• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
• /
• pp.577-577
• /
• 2013

플라즈마를 이용하는 공정은 반도체 산업에서 박막트랜지스터, 평면 모니터와 LCD 등 다양한 반도체 및 디스플레이 소자를 제작하는데 중요한 기술 중 하나로 발전되어 왔다. 현재 플라즈마 공정 기술을 이용하여 소자의 크기를 수십 나노 이하로 공정함으로써 수율을 향상시킬 수 있었지만, 소자의 미세화는 그 한계점에 봉착하였다. 그러한 이유로 웨이퍼 사이즈의 크기를 대구경화 시킴으로써 이런 문제점을 극복하고자 하였지만, 대구경 웨이퍼 사이즈에 맞는 차세대 대면적 공정 장비와 그에 따른 플라즈마 소스의 개발과 이를 컨트롤 할 수 있는 능력이 매우 절실하게 되었다. 본 연구에서는 대구경 웨이퍼용 플라즈마 소스를 위해 상대적으로 낮은 압력과 고밀도 플라즈마를 발생시킬 수 있는 유도 결합형 플라즈마원을 사용하였다. 하지만 유도 결합형 플라즈마 소스의 경우 대구경화에 따른 안테나의 길이가 길어짐으로써 생기는 정상파 효과를 피할 수가 없게 되었다. 그러한 이유로, 본 연구에서는 정상파 효과를 줄일 수 있는 상대적으로 낮은 주파수를 사용하는 안테나의 형태를 이용하여 실질적인 공정 영역에 있어서의 균일도 문제를 해결하였다. 또한, 플라즈마의 특성조절을 위해 이중주파수를 사용함 으로써 플라즈마 특성 조절을 하였다. 이러한 형태의 이중주파수를 사용하는 플라즈마 소스를 이용하여 10 mTorr의 Ar/CF4 조건에서 양이온 종들을 PSM (Plasma Sampling Mass spectroscopy, HIDEN Inc.)을 통해 에너지를 분석하였다. 이중 주파수에 있어 전력비율에 따라 IEDs (Ion Energy Distributions)는 많은 변화가 관찰되었으며, 인가하는 입력전력에 따라 E-H mode 전이가 일어남을 관찰할 수 있었다.

• 방사성폐기물학회지
• /
• 제2권4호
• /
• pp.231-238
• /
• 2004

원자력 발전소에서 발생하는 고체 방사성 폐기물인 이온교환수지, 제올라이트, 활성탄 및 슬러지 에 포함된 성분 원소 분석을 위한 산분해 조건을 확립하였다. 방사성 폐기물의 분해 에는 흔합산을 이용한 밀폐형 극초단파 산분해법을 사용하였으며, 제안한 방법에 따른 산분해 후의 용액은 맑고 색이 없는 투명한 상태임을 확인할 수 있었다. 또한, 산분해 과정을 거친 각각의 용액 시료는 ICP-AES와 AAS를 사용하여 분석하였고, 모의 방사성 폐기물에 첨가한 5종의 금속 원소들은 $94{\%}$ 이상의 높은 회수율을 보여주었다. 화학적 특성을 고려하여 제안된 산분해 조건에 의해 용액화된 중${\cdot}$저준위 방사성 폐기물의 성분 원소 분석은 최적의 유리화 기술 개발을 위한 기초 자료로 유용하게 사용될 수 있을 것으로 판단된다.

• Journal of Microbiology and Biotechnology
• /
• 제26권11호
• /
• pp.1908-1917
• /
• 2016

Wild strain L-6 was subjected to combined mutagenesis, including UV irradiation, atmospheric and room temperature plasma, and ion beam implantation, to increase the yield of 1,3-dihydroxyacetone (DHA). With application of a high-throughput screening method, mutant Gluconobacter oxydans I-2-239 with a DHA productivity of 103.5 g/l in flask-shake fermentation was finally obtained with the starting glycerol concentration of 120 g/l, which was 115.7% higher than the wild strain. The cultivation time also decreased from 54 h to 36 h. Compared with the wild strain, a dramatic increase in enzyme activity was observed for the mutant strain, although the increase in biomass was limited. DNA and amino acid sequence alignment revealed 11 nucleotide substitutions and 10 amino acid substitutions between the sldAB of strains L-6 and I-2-239. Simulation of the 3-D structure and prediction of active site residues and PQQ binding site residues suggested that these mutations were mainly related to PQQ binding, which was speculated to be favorable for the catalyzing capacity of glycerol dehydrogenase. RT-qPCR assay indicated that the transcription levels of sldA and sldB in the mutant strain were respectively 4.8-fold and 5.4-fold higher than that in the wild strain, suggesting another possible reason for the increased DHA productivity of the mutant strain.

