• 산업공학
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• 제15권4호
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• pp.432-438
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• 2002

When the trailing edge and leading edge of an airfoil contour of high pressure compressor blades are measured, there exists a measurement error due to the size of the probe stylus ball diameter. In the paper an experimental study is provided to determine the optimum diameter of the probe stylus in inspecting the airfoil of the high pressure compressor blade. The measurement and analysis procedure suggested in this paper will be helpful to those who are involved in measuring and inspecting various types of blades.

• Journal of the Optical Society of Korea
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• 제5권2호
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• pp.60-66
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• 2001

The authors discuss a prototype stylus profilometer designed to measure large optics. It consists of a low contact force type probe system, laser reference system, interferometric distance measurement system, and horizontal driving system. The probe contacts the surface ; the height and the horizontal distances of the measurement points are measured by the interferometer. The freely propagated laser beam provides the reference line during the measurement. The developed stylus profilometry shows only $\pm$60 nm of P-V error for the 157 mm diameter spherical mirror.

• International Journal of Precision Engineering and Manufacturing
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• 제8권2호
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• pp.26-31
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• 2007

A novel scanning probe measurement system was developed to enable precise profile measurements of microaspheric surfaces. An air-bearing stylus with a microprobe was used to perform the surface profile scanning. The new system worked in a contact mode and had the capability of measuring micro-aspheric surfaces with large tilt angles and complex profiles. Due to limitations resulting from the contact mode, such as possible damage caused by the contact force and lateral resolution restrictions from the curvature of the probe tip, several system improvements were implemented. An air bearing was used to suspend the shaft of the probe to reduce the contact force, enabling fine adjustments of the contact force by changing the air pressure. The movement of the shaft was measured by a linear encoder with a scale attached to the actual shaft to avoid Abbe errors. A $50-{\mu}m-diameter$ glass sphere was bonded to the tip of the probe to improve the lateral resolution of the system. The maximum contact force of the probe was 10 mN. The shaft was capable of holding the probe continuously if the contact force was less than 40 mN, and the resolution of the probe could be as high as 10 nm, The performance of the new scanning probe measurement system was verified by experimental data.