Abstract
IrO$_2$-RuO$_2$ films were deposited on plasma sprayed TiO$_2$ buffer layer above Ti metal by sol-gel and dip-coating method. Organic vehicle (ethyl cellulose and $\alpha$-terpineol) and glass frit were added to improve adherence of the coatings. Taguchi method and L$_{18}$ (2$^1$$\times$3$^{7}$ ) orthogonal arrays were evalvated in terms of current density to determine the optimal combination of levels of factors that best satisfy the bigger is better quality characteristic. The observed conditions were as fellows: ethyl cellulose (100 cp), drying temperature and time (17$0^{\circ}C$,20 min), heat treatment temperature and time (75$0^{\circ}C$,10 min), the weight ratio of IrO$_2$-RuO/powders to glass frit (99:5), final heat treatment time (120 min) and flow rate of air (5 sccm), respectively. ANOVA analysis suggested that the influence of the factors within $\alpha$= 0.1 was significant with a 90% confidence level.
Ti 기판에 TiO$_2$ 중간층을 플라즈마 용사법으로 증착 후 IrO$_2$-RuO$_2$ 박막을 졸-겔과 dip coating법으로 제조하였다. 코팅 층의 접착력을 향상시키기 위하여 유기화합물과 glass brit을 첨가하였다. Taguchi법의 망대특성과 Lls(2$^1$$\times$3$^{7}$ )의 직교배열표를 이용하여 IrO$_2$-RuO$_2$ 박막의 최적조건인 인자와 수준 조합의 최적화를 전류밀도를 측정 분산분석하였다. 최적의 코팅조건은 각각 ethyl cellulose의 점도는 100cp, 건조온도 및 시간은 17$0^{\circ}C$ 20분, 열처리온도 및 시간은 75$0^{\circ}C$ 10분, 전도성 분말과 glass frit의 무게비는 99:5, 최종열처리시간은 120분, 주입산소량은 5sccm이었다. 분산분석결과, 유의수준이 $\alpha$=0.1인 통계적으로 90%신뢰공정이었다.