• Journal of the Korean Institute of Telematics and Electronics D
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• v.34D no.3
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• pp.87-92
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• 1997

Inductively coupled Cl$_{2}$ plasma has been studied to etch Pt thin films, which hardly form volatile compound with any reactive gas at normal process temperature. Low etch rate and residue problems are frequently observed. For higher etch rate, high density plasma and higher process temperature is adopted observed. For higher etch rate, high density plasma and higher process temperature is adopted and thus SiO$_{2}$ is used as for patterning mask instead of photoresist. The effect of O$_{2}$ or Ar addition to Cl$_{2}$ was investigated, and the chamber pressure, gas flow rate, surce RF power and bias RF power are also varied to check their effects on etch rate and selectivity. The major etching mechanism is the physical sputtering, but the ion assisted chemical raction is also found to be a big factor. The proposs can be optimized to obtain the etch rate of Pt up to 200nm/min and selectivity to SiO$_{2}$ at 2.0 or more. Patterning of submicron Pt lines are successfully demonstrated.

• Nuclear Engineering and Technology
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• v.33 no.1
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• pp.83-92
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• 2001

The properties of off-gas generated from vitrification process of ion-exchange resin were characterized. Theoretical composition and flow rate of the off-gas were calculated based on chemical composition of resin and it＇s burning condition inside CCM. The calculated off-gas flow rate was 67.9Nm$^3$/h at the burning rate of 40kg/h. And the composition of off-gas was avaluated as $CO_2$(41.4%), steam(40.0%), $O_2$(13.3%), NO(3.6%), and SO$_2$(1.6%) in order. Then, actual flow rate and composition of off-gas were measured during pilot-scale demonstration tests and the results were compared with theoretical values. The actual flow rate of off-gas was about 1.6 times higher than theoretical one. The difference between theoretical and actual flow rates was caused by the in-leakage of air to the system, and the in-leakage rate was evaluated as 36.3Nm$^3$/h. Because of continuous change in the combustion parameters inside CCM, during demonstration tests, the concentration of toxic gases showed wide fluctuation. However, the concentration of CO, a barometer of incompleteness of combustion inside CCM, was stabilized soon. The result showed quasi-equilibrium state was achieved two hours after feeding of resin.

• Journal of Electrochemical Science and Technology
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• v.13 no.2
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• pp.261-268
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• 2022

In this study, electrochemical treatment of urban wastewater with electrical conductivity of 1000 μS cm^-1 and chemical oxygen demand of 250 mg L^-1 was investigated using the variables of initial pH value, current density and flow rate. Electrocoagulation was used, in which aluminum and stainless steel were selected, as the electrochemical treatment process. The electrocoagulation process was operated in continuous mode. The data obtained in experimental studies show that the best COD removal efficiency occurred in experiments where the initial pH value was 6. The increase in current density from 5 A to 15 A decreased the removal efficiency from 79 to 67%. The increase in flow rate under constant current density also reduced the efficiency of removal as expected. In experiments in which current density and flow rate were examined together, the increase in flow rate allowed the application of higher current densities. This situation led to considerable reductions in energy consumption values, even if the COD removal efficiency did not significantly increase. The high COD removal obtained with the use of high flow rate and high current density indicates that the electrocoagulation process can be used for high flow rate municipal wastewater treatment.

• Korean Chemical Engineering Research
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• v.58 no.3
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• pp.369-380
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• 2020

Most mono-crystalline silicon ingots are manufactured by the Czochralski (Cz) process. But If there are oxygen impurities, These Si-ingot tends to show low-efficiency when it is processed to be solar cell substrate. For making single-crystal Si- ingot, We need Czochralski (Cz) process which melts molten Si and then crystallizing it with seed of single-crystal Si. For melts poly Si-chunk and forming of single-crystalline Si-ingot, the heat transfer plays a main role in the structure of Cz-process. In this study to obtain high-quality Si ingot, the Cz-process was modified with the process design. The crystal growth simulation was employed with pulling rate and rotation speed optimization. Studies for modified Cz-process and the corresponding results have been discussed. The results revealed that using crystal growth simulation, we optimized the oxygen concentration of single crystal silicon by the optimal design of the pulling rate, rotation speed and melt charge level of Cz-process.

• Journal of Korean Society on Water Environment
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• v.21 no.4
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• pp.347-352
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• 2005

The isolated microorganisms, Pseudomonas stutzeri, Raoultella planticola (Klebsiella), Serratia fonticola from petroleum contaminated soil were enriched on benzene, toluene, ethylbenzene, o-xylene as carbon and energy sources, respectively. And the degradation characteristics of BTEX was observed in the mixed BTEX substrates. We found that the BTEX in mixed substrates were degraded more than 50% by three isolated microorganisms. Among three isolated microorganisms, the highest degradation rate was observed in Pseudomonas stutzeri, but the degradation rate was different according to microorganisms. In order to increase the degradation efficiency, we applied the co-culture of isolated three microorganisms. The mixture rate of pseudomonas stutzeri : Raoultella planticola (Klebsiella) : Serratia fonticola was follows ; 1:2:1, 1:1:2, and 2:1:1, respectively. In two co-culture of 1:2:1 and 1:1:2, degradation rate was lower than isolated microorganisms. However, degradation rate became higher than isolated microorganisms and the degradation rate of benzene, toluene, and ethylene was more than 95% in co-culture of 2:1:1. The degradation rate increased through the co-culture of isolated microorganisms, however, the growth rate decreased. This was resulted from the substrate competition between microorganisms. The co-culture of microorganisms is a effective method to increase the degradation efficiency of BTEX and the co-culture mixing rate is a important factor for determination of degradation efficiency.

