• Title/Summary/Keyword: plasma coating

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Tuning the Interference Color with PECVD Prepared DLC Thickness (PECVD를 이용한 DLC 두께 제어에 따른 간섭색 구현)

  • Park, Saebom;Kim, Kwangbae;Kim, Hojun;Kim, Chihwan;Choi, Hyun Woo;Song, Ohsung
    • Korean Journal of Materials Research
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    • v.31 no.7
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    • pp.403-408
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    • 2021
  • Various surface colors are predicted and implemented using the interference color generated by controlling the thickness of nano-level diamond like carbon (DLC) thin film. Samples having thicknesses of up to 385 nm and various interference colors are prepared using a single crystal silicon (100) substrate with changing processing times at low temperature by plasma-enhanced chemical vapor deposition. The thickness, surface roughness, color, phases, and anti-scratch performance under each condition are analyzed using a scanning electron microscope, colorimeter, micro-Raman device, and scratch tester. Coating with the same uniformity as the surface roughness of the substrate is possible over the entire experimental thickness range, and more than five different colors are implemented at this time. The color matched with the color predicted by the model, assuming only the reflection mode of the thin film. All the DLC thin films show constant D/G peak fraction without significant change, and have anti-scratch values of about 19 N. The results indicate the possibility that nano-level DLC thin films with various interference colors can be applied to exterior materials of actual mobile devices.

MICROSTRUCTURE AND MECHANICAL PROPERTIES OF AMORPHOUS HYDROGENATED DLC-COATED Ti-6Al-4V ELI ALLOY WITH TiCN INTERLAYER PREPARED BY rf-PECVD

  • KWANGMIN LEE;SEOKIL KANG
    • Archives of Metallurgy and Materials
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    • v.65 no.4
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    • pp.1357-1360
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    • 2020
  • The low adherence of diamond-like carbon (DLC) films on titanium (Ti) alloys can be improved by using interlayer coatings. In this study, DLC (a-C:H) films were deposited using radio-frequency plasma-enhanced chemical vapor deposition (rf-PECVD), and a TiCN interlayer was applied between the extra low interstitial (ELI) grade of Ti-6Al-4V alloy and a-C:H film. The characteristics of the a-C:H-coated Ti-6Al-4V ELI alloy were investigated using field emission scanning electron microscopy, Vickers hardness, and scratch and wear tests. The DLC (a-C:H) films deposited by rf-PECVD had a thickness of 1.7 ㎛, and the TiCN interlayer had a thickness of 1.1 ㎛. Vickers hardness of the DLC (a-C:H) films were increased as a result of the influence of the TiCN interlayer. The resulting friction coefficient of the a-C:H-coated Ti-6Al-4V with the TiCN interlayer had an extremely low value of 0.07.

A Study on the Optimization of the SiNx:H Film for Crystalline Silicon Sloar Cells (결정질 실리콘 태양전지용 SiNx:H 박막 특성의 최적화 연구)

  • Lee, Kyung-Dong;Kim, Young-Do;Dahiwale, Shailendra S.;Boo, Hyun-Pil;Park, Sung-Eun;Tark, Sung-Ju;Kim, Dong-Hwan
    • Journal of the Korean Vacuum Society
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    • v.21 no.1
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    • pp.29-35
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    • 2012
  • The Hydrogenated silicon nitride (SiNx:H) using plasma enhanced chemical vapor deposition is widely used in photovoltaic industry as an antireflection coating and passivation layer. In the high temperature firing process, the $SiN_x:H$ film should not change the properties for its use as high quality surface layer in crystalline silicon solar cells. Initially PECVD-$SiN_x:H$ film trends were investigated by varying the deposition parameters (temperature, electrode gap, RF power, gas flow rate etc.) to optimize the process parameter conditions. Then by varying gas ratios ($NH_3/SiH_4$), the hydrogenated silicon nitride films were analyzed for its optical, electrical, chemical and surface passivation properties. The $SiN_x:H$ films of refractive indices 1.90~2.20 were obtained. The film deposited with the gas ratio of 3.6 (Refractive index=1.98) showed the best properties in after firing process condition. The single crystalline silicon solar cells fabricated according to optimized gas ratio (R=3.6) condition on large area substrate of size $156{\times}156mm$ (Pseudo square) was found to have the conversion efficiency as high as 17.2%. Optimized hydrogenated silicon nitride surface layer and high efficiency crystalline silicon solar cells fabrication sequence has also been explained in this study.

