• 제목/요약/키워드: plasma flow

검색결과 1,180건 처리시간 0.031초

RF 마그네트론 스퍼터링에 의한 NiO 박막 증착시 산소 유량비가 박막의 결정 배향성에 미치는 영향 (Effects of Oxygen Flow Ratio on the Crystallographic Orientation of NiO Thin Films Deposited by RE Magnetron Sputtering)

  • 류현욱;최광표;노효섭;박용주;박진성
    • 한국세라믹학회지
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    • 제41권2호
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    • pp.106-110
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    • 2004
  • NiO 산화물 타겟을 이용한 RF 마그네트론 스퍼터로 상온에서 Si(100) 기판 위에 NiO 박막을 증착시켜, 스퍼터 가스의 산소 유량비가 NiO 박막의 결정 배향성과 표면 형상에 미치는 영향을 조사하였다. Ar 가스에서 증착된 NiO 박막은 높은결정화도와 (100)면의 우선 배향성을 나타내었으나, $O_2$ 가스에서 증착된 경우에는 (111)면의 우선 배향성을 보였으며 그 증착속도도 감소하였다. 스퍼터 가스의 $O_2$ 함량에 따른 NiO 박막의 결정성과 우선배향성 변화에 대한 요인을 고찰하였으며, 박막의 표면 형상과 거칠기의 변화를 조사하였다.

$K^+$ Channel 개방제인 SKP-450의 신장작용 (Renal Action of SKP-450, $K^+$Channel Opener, in Dog)

  • 고석태;김미형
    • Biomolecules & Therapeutics
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    • 제8권1호
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    • pp.44-52
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    • 2000
  • SKP-450 which is $K^{+}$ channel opener, When given into duodenum, exhibited the decline of urine flow accompanied with the decrease of glomerular filtration rates (GFR), renal plasma flow (RPF), N $a^{+}$ and $K^{+}$ excreated in the urine ( $E_{Na}$ , $E_{K}$) and the increase of $K^{+}$N $a^{+}$ratios, and then appeared the significant fall of mean arterial pressure (MAP) and unchanged of reabsorption rates of N $a^{+}$, $K^{+}$ in renal tubules ( $R_{Na}$ , $R_{K}$). SKP- 450 injected into the vein elicited the decline of urine flow along with the reduction of $E_{Na}$ , $E_{K}$, and the increase of $R_{Na}$ , $R_{K}$ and $K^{+}$M $a^{+}$ ratios. SKP-450 administered into a renal artery produced diuretic action along with the increase of $E_{Na}$ , $E_{K}$ and the decrease of $R_{Na}$ , $R_{K}$ in experimental kidney, whereas produced the same aspect to intravenous SKP-450 in the control kidney. Above results suggest that SKP-450 possess both diuretic action in the kidney and central antidiuretic action in dog.tic action in dog.tion in dog.

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필터용 AIN 압전 박막의 제작 (Preparation of AIN piezoelectric thin film for filters)

  • 금민종;김영철;서화일;김경환
    • 반도체디스플레이기술학회지
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    • 제5권1호
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    • pp.13-16
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    • 2006
  • AIN thin films were prepared on amorphous glass and $SiO_2(1{\mu}m)/Si(100)$ substrate by the facing targets sputtering (FTS) apparatus, which can provide high density plasma, a high deposition rate at a low working gas pressure. The AIN thin films were deposited at a different nitrogen gas flow rate ($1.0{\sim}0.3$) and other sputtering parameters were fixed such as sputtering power of 200w, working pressures of 1mTorr and AIN thin film thickness of 800 nm, respectively. The thickness and crystallographic characteristics of AIN thin films as a function of $N_2$ gas flow rate $[N_2/(N_2+Ar)]$ were measured by $\alpha$-step and an X-ray diffraction (XRD) instrument. And the c-axis preferred orientations were evaluated by rocking curve. In the results, we could prepared the AIN thin film with c-axis preferred orientation of about $5^{\circ}$ on substrate temperature R.T. at nitrogen gas flow rate 0.7.

