• Title/Summary/Keyword: plasma ion

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A study on the oxide etching using multi-dipole type magnetically enhanced inductively coupled plasmas (자장강화된 유도결합형 플라즈마를 이용한 산화막 식각에 대한 연구)

  • 안경준;김현수;우형철;유지범;염근영
    • Journal of the Korean Vacuum Society
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    • v.7 no.4
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    • pp.403-409
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    • 1998
  • In this study, the effects of multi-dipole type of magnets on the characteristics of the inductively coupled plasmas and $SiO_2$ etch properties were investigated. As the magnets, 4 pairs of permanent magnets were used and, to etch $SiO_2, C_2F_6, CHF_3, C_4F_8, H_2$, and their combinations were used. The characteristics of the magnetized inductively coupled plasmas were investigated using a Langmuir probe and an optical emission spectrometer, and $SiO_2$ etch rates and the etch selectivity over photoresist were measured using a stylus profilometer. The use of multi-dipole magnets increased the uniformity of the ion density over the substrate location even though no significant increase of ion density was observed with the magnets. The use of the magnets also increased the electron temperature and radical densities while reducing the plasma potential. When $SiO_2$ was etched using the fluorocarbon gases, the significant increase of $SiO_2$ etch rates and also the increase of etch uniformity over the substrate were obtained using the magnets. In case of gas combinations with hydrogen, $C_4F_8/H_2$ showed the highest etch rates and etch selectivities over photoresist among the gas combinations with hydrogen used in the experiment. By optimizing process parameters at 1000 Watts of inductive power with the magnets, the highest $SiO_2$ etch rate of 8000 $\AA$/min could be obtained for 50% $C_4F_8/50% H_2$.

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Evaluation of Titanium-nitride Coated Crown: Surface Hardness, Corrosion Resistance and Color Sustainability (타이타늄-질소 코팅된 금속관에 대한 평가: 표면 경도, 부식 저항성, 색조 안정성)

  • Kim, Hyojin;Lim, Sumin;Kim, JinYoung
    • Journal of the korean academy of Pediatric Dentistry
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    • v.48 no.3
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    • pp.344-351
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    • 2021
  • The purpose of this study was to compare surface hardness between titanium-nitride coated crowns (TiNCs) and stainless steel crowns (SSCs), and to evaluate the corrosion resistance and color sustainability of TiNCs. Ten TiNCs and 10 SSCs were used for the hardness test. Measurement was performed 30 times for each type of crowns, and the mean values were compared. Metallic raw material plates (before being processed into crowns) of TiNCs and SSCs were prepared for the corrosion resistance test. The total amounts of metal ion releases in the test solution were detected by inductively coupled plasma-optical emission spectrometry. Five TiNCs were subjected to the color sustainability test by applying repetitive brushing forces. The mean hardness values of TiNC group and SSC group were 395.53 ± 105.90 Hv and 278.70 ± 31.45 Hv respectively. Hardness of TiNCs were significantly higher than that of SSCs. The total amounts of metal ion releases from the materials of TiNCs and SSCs satisfied the criterion in International Organization for Standardization 22674. The results mean that TiNCs and SSCs were not harmful in an acidic environment. The golden coating was stable against the repetitive physical stimulations for a given period time.

Comparative Analysis of the Physical and Biochemical Properties of Light-cure Resin-modified Pulp Capping Materials