• 청정기술
• /
• 제18권1호
• /
• pp.89-94
• /
• 2012

본 연구에서는 산성을 갖는 Fe-ZSM5를 담체로 활용하여 Pd, Pt 등 귀금속을 담지한 후, 제조 촉매의 암모니아의 선택적 산화반응 활성을 평가하였다. 이들 중 Pt/Fe-ZSM5가 Pd/Fe-ZSM5 보다 높은 활성을 나타냈다. 또한 Pt/Fe-ZSM5 촉매에서 ZSM5 구조체 내 Fe의 이온교환량을 달리한 촉매의 실험을 수행하여, 암모니아의 선택적 산화반응에 가장 우수한 활성을 보이는 최적 조성비를 탐색하였다. 그 결과, Fe의 이온교환량이 적을수록 반응 활성이 증가하는 경향을 보였고, 저온 영역인 $250^{\circ}C$에서 100%의 암모니아 전환율을 나타냈다. 이와 같이 암모니아의 선택적 산화반응에 효과적인 Fe-ZSM5 담체에 대하여, ICP-AES, BET, XRD, $NH_3$-TPD 등과 같은 특성 분석을 수행하여 제조 촉매의 구조와 물성이 반응활성에 미치는 영향을 검토해보았다.

• 반도체디스플레이기술학회지
• /
• 제7권1호
• /
• pp.1-5
• /
• 2008

In this paper, we fabricated pressure difference type gas flow sensor using only dry etching technology by ICP-RIE(inductive coupled plasma reactive ion etching). The sensor's structure consists of a common shear stress type piezoresistive pressure sensor with an orifice fabricated in the middle of the sensor diaphragm. Generally, structure like diaphragm is fabricated by wet etching technology using TMAH, but we fabricated diaphragm by only dry etching using ICP-RIE. To equalize the thickness of diaphragm we applied insulator($SiO_2$) layer of SOI(Si/$SiO_2$/Si-sub) wafer as delay layer of dry etching. Size of fabricated diaphragm is $1000{\times}1000{\times}7\;{\mu}m^3$ and overall chip $3000{\times}3000{\times}7\;{\mu}m^3$. We measured the variation of output voltage toward the change of gas pressure to analyze characteristics of the fabricated sensor. Sensitivity of fabricated sensor was relatively high as about 1.5mV/V kPa at 1kPa full-scale. Nonlinearity was below 0.5%F.S. Over-pressure range of the fabricated sensor is 100kPa or more.

• Journal of the Optical Society of Korea
• /
• 제13권1호
• /
• pp.37-41
• /
• 2009

We observe the proton signals produced by laser interaction with thin-foil targets of polyimide and of copper. We change the thickness of the polyimide target to $7.5{\mu}m$, $12.5{\mu}m$, and $50{\mu}m$. High-energy protons with the maximum energy of ${\sim}2.3\;MeV$ from $7.5{\mu}m$ thick polyimide are observed. This proton beam with the maximum energy of multi-MeV has various applications such as a proton shadowgraphy.

• Journal of Korean Dental Science
• /
• 제4권2호
• /
• pp.73-78
• /
• 2011

Purpose: $HCO_3{^-}$ is the most important ion to buffer the acidity of saliva. The transport of $HCO_3{^-}$ is mediated by electrogenic $Na^+/HCO_3{^-}$ cotransporter 1 (NBCe1), which expressed in various tissues including salivary glands, kidney and pancreas, etc. This experiment was performed to investigate regulatory site of NBCe1involved in the pH regulation using various mutants of NBCe1. Materials and Methods: Human parotid gland NBCe1 (hpNBCe1) and mutants by deletion of 1~285 bp and 1~1,035 bp were prepared. After microinjection of each cRNA to oocytes of Xenopus laevis, they were incubated for 2~3 days. The function of each protein was tested by electrophysiological method. Results: When oocytes were exposed to the $HCO_3{^-}$ buffered solution, 1~285 bp deleted mutant hpNBCe1 evoked a marked hyperpolarization ranging from -90 mV to -160 mV (average: -134 mV; n=12) compared to the full length of hpNBCe1. Although 1~1,035 bp deleted mutant hpNBCe1 was also expressed in the plasma membrane, but it did not show any changes of membrane potentials. Conclusion: Our deletion mutant study demonstrated that 1~285 bp of the NBCe1 is the major domain to determine $HCO_3{^-}$ transport ratio.

