• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.315-315
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• 2007

본 논문에서는 DLC (Diamond-like carbon)박막이 가지는 높은 경도, 낮은 마찰계수, 전기적 절연성, 화학적 안정성 등의 특성을 이용하여, 리소그래피를 위한 resist나 hard coating물질로써 응용하기 위해, DLC 박막의 에칭에 관한 연구를 진행하였다. DLC 박막의 합성 과 에칭은 13.56 MHz RF plasma enhanced vapor deposition technique를 통해 이루어졌으며, DLC 박막은 150 W의 RF Power에서 메탄 $(CH_4)$과 수소$(H_2)$ 가스를 이용하여 약 300 nm의 두께로 제작되었으며, DLC박막의 에칭은 RF power의 변화 (50~250 W)와 산소 $(O_2)$가스의 유량변화 (5~25 sccm)에 따라 실시하였다. 에칭 되어진 DLC 박막의 표면 특성들은 AFM (atomic force microscopy)과 contact angle 장치를 사용하여 측정되었고, 측정된 결과로써 DLC 박막은 RF power와 산소 가스의 유량이 높을수록 etching rate는 증가하였고, 박막의 표면은 거칠어졌으며, 결국 DLC 표면에서는 산소에 의한 결합의 증가로 인해 친수성을 나타내었다.

• Journal of Surface Science and Engineering
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• v.51 no.6
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• pp.415-420
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• 2018

The possibility of an improvement in heat dissipation performance of aluminum alloy heat sink for shipboard LED luminaries through plasma electrolytic oxidation (PEO) was investigated. Four different PEO coatings were produced on aluminum alloy 5052 in silicate based alkaline solution by varying current density ($50{\sim}200mA/cm^2$). On voltage-time response curves, three stages were clearly distinguished at all current densities, namely an initial linear increase, slowdown of increase rate, and steady state(constant voltage). It was found that the increase in current density caused the breakdown voltage to increase. Two different surface morphologies - coralline porous structure and pancake structure - were confirmed by SEM examination. The coralline porous structure was predominant in the coatings produced at lower current densities (50 and $100mA/cm^2$) while under high current densities(150 and $200mA/cm^2$) the pancake structure became dominant. The coating thickness was measured and found to be in a range between about $13{\mu}m$ and $44{\mu}m$, showing increasing thickness with increasing current density. As a result, $100mA/cm^2$ was proposed as an effective process parameter to improve the heat dissipation performance of aluminum alloy heat sink, which could lower the LED operating temperature by about 30%.

• Korean Journal of Metals and Materials
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• v.46 no.10
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• pp.646-651
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• 2008

The electrolytic reduction of spent oxide fuel involves the liberation of oxygen in a molten LiCl electrolyte, which results in a chemically aggressive environment that is too corrosive for typical structural materials. It is essential to choose the optimum material for the process equipment handling molten salt. IN713LC is one of the candidate materials proposed for application in electrolytic reduction process. In this study, yttria-stabilized zirconia (YSZ) top coat was applied to a surface of IN713LC with an aluminized metallic bond coat by an optimized plasma spray process, and were investigated the corrosion behavior at $675^{\circ}C$ for 216 hours in the molten salt $LiCl-Li_2O$ under an oxidizing atmosphere. The as-coated and tested specimens were examined by OM, SEM/EDS and XRD, respectively. The bare superalloy reveals obvious weight loss, and the corrosion layer formed on the surface of the bare superalloy was spalled due to the rapid scale growth and thermal stress. The top coatings showed a much better hot-corrosion resistance in the presence of $LiCl-Li_2O$ molten salt when compared to those of the uncoated superalloy and the aluminized bond coatings. These coatings have been found to be beneficial for increasing to the hot-corrosion resistance of the structural materials for handling high temperature lithium molten salts.

• Korean Journal of Materials Research
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• v.31 no.7
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• pp.392-396
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• 2021

Expensive PCBN or ceramic cutting tools are used for processing of difficult-to-cut materials such as Ti and Ni alloy materials. These tools have the problem of breaking easily due to their high hardness but low fracture toughness. To solve these problems, cutting tools that form various coating layers are used in low-cost WC-Co hard material tools, and research on various tool materials is being conducted. In this study, binderless-WC, WC-6 wt%Co, WC-6 wt%Co-1 wt% Mo₂C, and WC-6 wt%Co-2.5 wt% Mo₂C hard materials are densified using horizontal ball milled WC-Co, WC-Co-Mo₂C powders, and spark plasma sintering process (SPS process). Each SPSed Binderless-WC, WC-6 wt%Co-1 wt% Mo₂C, and WC-6 wt%Co-2.5 wt% Mo₂C hard materials are almost completely dense, with relative density of up to 99.5 % after the simultaneous application of pressure of 60 MPa and almost no significant change in grain size. The average grain sizes of WC for Binderless-WC, WC-6 wt%Co-1 wt% Mo₂C, and WC-6 wt%Co-2.5 wt% Mo₂C hard materials are about 0.37, 0.6, 0.54, and 0.43 ㎛, respectively. Mechanical properties, microstructure, and phase analysis of SPSed Binderless-WC, WC-6 wt%Co-1 wt% Mo₂C, and WC-6 wt%Co-2.5 wt% Mo₂C hard materials are investigated.