Preparation of Protein-coated Cationic Liposomes Containing Doxorubicin and Their Binding Property of Blood Plasma Protein (독소루비신을 함유하고 단백질로 수식된 양이온성 리포솜의 제조 및 혈장 단백흡착 특성)

  • Kim, Sung-Kyu;Jung, Soon-Hwa;Jung, Suk-Hyun;Seong, Ha-Soo;Chi, Sang-Cheol;Cho, Sun-Hang;Shin, Byung-Cheol
    • Journal of the Korean Chemical Society
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    • v.52 no.1
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    • pp.57-65
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    • 2008
  • are nanometer or micrometer scale vesicles that can be used as drug delivery carriers. However, plain liposomes are plagued by rapid opsonization, making their circulation time in bloodstream be shortened. In this study, model protein, bovine serum albumin (BSA)-coated liposomes were prepared by coating cationic liposomes with BSA molecules at higher pH than isoelectric point of BSA. The BSA molecules coated on the liposomal surface were denatured by thermal treatment at above 60oC. While both plain and cationic liposomes had about mean particle diameter of 1041 nm, BSA-coated cationic liposomes (BCL) had mean particle diameter of 1091 nm. Encapsulation of model drug, doxorubicin (DOX), in liposomes were carried out by using remote loading method and the loading efficiency of DOX to liposomes was about 90%. The mean particle diameter of BCL did not increase in blood plasma and adsorption of plasma protein was much less than plain or cationic liposomes. These results suggest that BCL can be used as a long-circulating liposomes in bloodstream.

HISTOLOGICAL COMPARISONS OF TITANIUM PLASMA SPRAYED IMPLANT AND HYDROXYAPATITE COATED IMPLANT TO BONE INTERFACE IN PERIODONTALLY INVOLVED EXTRACTION SOCKETS IN DOGS (성견 치주질환 이환 발치와에 즉시 임플란트 매식술시 Titanium plasma sprayed 임프란트와 Hydroxyapatite coated 임프란트의 계면조직에 관한 연구)

  • Kim, Jin-Sook;Kim, Chong-Kwan
    • Journal of Periodontal and Implant Science
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    • v.23 no.3
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    • pp.400-410
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    • 1993
  • Dental implants have been widely used in the treatment of esthetic and functional problems of the mouth due to alveolar bone loss, after tooth extraction. The success of implantation strongly depends on osseointegration. For osseointegration, implant material, methodology, and design have been investigated. For materials, two popular materials at present are titanium and hydroxyapatite. For methods, immediate implantation is being used recently. The purpose of this study is to evaluate osseointegration between the unthreaded cylindrical TPS implant and the HA-coated implant by a histomorphometric analysis. For this analysis, experimental periodontits was induced on the 3, 4 premolars of adult dogs by the ligation of orthodontic threads. Thereafter, each tooth was extracted. TPS. Implants and HA-coated implants were immediately inserted in the extraction socket. In control group, TPS implants were immediately inserted, and In experimental group, HA implants were immediately inserted. The dogs were sacrificed after 12 weeks, then the specimens were prepared for LM and histomorphometric analysis. The conclusion of this study is as follows l. In both control and experimental group, no inflammatory cells were observed. 2. The results of the histomorphometric analysis showed that the total osseointegration was 48.5% in control group, and 68.8% in expermental group. The experimental group was higher than the control group, and the difference was not statistically significant (p<0.05). 3. The results of the histomorphometric analysis showed that the osseointegration in the hole was 40.6% in control group, and 70.2% in experimental group. The experimental group was higher than the control group, and the difference was statistically significant (p<0.05). In both control and experinental group, no inflammatory cells were observed. 4. The results of the histomorphometric analysis showed that the osseointegration in the lower part was 52.1% in control group, and 73.3% in experimental group. The experimental group was higher than the control group, and the difference was statistically significant (p<0.05). 5. In experimental group, the bone to HA interface seemed to be mixed of bone and HA. We could not distinguish HA from the bone. The HA coating was detached from the titanium surface.

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교류형 플라즈마 방전 표시기 방전유지 전압의 전압 상승 시간의 변화에 따른 방전 현상의 변화

