• Title/Summary/Keyword: post-process

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A Study on the Characteristics change of WSix Thin Films by S/H Life Time (S/H Life Time에 따른 WSix의 특성 변화에 관한 연구)

  • 정양희;강성준
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.6 no.5
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    • pp.689-695
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    • 2002
  • Film compositions are needed in semiconductor manufacturing for such diverse application as production tool qualifications and process development. Surface and interface information is generally provided with Auger electron spectroscopy(AES). In this paper, WSix films were analyzed for structural, electrical, and compositional properties of tungsten silicide thin films produced by low pressure chemical vapor deposition as a function of temperature, DCS post flow, shower head life time, and the silicon to tungsten ratios have been investigated. We find that Si/W composition ratio is increased in the surface and interface of WSix thin films by the DCS post flow process and increasing deposition temperature, respectively. The results obtained in this study are also applicable to process control of WSix deposition for memory device fabrication.

Stress of External Steel Rod in Post-Tensioned Concrete Beam (포스트텐션 콘크리트 보에서 비부착 외부강봉의 응력)

  • Lee, Swoo-Heon;Kang, Thomas H.K.;Shin, Kyung-Jae
    • Journal of Korean Association for Spatial Structures
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    • v.15 no.1
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    • pp.47-55
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    • 2015
  • This paper shows the simplified equation to predict the ultimate moment capacity and corresponding rod stress in reinforced concrete beam with external post-tensioning rods. Because the stress of external post-tensioning rod depends on the beam deflection, the previous analytical model for post-tensioned beams requires a tedious iteration process. Also, the stress equations in ACI code or other researchers' models are suitable only for internal tendons in concrete beams. In this study, given the lack of analytical approaches to predict the nominal stress of the external unbonded rod, a simple and robust equation has been proposed for externally post-tensioned concrete beams. It is concluded that the proposed equation predicted the stress of external steel rods in post-tensioned concrete beams reasonably well.

Application of Surfactant added DHF to Post Oxide CMP Cleaning Process (계면활성제가 첨가된 DHF의 Post-Oxide CMP 세정 공정에의 적용 연구)

  • Ryu, Chung;Kim, You-Hyuk
    • Journal of the Korean Chemical Society
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    • v.47 no.6
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    • pp.608-613
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    • 2003
  • In order to remove particles on surface of post-oxide CMP wafer, new cleaning solution was prepared by mixing with DHF (Diluted HF), nonionic surfactant PAAE (Polyoxyethylene Alkyl Aryl Ether), DMSO (Dimethylsulfoxide) and D.I.W.. Silicone wafers were intentionally contaminated by silica, alumina and PSL (polystylene latex) which had different zeta potentials in cleaning solution. This cleaning solution under megasonic irradiation could remove particles and metals simultaneously at room temperature in contrast to traditional AMP (mixture of $NH_4OH,\;H_2O_2$ and D.I.W) without any side effects such as increasing of microroughness, metal line corrosion and deposition of organic contaminants. This suggests that this cleaning solution would be useful future application with copper CMP in brush cleaning process as well as traditional post CMP cleaning process.

Consumer Satisfaction and Dissatisfaction in Return Process (반품과정에서의 소비자만족.불만경험)

  • Park Kyung-Ae
    • Journal of the Korean Society of Clothing and Textiles
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    • v.30 no.7 s.155
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    • pp.1116-1125
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    • 2006
  • This study investigated consumer satisfaction and dissatisfaction experiences in post-purchase product return process. As an exploratory research the study collected qualitative data of subjective consumer experiences using an open-ended questionnaire and identified and classified themes and patterns of satisfaction and dissatisfaction experiences. A total of 113 cases were categorized into satisfied experiences, unsatisfied experiences, and neutral experiences. Further, satisfied experiences were sub-categorized into kind sales associates, quick and easy return process, and services higher than expected based on sources of satisfaction in the return process while unsatisfied experiences were sub-classified into rejection of return, attitude of sales associates, and hassle of return process. In-store adaptive behaviors and intentions on future behaviors were also observed. The results indicated that service quality in the post-purchase service encounter and consumer expectation were important in determining satisfaction and dissatisfaction in the return process. Insights for research questions were proposed.

