Electrochemical Polarization Characteristics and Effect of the CMP Performances of Tungsten and Titanium Film by H2O2 Oxidizer (H2O2 산화제가 W/Ti 박막의 전기화학적 분극특성 및 CMP 성능에 미치는 영향)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.18 no.6
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- pp.515-520
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- 2005