• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 1999년도 춘계학술대회 논문집
• /
• pp.501-504
• /
• 1999

In the shallow trench isolation(STI) chemical mechanical polishing(CMP) process, the key issues are the optimized thickness control within- wafer-non-uniformity, and the possible defects such as nitride residue and pad oxide damage. These defects after STI CMP process were discussed to accomplish its optimum process condition. To understand its optimum process condition, overall STI related processes including reverse moat etch, trench etch, STI filling and STI CMP were discussed. It is represented that the nitride residue can be occurred in the condition of high post CMP thickness and low trench depth. In addition there are remaining oxide on the moat surface after reverse moat etch. It means that reverse moat etching process can be the main source of nitride residue. Pad oxide damage can be caused by over-polishing and high trench depth.

• 터널과지하공간
• /
• 제14권4호
• /
• pp.248-260
• /
• 2004

응력 증가에 의한 취성 암석의 손상은 미세균열의 개시로부터 시작하여 각 개별 균열들의 전파 및 결합에 의해 거시적인 파괴면을 발생시킨다. 전통적으로 암반의 손상 및 파괴현상을 설명하기 위해 거시적인 파괴 기준이나 탄소성 모델과 같은 연속체적인 접근법이 주류를 이루어왔다. 하지만 개별적인 균열들의 개시와 전락 과정을 명시적으로 고려할 수 있다면 현상론적인 관점에서 보다 실제에 가까운 암석 손상 및 파괴 과정을 재현할 수 있을 것이다. 본 연구에서는 암석의 균열 진전 모델링을 위해 개발된 경계요소 코드인 FRACOD를 이용하여 암석의 손상 및 파괴 과정을 모사한 결과를 제시한다. 수치일축압축시험을 통해 개발된 모델의 적정성을 검증하고 암반의 치수효과를 고려한 현실적인 암석 파괴 과정을 재현하였다. 또한 이러한 접근법의 적용 사례로서, 실제 굴착이 진행중인 심부 수갱 암반 주변에서 심도와 암반 특성에 따라 균열 진전과 이에 따른 암반 손상의 범위를 예측한 결과를 제시하였다. 이 접근법은 취성도가 큰 암반에서 발생하는 안정성 문제에 대한 공학적인 해법을 찾는데 기여를 할 수 있을 것으로 기대된다.

• Journal of Information Technology Applications and Management
• /
• 제15권2호
• /
• pp.67-82
• /
• 2008

Risk that breed large size disaster is happening variously for cause at social. natural a management. Incidence and damage scale are trend that increase rapidly than past. In these circumstance, to keep operational continuity of organization, area, society, risk management action that establish systematic counter measure estimating and analyze occurrence possibility and expectation damage of risk is essential indispensable issue and the best countermeasure. Risk management action does by main purpose establish optimum disaster reduction countermeasure. To deduce various countermeasure, process that estimate and analyze occurrence possibility and expectation damage of risk is essential indispensable issue. Therefore, this paper studies process design that can presume risk occurrence frequency and damage scale through distribution of probability.

• International Journal of Naval Architecture and Ocean Engineering
• /
• 제12권1호
• /
• pp.755-767
• /
• 2020

A significant development has been made on a new fatigue damage model applicable to Gaussian wide band stress response spectra using numerical approximation methods such as data processing, time simulation, and regression analysis. So far, most of the alternative approximate models provide slightly underestimated or overestimated damage results compared with the rain-flow counting distribution. A more reliable approximate model that can minimize the damage differences between exact and approximate solutions is required for the practical design of ships and offshore structures. The present paper provides a detailed description of the development process of a new fatigue damage model. Based on the principle of the Gaussian wide band model, this study aims to develop the best approximate fatigue damage model. To obtain highly accurate damage distributions, this study deals with some prominent research findings, i.e., the moment of rain-flow range distribution MRR(n), the special bandwidth parameter μk, the empirical closed form model consisting of four probability density functions, and the correction factor QC. Sequential prerequisite data processes, such as creation of various stress spectra, extraction of stress time history, and the rain-flow counting stress process, are conducted so that these research findings provide much better results. Through comparison studies, the proposed model shows more reliable and accurate damage distributions, very close to those of the rain-flow counting solution. Several significant achievements and findings obtained from this study are suggested. Further work is needed to apply the new developed model to crack growth prediction under a random stress process in view of the engineering critical assessment of offshore structures. The present developed formulation and procedure also need to be extended to non-Gaussian wide band processes.