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Debrisoquine이 가토신장기능(家兎腎臟機能)에 미치는 영향(影響) (Effect of Debrisoquine on Renal Function in Rabbits)

  • 고석태;박정희
    • Journal of Pharmaceutical Investigation
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    • 제14권2호
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    • pp.92-103
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    • 1984
  • The action of debrisoquine on renal function in rabbits was studied. 1. When debrisoquine was given into ear vein, it did not affect on renal functin with smaller doses of 0.1 or 0.3mg/kg, while with higher dose of 1.0mg/kg it elicited the significant decrease of urine flow, renal plasma flow and glomerular filtration rate, and the increase of filtration fraction, and at the same time sodium excreted in urine, FENa (fractional excretion of sodium) and osmolar clearance were significantly decreased, and then it exhibited the increase of $K^+/Na^+$ ratio and no changes of $T^cH_2O$. 2. Debrisoquine (1.0mg/kg), when injected repeatedly into a vein, produced a more marked decrease of urine flow. 3. Debrisoquine induced-antidiuretic action was not affected by pretreatment with phentolamine (2mg/kg, i.v.), alpha-sympathetic blocking agent. 4. Debrisoquine given intracerebroventricularly did not produce a significant change on renal function in dose of 0.1mg/kg. These results suggest that debrisoquine produce the antidiuretic effect in rabbit, and the mechanism of its action is due to dual actions that are the decrease of hemodynamic effect and the facilitation of reabsorption of sodium in renal tubules.

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주사바늘 전극형 오존발생기 특성 연구 (Observation and Characteristics of Ozonizer using Injection Needle Electrode)

  • 박현미;권영학;박원주
    • 조명전기설비학회논문지
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    • 제29권12호
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    • pp.77-82
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    • 2015
  • Ozone is a powerful disinfectant and oxidizing agent, and it is used in a wide range of applications, such as waste water treatment, food processing, etc.. There is also a great potential of using ozone in new emerging medical applications, such as ozone dentistry and ozone oxygen therapy. For these purposes, simple, small, compact and efficient sources of ozone are needed. In this study, in order to increase the current-voltage range of the discharge and to avoid the overheating of the gas in the ozonizer we suggested ozonizer of injection needle and plate electrode type(INP Type) with the gas through the needle. A ozonizer of INP type have been investigated by focusing on ozone concentration and yield according to flow rates and Gap of two electrodes. The results of studies of ozone production for DC corona discharge in oxygen at atmospheric pressure about the ozonizer of INP type. The ozone concentration and the generation yield increased as the gap of two electrodes and gas flow were decreased. Also, when the gap of two electrodes and gas flow with no change, the ozone concentration and generation yield each have variation of direct proportion and inverse proportion with discharge voltage.

Pb Splashing 합금으로부터 Zn정련에 관한 연구 (A Study on the Purification of Zn from Pb Splashing Alloy)

  • 박재욱;김용하;이대열;신형기;김진한;박성수;정원섭
    • 자원리싸이클링
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    • 제6권4호
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    • pp.3-10
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    • 1997
  • Electric are furnace dust (EAF dust) generated in steel production based on scrap melting is contained Zn and Fe about 25 and 30 percent by weight, respectively. From a metallurgical point of view, the dust could be regarded as a raw material for Zn and Fe source. To recover the Zn in the metal from EAF dust, many system are proposed such as Arc Plasma Furmace and Pb splasher method. In this study, to recover high purity Zn from Pb splasing alloy, Zn distillation is carried out at the temperature of 1123, 1173, 1223, 1273 K, the gas flow rate of 2.5, 5.0, 8.0 Ni/min and the distilling time of 10, 30, 60, 90 minutes. The main results obtained from this study are as follows:(1) The amount of evaporated Zn and its evaporating rate increased with increasing temperature, but purity of Zn decreased with increasing temperature. Optimum temperature range was found out to be between 1173∼1223K. (2) The amount of evaporated Zn and evaporation rate increased with increasing gas flow rate at a given temperature and distillation time. Gas flow rate has more influence over the amount of evaporated Zn and evaporation rate with increasing temperature.

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레이저 가공에 있어서 키홀의 동적거동 (Dynamic Bechavior of the keyhole in Laser Processing)

  • 김종도
    • 해양환경안전학회지
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    • 제3권2호
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    • pp.23-31
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    • 1997
  • The results of high speed photography, acoustic emission detection and plasma UV radiation intensity measurement during CO2 laser welding of stainless steel 304 are presented. Video images with high spatial and temporal resolution allowed to observe the melt dynamics and keyhole evolution. The existence of a high speed melt flow which originated from the part of weld pool and flowed along the sides wall of keyhole was confirmed by the slag motion on the weld pool. the characteristic frequencies of flow instability and keyhole fluctuations at different welding speed were measured and compared with the results of Fourier analyses of temporal acoustic emission (AE) and light emission (LE) spectra. The experimental results were compared with the newly developed numerical model of keyhole dynamics. (The model is based on the assumption that the propagation of front part of keyhole into material is due to the melt ejection driven by laser induced surface evaporation.) The calculations predict that a high speed melt flow is induced at the front part of keyhole when the sample travel speed exceeds several 10mm/s. The numerical analysis also shows the hump formation on the front keyhole wall surface. Experimentally observed melt behavior and transformation of the AE and LE spectra with variation of welding speed are qualitatively in good agreement with the model predictions.