  • Tae Gyeom Kim;Jongsoo Kim;Joonhaeng Lee;Jisun Shin;Mi Ran Han;Jongbin Kim;Yujin Kim;Jae Hee Park
    • Journal of the korean academy of Pediatric Dentistry
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    • v.51 no.2
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    • pp.149-164
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    • 2024
  • This study compared the solubility, water absorption, dimensional stability, release of various ions (hydroxyl, calcium, sulfur, strontium, and silicon), and cytotoxicity of light-cured resin-modified pulp-capping materials. Resin-modified calcium hydroxide (Ultra-blendTM plus, UBP), light-cured resin-modified calcium silicate (TheraCal LCTM, TLC), and dual-cure resin-modified calcium silicate (TheraCal PTTM, TPT) were used. Each material was polymerized; solubility, 24-hour water absorption, and 30- day dimensional stability experiments were conducted to test its physical properties. Solubility was assessed according to the ISO 6876 standard, and 24 hours of water absorption, 30 days of dimensional stability were assessed by referring to the previous protocol respectively. Eluates at 3 and 24 hours and on 7, 14, and 28 days were analyzed according to the ISO 10993-12 standard. And the pH, Ion-releasing ability, cell proliferation rate, and cell viability were assessed using the eluates to evaluate biochemical characteristics. pH was measured with a pH meter and Ion-releasing ability was assessed using inductively coupled plasma atomic emission spectrometry (ICP-AES). Cell proliferation rate and cell viability were assessed using human dental pulp cells (hDPCs). The former was assessed by an absorbance assay using the CCK-8 solution, and the latter was assessed by Live and Dead staining. TPT exhibited lower solubility and water absorption than TLC. UBP and TPT demonstrated higher stability than TLC. The release of sulfur, strontium, calcium, and hydroxyl ions was higher for TLC and TPT than for UBP. The 28-day release of hydroxyl and silicon ions was similar for TLC and TPT. TLC alone exhibited a lower cell proliferation rate compared to the control group at a dilution ratio of 1 : 2 in cell proliferation and dead cells from Live and Dead assay evaluation. Thus, when using light-cure resin-modified pulp-capping materials, calcium silicate-based materials can be considered alternatives to calcium hydroxide-based materials. Moreover, when comparing physical and biochemical properties, TPT could be prioritized over TLC as the first choice.

Influences of Divalent Cations and Membrane Phosphorylation Inhibitors on $Na^+-Ca^{++}$ Exchange in Synaptosomes (이가 양이온과 세포막 인산화 반응의 억제제가 Synaptosome에서의 소듐-칼슘 교환이동에 미치는 영향)

  • Shin, Yong-Kyoo;Lee, Chung-Soo;Lee, Kwang-Soo
    • The Korean Journal of Pharmacology
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    • v.24 no.2
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    • pp.179-187
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    • 1988
  • Verapamil, tetrodotoxin and tetraethylammonium chloride in the stated amount did not affect the $Na^{++}$ induced $Ca^{++}$ release. $Cd^{++}$ and $Zn^{++}$ significantly inhibited the $Na^{++}$ induced $Ca^{++}$ release. $Mn^{++}$ also inhibited $Na^+-Ca^{++}$ exchange. $Cd^{++}$ inhibited $Na^+-Ca^{++}$ exchange noncompetitively with an apparent inhibition constant (Ki) of $100\;{\mu}M$. $Cd^{++}$ caused loss of sulfhydryl group, whereas $Zn^{++}$ did not show any significant effect. $Cd^{++}$ and $Zn^{++}$ effectively inhibited $Na^+-Ca^{++}$ ATPase and slightly inhibited $Ca^{++}-Mg^{++}$ ATPase. Carbonyl cyanide chlorophenylhydrazone, 2,4-dinitrophenol and sodium arsenate stimulated the $Na^{++}$ induced $Ca^{++}$ release. Dibucaine and oligomycin slightly inhibited it. The results suggest that the $Na^+-Ca^{++}$ exchange on the synaptosomal plasma membrane may be not accomplished by ion channels. The $Na^+-Ca^{++}$ exchange is sensitively inhibited by $Cd^{++}$ and this transport process appears to be partially regulated by sulfhydryl groups of the synaptosomal plasma membrane. It is also postulated that $Na^+-Ca^{++}$ exchange is suppressed during the phosphorylation reaction of protein component on the neuronal membrane.

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Inhibition Effect against the Rat Blood Plasma Oxidation of the $Makgeolli$ ($Takju$) Korean Rice Wine (막걸리(탁주)의 쥐 혈장 과산화물 생성 억제효과)

