• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.06a
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• pp.86-87
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• 2007

The dispersive method of white-light interferometry is proper for in-line 3-D inspection of dielectric thin-film thickness to be used in the semiconductor and flat-panel display industry. This research is the measurement application of CMP patterned wafer. The results describe 3-D and 2-D profile of the step height during polishing time.

• 한국가시화정보학회:학술대회논문집
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• 2006.12a
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• pp.73-77
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• 2006

Flow rate measurement is one of the difficult problems in the industrial applications. Especially, flow rate in a partially filled pipeline is affected by many parameters such as water level, channel slop, etc. In the present study, prior to the development of a flowmeter, the flow characteristics has been investigated by particle image velocimetry (PIV) measurements. Three-dimensional velocity distributions were obtained from sectional measurements of velocity profiles according to the water level. As a result, it is found that there is no similarity in the velocity profile when the lateral position is changed. In addition, the maximum velocity does not always occur on the free surface. It depends on the water level. In the aspect of flow rate measurement, the previous calculus based upon point measurement techniques is proved to be inaccurate because of the lack of whole flow information.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.7
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• pp.145-152
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• 2004

This paper proposed efficient manufacturing system using the OMM (on-machine measurement) system. The OMM system is software based 3D modeler for inspection on machine and it is interfaced tool machine with RS232C. The software is composed of two inspection modules that one is touch probe operating module and the other is laser displacement sensor operating module. The module for touch probe has need of inspection feature that extracted it from CAD data. Touch probe moves to workpiece by three operating modes as follows: manual, general and automatic mode. The operating module of laser displacement sensor is used inspection for profile and very small hole. An Advantage of this inspection method is to be able to execute on-line inspection during machining or after it. The efficiency of proposed system which can predict and definite the machining errors of each process is verified, so the developed system is applied to inspect the mold-base(cavity, core).

• Korean Journal of Optics and Photonics
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• v.14 no.3
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• pp.219-223
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• 2003

A novel method was proposed for determining the residual stress profile of an optical fiber by using a modified polariscope. Measurement results of the axisymmetric residual stress for a conventional single-mode fiber were demonstrated by using this method. It was found that non-uniform stress is distributed in the cladding of the fiber. This means that large mechanical stress is induced as a function of temperature generated near the neck shape of the fiber preform.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2014.10a
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• pp.956-957
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• 2014

In a fluid velocity measurement radar, the velocity information can be extracted from Doppler spectrum estimates of the return signal. However, the Doppler frequency ranges are too low for the case of low velocity profile measurements resulting in the serious effects in the velocity measurement. Therefore, the improved method is analyzed to overcome this problem.

• Korean Journal of Materials Research
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• v.22 no.9
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• pp.482-488
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• 2012

To fabricate a precise micro metal mold, the electrochemical etching process has been researched. We investigated the electrochemical etching process numerically and experimentally to determine the etching tendency of the process, focusing on the current density, which is a major parameter of the process. The finite element method, a kind of numerical analysis, was used to determine the current density distribution on the workpiece. Stainless steel(SS304) substrate with various sized square and circular array patterns as an anode and copper(Cu) plate as a cathode were used for the electrochemical experiments. A mixture of $H_2SO_4$, $H_3PO_4$, and DIW was used as an electrolyte. In this paper, comparison of the results from the experiment and the numerical simulation is presented, including the current density distribution and line profile from the simulation, and the etching profile and surface morphology from the experiment. Etching profile and surface morphology were characterized using a 3D-profiler and FE-SEM measurement. From a comparison of the data, it was confirmed that the current density distribution and the line profile of the simulation were similar to the surface morphology and the etching profile of the experiment, respectively. The current density is more concentrated at the vertex of the square pattern and circumference of the circular pattern. And, the depth of the etched area is proportional to the current density.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.23 no.5
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• pp.103-108
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• 2023

