• Title/Summary/Keyword: process equipment

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Equipment Maintenance Environment Based on Field-Data of Root Industry by Manufacturing-Field Analysis (뿌리산업 제조현장 체계분석 및 데이터 기반 설비보전 환경구축)

  • Kim, Dong-Hong;Song, Jun-Yeob
    • Journal of the Korean Society for Precision Engineering
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    • v.34 no.1
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    • pp.19-22
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    • 2017
  • This paper describes the efficient equipment maintenance that can offer the exact time for repair and change of component in root industry. A conventional method offered the fixed time for repair and change of component because the method is based on early guarantee specification of the component. However the operating condition of manufacturing field is often under worse condition than early guarantee condition for high productivity. So, most components can't use until early guarantee time due to the operation of various different condition. Therefore we suggest the useful method for efficient equipment-maintenance by manufacturing-field analysis and feedback database. For this, the classification of root industry and related equipment is performed and then the detail classification of the process and component for equipment maintenance. And the monitoring module is also designed to gather data for feedback process and the environment is basically implemented for aging and reliability test.

A study on structural stability of Backgrinding equipment using finite element analysis (유한요소해석을 이용한 백그라인딩 장비의 구조안정성 연구)

  • Wi, Eun-Chan;Ko, Min-Sung;Kim, Hyun-Jeong;Kim, Sung-Chul;Lee, Joo-Hyung;Baek, Seung-Yub
    • Design & Manufacturing
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    • v.14 no.4
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    • pp.58-64
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    • 2020
  • Lately, the development of the semiconductor industry has led to the miniaturization of electronic devices. Therefore, semiconductor wafers of very thin thickness that can be used in Multi-Chip Packages are required. There is active research on the backgrinding process to reduce the thickness of the wafer. The backgrinding process polishes the backside of the wafer, reducing the thickness of the wafer to tens of ㎛. The equipment that performs the backgrinding process requires ultra-precision. Currently, there is no full auto backgrinding equipment in Korea. Therefore, in this study, ultra-precision backgrinding equipment was designed. In addition, finite element analysis was conducted to verify the equipment design validity. The deflection and structural stability of the backgrinding equipment were analyzed using finite element analysis.

Velocity and Friction Force Distribution in Rotary CMP Equipment (회전형 CMP장비의 속도 및 마찰력 분포 해석)

  • Kim, Hyeong Jae;Jeong, Hae Do;Lee, Eung Suk;Sin, Yeong Jae
    • Journal of the Korean Society for Precision Engineering
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    • v.20 no.5
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    • pp.39-39
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    • 2003
  • As the design rules in semiconductor manufacturing process become more and more stringent, the higher degree of planarization of device surface is required for a following lithography process. Also, it is great challenge for chemical mechanical polishing to achieve global planarization of 12” wafer or beyond. To meet such requirements, it is essential to understand the CMP equipment and process itself. In this paper, authors suggest the velocity distribution on the wafer, direction of friction force and the uniformity of velocity distribution of conventional rotary CMP equipment in an analytical method for an intuitive understanding of variation of kinematic variables. To this end, a novel dimensionless variable defined as “kinematic number” is derived. Also, it is shown that the kinematic number could consistently express the velocity distribution and other kinematic characteristics of rotary CMP equipment.

Velocity and Friction Force Distribution in Rotary CMP Equipment (회전형 CMP장비의 속도 및 마찰력 분포 해석)

  • 김형재;정해도;이응숙;신영재
    • Journal of the Korean Society for Precision Engineering
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    • v.20 no.5
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    • pp.29-38
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    • 2003
  • As the design rules in semiconductor manufacturing process become more and more stringent, the higher degree of planarization of device surface is required for a following lithography process. Also, it is great challenge for chemical mechanical polishing to achieve global planarization of 12” wafer or beyond. To meet such requirements, it is essential to understand the CMP equipment and process itself. In this paper, authors suggest the velocity distribution on the wafer, direction of friction force and the uniformity of velocity distribution of conventional rotary CMP equipment in an analytical method for an intuitive understanding of variation of kinematic variables. To this end, a novel dimensionless variable defined as “kinematic number” is derived. Also, it is shown that the kinematic number could consistently express the velocity distribution and other kinematic characteristics of rotary CMP equipment.

Database establishment method for process scheduling by means of simulation (시뮬레이션 기법 기반 공정계획 수립을 위한 데이터베이스 구축 방법론)

  • Ko, Yong-Ho;Noh, Jae-Yun;Ngov, Kheang;Shin, Do-Hyoung;Han, Seung-Woo
    • Proceedings of the Korean Institute of Building Construction Conference
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    • 2022.04a
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    • pp.69-70
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    • 2022
  • The domestic process planning generally relies on calculations based on the construction-standard-production-rate. This method requires trial and error practice during the construction phase to deduce the optimized equipment combination for time and cost. Trial and error during construction can lead to cost overruns and schedule delays. Accordingly, this paper suggests an advanced method for establishing a productivity database based on combinations of equipment and also considering site conditions in order to reduce the timely effort for deducing the optimized equipment combination. For this purpose DES (Discrete Event Simulation) model was developed based on the information provided in the construction-standard-production-rate.