  • Wang, Seung-Jin;Lee, Hyoung-Jae;Cho, Jeong-Yong;Jang, Mi-Young;Park, Keun-Hyung;Moon, Jae-Hak
    • Food Science and Preservation
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    • v.19 no.1
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    • pp.116-122
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    • 2012
  • The antioxidant activities of $makgeolli$ and other alcoholic beverages were compared. Based on the same volume (70 ${\mu}L$ eq.) of the alcoholic beverages, the 2,2'-azinobis (3-ethylbenzothiazoline-6-sulfonic acid ammonium salt) (ABTS+) radical-scavenging activities were as follows: whisky > $makgeolli$ crude extract (MCE) > rice wine (RW) > clarified $makgeolli$ (CM) > soju. Based on the same alcohol concentration (6%) of the alcoholic beverages, however, $makgeolli$ showed the highest activity. In addition, based on the same volume (70 ${\mu}L$ eq.), the inhibition effects against the formation of cholesteryl ester hydroperoxide (CE-OOH) were as follows: soju > whisky > RW > MCE > CM. Based on the same alcohol concentration (6%), however, the inhibition effects against the formation of CE-OOH were as follows: RW > MCE > soju > whisky > CM. Therefore, it was suggested that $makgeolli$ may contain radical-scavenging- and metal-ion-chelate-type antioxidants and may increase the antioxidant activity in the blood.

Formation of Passivation Layer and Its Effect on the Defect Generation during Trench Etching (트렌티 식각시 식각 방지막의 형성과 이들이 결함 생성에 미치는 영향)

  • Lee, Ju-Wook;Kim, Sang-Gi;Kim, Jong-Dae;Koo, Jin-Gon;Lee, Jeong-Yong;Nam, Kee-Soo
    • Korean Journal of Materials Research
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    • v.8 no.7
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    • pp.634-640
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    • 1998
  • A well- shaped trench was investigated in view of the defect distribution along trench sidewall and bottom using high resolution transmission electron microscopy. The trench was formed by HBr plasma and additive gases in magnetically enhanced reactive ion etching system. Adding $0_2$ and other additive gases into HBr plasma makes it possible to eliminate sidewall undercut and lower surface roughness by forming the passivation layer of lateral etching, resulted in the well filled trench with oxide and polysilicon by subsequent deposition. The passivation layer of lateral etching was mainly composed of $SiO_xF_y$ $SiO_xBr_y$ confirmed by chemical analysis. It also affects the generation and distribution of lattice defects. Most of etch induced defects were found in the edge region of the trench bottom within the depth of 10$\AA$. They are generally decreased with the thickness of residue layer and almost disappeared below the uni¬formly thick residue layer. While the formation of crystalline defects in silicon substrate mainly depends on the incident angle and energy of etch species, the region of surface defects on the thickness of residue layer formed during trench etching.

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A study on Etch Characteristics of {Y-2}{O_3}$ Thin Films in Inductively Coupled Plasma (유도 결합 플라즈마를 이용한 {Y-2}{O_3}$ 박막의 식각 특성 연구)

  • Kim, Yeong-Chan;Kim, Chang-Il
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.38 no.9
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    • pp.611-615
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    • 2001
  • Y$_2$O$_3$ thin films have been proposed as a buffering insulator of metal/ferroelectric/insulator/semiconductor field effect transistor(MFISFET)-type ferroelectric random access memory (FRAM). In this study, $Y_2$O$_3$ thin films were etched with inductively coupled plasma(ICP). The etch rates of $Y_2$O$_3$ and YMnO$_3$, and the selectivity of $Y_2$O$_3$ to YMnO$_3$ were investigated by varying Cl$_2$/(Cl$_2$+Ar) gas mixing ratio. The maximum etch rate of $Y_2$O$_3$, and the selectivity of $Y_2$O$_3$ to YMnO$_3$ were 302$\AA$/min, and 2.4 at Cl$_2$/(Cl$_2$+Ar) gas mixing ratio of 0.2 respectively. Optical emission spectroscopy(OES) was used to understand the effects of gas combination on the etch rate of $Y_2$O$_3$ thin film. The surface reaction of the etched $Y_2$O$_3$ thin films was investigated by x-ray photoelectron spectroscopy (XPS). XPS analysis confirmed that there was chemical reaction between Y and Cl. This result was confirmed by secondary ion mass spectroscopy(SIMS) analysis.