• Smart Structures and Systems
• /
• 제5권1호
• /
• pp.43-54
• /
• 2009

This study introduces a novel approach for locating damage in a structure using wireless sensor system with local level computational capability to alleviate data traffic load on the centralized computation. Smart wireless sensor systems, capable of iterative damage-searching, mimic an optimization process in a decentralized way. The proposed algorithm tries to detect damage in a structure by monitoring abnormal increases in strain measurements from a group of wireless sensors. Initially, this clustering technique provides a reasonably effective sensor placement within a structure. Sensor clustering also assigns a certain number of master sensors in each cluster so that they can constantly monitor the structural health of a structure. By adopting a voting system, a group of wireless sensors iteratively forages for a damage location as they can be activated as needed. Since all of the damage searching process occurs within a small group of wireless sensors, no global control or data traffic to a central system is required. Numerical simulation demonstrates that the newly developed searching algorithm implemented on wireless sensors successfully localizes stiffness damage in a plate through the local level reconfigurable function of smart sensors.

• 한국기계가공학회지
• /
• 제10권4호
• /
• pp.88-95
• /
• 2011

In this study, the deformation, stress, vibration, fatigue life and the probability of damage are analyzed at the pedal applied by the force of 300N. The maximum stress at the lower of pedal is shown as 20.801MPa. And the maximum displacement is 0.85mm at the maximum response frequency as 3800Hz. Among the cases of nonuniform fatigue loads, 'SAE bracket history' with the severest change of load becomes most unstable but 'Sample history' becomes most stable. In case of 'Sample history' with the average stress of 0 to $-10^{5}MPa$ and the amplitude stress of 0 to $10^{5}MPa$, the possibility of maximum damage becomes 0.6%. This stress state can be shown with 5 times more than the damage possibility of 'SAE bracket history' or 'SAE transmission'. The structural result of this study can be effectively improved with the design of pedal by investigating durability against its damage.

• 한국전산구조공학회:학술대회논문집
• /
• 한국전산구조공학회 2004년도 가을 학술발표회 논문집
• /
• pp.534-541
• /
• 2004

The modeling of crack initiation and propagation is very important for the failure analysis of concrete. The cracking process in concrete is quite different from that of other materials, such as metal and glass, in that it is not a sudden onset of new free surface but a continuous forming and connecting of microcracks. The failure process of concrete by cracking causes irreversible deformations and stiffness degradation. Those phenomenon can be modeled using plasticity and damage theory in macroscopic aspect. In this study, a plastic-damage model based on homogenized crack model considering velocity discontinuity and damage variable which is a function of plastic strain is proposed for fracture analysis of concrete. Finally, the plastic-damage model is verified with experimental data.

• 한국기계가공학회지
• /
• 제11권5호
• /
• pp.68-75
• /
• 2012

This study aims at the structural analysis of vibration and fatigue according to the tie rod configuration. The maximum displacement amplitude is happened at 156Hz by harmonic vibration analysis, this tie rod model can be broken as the weakest state. Among the cases of nonuniform fatigue loads, 'SAE bracket history' with the severest change of load becomes most unstable but 'Sine wave' becomes most stable. In case of 'Sine wave' with the average stress of 0MPa and the amplitude stress of 570MPa, the possibility of maximum damage becomes 70%. This stress state can be shown with 140 times more than the damage possibility of 'SAE bracket history' or 'SAE transmission'. The structural result of this study can be effectively utilized with the design on tie rod by investigating prevention and durability against its damage.

• 한국기계가공학회지
• /
• 제7권4호
• /
• pp.102-108
• /
• 2008

This study investigates the fatigue life and the damage possibility of cam shaft by the fatigue tool of Ansys. Among nonconstant fatigue loads, the case of 'SAE Bracket History' which is severest at the variation of load tends to be most unstable. The maximum relative damage in case of 'SAE Bracket History' is occurred near the average stress '0' and this case can be shown to have the possibility to take more damage than other cases. The case of 'Sample History' which becomes a little slow at the variation of load tends to be most stable. But there is most damaged possibility of 5% as 7 times at the range of mean stress from 0Pa to -104MPa and amplitude stress from 0MPa to 104MPa than the case of 'SAE Bracket History' or 'SAE Transmission'.

• 항공우주시스템공학회지
• /
• 제8권3호
• /
• pp.41-46
• /
• 2014

Fatigue evaluations for the rotor blades of commercial or military rotorcraft have been carried out using the safe life concept since 1950s. Particularly, in the case of a rotor blade made of a composite material, a highly reliable fatigue life could be predicted by evaluation the cumulative damage using combination of fatigue life curve and load spectrum. However, there is a limit in adequately evaluating the strength reducing phenomena caused by damages or defects generated during the manufacturing process or impact damage induced by operational usages, using only the safe life concept. In this study, the fatigue evaluation process based on the damage tolerance concept is described and illustrated by means of successful application to substantiate the retirement time of composite rotor blades.