• Journal of the Korean Society of Propulsion Engineers
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• v.25 no.2
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• pp.34-41
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• 2021

A commercial HVOF torch (originally designed for coating applications) has been modified as a high temperature flow source for material testing. In this study, a water cooled commercial Gardon gauge was used to measure heat fluxes at four locations away from the nozzle exit. The cooling water temperature data were used to calculate calorimetric heat fluxes at the same locations. The heat fluxes from both methods were compared and the calorimetric heat fluxes were found to be many times higher than the Gardon gauge heat fluxes. A hypothesis is applied to the calorimetric method to understand the discrepancy seen between the methods. The Gardon gauge heat fluxes are seen to be in the range of the hypothesized calorimetric calculations. This can be considered as a considerable validation for the hypothesis, but further refinement needed using appropriate numerical models.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.100-101
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• 2012

The plasma damage free and room temperature processedthin film deposition technology is essential for realization of various next generation organic microelectronic devices such as flexible AMOLED display, flexible OLED lighting, and organic photovoltaic cells because characteristics of fragile organic materials in the plasma process and low glass transition temperatures (Tg) of polymer substrate. In case of directly deposition of metal oxide thin films (including transparent conductive oxide (TCO) and amorphous oxide semiconductor (AOS)) on the organic layers, plasma damages against to the organic materials is fatal. This damage is believed to be originated mainly from high energy energetic particles during the sputtering process such as negative oxygen ions, reflected neutrals by reflection of plasma background gas at the target surface, sputtered atoms, bulk plasma ions, and secondary electrons. To solve this problem, we developed the NBAS (Neutral Beam Assisted Sputtering) process as a plasma damage free and room temperature processed sputtering technology. As a result, electro-optical properties of NBAS processed ITO thin film showed resistivity of $4.0{\times}10^{-4}{\Omega}{\cdot}m$ and high transmittance (>90% at 550 nm) with nano- crystalline structure at room temperature process. Furthermore, in the experiment result of directly deposition of TCO top anode on the inverted structure OLED cell, it is verified that NBAS TCO deposition process does not damages to the underlying organic layers. In case of deposition of transparent conductive oxide (TCO) thin film on the plastic polymer substrate, the room temperature processed sputtering coating of high quality TCO thin film is required. During the sputtering process with higher density plasma, the energetic particles contribute self supplying of activation & crystallization energy without any additional heating and post-annealing and forminga high quality TCO thin film. However, negative oxygen ions which generated from sputteringtarget surface by electron attachment are accelerated to high energy by induced cathode self-bias. Thus the high energy negative oxygen ions can lead to critical physical bombardment damages to forming oxide thin film and this effect does not recover in room temperature process without post thermal annealing. To salve the inherent limitation of plasma sputtering, we have been developed the Magnetic Field Shielded Sputtering (MFSS) process as the high quality oxide thin film deposition process at room temperature. The MFSS process is effectively eliminate or suppress the negative oxygen ions bombardment damage by the plasma limiter which composed permanent magnet array. As a result, electro-optical properties of MFSS processed ITO thin film (resistivity $3.9{\times}10^{-4}{\Omega}{\cdot}cm$, transmittance 95% at 550 nm) have approachedthose of a high temperature DC magnetron sputtering (DMS) ITO thin film were. Also, AOS (a-IGZO) TFTs fabricated by MFSS process without higher temperature post annealing showed very comparable electrical performance with those by DMS process with $400^{\circ}C$ post annealing. They are important to note that the bombardment of a negative oxygen ion which is accelerated by dc self-bias during rf sputtering could degrade the electrical performance of ITO electrodes and a-IGZO TFTs. Finally, we found that reduction of damage from the high energy negative oxygen ions bombardment drives improvement of crystalline structure in the ITO thin film and suppression of the sub-gab states in a-IGZO semiconductor thin film. For realization of organic flexible electronic devices based on plastic substrates, gas barrier coatings are required to prevent the permeation of water and oxygen because organic materials are highly susceptible to water and oxygen. In particular, high efficiency flexible AMOLEDs needs an extremely low water vapor transition rate (WVTR) of $1{\times}10^{-6}gm^{-2}day^{-1}$. The key factor in high quality inorganic gas barrier formation for achieving the very low WVTR required (under ${\sim}10^{-6}gm^{-2}day^{-1}$) is the suppression of nano-sized defect sites and gas diffusion pathways among the grain boundaries. For formation of high quality single inorganic gas barrier layer, we developed high density nano-structured Al2O3 single gas barrier layer usinga NBAS process. The NBAS process can continuously change crystalline structures from an amorphous phase to a nano- crystalline phase with various grain sizes in a single inorganic thin film. As a result, the water vapor transmission rates (WVTR) of the NBAS processed $Al_2O_3$ gas barrier film have improved order of magnitude compared with that of conventional $Al_2O_3$ layers made by the RF magnetron sputteringprocess under the same sputtering conditions; the WVTR of the NBAS processed $Al_2O_3$ gas barrier film was about $5{\times}10^{-6}g/m^2/day$ by just single layer.