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R.F. plasma assisted CVD로 합성한 BN, BCN 박막의 물성과 구조 연구

  • 김홍석;백영준;최인훈
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.114-114
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    • 1999
  • Boron nitride (BN)는 매우 뛰어난 물리적, 화학적 성질을 가지고 있는 재료로 많은 연구가 진행되고 있다. hexagonal 형태의 hBN의 경우 큰 전기 저항과 열 전도도를 가지고 있고 열적 안정성을 가지고 있어 반도체 소자에서 절연층으로 쓰일 수 있다. 또한 X-ray와 가시광선을 투과시키기 때문에 X-ray와 가시광선을 투과시키기 때문에 X-ray lithography이 mask 기판으로 사용될 수 있다. Boron-carbon-nitrogen (BCN) 역시 뛰어난 기계적 성질과 투명성을 가지고 있어 보호 코팅이나 X-ray lithography에 이용될 수 있다. 또한 원자 조성이나 구성을 변화시켜 band gap을 조절할 수 있는 가능성을 가지고 있기 때문에 전기, 광소자의 재료로 이용될 수 있다. 본 연구에서는 여러 합성 조건 변화에 따른 hBN 막의 합성 거동을 관찰하고, 카본 농도변화에 따른 BCN 막의 기계적 성질과 구조의 변화, 그리고 실리콘 첨가에 의한 물성 변화를 관찰하였다. BN박막은 실리콘 (100) 기판 위에 r.f. plasma assisted CVD를 이용하여 합성하였다. 합성 압력 0.015 torr, 원료 가스로 BCl3 1.5 sccm, NH3 6sccm을 Ar 15 sccm을 사용하여 기판 bias (-300~-700V)와 합성온도 (상온~50$0^{\circ}C$)를 변화시켜 BN막을 합성하였다. BCN 박막은 상온에서 기판 bias를 -700V로 고정시킨 후 CH4 공급량과 Ar 가스의 첨가 유무를 변화시켜 합성하였다. 또한 SiH4 가스를 이용하여 실리콘을 함유하는 Si-BCN 막을 합성하였다. 합성된 BN 막의 경우, 기판 bias와 합성 온도가 증가할수록 증착속도는 감소하는 경향을 보여 주었다. 기판 bias와 합성온도에 따른 구조 변화를 SEM과 Xray로 분석하였다. 상온에서 합성한 경우는 표면형상이 비정질 형태를 나타내었고, X-ray peak이 거의 관찰되지 않았다. 합성온도가 증가하게 되면 hBN (100) peak이 나타나게 되고 이것은 합성된 막이 turbostratic BN (tBN) 형태를 가지고 있다는 것을 나타낸다. 50$0^{\circ}C$의 합성 온도에서 기판 bias가 -300V에서 hBN (002) peak이 관찰되었고, -500, -700 V에서는 hBN (100) peak만이 관찰되었다. 따라서 고온에서의 큰 ion bombardment는 합성되는 막의 결정성을 저해하는 요소로 작용한다는 것을 확인 할 수 있었다. 합성된 BN 막은 ball on disk type의 tribometer를 이용하여 마모 거동을 관찰한 결과 대부분 1이상의 매우 큰 friction coefficient를 나타내었고, nano-indenter로 측정한 BN막의 hardness는 매우 soft한 막에서부터 10 GPa 정도 까지의 값을 나타내었고, nano-indenter로 측정한 BN 막의 hardness는 매우 soft한 막에서부터 10GPa 정도 까지의 값을 가지며 변하였다. 합성된 BCN, Si-BCN 막은 FT-IR, Raman, S-ray, TEM 분석을 통하여 그 구조와 합성된 상에 관하여 분석하였다. FT-IR 분석을 통해 B-N 결합과 C-N 결합을 확인할 수 있었고, Raman 분석을 통하여 DLC의 특성을 분석하였다. 마모 거동에서는 BCN 막의 경우 0.6~0.8 정도의 friction coefficient를 나타내었고 Si-BCN 막은 0.3이하의 낮은 friction coefficient를 나타내었다. Hardness는 carbon의 함유량과 Ar 가스의 첨가 유무에 따라 각각을 측정하였고 이것은 BN 막 보다 향상된 값을 나타내었다.