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LIF 공초점 현미경을 이용한 Y-채널 마이크로믹서의 혼합 효율 평가 (Mixing Efficiency Evaluation in Y-channel Micromixer Using LIF Confocal Microscope)

  • 김경목;신용수;안유민;이도형
    • 대한기계학회논문집B
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    • 제31권2호
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    • pp.159-166
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    • 2007
  • Mixing between two or more reagents is one of important processes in biochemical microfluidics. In efficient micromixer design, it is essential to analyze flow pattern and evaluate mixing efficiency with good precision. In this work, mixing efficiency for Y-channel micromixer is measured by fluorescence intensity using LIF(Laser Induced Fluorescence) Confocal Microscope. The Y-channel micromixers are fabricated with polydimethylsiloxane(PDMS) and those are bonded to glass plate through Plasma bonding. Nile Blue A is injected into the micromixer as a fluorescence dye for measuring of fluorescence intensity by He/Ne laser. For visualization of the flow pattern, dynamic image capturing is carried out using CAM scope. For the comparison with computer simulation, modified SIMPLE algorithm for incompressible flow equation is solved for the same geometry as in the experiment. Throughout the experiments and computer simulation, accurate mixing efficiency evaluation process for a PDMS Y-channel micromixer is established.

직접에탄올 연료전지의 운전조건에 관한 연구 (A Study on an Operating Conditions for the Direct Ethanol Fuel Cell)

  • 김영춘;구본국;장문국;지학배;한상보;박재윤
    • 전기학회논문지
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    • 제60권11호
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    • pp.2076-2082
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    • 2011
  • The goal of this paper is to find an operating conditions of the single direct ethanol fuel cell such as the cell temperature, and flow rates of ethanol and oxygen. To investigate the output characteristics, the electrical current increased from 0[A] with interval of 0.001[A] every 2[s], and the cell voltage was increased until the voltage became 0.05[V]. Related to the effect of the cell temperature, the output characteristics both voltage and power were increased upto 80[$^{\circ}C$] according to the increase of the current density, but those were decreased over that temperature. In addition, the optimal flow rate of ethanol in anode was identified as of 2[mL/min] due to the dependence of generation rate such as the hydrogen ion and electron. And the flow rate of oxygen in cathode was desirable to about 300[sccm/min], it might be affected by the chemical reaction rate of the water formation among hydrogen ion, electron, and oxygen. Consequently, the fundamental conditions were identified in this work, and it will be carried out to find the best conditions of membrane by the effect of the plasma surface treatment, and the effect of other catalysts except for a platinum.

${SF_6}/{Cl_2}$ 혼합비에 따른 실리콘 식각 특성 고찰 (A Study on the Silicon Etching Characteristics in ECR using ${SF_6}/{Cl_2}$ Gas Mixtures)

  • 이상균;강승열;권광호;이진호;조경익;이형종
    • 한국전기전자재료학회논문지
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    • 제13권2호
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    • pp.114-119
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    • 2000
  • Etch characteristics of SF6/CI2 electron cyclotron resonance (ECR) plasmas have been investigated. Surface reaction of gas plasma with polysilicon was also analysed using X-ray photoelectron spectroscopy (XPS). At the same time, the relationship between surface reaction and the etched profile of polysilicon was examined using XPS. The etch rate of polysilicon and oxide increases with increasing flow rate of SF6 in the SF6/CI2 gas mixture, and tis selectivity also increase also increase. It was also found that as increasing flow rate of SF6 in the SF6/CI2 gas mixture, the atomic% of chlorine detected at surface region decrease, but F and S contents increase. At the same time, when the mixing ratio of SF6 gas increases, the anisotropy of etched polysilicon is sharply decreased in the 0%~10% range of the SF6 mixing ratio, but is rarely varied in the range over 10%, in spite of the large variations in flow rates. It can be explained that the bonding of S-Si due to SiSx(x$\leq$2) compound formed on the etched surface suppress the formation of Si-Cl and 'or Si-F bonding in the silicon etching.

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