A study on the Dislocation-Free Shallow Trench Isolation (STI) Process (Dislocation-Free Shallow Trench Isolation 공정 연구)

  • Yoo, Hae-Young;Kim, Nam-Hoon;Kim, Sang-Yong;Lee, Woo-Sun;Chang, Eui-Goo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.11a
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    • pp.84-85
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    • 2005
  • Dislocations are often found at Shallow Trench Isolation (STI) process after repeated thermal cycles. The residual stress after STI process often leads defect like dislocation by post STI thermo-mechanical stress. Thermo-mechanical stress induced by STI process is difficult to remove perfectly by plastic deformation at previous thermal cycles. Embedded flash memory process is very weak in terms of post STI thermo-mechanical stress, because it requires more oxidation steps than other devices. Therefore, dislocation-free flash process should be optimized.

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Recompression Properties of Sand in Post-Liquefaction Process According to Relative Density and Cyclic Loading History (상대밀도와 반복전단이력의 차이에 의한 모래의 액상화 후 재압축 특성)

  • Kwon, Youngcheul
    • Journal of the Korean GEO-environmental Society
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    • v.13 no.1
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    • pp.21-29
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    • 2012
  • Ground failure by liquefaction can occur not only during shaking but also as the result of the post-liquefaction process after an earthquake. During the process of ground deformation and failure, excess pore water pressure in soil is redistributed, which can then lead to changes in the effective stress of soils. Therefore, in order to provide a further understanding of the phenomenon, we have to estimate the properties of effective stress during the recompression process in post-liquefaction as well, not only the total amount of pore water drained. The primary objectives of this study are to determine and compare the recompression properties in the post-liquefaction process in terms of the relationship between volumetric strains and mean effective stresses under the various conditions of relative density and shear stress history. In all experimental cases, the volumetric strains increase greatly in the low effective stress level, almost to the zero zone, and granite soil, which has fine grains, undergoes gradual changes in the relationship between volumetric strains and mean effective stresses compared with fine sand. And, we can also find that recompression properties in the post-liquefaction process by cyclic loading depend highly on the dissipation energy and maximum shear strain, and this fact can be obtained in all cases regardless of the existence of fine content, relative density, and loading history. Especially, granite soil having fine grains can be defined uniformly in the relationship between dissipation energy and maximum volumetric strain, while fine sand cannot be so uniformly defined.

Optical and Electrical Properties with Various Post-Heating Temperatures in the Al-Doped ZnO Thin Films by Sol-Gel Process (졸-겔법에 의해 제조된 Al-Doped ZnO 박막의 후열처리 온도에 따른 전기 및 광학적 특성)

  • Ko, Seok-Bae;Choi, Moon-Sun;Ko, Hyungduk;Lee, Chung-Sun;Tai, Weon-Pil;Suh, Su-Jeong;Kim, Young-Sung
    • Journal of the Korean Ceramic Society
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    • v.41 no.10 s.269
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    • pp.742-748
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    • 2004
  • Isopropanol of low boiling point was used as a solvent to prepare Al-doped ZnO(AZO) thin films. A homogeneous and stable sol was made from Zn acetate a solute whose mole concentration was 0.7mol/$\iota$ and Al chloride as a dopant. Al-doped ZnO thin films were prepared by sol-gel method as a function of post-heating temperature from 500 to $700^{\circ}C$ and the optical and electrical properties were investigated. The c-axis orientation along (002) plane was enhanced with the increasing of post-heating temperature and the surface morphology of the films showed a homogeneous and nano-sized microstructure. The optical transmittance of the films post-heated below $650^{\circ}C$ was over $86\%$, but decreased at $700^{\circ}C$. The electrical resistivity of the thin films decreased from 73 to 22 $\Omega$-cm as the post-heating temperature increased up to $650^{\circ}C$, but increased greatly to 580 $\Omega$-cm at $700^{\circ}C$. XPS analysis indicated that the deterioration of electrical and optical properties was attributed to the precipitation of $Al_2O_3$ phase on the surface of AZO thin film. This result suggests that the optimum post-heating temperature to improve electrical and optical properties is $600^{\circ}C$.