  • 김중균;양진호;윤차근;황기웅
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.229-229
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    • 1999
  • 교류형 플라즈마 방전 표시기(AC Plasma Display Panel, AC PDP)의 구동에서의 방전 현상은 기입방전, 유지방전, 소거 방전이 있다. 이중 유지 방전은 표시장치로서의 휘도와 계조의 표현을 위한 방전으로 표시기로서의 효율을 결정하게 된다. 본 연구에서는 유지 방전 전압의 상승 시간의 변화에 따른 방전현상과 휘도, 효율의 변화를 살펴 보았다. 방전 현상에서의 가장 큰 변화는 교류형 플라즈마 방전 표시기의 방전 개시 전압과 방전 유지 전압의 변화이다. 유지 전압의 상승시간이 증가할수록 방전 개시 전압과 방전 유지 전압의 변화이다. 유지 전압의 상승 시간이 증가할수록 방전 개시 전압과 방전 유지 전압의 차(sustain margin)는 감소하여 상승 시간이 1$\mu$s/100V 이상의 영역에서는 방전 개시 전압과 방전 유지 전압이 차이가 없어지게 된다. 이는 방전 유지 전극 위의 유전체에 쌓이게 되는 벽전하(wall charge) 양의 감소에 의한 방전 약화의 영향을 보여질 수 있다. 그러나 방전 유지 전압의 형태와 전류의 시간적인 변화를 살펴보면 이러한 약한 방전은 벽전하의 감소에 의한 방전 시의 전계 감소보다는 방전 전류의 발생 시간이 방전 전압이 증가하여 최고점에 이르지 못한 시간에 위치하여 방전이 형성될 때의 전계가 강하지 못하기 때문인 것을 알 수 있다. 방전 전류를 측정한 결과에 의하면 방전 전류의 시작은 변위 전류가 흐르고 난 후부터 시작되며 그 결과 방전 전류가 최고점에 도달하는 시간은 방전 전압 상승 시간이 길어질수록 낮은 전압에서 형성되게 된다. 또한 방전 유지 전압의 상승 시간이 길어질수록 플라즈마 방전표시기의 휘도와 효율은 낮아지고 이 결과 또한 약한 전계에서의 방전에 의한 결과로 생각되어진다.플라즈마의 강도값을 입력하여 플라즈마의 radiation을 검출하고, 스퍼터링 공정중 실질적인 in-situ 정보로 이용하였다. PEM을 통하여 In/Sn의 플라즈마 강도변화를 조사하였다. 초기 In/Sn의 플라즈마 강도(intensity)는 강도를 100하여, 산소를 주입한 결과, plasma intensity가 35 줄어들었고, 이때 우수한 ITO 박막을 얻을 수 있었다. Pulsed DC power를 사용하여 아크 현상을 방지하였다. PET 상에 coating 된 ITO 박막의 표면저항과 광투과도는 4-point prove와 spectrophotometer를 이용하여 분석하였고, AES로 박막의 두께에 따른 성분비를 확인하였다. ITO 박막의 광투과도는 산소의 유량과 sputter 된 In/Sn ion의 plasma emission peak에 따라 72%-92%까지 변화하였으며, 저항은 37$\Omega$/$\square$ 이상을 나타내었다. 박막의 Sn/In atomic ratio는 0.12, O/In의 비율은 In2O3의 화학양론적 비율인 1.5보다 작은 1.3을 나타내었다.로 보인다.하면 수평축과 수직축의 분산 장벽의 비에 따라 cluster의 두께비가 달라지는 성장을 볼 수 있었고, 한 축 방향으로의 팔 넓이는 fcc(100) 표면의 경우 동일한 Ed+Ep값에 대응하는 팔 넓이와 거의 동일한 결과가 나타나는 것을 볼 수 있다. 따라서 이러한 비대칭적인 모양을 가지는 성장의 경우도 cluster 밀도, cluster 모양, cluster의 양 축 방향 길이 비, 양 축 방향의 평균 팔 넓이로부터 각 축 방향의 분산 장벽을 얻어낼 수 있을 것으로 보인다. 기대할 수 있는 여러 장점들을 보고하고자 한다.성이 우수한 시

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Improvement of Impact Resistance of B4C Tile Inserted B4Cp/Al7075 Hybrid Composites Through Interface Control (B4C tile 삽입 B4Cp/Al7075 하이브리드 복합재의 계면 제어를 통한 내충격 특성의 향상)

  • Park, Jongbok;Lee, Taegyu;Lee, Donghyun;Cho, Seungchan;Lee, Sang-Kwan;Hong, Soon Hyung;Ryu, Ho Jin
    • Composites Research
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    • v.33 no.5
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    • pp.235-240
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    • 2020
  • In this study, in order to improve the impact resistance of the B4C tile-inserted B4Cp/Al7075 hybrid composite, a control method of the B4C/Al7075 interface was developed and the characteristics of the controlled interface were analyzed. B2O3, Ni, and Si were coated on the B4C tile surface using additional thermal oxidation, electroless plating, and plasma spraying. The coated B4C tile is inserted into the B4Cp/Al7075 composite material using the liquid pressurization method. Interfacial energy, bonding strength, and impact resistance were measured to analyze the effect of the coating. All coatings enhanced interfacial energy, bonding strength, and impact resistance, and in particular, it was confirmed that the impact resistance increased by 86.8% when B2O3 coating was used. This study is significant in developing and analyzing a core surface treatment method that improves the performance of B4C/Al series composites, which are attracting attention as next-generation lightweight amour and bulletproof materials.

