• Proceedings of the KIPE Conference
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• 2006.06a
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• pp.413-416
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• 2006

The power source of an AC-PDP fur sustainer circuit is operated in high-voltage and high frequency switching during the process required to achieve the gas discharge current to generate light in a PDP panel. Since PDP has the characteristics of a pure capacitive load, the displacement current that occurs during charge and discharge generates considerable reactive power. An auxiliary circuitry called Energy Recovery Circuit (ERC) reduces the capacitive displacement current. However, this auxiliary topology also bears high stress in its components. In this paper, a multilevel voltage wave shaping sustainer circuit with auxiliary ERC characteristics for an AC-PDP driver is proposed. A comparative analysis and experimental results are presented.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 1999.11a
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• pp.42-48
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• 1999

An experimental study was performed to discover the effect of environment on the tribological behavior of Si-incorporated diamond-like carbon(Si-DLC) film slid on a steel ball. The films were deposited on Si(100) wafers from radio-frequency glow discharge of mixtures of benzene and dilute silane gases. Experiments using a ball-on-disk test-rig was performed under vacuum, dry air and ambient air conditions. It was observed that coefficient of friction was decreased as the environmental condition changes from vacuum, to dry air. It was also observed that the coefficient of friction decreased with increasing silicon concentration in the film. Chemical analyses of debris suggested that the low and stable friction coefficient is closely related to the silicon rich oxide debris and the rolling action.

• KSTLE International Journal
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• v.9 no.1_2
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• pp.31-35
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• 2008

DLC (Diamond Like Carbon) films have predominant tribological properties like a high hardness, low friction and high chemical resistance; therefore, DLC films are applied in a wide range of industrial fields. This paper evaluated the characteristics of DLC films deposited on bearing steel with different hardness by RF-PECVD (Radio Frequency - Plasma Enhanced Chemical Vapor Deposition) method. Si-interlayer was deposited on bearing steel to improve adhesion strength by RF-Sputtering method. The DLC film structures were analyzed with Raman spectra and Gaussian function. Adhesion strength of DLC films was measured with a scratch tester. Friction and wear test were carried out with a ball-on -disc type to investigate the tribological characteristics. Experimental results showed that DLC films deposited on bearing steel under same deposition condition have typical structure DLC films regardless of hardness of bearing steel. Adhesion strength of DLC film is increased with a hardness of bearing steel. Friction coefficient of DLC film showed lower at the high hardness of bearing steel.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.452-452
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• 2012

저온 플라즈마를 발생시키는 대기압 마이크로-플라즈마 젯(Micro-plasma jet)을 이용하여 플라즈마와 세포와의 상호작용에 대한 연구를 진행하였다. 실험에 사용된 세포는 인체의 방광암 세포(Human bladder carcinoma cell, EJ)이며, 플라즈마 처리 후 bioassay를 통하여 세포 예정사 효과를 확인하였다. 수십 kHz (low frequency)의 펄스파 전압을 인가하여 발생시킨 플라즈마는 형성 기체로 헬륨을 사용하였고, 광 방출 분광법으로 산소의 첨가량에 따른 활성 종들의 변화를 비교해 보았다. 플라즈마 처리 후에는 DAPI staining을 통하여 세포 예정사에서 형성되는 apoptotic body를 확인하였고, 세포막 외부로 이동하는 Phosphatidic Serin (PS)과 결합하는 Annexin-V assay를 통하여 apoptosis rate를 측정하였다. 이를 바탕으로 암세포에 미치는 플라즈마 활성종의 영향을 분석하였다.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2015.11a
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• pp.244-245
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• 2015

PEALD TiN 금속 전극을 갖는 MOS device에서 SC1 ($NH_4/H_2O_2/H_2O=1:2:5$), SPM ($H_2SO_4/H_2O_2=10:1$), $H_2O_2$ etch chemical을 이용해 TiN 식각 후 oxide 표면 잔류 Ti에 의한 전기적 특성 분석을 진행 하였다. Etch chemical 중 SPM을 이용한 소자의 전기적 특성이 우수하였는데, 이는 잔류Ti atom의 양이 다른 etch chemical을 사용한 것 대비 낮았기 때문이다. 이로 인하여 낮은 leakage current, less frequency dependence의 특성이 관찰되었다. 또한, 후속 열처리를 통해 더욱 우수한 특성이 관찰 되었다. 이러한 공정기술은 single 전극을 갖는 CMOS 형성 시 사용 될 수 있을 것으로 기대된다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.11a
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• pp.492-494
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• 2002

The fundamental principles of the operation of microwave discharges that are used to convert microwave energy to broad spectrum visual light are known. In this paper, emission dependance of microwave discharges in mixture content of sulfur with noble gases was studied. It is shown that the excitation of this gaseous mixture is carried out in two phases: (1) ionization of noble gas atoms by a microwave field and (2) the consequent maintenance of slightly ionized nonequilibrium plasma by the field. These two processes have essentially various thresholds for the microwave pump. The purpose of this work is to investigate spectral properties of the high frequency discharges in a mixture sulfur vapors with noble gases.

• Proceedings of the KIEE Conference
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• 2006.07c
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• pp.1357-1358
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• 2006

Indium tin oxide (ITO) thin film is a transparent electrode, which is widely applied to solar battery, illuminators, optical switches, liquid crystal displays (LCDs), plasma display panels (PDPs), and organic light emitting displays (OLEDs) due to its easy formation on glass substrates, goof optical transmittance, and good conductivity. ITO thin film is generally fabricated by various methods such as spray, CVD, evaporation, electron gun deposition, direct current electroplating, high frequency sputtering, and reactive DC sputtering. However, some problems such as peaks, bumps, large particles, and pin-holes on the surface of ITO thin film were reported, which caused the destruction of color quality, the reduction of device life time, and short-circuit. Chemical mechanical polishing (CMP) processis one of the suitable solutions which could solve the problems.

• Proceedings of the KIEE Conference
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• 2007.11a
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• pp.188-189
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• 2007

Axial magnetic field was applied into the hollow anode of plasma torch for the purpose of extension of electrode lifetime. The average arc voltage increased because the arc column became longer, the arc voltage ripple frequency became low. The steady state of arc voltage was removed by applied magnetic filed. The lifetime of electrode was over 1000 hours which is 100 times longer than operation without magnetic field.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.438-439
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• 2007

In this study, we prepared ITO thin film on the polycarbonate(PC) substrate by using Facing Targets sputtering (FTS) system. After the external bending force was applied to as-deposited ITO thin films with fixed face-plate distance (L), we investigated how properties of those change. As a result, the crack density of films was increasing as bending frequency increased. In accordance with crack distribution, we observed that the resistivity value of ITO thin film increased.

• Proceedings of the KIEE Conference
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• 2002.11a
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• pp.109-111
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• 2002

The fundamental principles of the operation of microwave discharges that are used to convert microwave energy to broad spectrum visual light are known. In this paper, emission dependance of microwave discharges in mixture content of sulfur with noble gases was studied. It is shown that the excitation of this gaseous mixture is carried out in two phases; (1) ionization of noble gas atoms by a microwave field and (2) the consequent maintenance of slightly ionized nonequilibrium plasma by the field. These two processes have essentially various thresholds for the microwave pump. The purpose of this work is to investigate spectral properties of the high frequency discharges in a mixture sulfur vapors with noble gases.