• Quality Improvement in Health Care
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• v.20 no.1
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• pp.60-73
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• 2014

Objectives: This study aims at decreasing spatial dose rate through work improvement whilst spatial dose rate is the cause of increasing personal exposure dose which occurs in the process of handling radioisotope. Methods: From February 2013 until July 2013, divided into "before" and "after" the improvement, spatial dose rate in laboratory of nuclear medicine was measured in gamma image room, PET/CT-1 image room, and PET/CT-2 image room as its locations. The measurement time was 08:00, 12:00 and 17:00, and SPSS 21.0 USA was opted for its statistical analysis. Result: The spatial dose rate at distribution worktable, injection table, the entrance to the distribution room, and radioisotope storage box, which had showed high spatial dose rate, decreased by more than 43.7% a monthly average. The distribution worktable, that had showed the highest spatial dose rate in PET/CT-1 image room, dropped the rate to 42.3% as of July. The injection table and distribution worktable in the PET/CT-2 image room also showed the decline of spatial dose rate to 89% and 64.4%, respectively. Conclusion: By improving distribution process and introducing proper radiation shielding material, we were able to drop the spatial dose rate substantially at distribution worktable, injection table, and nuclide storage box. However, taking into account of steadily increasing amount of radioisotope used, strengthening radiation related regulations, and safe utilization of radioisotope, the process of system improvement needs to be maintained through continuous monitoring.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.17-18
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• 2006

• Membrane Journal
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• v.23 no.6
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• pp.460-468
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• 2013

This study reviewed optimum dosage rate of coagulant and ability to remove dissolved organic carbon without sedimentation in conventional water purification plant. It was confirmed that floc formated by pre-treatment process was broken by impeller of booster pump. Optimum dosage rate of coagulant was 4 mg/L (as PACl 17%) for floc formation through blend, coagulation and after passing through the pump when turbidity of raw water was less than 10 NTU. And average removal rate of dissolved organic carbon was 43% at that time. Maximum removal rate of dissolved organic carbon was 48%, even though coagulation rate was increased gradually until 8 mg/L (as PACl 17%). So removal rate of dissolved organic carbon is not much improved even if dosage rage of coagulant increase. TMP of PVDF (polyvinylidene flouride) pressurized MF process without pre-treatment operated at 0.54 bar and TMP of PVDF pressurized MF process with pre-treatment operated at 0.41 bar.

• Environmental Engineering Research
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• v.19 no.4
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• pp.395-399
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• 2014

Operation characteristics of the sequencing batch reactor (SBR) process with electro-flotation (EF) as a solid liquid separation method (EF-SBR) were investigated. EF-SBR process showed excellent solid-liquid separation performance which enabled to separate biosolids from liquid phase within 30 min and to extend cyclic reaction time. Although influent organic loading rate was increased stepwise from 5 to 15 g COD/day, food to microorganisms (F/M) ratio could be maintained about 0.3 g COD/g VSS/day in EF-SBR because biomass concentration could be easily controlled at desired level by EF. However, it was impossible to increase biomass concentration at the same level in control SBR (C-SBR) process because solid-liquid separation by gravity settling showed a limitation at higher mixed liquor suspended solids (MLSS) concentration with 60 min of settling time. Total chemical oxygen demand (TCOD) removal efficiency of EF-SBR process was not decreased although influent organic loading rate became 3 times higher than initial value. However, it was seriously deteriorated in C-SBR process after increasing the rate over 10 g COD/day, which was accounted for insufficient organic removal by relatively higher food to microorganisms (F/M) ratio as well as biosolids wash-out by a limitation of gravity sedimentation.

• Journal of Surface Science and Engineering
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• v.51 no.5
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• pp.291-296
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• 2018

In this study, we carried out an ultrasonic-chemical decontamination process with immersion type, reproduced in the laboratory. The corrosion damage characteristics, depending on kind of materials and ultrasonic process time, were investigated. Inconel 600, which showed lower corrosion potential and higher corrosion current density than that of STS 316, revealed severer corrosion damage and higher weight-loss rate than STS 316. Weight-loss rate of Inconel 600 increased with increasing ultrasonic process time. On the other hands, STS 316 presented a negligibly small corrosion damage, which was almost indistinguishable from visual observation. There was no effect of ultrasonic process time on the weight-loss rate of STS 316.