• Title/Summary/Keyword: plasma frequency

검색결과 855건 처리시간 0.028초

증착조건에 따른 극미세 다이아몬드상 카본 박막의 탄성률 변화거동 (A variation of elastic modulus of very thin diamond-like carbon films with deposition condition)

  • 정진원;이광렬;은광용;고대홍
    • 한국진공학회지
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    • 제10권4호
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    • pp.387-395
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    • 2001
  • 증착 조건에 따라 나타나는 폴리머상, 경질, 흑연상의 다이아몬드상 카본(DLC) 박막에서 두께 감소에 따른 탄성률의 변화거동을 구조적인 관점에서 살펴보았다. 실험에 사용된 박막은 r.f.-PACVD 장비를 이용하여 증착하였으며, 반응 가스로는 벤젠과 메탄을 사용하였다. 기판을 식각 과정을 통해 완전히 제거시켜 주기 때문에 다른 방법들과는 달리 기판의 영향 없이 박막만의 탄성률을 정확히 측정할 수 있는 free overhang 방법을 이용하여 DLC 박막의 biaxial elastic modulus를 측정하였다. 또한 Raman 분석을 이용하여 박막의 구조를 조사하였다. 박막이 폴리머상 혹은 흑연상인 경우 두께가 감소함에 따라 탄성률이 감소하는 것을 확인하였고, Ramanm spectrum의 G-peak 위치를 분석한 결과 그 원인은 폴리머상인 경우 증착 초기에 낮은 물성을 가지는 폴리머상의 박막이 형성되기 때문이며, 흑연상인 경우 증착 초기에 낮은 물성을 가지는 흑연상의 박막이 증착되기 때문이다. 반면에 경질의 박막에서는 두께에 상관없이 일정한 탄성률을 가지고 있었으며, 두께에 따른 박막의 구조적인 변화도 관찰되지 않았다.

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압전 MEMS 스위치 구현을 위한 DLC 구조층에 관한 연구 (DLC Structure Layer for Piezoelectric MEMS Switch)

  • 황현석;이경근;유영식;임윤식;송우창
    • 한국위성정보통신학회논문지
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    • 제6권1호
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    • pp.28-31
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    • 2011
  • 본 논문에서는 d33 모드로 구동하여 우수한 성능을 가지는 RF-MEMS 스위치의 구현을 위한 희생층과 구조층의 조합으로서 DLC와 포토레지스트를 제안하였다. 포토레지스트의 경화현상을 방지하기 위하여 DLC 구조층은 상온에서 RF-PECVD 방법을 이용하여 증착하였다. 그리고 PZT 압전층은 RF 마그네트론 스퍼터링 방법을 이용하여 상온에서 구조층 위에 증착하였으며, 희생층의 제거 후 결정화를 위하여 급속 열처리 (RTA) 장비를 이용하여 후 열처리하였다. PZT의 결정화 과정과 DLC의 기계적 성질의 변화를 다양한 온도조건에 따라 분석한 결과 DLC는 PZT의 결정화 온도까지 영률과 강도면에서 우수한 특성을 나타냄을 확인하였다. 또한 포토레지스트를 사용함으로서 공정을 단순화하고 낮은 비용으로 제작이 가능하였다.

TiO2/ZnS/Ag/ZnS/TiO2 다층막의 PDP 필터용 전극 특성 (Transparent Electrode Performance of TiO2/ZnS/Ag/ZnS/TiO2 Multi-Layer for PDP Filter)

  • 오원석;이서희;장건익;박성완
    • 한국전기전자재료학회논문지
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    • 제23권9호
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    • pp.681-684
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    • 2010
  • The $TiO_2$/ZnS/Ag/ZnS/$TiO_2$ multilayered structure for the transparent electrodes in plasma display panel was designed by essential macleod program (EMP) and the multilayered film was deposited on a glass substrate by direct-current (DC)/radio-frequency (RF) magnetron sputtering system. During film deposition process, the Ag layer in $TiO_2$/Ag/$TiO_2$ structure became oxidized and the filter characteristic was degraded easily. In this study, ZnS layer was adopted as a diffusion blocking layer between $TiO_2$ and Ag to prevent the oxidation of Ag layer efficiently in $TiO_2$/ZnS/Ag/ZnS/$TiO_2$ structure. Based on the AES depth profiling analysis, the Ag layer was effectively protected by the ZnS layer as compared with the $TiO_2$/Ag/$TiO_2$ multilayered films without ZnS as an antioxidant layer. The 3 times stacked $TiO_2$/ZnS/Ag/ZnS/$TiO_2$ films have low sheet resistance of $1.22{\Omega}/{\square}$ and luminous transmittance was as high as 62% in the visible ranges.

