• Journal of the Korean Ceramic Society
• /
• v.51 no.5
• /
• pp.447-452
• /
• 2014

This paper presents the effects of pulse plasma parameters such as duty cycle and pulse frequency on the properties of TiAlN coatings deposited by asymmetric bipolar pulsed DC magnetron sputtering systems. The results show that, with decreasing duty cycle and increasing pulse frequency, the coating morphology changes from a columnar structure to a dense structure with finer grains. Pulsed sputtered TiAlN coatings showed higher hardness, higher residual stress, and smaller grain sizes than did DC prepared TiAlN coatings. Moreover, residual stress and nanoindentation hardness of pulsed sputtered TiAlN coatings increased with increasing pulse frequency. Meanwhile, the surface roughness decreased continuously with increasing pulsed DC frequency up to 50 kHz.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2015.08a
• /
• pp.101.1-101.1
• /
• 2015

플라즈마에 의한 식각 공정중 챔버 내에서 발생한 오염입자가 기판위에 떨어져 제품의 불량을 일으키고 그에 따른 부품 교체비용이나 교체시 가동을 멈춰야하는 문제점들이 있다. 이러한 문제점을 해결하기 위해 내플라즈마성이 우수하다고 알려진 아노다이징 피막을 사용하고 있다. 하지만 다양한 아노다이징 공법중 어떠한 요인이 내플라즈마 특성과 관계되는지에 대한 보고는 부족한 실정이다. 기존의 아노다이징 특성평가방법으로는 내화학 특성과 열안정성 평가, 구조적 특성을 확인하는 것이 주로 사용되어 왔다. 따라서 본 연구에서는 기존 내화학 특성과 열안정성이 우수하다고 알려진 황산-주석산법을 이용한 피막의 특성을 평가하여 내화학특성, 열적 안정성, 구조적 특성이 내플라즈마 특성과 어떠한 관계가 있는지 확인했다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2000.04b
• /
• pp.56-59
• /
• 2000

In this study, Ferroelectric $Pb(Zr_x,Ti_{1-x})O_3$(x=0.53) thin films were fabricated by the spin-coating on the Pt/Ti/$SiO_2$/Si substrate using the PZT metal alkoxide solutions with various excess Pb contents. Etching of PZT film was performed using planar inductively coupled Ar(20)$/Cl_2/BCl_3$ plasma. The etch rate of PZT film was 2450 ${\AA}/min$ at Ar(20)$/BCl_3$(80) gas mixing ratio and substrate temperature of $80^{\circ}C$. The leakage current densities of before etching and after etching PZT thin film were $6.25\times10^{-8}A/cm^2$, $8.74\times10^{-7}A/cm^2$ with electric field of 0.07MV/em, respectively.

• Journal of Korea Foundry Society
• /
• v.18 no.6
• /
• pp.593-603
• /
• 1998

Commercial ductile iron was coated with titanium and aluminum powders by low pressure plasma spraying and then irradiated with a $CO_2$ laser to produce anti-corrosive TiC composite layer. TiC carbides were precipitated homogeneously in a laser alloyed layer by in-situ reaction between carbon existed in the base metal and titanium with thermal sprayed coating. The formation of gas pores and brittle limited mixing zone with ledeburite microstructure in TiC composite layer were surpressed by the complementary alloying of aluminum. The hardness of TiC composite layer obtained by addition of titanium and aluminum was between 600 and 660 Hv, which was three times as high as the hardness of ferritic ductile iron. From the results of isothermal oxidation at 1123k for 24 hours in air, high temperature oxidation resistance of the TiC composite layer with aluminum was improved and doubled when compared with the TiC composite layer without aluminum.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2002.07b
• /
• pp.964-967
• /
• 2002

The effectiveness of silicon nitride SiNx surface passivation is investigated and quantified. This study adopted single-layer antireflection (SLAR) coating of SiNx for efficiency improvement of solar cell. The silicon nitride films were deposited by means of plasma enhanced chemical vapor deposition (PECVD) in planar coil reactor. The process gases used were pure ammonia and a mixture of silane and helium. The thickness and the refractive index on the films were measured by ellipsometry and chemical bonds were determined by using an FT-IR equipment. This films obtained were analyzed in term of hydrogen content, refractive index for gas flow ratio $(NH_3/SiH_4)$, and efficiency of solar cell. The polycrystalline silicon solar cells passivated by silicon nitride shows efficiency above 12.8%.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
• /
• 1998.04a
• /
• pp.97-107
• /
• 1998