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A methodology for an effective utilization of construction equipment for highway construction projects (도로공사 공정계획을 위한 공정 로직 및 건설장비 효율화 방안)

  • Song, Hojeong;Choi, Jaehyun
    • Korean Journal of Construction Engineering and Management
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    • v.15 no.6
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    • pp.26-34
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    • 2014
  • Highway construction is a combination of linear, repetitive, and highly equipment intensive operations. Various types of construction equipment are deployed to ensure undisrupted performance of construction, and thus productivity improvement and cost-saving can be achieved through well-thought-out planning. The selection of construction equipment is dependent upon construction sequence, site conditions, and construction methods. In the process of planning, management should consider various types of construction methods per each type of construction operation. Also, management should map out proper construction equipment operation plan that takes the construction duration and cost measures into consideration. However, limited availability of historic data from the similar types of operations has been a stumbling block to proper construction planning, making the operations performed based upon experience and intuition guided by rules-of-thumb. As a consequence, the planing phase rarely provided an adequate validity in the implementation phase. The researchers developed a process logic for each construction type that management can utilize from early phase of highway construction planning process. Moreover, derived the construction equipment combination optimized for efficiency by using the process simulation technique. The developed method is expected to be useful for the decision-making process that aims to evaluate efficiency of various process plans and to ensure optimal selection of construction equipment for highway construction projects.

Development of the stone surface process equipment by Water Jet System (워터젯 시스템을 이용한 석재표면처리장치 개발)

  • 강지호;장명환
    • Journal of Korean Society of Industrial and Systems Engineering
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    • v.26 no.3
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    • pp.31-38
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    • 2003
  • There is boner process of stone manufacturing to become quality down of stone to consolidated micro crack appearance of stone surface and biotite by fire that is to be route process in stone surface by flame of LPG. And then, it is develop that stone surface process equipment by automation for the work method of boner process can be substitute work method by water jet To development of equipment, There is to be down noise and dust. According to remove calamity growth hazardous substance in the work environment, there is to solve workplace avoidance factor.

Domestic Production Process of Early Korean Broadcast CG Equipment

  • Nah, So-Mi
    • Journal of Multimedia Information System
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    • v.8 no.4
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    • pp.285-294
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    • 2021
  • The development process of domestic CG (Computer Graphics) needs to be studied by classifying the technical part and the design part. This paper analyzes how early domestic broadcast equipment evolved and focused on what went through the development process. Domestic broadcasting companies have introduced and used overseas equipment and have begun to develop their own technology. The development process of the early domestic production technology of broadcasting stations was classified into Character Generator, On-line Real-Time Graphic and Sport Coder. It was found that the orientation of broadcasting technology was conclusively focused on visualization, with socio-cultural factors acting along with the evolution of hardware and software. This research is meaningful in reorganizing the history of the development process of domestic CG technology in the early days through previous research (primary verification), newspaper articles and news coverage (secondary verification). This paper looks at what is missing by regaining the past of CG, and argues that with the advent of new technologies today, we must develop through appropriate division of roles and collaboration between engineers and designers.

Analysis of Remote Operation involved in Spent Nuclear Fuel Conditioning Process using its Virtual Mockup

  • Yoon, Ji-Sup;Kim, Sung-Hyun;Song, Tai-Gil
    • 제어로봇시스템학회:학술대회논문집
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    • 2004.08a
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    • pp.840-845
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    • 2004
  • The remote operation of the Advanced Spent Fuel Conditioning Process (ACP) is analyzed by using the 3D graphic simulation tools. Since the spent nuclear fuel, which is a high radioactive material, is processed in the ACP, the ACP equipment is operated in intense radiation fields as well as in a high temperature. Thus, the equipment is operated in a remote manner and should be designed with consideration for the remote handling and maintenance. Also suitable remote handling technology needs to be developed along with the design of the process concepts. For this we developed a graphic simulator, which provides the capability of verifying the remote operability of the ACP without the fabrication of the process equipment. In other words, by applying virtual reality to the remote maintenance operation, a remote operation task can be simulated in the graphic simulator, not in the real environment. The graphic simulator will substantially reduce the cost of the development of the remote handling and maintenance procedure as well as the process equipment, while at the same time developing a remote maintenance concept that is more reliable, easier to implement, and easier to understand.

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Visualization and Analysis of Remote Operation involved in Advanced Conditioning Process

  • Yoon, Ji-Sup;Kim, Sung-Hyun;Song, Tai-Gil
    • Proceedings of the Korean Radioactive Waste Society Conference
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    • 2004.02a
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    • pp.205-219
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    • 2004
  • The remote operation of the Advanced Spent Fuel Conditioning Process (ACP) is analyzed by using the 3D graphic simulation tools. The ACP equipment operates in intense radiation fields as well as in a high temperature. Thus, the equipment should be designed in consideration of the remote handling and maintenance. As well as suitable remote handling and maintenance technology needs to be developed along with the design of the process concepts. To develop such remote operation technology, we developed the graphic simulator which provides the capability of verifying the remote operability of the ACP without fabrication of the process equipment. In other words, by applying virtual reality to the remote maintenance operation, a remote operation task can be simulated in the graphic simulator, not in the real environment. The graphic simulator will substantially reduce the cost of the development of the remote handling and maintenance procedure as well as the process equipment, while at the same time developing a remote maintenance concept that is more reliable, easier to implement, and easier to understand.

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