• 한국세라믹학회지
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• 제34권3호
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• pp.249-256
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• 1997

100-500KHz범위의 주파수전원을 인가하여 발생한 플라즈마를 이용하여 질화붕소(boron nitride)막의 합성시 육방정상(hexagonal phase)과 입방정상(cubic phase)의 생성거동을 관찰하였다. BCl3와 NH3를 붕소와 질소의 공급기체로 선택하였고 Ar과 수소를 carrier기체로 사용하였다. 합성변수로는 플라즈마전원의 전압, 기판의 bias, 합성압력, 기체의 조성, 기판의 온도이었는데, 합성된 박막은 FT-IR결과로부터 육방정과 입방정의 혼합상으로 나타났고, 각 상의 분률은 변수의 크기에 의존하였다. TEM분석결과 육방정으로만 구성된 박막은 비정질상으로 이루어졌으며, 입방정과 육방정의 혼합상의 경우는 비정질기지상에 수십 nanometer크기의 입방정입자가 분산된 구조를 하고 있었다.

• 한국수소및신에너지학회논문집
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• 제25권6호
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• pp.586-593
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• 2014

Limited sources of fossil fuels and also global climate changes caused by $CO_2$ emissions are currently discussed around the world. As a renewable, carbon neutral and widely available energy source, biogas is regarded as a promising alternative to fossil fuels. In this study, a plasma dump reformer was proposed to produce $H_2$-rich synthesis gas by a model biogas. The three-phase gliding arc plasma and dump combustor were combined. Screening studies were carried out with the parameter of a dump injector flow rate, water feeding flow rate, air ratio, biogas component ratio and input power. As the results, methane conversion rate, carbon dioxide conversion rate, hydrogen selectivity, carbon monoxide yield at the optimum conditions were achieved to 98%, 69%, 42%, 24.7%, respectively.

• Applied Microscopy
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• 제47권1호
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• pp.13-18
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• 2017

High-quality graphene was synthesized on Cu foil and $Fe_2O_3$ film using $CH_4$ gas via inductively-coupled plasma chemical vapor deposition (ICPCVD). The graphene film was formed on $Fe_2O_3$ at a temperature as low as $700^{\circ}C$. Few-layer graphene was formed within a few seconds and 1 min on Cu and $Fe_2O_3$, respectively. With increasing growth time and plasma power, the graphene thickness was controllably reduced and ultimately self-limited to a single layer. Moreover, the crystal quality of graphene was constantly enhanced. Understanding the ICPCVD growth kinetics that are critically affected by ICP is useful for the controllable synthesis of high-quality graphene on metals and oxides for various electronic applications.

• 한국재료학회지
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• 제19권10호
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• pp.522-526
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• 2009

Graphene has been effectively synthesized on Ni/SiO$_2$/Si substrates with CH$_4$ (1 SCCM) diluted in Ar/H$_2$(10%) (99 SCCM) by using an inductively-coupled plasma-enhanced chemical vapor deposition. Graphene was formed on the entire surface of the 500 nm thick Ni substrate even at 700 $^{\circ}C$, although CH$_4$ and Ar/H$_2$ gas were supplied under plasma of 600 W for 1 second. The Raman spectrum showed typical graphene features with D, G, and 2D peaks at 1356, 1584, and 2710 cm$^{-1}$, respectively. With increase of growth temperature to 900 $^{\circ}C$, the ratios of the D band intensity to the G band intensity and the 2D band intensity to the G band intensity were increased and decreased, respectively. The results were strongly correlated to a rougher and coarser Ni surface due to the enhanced recrystallization process at higher temperatures. In contrast, highquality graphene was synthesized at 1000 $^{\circ}C$ on smooth and large Ni grains, which were formed by decreasing Ni deposition thickness to 300 nm.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1989년도 하계종합학술대회 논문집
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• pp.390-393
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• 1989

Diamond is synthesized from the gaseous mixture of carbon monoxide and hydrogen by microwave PECVD. $10{\times}10mm^2$ silicon wafers are used as the substrate,and it can be raised more than $900^{\circ}C$ by microwave absorption, radiation by plasma and bombardment of ions. The changes of the morphology and the growth rates of the deposits with the experimental conditions are examined by Scanning Electron Microscopy. The d values of all the deposited films concide with those of powder diffraction data in XRD. In Raman spectra, the peak of the deposit coincides with that of the natural diamond which has a value of 1332.5 $cm^{-1}$, and the broad peak from 1360 $cm^{-1}$to 1600 $cm^{-1}$which represents the amorphous graphite was observed in the higher concentration of carbon monoxide.

