• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2000년도 하계종합학술대회 논문집(2)
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• pp.282-285
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• 2000

Four helical resonators are distributed in a 2 ${\times}$ 2 array by modifying upper part of the conventional reactive ion etching(RIE) type LCD etcher in order to prepare a large area plasma source. Since the resonance condition of the RF signal to the helical antenna, one RF power supply is used for delivering the power efficiently to all four helical resonators without an impedance matching network Previous work of 2 ${\times}$ 2array inductively coupled plasma(ICP)requires one matching circuit to each ICP antenna for more efficient power deliverly Distributions of ion density and electron temperature are measured in terms of chamber pressure, gas flow rate and RF power . By adjusting the power distribution among the four helical resonator units, argon plasma density of higher than 10$\^$17/㎥ with the uniformity of better than 7％ can be obtained in the 620 ${\times}$ 620$\textrm{mm}^2$ chamber.

• 한국연소학회:학술대회논문집
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• 한국연소학회 2014년도 제49회 KOSCO SYMPOSIUM 초록집
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• pp.195-198
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• 2014

$Fuel/N_2$ and fuel/air mixtures were treated with non-thermal DBD plasma and the changes in characteristics of laminar diffusion flame have been observed. Flame of $Fuel/N_2$ mixture generated more soot under plasma condition while less amount of soot was formed from fuel/air mixture flame. Luminescence spectrum and gas chromatography results confirmed that plasma energy converts a fraction of fuel molecules into radicals, which then form $C_2$, $C_3$, $C_4$ and higher hydrocarbon under no oxygen condition or turn into CO, $CO_2$ and $H_2O$ when oxygen is present.

• 반도체디스플레이기술학회지
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• 제8권4호
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• pp.89-94
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• 2009

The influence on a stability of thermal plasma has been investigated in an electrode structure of non-transferred plasma torch. The variations of dynamic characteristic of the arc voltage was analyzed and compared in terms of voltage character and nozzle types for both the step-shaped nozzles and magnetic-approved cylindrical nozzle. From the experimental results, an electrode gap, flow rate of arc gas, and currents are considered as major operational parameters. As conclusion, it was assured that a torch with step-shaped nozzles of magnetic-approved type produce the stable plasma jet.

• 한국연소학회:학술대회논문집
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• 대한연소학회 2003년도 제27회 KOSCO SYMPOSIUM 논문집
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• pp.27-32
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• 2003

The effect of non-thermal plasma on diffusion flames in co-flow jets has been studied experimentally by adopting a dielectric barrier discharge technique. The generation of streamers was enhanced with a flame due to increased reduced electric fields by high temperature burnt gas and the abundance of ions in the flame region. The effect of streamers on flame behavior reveals that the flame length was significantly decreased as the applied voltage increased and the yellow luminosity by the radiation of soot particles was also significantly reduced. The formation of PAH and soot was influenced appreciably by the non-thermal plasma, while the flame temperature and the concentration of major species were not influence much with the plasma generation. The results demonstrated that the application of non-thermal plasma can be a viable technique in controlling soot generation in flames with low power consumption in the order of 1 W.

• 대한한방내과학회지
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• 제10권1호
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• pp.125-136
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• 1989

This study was investigated to clarify the effect of Sin Bee Tang (神秘湯) on the renal function, arterial blood pressure and plasma cortisol. The results obtained were follows; 1. Urine volume and glomerular filtration rate were decreased significantly after Sin Bee Tang water extract, 0.1ml/kg, administration. 2. Glomerular filtration rate, renal plasma flow and urinary excretion of electrolytes were increased significantly after Sin Bee Tang water extract, 0.25ml/kg, administration. 3. Plasma cortisol concentration increased significantly after Sin Bee Tang water extract, 0.25ml/kg, administration. These results suggest that the therapeutic action of Sin Bee Tang for 'Su Chun (水喘)' has a relation with the increase of plasma cortisol and renal hemodynamic effect.

• 한국진공학회지
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• 제7권1호
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• pp.72-76
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• 1998

본 연구에서는 방전내에서 활성화된 라디칼의 반응을 촉진시키는 플라즈마중합을 통하여 기능성 유기박막을 합성하기 위해 새로운 형태의 유동가스형 반응장치를 개발하였 다. 중합을 위해서 스티렌 모노머를 사용하였으며 분자구조와 분자량 분포에 대한 분석을 행하였다. 제작된 플라즈마중합막은 우수한 성능의 전자빔 레지스트로서 평가되었다. 새로운 플라즈마 반응장치를 이용하여 제작된 박막의 감도는 습식공정에 의해 제작된 레지스트의 감도에 비해서 향상되었으며 깨끗한 패턴이 성공적으로 제작되었다.

• 한국자동차공학회논문집
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• 제6권4호
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• pp.211-218
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• 1998

The purpose of this study is to investigate the reduction rate of NOX according to several parameters(NOX concentration, the flow rate of gas, the additional amount of C2H4, input voltage, input frequency and so in) when NOX is reduced by using PPCP(Pulse-induced Plasma Chemical Process). PPCP is based on the plasma-chemical technology, which induces narrow voltage pulses to binary electrode structure.

• Journal of Korean Society for Atmospheric Environment
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• 제9권E호
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• pp.382-389
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• 1993

An evaluation of a plasma reactor was conducted to investigate its potential as a feasible and economical off-gas control technology for an air stripping tower (AST). The plasma reactor was powered by an alternating current with frequencies up to 1000Hz. The study showed that over 90% conversion of gas-phase trichloroethylene (TCE) can be achieved. An optimum frequency for the laternating current existed for maximum power input. The optimum frequency was dependent on the reactor geometry and the primary voltage applied. for a fixed geometry, a plasma reactor has a limited capacity for flow rate. Even though it is a feasible process to control off-gases, further investigations should be conducted to develop a more economic process.

• 산업기술연구
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• 제14권
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• pp.63-75
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• 1994

The objective of this research is to analyze the phenomena of negative ion behavior in silane plasma chemical vapor deposition. Based on the plasma chemistry, the model equations for the formation and transport of negative ions were proposed and solved. The evolutions of gaseous species along the reactor were presented for several conditions of process variables such as reactor pressure, total gas flow rate, and electric field. Based on the model results, it is found that : (1) The concentration profiles of positive ions show the sharp peaks at the center of plasma reactor. (2) Most of negative ions are located in bulk plasma region, because the negative ions are excluded from the sheath region by electrostatic repulsion.

• 한국연소학회:학술대회논문집
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• 한국연소학회 2015년도 제51회 KOSCO SYMPOSIUM 초록집
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• pp.189-192
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• 2015

An experimental study was conducted to find the effect of DBD plasma on the flammability limits of inert-gas-diluted fuel. The results showed that the concentration of diluting nitrogen at flammability limit increased when nitrogen-diluted methane and propane were reformed by plasma, while it decreased when nitrogen-diluted ethylene was reformed by plasma. Gas chromatography results suggested that the fuel type dependence of flammability limits is due to the difference in the concentrations of hydrogen and hydrocarbon species in reformed fuel.