• 공업화학
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• 제33권2호
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• pp.229-233
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• 2022

In this study, a gas-liquid hybrid atmospheric pressure plasma reactor of the dielectric barrier discharge method was fabricated and characterized. The solubility of copper oxide in the organic acid solution was increased when argon having a larger atomic weight than helium was used during plasma discharge. There was no significant effect of mixing organic acid solutions under plasma discharge treatment on the variation of copper oxide's solubility. As the applied voltage for plasma discharge and the concentration of the organic acid solution increased, the dissolution and removal power of the copper oxide layer increased. Solubility of copper oxide was more affected by the concentration in organic acid solution rather than the variation of plasma applied voltage. The usefulness of hybrid plasma reactor for the surface cleaning process was confirmed.

• 한국결정성장학회지
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• 제10권2호
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• pp.128-133
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• 2000

Numerical analysis of the transport phenomena in an inductively coupled plasma reactor was conducted with two-dimensional axisymmetric model including the electromagnetic field model, electron and species density models. The spatial distribution of the charged species in the ion flux to the wafer have been calculated to examine the influence of the process conditions including antenna and reactor geometry. The antenna radius had a significant influence on the plasma state and axial ion flux distribution.

• 자원리싸이클링
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• 제13권1호
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• pp.59-67
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• 2004

A universal plasma-chemical module (PChM) for the industrial processing of different hydrocarbon raw material pyrolysis was designed and tested. Laboratory investigations for the plasma-chemical method of acetylene production from natural gas and different coals were made. Similar laboratory tests on the industrial production of acetylene as a raw material for organic syn-thesis were developed using the PChM. A comparison of the suggested plasma-chemical method with the traditional process of acetylene production were carried out. The outlook of the plasma-chemical method was shown.

• Korean Chemical Engineering Research
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• 제50권2호
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• pp.343-347
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• 2012

충전형 저온 플라즈마 반응기 내에서의 가스 상 시안화합물의 분해특성을 반응기로 투입되는 방전 전력, 시안화합물의 유입농도, 운반기체인 공기의 습도 및 반응기 내의 충전물질 등을 변수로 연구하였다. 저온플라즈마 방전의 경우 시안화합물들의 분해는 트리클로로에틸렌에 비하여 상대적으로 매우 낮은 효율을 보였다. 그러나 플라즈마 방전 영역에 알루미나 또는 백금/알루미나 구슬을 충전한 경우 분해효율이 크게 높아졌으며 이는 플라즈마 반응과 더불어 백금/알루미나의 촉매작용에 의한 촉매 반응이 동시에 작용함에 기인한 것으로 판단된다.

• 한국안전학회지
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• 제15권3호
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• pp.66-70
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• 2000

In order to cope with environmental problems caused by harmful gases emitted from various industrial sources, a new technology which employs discharge plasma formed in ordinary atmospheric pressure has been intensively investigated in many industrialized nations. Although a plenty of useful outcomes and suggestions have been made public by scientists in this field, few commercial products which effectively decompose pollutant gases have appeared as yet. This is partly because that the energy efficiency of a most effective plasma reactor has not reached a satisfactory level in comparison with those of devices using conventional technologies. In an attempt to solve the problem mentioned above, we noticed to combine heterogeneous electrical discharges. This concepts is based on that each plasma reactor has its specific spatial region in which chemical reaction are active and by electrically affected with another reactor of different type, the activated region would increase - which may lead to cutting down the energy consumption. To prove this concept experimentally, two different discharge equipments, a plane ceramic-based surface discharge electrode and a corona electrode with tungsten needle may, are selected and combined to fabricate a hybrid plasma reactor. The results are summarized as follows; (1) Ozone concentration generated in the plasma region drastically increases when the positive corona discharge is added to the surface discharge. The rate of increase of ozone depends on the frequency of the surface discharge. The negative corona, however, does not contribute to the improvement of the ozone generation. (2) NO(nitrogen monoxide) decomposition rate also improves by simultaneously applying the surface and the positive corona discharges. The effect of the corona superposition is more evident when the level of the surface discharge is moderate. (3) By adjusting the corona level, the net energy efficiency during NO decomposition improves in comparison with the simple surface discharge reactor.