In this paper, a performance enhancement study of an AESA antenna that can be applied to a seeker that serves as the eye of a missile was conducted, and the performance of the antenna was verified through actual measurement. When designing an AESA antenna, the optimization of the active reflection coefficient must be considered during transmission due to the mutual coupling between radiators that inevitably occurs, and the selection of a radiator that can overcome the space limitation of the seeker with a small size/light weight is an important design consideration. Accordingly, optimization in terms of electrical performance and low-profile structure is required through research on array antennas for application to the AESA structure. The radiator designed and measured in this paper was designed as an SFN that can satisfy the low-profile structure while enhancing the performance of a general vivaldi antenna. Through this paper, it was confirmed that SFN has the same broadband characteristics as general vivaldi antennas and has optimized characteristics required for AESA antennas. The structure optimized through simulation confirmed the pattern characteristics and active reflection coefficient characteristics through the fabrication of actual proto-type antennas.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.1
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• pp.40-45
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• 2004

Recently, aspheric optical lenses and mirrors, which are harder to manufacture and measure than the conventional spherical ones, are widely used, particularly in electronic fabrication process. Generally, interferometric optical method is used for the measurement of spherical optical surface. However, the interferometric method for aspheric surface measurement is difficult because it needs a precise null corrector and strict environmental conditions such as constant temperature, humidity and vibrations. We have been studied on the manufacturing of aspheric optics to improve the surface profile accuracy and productivity using a corrective polishing process. For the corrective polishing, a practical method of On-Machine Measurement (OMM) is required. For this purpose, an optical OMM system has been studied using the Shach-Hartmann test, which is very robust to the practical polishing environment. The wavefront has been reconstructed from the measured data using the primary aberration polynomial function by the least squares fitting. The measured result of the OMM system shows that the maximum deviation is less than 200 nm for the one of commercial Fizeau interferometer Wyko 6000.

• Proceedings of the Korean Nuclear Society Conference
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• 1996.05b
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• pp.29-35
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• 1996

For the Reactor Coolant System(RCS) flow rate measurement by the secondary calorimetric heat balance method, the coolant temperature of the hot leg is needed. Several Resistance Temperature Detectors(RTD) are installed in the hot leg to measure the temperature, but the average value of RTDs does not correctly represent the energy-averaged(bulk) temperature because of the thermal stratification phenomenon. Therefore some correction is introduced to predict the bulk temperature, but the correction inevitably contains uncertainty because the stratification is not defined well quantitatively yet. Therefore a large uncertainty for the correction has been used for the conservative estimation. But unrealistically large uncertainty causes degradation of the measurement method and yields difficulty to meet the acceptance criterion in start-up flow measurement test. In this paper, an analytical estimation is made on the correction and the related uncertainty using the measured hot leg velocity profile of System 80 reactor flow model test and the measured temperatures of YGN 3&4 and PVNGS 1&2 start-up tests. The results reveal that the magnitude of the correction uncertainty is much smaller than that used in the previous design. Therefore, the confidence on the flow rate measurement method can be improved and the difficulty in start-up flow measurement test can be lessened if the smaller correction uncertainty obtained through this estimation is applied.

• Journal of the Optical Society of Korea
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• v.13 no.2
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• pp.251-255
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• 2009

In the non-contact 3-dimensional (3D) shape measurements, the fringe pattern projection method based on the phase-shifting technique has been considered very effective for its high speed and accuracy. The digital fringe projector in particular has great flexibility in generating fringe patterns since the patterns can be controlled easily by the computer program. In this work, we have developed a high-speed digital laser grating projection system using a laser diode and a polygon mirror, and evaluated its performance. It has been demonstrated that all the optical measurements required to find out the profile of a 3D object could be carried out within 31 ms, which confirmed the validity of our 3D measurement system. The result implies the more important fact that the speed in 3D measurement can be enhanced remarkably since, in our novel system, there is no device like a LCD or DMD whose response time limits the measurement speed.