• Journal of the korean academy of Pediatric Dentistry
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• v.32 no.4
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• pp.611-619
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• 2005

The aim of this study was to apply the quantitative light-induced fluorescence(QLF) and use of fluorescein-enhanced QLF method for quantitative assessment of early enamel demineralization in vitro, comparing effectiveness of light sources : argon laser, halogen lamp, light emitting diode (LED) and plasma arc lamp. Sixty extracted teeth were used, prepared by gentle pumicing and coating in an acid-resistant nail-varnish, except for an exposure to a demineralizing solution. Teeth were removed at regular intervals (24, 48 and 72hrs), air-dried and QLF image were taken. Mineral loss, as measured by difference of optical density, was recorded. For dyeenhanced QLF a 0.075% sodium fluorescein dye was applied after QLF examination and mineral loss was recorded. The following result were obtained : 1. Comparing with mean difference of optical density, plasma arc lamp was higher than other light sources in all group (p<0.05). 2. Comparing each group with mean difference of optical density, there was significant different using plasma are lamp and halogen lamp. 3. For use of dye-enhanced QLF, comparing with mean difference of optical density, plasma arc lamp were higher than other light sources in all group(p<0.05). 4. With this model dye-enhanced QLF compared with QLF in optical density, dye-enhanced QLF was higher than QLF in optical density. From the results presented in this paper, it was concluded that plasma light source was more effective compared with other light source for the detection and the quantification of early enamel caries.

• Journal of Surface Science and Engineering
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• v.39 no.3
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• pp.93-97
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• 2006

Polymer light emitting diodes (PLEDs) are expected to be commercialized as next generation displays by advantages of the fast response time, low driving voltage and easy manufacturing process for large sized flexible display. Generally, the electrical and optical properties of PLEDs are affected by the surface conditions of transparent electrode. The PLED devices with ITO/PEDOT:PSS/PVK/PFO-poss/LiF/Al structures were prepared by using the spin coating method. For this, PEDOT:PSS(poly(3,4-ethylenedioxythiophene):poly(styrene sulfolnate)) Al 4083 and PVK(N-vinylcabozole) were used as hole injection and transport layers. The PFO-poss(poly(9,9-dioctylfluorene)) was used as the emitting layer. The dependence of $O_2$ plasma treatment of ITO electrode on the electrical and optical properties of PLEDs were investigated. The sheet resistances increased slightly with an improved surface roughness of ITO electrode as the RF power increased during $O_2$ plasma treatment. The PLED devices prepared on the ITO/Glass substrates, which were plasma-treated at 40 watt in RF power for 30 seconds under 40 mtorr $O_2$ pressure, showed the maximum external emission efficiency of 0.86 lm/W and the maximum luminance of $250\;cd/m^2$, respectively. The CIE color coordinates are ranged $X\;=\;0.13{\sim}0.18$ and $Y\;=\;0.10{\sim}0.16$, showing blue color. emission.

• Tribology and Lubricants
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• v.18 no.4
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• pp.305-311
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• 2002

Three different kinds of brake discs including two coated brake discs and one steel disc were tested under the same experimental conditions on a reduced scale braking test bench. A braking test bench was specially designed to analyse thermo-mechanical and frictional behaviors of two types of brake with different sizes in stop and hold braking modes. Plasma spray coating technique was also used to coat the discs with ceramic powder. During the test four commercial brake pads were coupled with discs. Ceramic coated discs showed good stability in friction coefficient at high speed and high energy braking conditions. But they caused large wear loss of pad mass compared with the steel disc. It was shown that thermal barrier effect in ceramic coated discs adjusted the thermal partition between pad and disc. For a steel disc. it showed fluctuating friction coefficient at high speed but small wear loss of pad mass compared with ceramic coated discs.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2002.10b
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• pp.429-430
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• 2002

In this study, three kinds of brake: discs including two coated brake discs and one steel disc were tested under the same experimental conditions on a reduced scale braking test bench. Plasma spray coating technique was used to coat ceramic powder on the discs. In the test, four commercial sintered brake pads were coupled with discs. Ceramic coated discs have shown good stability in friction coefficient at high speed and high energy braking conditions. However, ceramic coated discs caused more wear loss of pad mass than the steel disc. It was shown that thermal barrier effect in ceramic coated discs adjusted the thermal partition between pad and disc. Steel disc showed fluctuating friction coefficient at high speed but less wear loss of pad mass than ceramic coated discs.