The Effects of Science Class using Multiple Intelligence on the Learning Motivation, Academic Achievement and Science Process Skill of Elementary Student - Focused on 'Stratum and Fossil' Unit in 3rd Grade - (다중지능을 활용한 과학수업이 초등학생의 과학학습동기, 학업성취도 및 과학탐구능력에 미치는 효과 - 3학년 '지층과 화석' 단원을 중심으로 -)

  • Kim, Jin-hyeon;Lee, Hyeong-cheol
    • Journal of Korean Elementary Science Education
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    • v.36 no.1
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    • pp.31-42
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    • 2017
  • This study aimed to investigate the effect of science class using multiple intelligence on science learning motivation, academic achievement and science process skill of elementary student. The number of participants were 98, 4 classes of $3^{rd}$ graders in G elementary school in B city. The experimental group, 2 classes including 49 participants, had science classes using multiple intelligence while the comparative group, 2 classes including 49 participants, took ordinary teacher-driven lessons using teacher's guidebook. Pre and post tests were done before and after executing lessons to assess the changing in each group's science learning motivation, academic achievement and science process skill. The results of this study can be summarized as follows: First, the pre and post test results of science learning motivation revealed that the experimental group had higher improvement compared to the comparative group and the difference was meaningful. Second, the post test results of the science academic achievement showed that the experimental group had higher average value compared to the comparative group and the difference was meaningful. Third, the pre and post test results of basic science process skill showed that the experimental group had higher average value compared to the comparative group and the difference was meaningful, especially in inference and prediction elements.

Post-Chlorination Process Control based on Flow Prediction by Time Series Neural Network in Water Treatment Plant

  • Lee, HoHyun;Shin, GangWook;Hong, SungTaek;Choi, JongWoong;Chun, MyungGeun
    • International Journal of Fuzzy Logic and Intelligent Systems
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    • v.16 no.3
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    • pp.197-207
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    • 2016
  • It is very important to maintain a constant chlorine concentration in the post chlorination process, which is the final step in the water treatment process (hereafter WTP) before servicing water to citizens. Even though a flow meter between the filtration basin and clear well must be installed for the post chlorination process, it is not easy to install owing to poor installation conditions. In such a case, a raw water flow meter has been used as an alternative and has led to dosage errors due to detention time. Therefore, the inlet flow to the clear well is estimated by a time series neural network for the plant without a measurement value, a new residual chlorine meter is installed in the inlet of the clear well to decrease the control period, and the proposed modeling and controller to analyze the chlorine concentration change in the well is a neuro fuzzy algorithm and cascade method. The proposed algorithm led to post chlorination and chlorination improvements of 1.75 times and 1.96 times respectively when it was applied to an operating WTP. As a result, a hygienically safer drinking water is supplied with preemptive response for the time delay and inherent characteristics of the disinfection process.

A Qualitative Research on Purchase Decision-Making Process by Limited Edition Fashion Consumers (리미티드 에디션 패션제품 구매자의 구매의사결정과정에 관한 연구)

  • Hwang, Kyeong-Yi;Koh, Ae-Ran
    • Human Ecology Research
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    • v.54 no.6
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    • pp.599-610
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    • 2016
  • The purposes of this study are to identify the characteristics of limited edition fashion consumers, to analyze their purchase decision-making processes, and to examine negative factors of consumers' recognition toward limited edition fashion products. A qualitative investigation was conducted by doing in-depth interviews with 11 selected consumers in their twenties and thirties who have actively purchased and consumed limited edition fashion products. The results of this study can be summarized as follows. First, there are four sub-categories of appearance management activity, acceptance of fashion trend, information-seeking behavior, and hedonic shopping orientation for the limited edition fashion consumers' characteristics. Second, the purchase decision-making process of limited edition fashion consumers are identified as seven steps: need recognition, information search, evaluation of alternatives, planning and courtship, purchase, post-purchase evaluation, and post-purchase behavior. Courtship/attachment formation and post-purchase behavior are unique steps when compared to general purchase decision-making process. Third, this study identified negative factors of consumers' recognition toward limited edition this study in order to suggest several improvement plans for enterprises using limited marketing. Four sub-categories are examined: outrageous price, tricks of company, fatigue due to purchasing competition, and re-sellers. In conclusion, this study indicates that the purchase decision-making process of limited edition consumers, which involves two distinctive steps including courtship/attachment formation and post-purchase behavior, can be differentiated from general consumers. The results of this study provides preliminary data for further research for in-depth analysis of limited edition consumers.