• 한국전기전자재료학회논문지
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• 제18권6호
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• pp.515-520
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• 2005

CMP(chemical mechanical polishing) process has been attracted as an essential technology of multi-level interconnection. Also CMP process got into key process for global planarization in the chip manufacturing process. In this study, potentiodynamic polarization was carried out to investigate the influences of $H_2O_2$ concentration and metal oxide formation through the passivation on tungsten and titanium. Fortunately, the electrochemical behaviors of tungsten and titanium are similar, an one may expect. As an experimental result, electrochemical corrosion of the $5\;vol\%\;H_2O_2$ concentration of tungsten and titanium films was higher than the other concentrations. According to the analysis, the oxidation state and microstructure of surface layer were strongly influenced by different oxidizer concentration. Moreover, the oxidation kinetics and resulting chemical state of oxide layer played critical roles in determining the overall CMP performance. Therefore, we conclude that the CMP characteristics tungsten and titanium metal layer including surface roughness were strongly dependent on the amounts of hydrogen peroxide oxidizer.

• Corrosion Science and Technology
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• 제21권2호
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• pp.147-157
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• 2022

Electrochemical characteristics and damage behavior of 6061-T6 aluminum alloy used as a battery housing material for electric vehicles were investigated in solution simulating the acid rain environment with chloride concentrations. Potentiodynamic polarization test was performed to analyze electrochemical characteristics. Damage behavior was analyzed through Tafel analysis, measurement of damage area, weight loss, and surface observation. Results described that corrosion current density was increased rapidly when chloride concentration excceded 600 PPM, and it was increased about 7.7 times in the case of 1000 PPM compared with 0 PPM. Potentiodynamic polarization experiment revealed that corrosion damage area and mass loss of specimen increased with chloride concentrations. When chloride concentration was further increased, the corrosion damage area extended to the entire surface. To determine damage tendency of pitting corrosion according to chloride concentration, the ratio of damage depth to width was calculated. It was found that the damage tendency decreased with chloride concentrations. Thus, 6061-T6 aluminum alloy damage becomes larger in the width direction than in the depth direction when a small amount of chloride is contained in an acid rain environment.

• 한국전기화학회:학술대회논문집
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• 한국전기화학회 2002년도 춘계총회 및 학술발표회
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• pp.28-28
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• 2002

• Corrosion Science and Technology
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• 제17권1호
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• pp.30-36
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• 2018

The high rate of corrosion of magnesium alloys makes it limited for industrial applications. Therefore, surface treatment is required to enhance their corrosion resistance. In our study, a chemical conversion coating for protecting the corrosion of the magnesium alloy, AZ31B, was prepared by using a phosphate-permanganate solution. The chemical conversion coating had a limited protection ability due to defects arising from cracks and pores in the coating layer. The sol-gel coating was prepared by using trimethoxymethylsilane (MTMS) and 3-glycidoxypropyltrimethoxysilane (GPTMS) as precursors, and aluminum acetyl acetonate as a ring opening agent. The corrosion protection properties of sol-gel and conversion coatings in 0.35wt% NaCl solution were measured by the electrochemical impedance spectroscopy (EIS) and potentiodynamic polarization test. The EIS results indicated that the resistance of the chemical conversion coating with the sol-gel coating was significantly improved through the sol-gel sealed phosphate-permanganate conversion coating. The results of the potentiodynamic polarization test revealed that the sol-gel coating decreased the corrosion current density ($I_{corr}$). The SEM image showed that the sol-gel coating sealed conversion coating and improved corrosion protection.

• Corrosion Science and Technology
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• 제20권6호
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• pp.451-465
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• 2021

In this investigation, electrochemical characteristics and damage behavior of 316L stainless steel polymer electrolyte membrane fuel cell(PEMFC) were analyzed by potentiodynamic and potentiostatic tests in cathode operating condition of PEMFC. As the result of potentiodynamic polarization test, range of passive region was larger than range of active region. In the result of potentiostatic test, damage depth and width, pit volume, and surface roughness were increased 1.57, 1.27, 2.48, and 1.34 times, respectively, at 1.2 V compared to 0.6 V at 24 hours. Also, as a result of linear regression analysis of damage depth and width graph, trend lines of damage depth and width according to applied potentials were 16.6 and 14.3 times larger, respectively. This demonstrated that applied potential had a greater effect on pitting damage depth of 316L stainless steel. The damage tendency values were 0.329 at 6 hours and 0.633 at 24 hours with applied potentials, representing rapid growth in depth direction according to the test times and applied potentials. Scanning electron microscopy images revealed that surface of specimen exhibited clear pitting damage with test times and applied potentials, which was thought to be because a stable oxide film was formed by Cr and Mo.