Morphology of RF-sputtered Mn-Coatings for Ti-29Nb-xHf Alloys after Micro-Pore Form by PEO

  • Park, Min-Gyu;Park, Seon-Yeong;Choe, Han-Cheol
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2016.11a
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    • pp.197-197
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    • 2016
  • Commercially pure titanium (CP Ti) and Ti-6Al-4V alloys have been widely used for biomedical applications. However, the use of the Ti-6Al-4V alloy in biomaterial is then a subject of controversy because aluminum ions and vanadium oxide have potential detrimental influence on the human body due to vanadium and aluminum. Hence, recent works showed that the synthesis of new Ti-based alloys for implant application involves more biocompatible metallic alloying element, such as, Nb, Hf, Zr and Mo. In particular, Nb and Hf are one of the most effective Ti ${\beta}-stabilizer$ and reducing the elastic modulus. Plasma electrolyte oxidation (PEO) is known as excellent method in the biocompatibility of biomaterial due to quickly coating time and controlled coating condition. The anodized oxide layer and diameter modulation of Ti alloys can be obtained function of improvement of cell adhesion. Manganese(Mn) plays very important roles in essential for normal growth and metabolism of skeletal tissue in vertebrates and can be detected as minor constituents in teeth and bone. Radio frequency(RF) magnetron sputtering in the various PVD methods has high deposition rates, high-purity films, extremely high adhesion of films, and excellent uniform layers for depositing a wide range of materials, including metals, alloys and ceramics like a hydroxyapatite. The aim of this study is to research the Mn coatings on the micro-pore formed Ti-29Nb-xHf alloys by RF-magnetron sputtering for dental applications. Ti-29Nb-xHf (x= 0, 3, 7 and 15wt%, mass fraction) alloys were prepared Ti-29Nb-xHf alloys of containing Hf up from 0 wt% to 15 wt% were melted by using a vacuum furnace. Ti-29Nb-xHf alloys were homogenized for 2 hr at $1050^{\circ}C$. Each alloy was anodized in solution containing typically 0.15 M calcium acetate monohydrate + 0.02 M calcium glycerophosphate at room temperature. A direct current power source was used for the process of anodization. Anodized alloys was prepared using 270V~300V anodization voltage at room. Mn coatings was produced by RF-magnetron sputtering system. RF power of 100W was applied to the target for 1h at room temperature. The microstructure, phase and composition of Mn coated oxide surface of Ti-29Nb-xHf alloys were examined by FE-SEM, EDS, and XRD.

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Optimization of Corrosion Properties of Ti/TiO2/IrO2-RuO2 Electrodes via Taguchi Method (Taguchi법을 이용한 Ti/TiO2/IrO2-RuO2전극의 부식특성 최적화)

  • 이득용;채경선;최형기;예경환;안중홍;송요승
    • Journal of the Korean Ceramic Society
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    • v.39 no.6
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    • pp.582-588
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    • 2002
  • IrO$_2$-RuO$_2$ films were deposited on plasma sprayed TiO$_2$ buffer layer above Ti metal by sol-gel and dip-coating method. Organic vehicle (ethyl cellulose and $\alpha$-terpineol) and glass frit were added to improve adherence of the coatings. Taguchi method and L$_{18}$ (2$^1$$\times$3$^{7}$ ) orthogonal arrays were evalvated in terms of current density to determine the optimal combination of levels of factors that best satisfy the bigger is better quality characteristic. The observed conditions were as fellows: ethyl cellulose (100 cp), drying temperature and time (17$0^{\circ}C$,20 min), heat treatment temperature and time (75$0^{\circ}C$,10 min), the weight ratio of IrO$_2$-RuO/powders to glass frit (99:5), final heat treatment time (120 min) and flow rate of air (5 sccm), respectively. ANOVA analysis suggested that the influence of the factors within $\alpha$= 0.1 was significant with a 90% confidence level.

Adhesive Strength of dry Adhesive Structures Depending on the Thickness of Metal Coating (건식 접착 구조물의 금속 코팅 두께에 따른 접착강도 변화)

  • Kim, Gyu Hye;Kwon, Da Som;Kim, Mi Jung;Kim, Su Hee;Yoon, Ji Won;An, Tea Chang;Hwang, Hui Yun
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.40 no.7
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    • pp.673-677
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    • 2016
  • Recently, engineering applications have started to adopt solutions inspired by nature. The peculiar adhesive properties of gecko skin are an example, as they allow the animal to move freely on vertical walls and even on ceilings. The high adhesive forces between gecko feet and walls are due to the hierarchical microscopical structure of the skin. In this study, the effect of metal coatings on the adhesive strength of synthetic, hierarchically structured, dry adhesives was investigated. Synthetic dry adhesives were fabricated using PDMS micro-molds prepared by photolithography. Metal coatings on synthetic dry adhesives were formed by plasma sputtering. Adhesive strength was measured by pure shear tests. The highest adhesion strengths were found with coatings composed of 4 nm thick layers of Indium, 8 nm thick layers of Zinc and 6 nm thick layers of Gold, respectively.