured surface profile was suggested. The original profile of worn out profile was estimated from its adjacent surface profile by using least squares curve fitting with Fourier series. The approximated curve was well fitted to original surface profile. With this approach, more accurate calculation of the wear amount will be possible.

• International Journal of Precision Engineering and Manufacturing
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• 제7권1호
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• pp.9-12
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• 2006

A spectral analysis and numerical simulation are employed to assess the effects of the stylus tip radius on measuring surface profiles. Original profiles with fractal spectral densities are generated and then are numerically traced with circular tipped stylus. Instead of their spectral densities, the accumulative power spectrums of traced profiles are analyzed. It is shown that the minimum wavelength of traced profile relates directly to the radius r of the stylus tip and the root-mean-square (rms) roughness ${\sigma}_o$ of original profile. From this accumulation spectral analysis, a formula is developed to estimate the minimum wavelength of traced profile. By using the concept of the minimum wavelength, an appropriate stylus tip radius can be chosen for the given rms roughness ${\sigma}_o$ of the profile.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2001년도 춘계학술대회논문집C
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• pp.197-201
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• 2001

Output and cost efficiency in the production of hot-rolled strip depend to a large content on the uniformity of geometric and mechanical properties over the length and width of the rolled end product. To ensure the homogeneous temperatures required for this during the rolling process a system to measure and evaluate the transverse temperature profile was developed and implemented in production. The systems used consist of temperature scanners and computers for measurement and data evaluation. The systems have been installed in Kwangyang hot strip mills, in the cases at the exit of the finishing train and at the entry of the coiler. They are used in production to determine the effect of the finishing train and the cooling zone on the technological properties of the hot rolled strip.