• Title/Summary/Keyword: poly-crystallization

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Manipulation of Microstructures of in-situ Phosphorus-Doped Poly Silicon Films deposited on Silicon Substrate Using Two Step Growth of Reduced Pressure Chemical Vapor Deposition (감압화학증착의 이단계 성장으로 실리콘 기판 위에 증착한 in-situ 인 도핑 다결정 실리콘 박막의 미세구조 조절)

  • 김홍승;심규환;이승윤;이정용;강진영
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.13 no.2
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    • pp.95-100
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    • 2000

  • For the well-controlled growing in-situ heavily phosphorus doped polycrystalline Si films directly on Si wafer by reduced pressure chemical vapor deposition, a study is made of the two step growth. When in-situ heavily phosphorus doped Si films were deposited directly on Si (100) wafer, crystal structure in the film is not unique, that is, the single crystal to polycrystalline phase transition occurs at a certain thickness. However, the well-controlled polycrtstalline Si films deposited by two step growth grew directly on Si wafers. Moreover, the two step growth, which employs crystallization of grew directly on Si wafers. Moreover, the two step growth which employs crystallization of amorphous silicon layer grown at low temperature, reveals crucial advantages in manipulating polycrystal structures of in-situ phosphorous doped silicon.

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Characteristics of Amorphous Si Films Fabricated by Mesh-type PECVD and Their Crystallization Behavior Using Excimer Laser (Mesh-type PECVD 방법으로 제조된 비정질 Si박막의 특성 및 레이저 결정화)

  • Han Sang-Yong;Choi Jae-Sik;Kim Yong-Su;Park Sung-Gye;Ro Jae-Sang;Kim Hyoung-June
    • Journal of the Korean Electrochemical Society
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    • v.3 no.1
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    • pp.19-24
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    • 2000

  • It is increasingly necessary to use poly-Si n's as high resolution and integration of Tn for LCD. Excimer Laser Crystallization (ELC) of a-Si is mainly used as a low temperature process. But the ELC method for the fabrication of poly-Si has the eruption problems associated with hydrogen in the a-Si film. So we need a dehydro-genation process additionally. Hydrogen in a-Si film can degrade the quality of poly-Si film and electrical properties of device due to the hydrogen eruption and voids which occur during the excimer laser annealing. In this study, we propose mesh-type PECVD as the a-Si film deposition method for achieving the low concentration hydrogen. Mesh-type PECVD was found to reduce the hydrogen content substantially. We could obtain a as-deposited a-Si film with hydrogen contents less than $1\%$ at $300^{\circ}C$. We also investigated the behavior by XeCl excimer laser annealing of a-Si fabricated by mesh-type PECVB. As a result, we were able to confirm the broad process window in contrast to the narrow process range typically obtained in ELC. Hydrogen eruption was not observed in poly-Si films after ELC These results suggests that mesh-type PECVD is a viable method to achieve the low hydrogen content a-Si and improve the process windows for ELC.

  • https://doi.org/10.5229/JKES.2000.3.1.019 인용 PDF

Synthesis and Hydrophilicities of Poly(ethylene 2,6-naphthalate)/ Poly(ethylene glycol) Copolymers

  • Son, Jun-Sik;Ji, Dong-Sun
    • Fibers and Polymers
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    • v.4 no.4
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    • pp.156-160
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    • 2003

  • Poly(ethylene 2,6-naphthalate) (PEN)/Poly(ethylene glycol) (PEG) copolymers were synthesized by two step reaction during the melt copolymerization process. The first step was the esterification reaction of dimethyl-2,6-naphthalenedicarbox-ylate (2,6-NDC) and ethylene glycol (EG). The second step was the condensation polymerization of bishydroxyethylnaphthalate (BHEN) and PEG. The copolymers contained 10 mol% of PEG units with different molecular weights. Structures and thermal properties of the copolymers were studied by using $^1{H-NMR}$, DSC, TGA, etc. Especially, while the intrinsic viscosities of PEN/PEG copolymers increased with increasing molecular weights of PEG, but the glass transition temperature, the cold crystallization temperature, and the weight loss temperature of the copolymers decreased with increasing molecular weights of PEG. Consequently, the hydrophilicities by means of contact angle measurement and moisture content of the copolymer films were found to be significantly improved with increasing molecular weights of PEG.

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LASER Crystallization System for Poly-Si

  • Lee, Ho-Nyeon
    • Information Display
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    • v.7 no.2
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    • pp.10-13
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    • 2006

  • Active Matrix Flat Panel Display(AM-FPD)의 경쟁력 향상을 위해서 반드시 필요한 고성능, 고생산성 Thin Film Transistor(TFT)를 제작에 사용하는 결정화 방법 중, 산업화에 가장 근접한 레이저 결정화 방법 및 장비에 대해서 기술한다.

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