코로나 방전-EGR 조합시스템에 의한 디젤기관의 배기 가스 특성 (The Characteristics of Exhaust Gas in Diesel Engine by Corana Discharge-EGR System)

  • 박재윤;정장근;김종석;하현진
    • 조명전기설비학회논문지
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    • 제19권7호
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    • pp.39-44
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    • 2005
  • 고연료 중 대부분이 수소와 탄소의 결합물이다. 연료들은 엔진 내부에서 완전 연소되었을 경우는 수분인 증기와 $CO_2$가 발생된다. 그러나 대개 불완전 연소가 일어나 $NO_x$나 Smoke가 발생되어진다. 그리고 이 물질은 인해에 매우 해로운 물질들이다. 본 논문에서는 EGR과 상용주파수를 이용한 플라즈마 장치를 조합하여 배기가스 유해물질 제거 특성을 연구하였다. $NO_x$의 경우에는 전압과 EGR율이 증가할수록 유해물질 제거 특성이 우수하였고, Smoke의 경우에는 EGR 율이 증가하게 되면 Smoke의 발생율이 증가하였으나 전압이 증가하게 되면 발생율이 감소하였다.

초음파 조사에 의한 트리암시놀론 아세토니드 겔의 피부투과 (Transdermal Delivery of Triamcinolone acetonide Gel by Ultrasound)

  • 송경숙;김영일;양재헌
    • Journal of Pharmaceutical Investigation
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    • 제32권2호
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    • pp.87-93
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    • 2002
  • This study is to enhance drug penetration via skin and investigate anti-inflammation effect following adoption of ultrasound. For this goal gel containing triamcinolone was prepared and the skin penetration rate and the change effects of blood plasma ingredients and serum enzyme were investigated. Using Franz type diffusion cell and the skin of hairless mouse, the permeation enhancing effect of ultrasound was tested. After the injury by direct trauma, the blood test was performed by measuring WBC, lymphocyte, and neutrophyl, and by analyzing CPK and LDH. The ultrasound transducer whose technical specification is geometric area(GA) $1.4\;cm^2$, effective radiation area(ERA) $0.8\;cm^2$, and beam non-uniformity ratio(BNR) 6.0 max was used. The influence of frequency having an effect on skin permeation rate was higher in the case of using 1MHz and continuous treatment. The temperature of receptor phase was not influenced in skin permeation by phonophoresis. Skin permeation increase attended by intensity of ultrasound, the permeation of triamcinolone was accelerated at $2.5\;w/cm^2\;than\;1.0\;w/cm^2$. Following muscle injury phonophoretic group the number of WBC, neutrophil and lympholyte were decreased significantly as compared with both control group and ultrasound group. The result of variation of serum CPK and LDH activity conformed to the phonophoretic effect as same pattern with the variation of WBC, neutrophil and lymphocyte.

플라즈마 용사방식에 의해 형성된 페라이트-탄화규소 표면층의 마이크로파 흡수 특성(II) (Microwave Absorbing Characteristics of Ferrite-silicon carbide surface Films Produced)

  • 신동찬;손현
    • 한국통신학회논문지
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    • 제18권8호
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    • pp.1169-1175
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    • 1993
  • 레이다의 추적 및 탐색으로 부터 비행 물체를 보호하기 위한 목적으로, 알루미늄 합금표면에 페라이트-탄화규소 복합물인 마이크로파 흡수층을 플라즈마 용사방식으로 제작하였다. 본 논문에서는 페라이트-탄화규소층(I) 제조시 사용했던 탄화규소 입자의 평균크기인 34[rm]대신에15[rm]가 사용되었으며, 플라즈마 용사변수들 중에서 분말의 공급비율은 70[Kg/h]대신에 50[Kg/h] 그리고, 용사거리는 80[mm[ 대신에 100[mm]가 사용 되었다. X-band(8~12.4(GHz)레이다용 페라이트-탄화규소 전자파 흡수체를 실험적으로 설계하고 시험제작하여 전기적 특성을 평가한 결과, -lOdB의 반사량을 허용한도로 했을 때 약 2.8%의 대역폭이 얻어졌으며, 최대 흡수두께는 0.5(mm)로 매우 양호한 박층형 전자파 흡수체가 얻어졌다.

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SAC 305솔더와 ENIG 기판의 접합강도에 미치는 저주파 수소라디칼처리의 영향 (Improvement of Solder Joint Strength in SAC 305 Solder Ball to ENIG Substrate Using LF Hydrogen Radical Treatment)

  • 이아름;조승재;박재현;강정윤
    • Journal of Welding and Joining
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    • 제29권1호
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    • pp.99-106
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    • 2011
  • Joint strength between a solder ball and a pad on a substrate is one of the major factors which have effects on electronic device reliability. The effort to improve solder joint strength via surface cleaning, heat treatment and solder composition change have been in progress. This paper will discuss the method of solder ball joint strength improvement using LF hydrogen radical cleaning treatment and focus on the effects of surface treatment condition on the solder ball shear strength and interfacial reactions. In the joint without radical cleaning, voids were observed at the interface. However, the specimens cleaned by hydrogen-radical didn't have voids at the interface regardless of cleaning time. The shear strength between the solder ball and the pad was increased over 120%(about 800gf) when compared to that without the radical treatment (680gf) under the same reflow condition. Especially, at the specimen treated for 5minutes, ball shear strength was considerably increased over 150%(1150gf). Through the observation of fracture surface and cross-section microstructure, the increase of joint strength resulted from the change of fracture mode, that is, from the solder ball fracture to IMC/Ni(P) interfacial fracture. The other cases like radical treated specimen for 1, 3, 7, 9min. showed IMC/solder interfacial fracture rather than fracture in the solder ball.