• Corrosion Science and Technology
• /
• 제19권4호
• /
• pp.189-195
• /
• 2020

Two air vents situated on a heat transport pipe in district heating system were exposed to the same environment for 10 years. However, one air vent was more corroded than the other. It also had a hole on the top of the front-end pipe. Comparative analysis was performed for these air vents to identify the cause of corrosion and establish countermeasures. Through experimental observation of the damaged part and analyses of powders sampled from air vents, it was found that corrosion was initiated at the top of the front-end pipe. It then spread to the bottom. Energy dispersive X-ray spectroscopy results showed that potassium and chlorine were measured from the corroded product in the damaged air vent derived from rainwater and insulation, respectively. The temperature of the damaged air vent was maintained at 75 ~ 120 ℃ by heating water. Rainwater-soaked insulation around the front-end pipe had been hydrolyzed. Therefore, the damaged air vent was exposed to an environment in which corrosion under insulation could be facilitated. In addition, ion chromatography and inductively coupled plasma measurements indicated that the matrix of the damaged front-end pipe contained a higher manganese content which might have promoted corrosion under insulation.

• 천문학회보
• /
• 제37권2호
• /
• pp.118.1-118.1
• /
• 2012

In situ observations from the Wind spacecraft that statistically analyzed the solar wind proton at 1 AU has indicated that the measured proton temperature anisotropies seems to be regulated by the oblique instabilities (the mirror and oblique firehose). This result is in contradiction with the prediction of linear kinetic theory that the ion-cyclotron (for ${\beta}_{\parallel}$ < 2) and parallel firehose (for ${\beta}_{\parallel}$ <10) would dominate over the oblique instabilities. Various kinds of physical mechanisms have been suggested to explain this disagreement between the observations and linear theory. All of the suggestions consider the solar wind as a unoform magnetized plasma. However the real space environment is replete with the intermediate spatio-temporal scale variations associated with various physical quantities, such as the magnetic field intensity and the solar wind density. In this paper we present that the pervasive intermediate-scale temporal variation of the local magnetic field intensity can lead to the modification of the proton temperature anisotropy versus beta inverse correlation for temperature-anisotropy-driven instabilities. By means of quasilinear kinetic theory involving such temporal variation, we construct the simulated solar wind proton data distribution associated the magnetic fluctuations in (${\beta}_{\parallel}$, $T_{\perp}/T_{\parallel}$) space. It is shown that the theoretically simulated proton distribution and a general trend of the enhanced fluctuations bounded by the oblique instabilities are consistent with in situ observations. Furthermore, the measure magnetic compressibility can be accounted for by the magnetic spectral signatures of the unstable modes.

• 천문학회보
• /
• 제37권2호
• /
• pp.101.2-101.2
• /
• 2012

Shocks are ubiquitous in astrophysical plasmas: bow shocks are formed by the interaction of solar wind with planetary magnetic fields, and supernova explosions and jets produce shocks in interstellar and intergalactic spaces. The global morphologies of these shocks are usually described by a set of magnetohydrodynamic (MHD) equations which tacitly assumes local thermal equilibrium, and the resulting Rankine-Hugoniot shock jump conditions are applied to obtain the relationship between the upstream and downstream physical quantities. While thermal equilibrium can be achieved easily in collisional fluids, it is generally believed that collisions are infrequent in astrophysical settings. In fact, shock widths are much smaller than collisional mean free paths and a variety of kinetic phenomena are seen at the shock fronts according to in situ observations of planetary shocks. Hence, both the MHD and kinetic equations have been adopted in theoretical and numerical studies to describe different aspects of the physical phenomena associated with astrophysical shocks. In this paper, we present the results of 3D relativistic particle-in-cell (PIC) simulations for ion-electron plasmas, with focus on the shock structures: when a jet propagates into an unmagnetized ambient plasma, a shock forms in the nonlinear stage of the Weibel instability. As the shock shows the structures that resemble those predicted in MHD systems, we compare the results with those predicted in the MHD shocks. We also discuss the thermalization processes of the upstream flows based on the time evolutions of the phase space and the velocity distribution, as well as the wave spectra analyses.