• 한국신뢰성학회지:신뢰성응용연구
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• 제17권1호
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• pp.72-77
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• 2017

Purpose: The electrochemical corrosion behavior of tin oxide film coated on PET substrates has been studied under varying concentrations of acrylic acid to investigate possible corrosion in contact with the acidic environment. Method: Potentiodynamic test was performed for a commercial ITO/PET film in 0.1, 0.3, and 0.5 M of acrylic acid. The surface morphology was analyzed by scanning electron microscope (SEM) and energy dispersive spectroscopy (EDS). Results: Potentiodynamic test results showed an increase in Icorr and decrease in Ecorr value with increasing concentration of acid. Microscopic evaluation suggested the presence of certain deep cracks on the surface of the film in addition with a severe acidic attack. Conclusion: Exposure of ITO to acrylic acid resulted in the stress corrosion cracking of ITO film due to the mechanical mismatch between brittle inorganic ITO fim and a compliant organic PET substrate leading to the subsequent failure of the film.

• 한국표면공학회지
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• 제36권4호
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• pp.301-306
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• 2003

Multilayered WC-Ti/suv $1-x/Al_{x}$ N coatings were deposited on AISI D2 steel using cathodic arc deposition (CAD) method. These coatings contain structural defects such as pores or droplets. Thus, the substrate is not completely isolated from the corrosive environment. The growth defects (pores, pinholes) in the coatings are detrimental to corrosion resistance of the coatings used in severe corrosion environments. The localized corrosion behavior of the coatings was studied in deaerated 3.5 wt.% NaCl solution using electrochemical techniques (potentiodynamic polarization test) and surface analyses (GDOES, SEM, AES, TEM). The porosity was calculated from the result of potentiodynamic polarization test of the uncoated and coated specimens. The calculated porosity is higher in the $WC-Ti_{0.6}$ $Al_{0.4}$ N than others, which is closely related to the packing factor. The positive effects of greater packing factor act on inhibiting the passage of the corrosive electrolyte to the substrate and lowering the localized corrosion kinetics. From the electrochemical tests and surface analyses, the major corrosion mechanisms can be classified into two basic categories: localized corrosion and galvanic corrosion.

• 한국표면공학회지
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• 제29권1호
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• pp.60-72
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• 1996

A photoetching process is widely used for small and high precision parts in machinery, electronic and semi-conductor industries. One of the high precision parts, grid is very important part of digitron which use electron display, and it is fabricated by only photoetching process because of high precision. In this study, to develop high precision digitron grid, characteristics of etching solution were investigated with electrochemical test, that was potentiodynamic test and immersion test in the ferric chloride solution and added some additives. Based on the electrochemical etching test, grid was fabricated by continuous photoetching process at various etching condition. From the result of measured line width and etching depth under-cut and etching factor were calculated. For the fabrication of 25$\mu\textrm{m}$ line width, optimal etching condition was etching temperature 40~$45^{\circ}C$, spray pressure 1.5kg/$\textrm{cm}^2$ and etching time 3~4min.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1281-1284
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• 2005

In the micro electrochemical machining (ECM), unfavorable oxide/passive layer formation and overall corrosion of electrodes must be prevented. Generally, the stainless steel electrode corrodes, passivates or dissolves in the electrochemical cell according to the electrode potential. Therefore, the electrode must maintain stable potential. The stable electrode potentials of tool and workpiece were determined with the potentiodynamic polarization test and verified experimentally from the point of machining stability and machined surface quality.

• 한국정밀공학회지
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• 제23권4호
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• pp.146-152
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• 2006

In micro electrochemical machining (ECM), electrodes should be prevented from unfavorable oxide and Passive layer formation on the machined surface or overall corrosion of the entire surface. Generally, metal electrodes corrode, passivate or dissolve in the electrochemical cell according to the electrode potential. Therefore, each electrode must maintain its stable potential. Tn this paper, the stable electrode potentials of tool and workpiece were determined using the potentiodynamic polarization test and verified experimentally considering machining stability and surface quality. Stable workpiece electrode potentials of two different passive materials of 304 stainless steel and nickel were determined in the 0.1 M sulfuric acid. Experimental results show good machined surface and fast machining rate using the determined electrode potentials.