• 산업기술연구
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• 제14권
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• pp.63-75
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• 1994

The objective of this research is to analyze the phenomena of negative ion behavior in silane plasma chemical vapor deposition. Based on the plasma chemistry, the model equations for the formation and transport of negative ions were proposed and solved. The evolutions of gaseous species along the reactor were presented for several conditions of process variables such as reactor pressure, total gas flow rate, and electric field. Based on the model results, it is found that : (1) The concentration profiles of positive ions show the sharp peaks at the center of plasma reactor. (2) Most of negative ions are located in bulk plasma region, because the negative ions are excluded from the sheath region by electrostatic repulsion.

• Korean Chemical Engineering Research
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• 제60권3호
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• pp.452-458
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• 2022

3가지 종류의 기-액 하이브리드 수평형, 수직형 그리고 needle-to-cylinder형 플라즈마 반응기가 제작되었다. 이들 반응기를 통하여 대기압 플라즈마 방전에서 발생하는 반응 활성종 생성과 전극 내의 전위차를 통한 세정성분의 기-액 활성화 반응을 일으키는 고효율 친환경 기반의 세정 개념을 제시하였다. 세정성능에 대한 효율성을 비교한 결과, needle-to-cylinder형 반응기가 가장 우수한 특성을 가졌다. 본 연구를 통해 기-액 하이브리드 대기압 플라즈마 반응기가 반도체 공정 등 초정밀 세정공정에 응용 가능성이 있음을 확인하였다.

• 한국안전학회지
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• 제14권3호
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• pp.63-68
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• 1999

In this paper, characteristics of ozone generation by using coil and SPCP + DC corona reactor was studied. The ceramic-based surface discharge electrode, which was first invented as a high-efficiency ozonizer, has been used as an experimental plasma chemical reactor.(Surface Induced Plasma Chemical Processing, SPCP.) The electrode, however, has a structural disadvantage that a highly energetic plasma region is localized near the electrode surface, which may make it impossible for higher efficiency to realize. In an attempt to overcome this advantage, we have developed a hybrid reactor which employs a corona discharge unit together with the surface discharge unit. Experimental results suggest that the efficiency of the ozone production rate is improved when positive corona discharge is added.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회A
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• pp.1869-1873
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• 2008

In this work, to make it possible to generate glow discharge in atmospheric pressure condition with relatively high and wide electric field, micro channel reactor is proposed. Si DRIE and Cr deposition by Ebeam evaporation is used to make channel and bottom electrode layer. Upper electrode is made from ITO glass to visualize discharge within micro channel. Fabricated reactor is verified by generating uniform glow plasma with N2 / He gases each as working fluid. The range of gas electric field to generate glow plasma is from about 200 V/cm and upper limit is not observed in tested condition of up to 150 kV/cm. This data shows that micro channel plasma reactor is more versatile. Indirect estimation of electron temperature in this reactor can be inferred that the electron temperature within glow discharge in micro reactor lies $0{\sim}2eV$. This research demonstrates that the reactor is appropriate in application that needs to maintain low temperature condition during chemical process.

• 공업화학
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• 제25권5호
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• pp.497-502
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• 2014

상압 플라즈마 반응기 내에 Ni-$Al_2O_3$와 Ni-$MgAl_2O_4$ 촉매를 충진한 하이브리드 반응기를 이용하여 메탄과 이산화탄소의 전환반응을 진행하였다. 인가전력, 반응가스 유량, 혼합비율 및 반응기 온도 등 다양한 공정변수와 촉매의 충진 유무에 따른 메탄과 이산화탄소의 전환반응 특성이 분석되었다. 촉매의 반응 기여도 분석에서 공정온도를 $400^{\circ}C$까지 올린 경우에도 플라즈마 방전이 없이는 메탄과 이산화탄소의 촉매를 통한 자발적 전환반응이 일어나지 않았다. 이는 촉매를 충진하지 않은 플라즈마 방전만의 전환공정과의 비교를 통하여 확인할 수 있었다. 플라즈마 반응기에 촉매를 적용하는 경우에는 공정의 적절성과 전환처리에 적합한 촉매의 선택이 필수적이다.