The Preferred Orientation and Morphology Characteristics of AlN Thin Films Prepared by RF Power Under Room Temperature Process (저온공정을 이용한 AlN 박막의 우선배향성과 모폴로지에 관한 연구)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.21 no.5
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- pp.458-462
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- 2008