Analysis of Growth Mechanism of Al Thin Film by in-situ Surface Reflectance Measurement During MOCVD Process (MOCVD에 의한 Al 박막 증착 중의 표면 반사도 측정을 통한 박막 성장 메커니즘 분석)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.28 no.2
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- pp.104-108
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- 2015