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LOW ATMOSPHERE RECONNECTIONS ASSOCIATED WITH AN ERUPTIVE SOLAR FLARE

  • MOON Y.-J.;CHAE JONGCHUL;CHOE G. S.;WANG HAIMIN;PARK Y. D.;CHENG C. Z.
    • Journal of The Korean Astronomical Society
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    • v.37 no.1
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    • pp.41-53
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    • 2004
  • It has been a big mystery what drives filament eruptions and flares. We have studied in detail an X1.8 flare and its associated filament eruption that occurred in NOAA Active Region 9236 on November 24,2000. For this work we have analyzed high temporal (about 1 minute) and spatial (about 1 arcsec) resolution images taken by Michelson Doppler Imager (MDI) onboard the Solar and Heliospheric Observatory, Hoc centerline and blue wing ($-0.6{\AA}$) images from Big Bear Solar Observatory, and 1600 ${\AA}$ UV images by the Transition Region and Corona Explorer (TRACE). We have found that there were several transient brightenings seen in H$\alpha$ and, more noticeably in TRACE 1600 ${\AA}$ images around the preflare phase. A closer look at the UV brightenings in 1600 ${\AA}$ images reveals that they took place near one end of the erupting filament, and are a kind of jets supplying mass into the transient loops seen in 1600 ${\AA}$. These brightenings were also associated with canceling magnetic features (CMFs) as seen in the MDI magnetograms. The flux variations of these CMFs suggest that the flux cancellation may have been driven by the emergence of the new flux. For this event, we have estimated the ejection speeds of the filament ranging from 10 to 160 km $s^{-1}$ for the first twenty minutes. It is noted that the initiation of the filament eruption (as defined by the rise speed less than 20 km $s^{-1}$) coincided with the preflare activity characterized by UV brightenings and CMFs. The speed of the associated LASCO CME can be well extrapolated from the observed filament speed and its direction is consistent with those of the disturbed UV loops associated with the preflare activity. Supposing the H$\alpha$/UV transient brightenings and the canceling magnetic features are due to magnetic reconnect ion in the low atmosphere, our results may be strong observational evidence supporting that the initiation of the filament eruption and the preflare phase of the associated flare may be physically related to low-atmosphere magnetic reconnection.

Comparison of the content of bioactive substances and antioxidative activity between conventionally and organically cultivated brown rice (Oryza sativa L.) (관행 및 유기재배 현미의 생리활성 성분의 함량 및 항산화활성 비교)

  • Kim, Gee An;Cho, Jeong-Yong;Lee, You Seok;Lee, Hyoung Jae;Jeong, Hang Yeon;Lee, Yu Geon;Moon, Jae-Hak
    • Food Science and Preservation
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    • v.24 no.3
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    • pp.334-342
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    • 2017
  • The content of bioactive substances and antioxidative activity in conventionally grown brown rice (CGBR) and organically grown brown rice (OGBR) were compared. Minerals (mg/100 g) such as magnesium (OGBR, $168.59{\pm}2.62$; CGBR, $121.43{\pm}2.22$), copper (OGBR, $0.50{\pm}0.06$; CGBR, $0.41{\pm}0.05$), and manganese (OGBR, $4.70{\pm}0.04$; CGBR, $2.49{\pm}0.02$) were higher in OGBR than in CGBR (p<0.05). In addition, levels of (${\mu}g/100g$) vitamins B2 (OGBR, $27.22{\pm}2.56$; CGBR, $22.12{\pm}2.24$) and B6 (OGBR, $46.32{\pm}2.66$; CGBR, $39.91{\pm}3.32$) were higher in OGBR than in CGBR (p<0.05). The contents (mg/100 g) of ${\beta}$-sitosterol (OGBR, $27.40{\pm}2.79$; CGBR, $24.75{\pm}1.06$), total phenolic (OGBR, $6.72{\pm}0.02$; CGBR, $6.64{\pm}0.02$), and ferulic acid (OGBR, $1.75{\pm}0.45$; CGBR, $1.11{\pm}0.14$) as well as the antioxidative activity (OGBR, $53.09{\pm}1.90%$; CGBR, $48.29{\pm}3.38%$) evaluated using 1,1-diphenyl-2-picrylhydrazyl (DPPH) radical-scavenging assay were higher in OGBR than in CGBR, although no significant differences between samples were observed. In comparison to the control group, brown rice samples significantly inhibited cholesteryl ester hydroperoxide formation in rat plasma subjected to copper ion-induced lipid peroxidation. The inhibitory effect of OGBR was higher than that of CGBR. These results indicate that OGBR showed higher levels of bioactive substances and enhanced antioxidative activity than CGBR, although the differences were not statistically significant.