A Study on C-axis Preferred Orientation of ZnO Thin Film at Ar/$O_2$ gas ratios
(Ar/$O_2$ 에 따른 ZnO 박막의 C-축 배향성에 관한 연구)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.13 no.7
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- pp.617-624
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- 2000