PAGAN II: THE EVOLUTION OF AGN JETS ON SUB-PARSEC SCALES

  • OH, JUNGHWAN;TRIPPE, SASCHA;KANG, SINCHEOL;KIM, JAE-YOUNG;PARK, JONG-HO;LEE, TAESEOK;KIM, DAEWON;KINO, MOTOKI;LEE, SANG-SUNG;SOHN, BONG WON
    • 천문학회지
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    • 제48권5호
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    • pp.299-311
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    • 2015
  • We report first results from KVN and VERA Array (KaVA) VLBI observations obtained in the frame of our Plasma-physics of Active Galactic Nuclei (PAGaN) project. We observed eight selected AGN at 22 and 43 GHz in single polarization (LCP) between March 2014 and April 2015. Each source was observed for 6 to 8 hours per observing run to maximize the uv coverage. We obtained a total of 15 deep high-resolution images permitting the identification of individual circular Gaussian jet components and three spectral index maps of BL Lac, 3C 111 and 3C 345 from simultaneous dual-frequency observations. The spectral index maps show trends in agreement with general expectations – flat core and steep jets – while the actual value of the spectral index for jets shows indications for a dependence on AGN type. We analyzed the kinematics of jet components of BL Lac and 3C 111, detecting superluminal proper motions with maximum apparent speeds of about 5c. This constrains the lower limits of the intrinsic component velocities to ~ 0.98c and the upper limits of the angle between jet and line of sight to ~20°. In agreement with global jet expansion, jet components show systematically larger diameters d at larger core distances r, following the global relation d ≈ 0.2r, albeit within substantial scatter.

광검출기 응용을 위하여 스퍼터된 미세결정 SiGe 박막성장 연구 (The Study of Sputtered SiGe Thin Film Growth for Photo-detector Application)

  • 김도영;김선조;김형준;한상윤;송준호
    • 한국전기전자재료학회논문지
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    • 제25권6호
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    • pp.439-444
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    • 2012
  • For the application of photo-detector as active layer, we have studied how to deposit SiGe thin film using an independent Si target and Ge target, respectively. Both targets were synthesized by purity of 99.999%. Plasma generators were generated by radio frequency (rf, 13.56 MHz) and direct current (dc) power. When Ge and Si targets were sputtered by dc and rf power, respectively, we could observe the growth of highly crystalline Ge thin film at the temperature of $400^{\circ}C$ from the result of raman spectroscopy and X-ray diffraction method. However, SiGe thin film did not deposit above method. Inversely, we changed target position like that Ge and Si targets were sputtered by rf and dc power, respectively. Although Ge crystalline growth without Si target sputtering deteriorated considerably, the growth of SiGe thin film was observed with increase of Si dc power. SiGe thin film was evaluated as microcrystalline phase which included (111) and (220) plane by X-ray diffraction method.

The Role of Yoga Intervention in the Treatment of Allergic Rhinitis: A Narrative Review and Proposed Model

  • Chauhan, Ripudaman Singh;Rajesh, S.K
    • 셀메드
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    • 제10권3호
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    • pp.25.1-25.7
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    • 2020
  • Allergic Rhinitis (AR) is an IgE (immunoglobin-E) mediated inflammatory condition of upper respiratory tract; main clinical features involve runny nose, sneezing, nasal obstruction, itching and watery eyes. AR is a global problem and has large variations in incidences, currently affects up to 20% - 40% of the population worldwide. It may not be a life-threatening disease per se but indisposition from the condition can be severe and has the potential to adversely affect the daily functioning of life. Classical yoga literature indicates that, components of yoga have been used to treat numerous inflammatory conditions including upper respiratory tract. A few yoga intervention studies reported improvement in lung capacity, Nasal air flow and symptoms of allergic rhinitis. This review examined various anti-inflammatory pathways mediated through Yoga that include downregulation of pro-inflammatory cytokines and upregulation of anti-inflammatory cytokines. The hypothalaminic-pitutary-adrenal (HPA) axis and vagal efferent stimulation has been reported to mediate anti-inflammatory effect. A significant reduction is also reported in other inflammatory biomarkers like- TNF-alpha, nuclear factor kappa B (NF-κB), plasma CRP and Cortisol level. Neti, a yogic nasal cleansing technique, reported beneficial effect on AR by direct physical cleansing of thick mucus, allergens, and inflammatory mediator from nasal mucosa resulting in improved ciliary beat frequency. We do not find any study showing effect of yoga on neurogenic inflammation. In summary, Integrated Yoga Therapy may have beneficial effect in reducing symptoms and improving quality of life for patients with allergic rhinitis. Yoga may reduce inflammation through mediating neuro-endocrino-immunological network. Future studies are needed to explore the mechanism how yoga might modulate immune inflammation cascade and neurogenic inflammation at the cellular level in relevance to allergic rhinitis; the effects of kriyas (yogic cleansing techniques) also need to be evaluated in early and late phase of AR. So the proposed model could guide future research.