Fabrication of Micro Ceramic Thin-Film Type Pressure Sensors for High-Temperature Applications and Its Characteristics (고온용 마이크로 세라믹 박막형 압력센서의 제작과 그 특성)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2003.07b
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- pp.888-891
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- 2003