Three different kinds of brake discs including two coated brake discs and one steel disc were tested under the same experimental conditions on a reduced scale braking test bench. Braking test bench was specially designed to analyse thermo-mechanical and frictional behaviors of two sizes of brake discs in stop and hold braking modes. And Plasma spray coating technique was used to coat ceramic powder on the discs. In the test four commercial brake pads were coupled with discs. Ceramic coated discs had shown good stability in friction coefficient at high speed and high energy braking conditions. But they caused large pad mass wear loss compared with the steel disc. It was shown that thermal barrier effect in ceramic coated discs adjusted the thermal partition between pad and disc. For a steel disc, it had shown fluctuating friction coefficient at high speed but a fittie pad mass wear loss compared with ceramic coated discs.

• Transactions on Electrical and Electronic Materials
• /
• v.8 no.3
• /
• pp.125-130
• /
• 2007

DLC coating on ceramics is very useful for manufacturing the materials with hardness and low friction. Adhesion of DLC thin film on ceramics, on the other hand, is usually very weak. Adhesion of DLC film depends on many parameters such as contamination and chemical bonding between thin film and substrate. In this study, adhesion of DLC film on ceramics was improved by the intermediate layer when the plasma immersion ion deposition (PIID) technique was applied. It is found that the chemical composition and the thickness of intermediate layer have significantly an effect on the adhesion of DLC thin film on $Al_2O_3$.

• Proceedings of the KWS Conference
• /
• 2004.05a
• /
• pp.314-315
• /
• 2004

As environmental issue threatens to be aggravated, applications of bio-degradable plastic (Polybutylene Succinate:PBS) tend to be increased. However, improvement of mechanical characteristics of PBS is indispensable for further widespread actual applications. Therefore, in order to produce further functional P8S with improved mechanical characteristics, TiO$_2$ coatings on PBS substrate were prepared under various spraying conditions using plasma and HVOF spraying techniques. The effects of thermal spraying methods and spraying parameters on coating properties could be confirmed. Moreover, wear behavior for TiO$_2$ coatings on PBS substrate has been also reviewed and characterized.

• Proceedings of the KIPE Conference
• /
• 2010.07a
• /
• pp.516-517
• /
• 2010

최근에 들어 반도체 및 디스플레이 분야를 포함하여 태양전지와 같은 신재생 에너지 분야에서 고품질, 고기능성 박막이 많이 사용되고 있으며, 이에 따라 플라즈마 제어기술 및 코팅 공정기술 개발에 대한 요구가 증가하고 있다. 산업기술이 고도화됨에 따라 다양한 계열의 박막이 필요하게 되었고 고밀도의 플라즈마를 공급하고 안정된 공정을 진행하기 위해 순시적인 플라즈마 제어가 가능한 임펄스 전원장치에 대한 연구가 활발히 진행되고 있다. 기존의 임펄스 전원장치에서는 플라즈마 발생에 필요한 고전압 발생만 관점을 두고 있으나 플라즈마의 발생뿐이 아니라 증착율이 높은 상태로 유지되어야 실제 공정의 효율이 증가한다. 본 연구에서는 증착 효율을 극대화하기 위하여 별도의 저압회로를 부가한 복합형 임펄스 전원장치를 제안한다.

• Journal of the Korea Academia-Industrial cooperation Society
• /
• v.4 no.4
• /
• pp.361-365
• /
• 2003

A unipolar-type E-chuck was fabricated for the application of holding silicon wafers in the oxide etcher. For the fabrication of the unipolar ESC, core technologies such as coating of polyimide films and anodizing treatment of aluminum surface were developed. The polyimide films were prepared on thin coated copper substrates to minimize the plasma damage during the etch processing. Thin film heater technology was also developed for new type of E-chuck.