• 한국세라믹학회지
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• 제48권1호
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• pp.86-93
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• 2011

Transparent plasma display can be realized by developing the synthetic chemistry of appropriate nanophosphors and generating nanophosphor-based transparent luminescent layers. For this goal, red-emitting $Y(V_{0.5},\;P_{0.5})O_4$:Eu nanophosphors were synthesized by a facile hydrothermal route at $200^{\circ}C$ for 48 h and the resulting nanophosphors were subsequently annealed at $800^{\circ}C$ at an ambient atmosphere. The crystallographic structure, morphology, and emission property of the as-synthesized and annealed nanophosphors were compared. Choosing 2-methoxyethanol as a dispersion medium and applying a standard sonication, well-dispersed nanophosphor solutions could be prepared. Using these dispersions, visible transparent nanophosphor layers were spin-deposited on glass substrates. By combining $Y(V_{0.5},\;P_{0.5})O_4$:Eu nanophosphor layer/glass substrate as a rear plate with a front plate used in a conventional plasma display panels (PDPs), mini-sized transparent red-emitting PDPs were constructed. Transmittance and luminance properties of two transparent test panels using as-synthesized versus $800^{\circ}C$-annealed nanophosphors were characterized and compared.

• 한국세라믹학회지
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• 제51권3호
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• pp.201-207
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• 2014

High-purity aluminum nitride nanopowders were synthesized using an RF induction thermal plasma instrument. Ammonia and nitrogen gases were used as sheath gas to control the reactor atmosphere. Synthesized AlN nanopowders were characterized by XRD, SEM, TEM, EDS, BET, FTIR, and N-O analyses. It was possible to synthesize high-purity AlN nanoparticles through control of the ammonia gas flow rate. However, additional process parameters such as plasma power and reactor pressure had to be controlled for the production of high-purity AlN nanopowders using nitrogen gas.

• 대한기계학회논문집B
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• 제33권11호
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• pp.869-875
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• 2009

The purpose of this paper is to investigate the optimal condition of the syngas production by reforming of propane using Gliding arc plasma reformer. The gliding arc plasma reformer in 3 phases has been newly designed and developed with a quick starting and fast response time. It can be applicable to the various types of fuels (Hydrocarbons $C_xH_y$), and it has a high conversion rate of fuels and high production of hydrogen. The parametric screening studies were carried out according to the changes of a steam feed amount i.e., steam/carbon ratio, total gas flow rate and input electric power. The optimum operating conditions were S/C ratio 2.8, total gas flow rate of 14 L/min and input electric power of 2.4 kW. The result of optimum operating conditions showed the 55 % $H_2$, 14 % CO, 15 % $CO_2$, 10 % $C_3H_8$ and 4 % $CH_4$. Also, $C_3H_8$ conversion, $H_2$ yield and $H_2$ selectivity were 90 %, 42 %, 15 %, respectively. The energy efficiency and specific energy requirements were 37 % and 334 kJ/mol respectively.

• Environmental Engineering Research
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• 제17권2호
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• pp.89-94
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• 2012

Pyrolysis/gasification technology utilizes an energy conversion technique from various waste resources, such as biomass, solid waste, sewage sludge, and etc. to generating a syngas (synthesis gas). However, one of the major problems for the pyrolysis gasification is the presence of tar in the product gas. The tar produced might cause damages and operating problems on the facility. In this study, a gliding arc plasma reformer was developed to solve the previously acknowledged issues. An experiment was conducted using surrogate benzene and naphthalene, which are generated during the pyrolysis and/or gasification, as the representative tar substance. To identify the characteristics of the influential parameters of tar decomposition, tests were performed on the steam feed amount (steam/carbon ratio), input discharge power (specific energy input, SEI), total feed gas amount and the input tar concentration. In benzene, the optimal operating conditions of the gliding arc plasma 2 in steam to carbon (S/C) ratio, 0.98 $kWh/m^3$ in SEI, 14 L/min in total gas feed rate and 3.6% in benzene concentration. In naphthalene, 2.5 in S/C ratio, 1 $kWh/m^3$ in SEI, 18.4 L/min in total gas feed rate and 1% in naphthalene concentration. The benzene decomposition efficiency was 95%, and the energy efficiency was 120 g/kWh. The naphthalene decomposition efficiency was 79%, and the energy yield was 68 g/kWh.

• 한국분말재료학회지
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• 제12권5호
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• pp.351-356
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• 2005

Nanoscale Al powder with thin layer of alumina was produced by Wire Electric Explosion (WEE) process. Spark-Plasma Sintering (SPS) was performed for the produced powder to confirm the effectiveness of SPS like so-called 'surface-cleaning effect' and so on. Crystallite size and alumina content of produced powder varied with the ratio of input energy to sublimation energy of Al wire ($e/e_s$): Increase in ($e/e_s$) resulted in the decrease of crystallite size and the increase of alumina content. Shrinkage curve during SPS process showed that the oxide surface layer could not be destroyed near the melting point of Al. It implied that there was not enough or no spark-plasma effect during SPS for Al/Alumina powder.