• Title/Summary/Keyword: plasma coating

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Mechanical and electrical properties of ta-C coating Using the Filtered Vacuum Arc System (FVAS 시스템을 이용한 기계적 및 전기적 특성이 우수한 ta-C 코팅막 형성 연구)

  • Gang, Yong-Jin;Jang, Yeong-Jun;Kim, Jong-Guk
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2016.11a
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    • pp.155-155
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    • 2016
  • DLC (Diamond like Carbon)는 Diamond와 유사한 물리화학적 특성을 보유한 막으로 고경도 및 우수한 내마모성, 화학적 안정성의 특성을 가지고 있다. DLC는 크게 카본의 막 형성 공정에서 카본 소스에 따라 수소가 포함된 DLC와 무수소 DLC 로 구분된다. Tetrahedral amorphous carbon (ta-C) 박막은 DLC 박막 중에서 가장 다이아몬드와 유사한 특성을 가지는 박막으로, a:C-H에 비해 고온안정성, 높은 경도 (30~80 GPa) 및 내마모 특성이 우수하여, 현재 다양한 응용분야에 적용되고 있으며, 최근에는 고내구성을 보유하면서 전기적 특성을 가지는 기능성 DLC막의 요구가 증대하고 있다. 본 연구에서는 무수소 DLC 형성을 위해 자장필터가 장착된 Filtered Vacuum Arc Source (FVAS)를 자체적으로 개발하여 연구를 수행하였다. FVAS 장비는 카본 이온 발생부와 Plasma Duct 부위, 전자석부위 구성되어 있으며, 본 연구에서는 Plasma Duct 부위의 Bias 제어를 통한 음극에서 기판으로 이동하는 카본이온의 에너지 및 flux 변화를 통해 ta-C 막의 전기적, 기계적 물성 연구를 진행하였다. Plasma Duct Bias 변화는 각 0 ~ 20 V 조건으로 진행하였으며, 물성 평가는 경도 (Hardness), 마찰계수, 전기적 특성에 대한 분석을 진행하였다. 박막의 증착 거동에서는 Plasma Duct bias 변화에 따라 10 V에서 가장 높은 증착 거동을 가지다 감소하는 경향을 확인 하였으며, 박막의 물성 특성 평가 시에도 이와 유사하게 특성의 차이를 관찰하였다. 이는 음극부위에서 형성된 카본이온이 기판에 도달 시에 Plasma Duct Bias 변화에 따라 이온의 Flux 및 에너지 변화로 인한 박막의 밀도 및 ta-C 막의 물성 변화로 예상되며, 이를 분석하기 위해 라만 분석법을 통해 증명하였다.

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A Study on the Ozone Reduction of Plasma Devices by Catalyst Method (촉매법을 적용한 오존 저감형 플라즈마 기기)

  • Jeon, Sin Young;Kim, Dong Jun;Kim, Jong Yeop;Gwon, Jin Gu;Jeon, Young Min;Do, Gye Ryung;Lee, Seong Eui
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.34 no.1
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    • pp.56-62
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    • 2021
  • In this study, we created a DBD plasma device and a MnO2 catalyst mesh filter for evaluating ozone reduction of devices via the catalyst method. The DBD plasma device was manufactured by applying Ag paste to soda lime glass via the screen-printing method. The MnO2 catalyst mesh filter was manufactured by mixing MnO2 powder with binder with a 10% difference in concentration from 10% to 50% and then applying it using the dip-coating method. Finally, we sintered a MnO2 catalyst mesh filter in an electric furnace. We evaluated the characteristics of ozone generation according to the Ar gas flow of DBD plasma devices, the opening ratio, and ozone reduction performance of the MnO2 catalyst filters. Ozone reduction performance was approximately 20.4% at MnO2 10 wt%, 37.8% at MnO2 30 wt% and 50% at MnO2 50 wt%.

Surface Modification of TiO2 Thin Films by N2 Atmospheric Plasma and Evaluation of Photocatalytic Activity (질소 상압플라즈마를 이용한 TiO2 박막의 표면개질 및 광활성 평가)

  • Lim, Gyeong-Taek;Kim, Kyung Hwan;Park, Jun;Kim, Kyoung Seok;Park, Yu Jeoung;Song, Sun-Jung;Kim, Jong-Ho;Cho, Dong Lyun
    • Applied Chemistry for Engineering
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    • v.20 no.4
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    • pp.402-406
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    • 2009
  • $TiO_2$ thin films were surface-modified with atmospheric plasma and their photocatalytic activities were evaluated. The films were deposited on glass plates by dip-coating in a $TiO_2$ sol-gel solution and sintered at various temperatures for various times. Nitrogen plasma was used for the modification and the experiments were carried out varying operational parameters such as discharge power and treatment time. Photocatalytic activity was evaluated based on the degradation efficiency of methylene blue (MB) under irradiation of UV-A and fluorescent light. According to XPS analysis, a little amount of nitrogen was found to be doped in the film surface after the modification. As a result, photocatalytic activity increased under irradiation of UV-A and fluorescent light, especially fluorescent light.

Friction and Wear Properties of Plasma-sprayed Cr2O3-MoO3 Composite Coatings at High Temperature (MoO3가 첨가된 Cr2O3 플라즈마 용사코팅의 고온 마찰 마멸 특성)

  • Lyo, In-Woong;Ahn, Hyo-Sok;Lim, Dae-Soon
    • Journal of the Korean Ceramic Society
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    • v.39 no.9
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    • pp.851-856
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    • 2002
  • Tribological behavior of plasma-sprayed $Cr_2O_3$-based coatings containing $MoO_3$ at 450$^{\circ}C$ was investigated to understand the influence of $MoO_3$. A reciprocal disc-on-plate type tribo-tester was employed to examine fricition and wear behavior of the specimens. The microstructure and phase composition of the coating was characterized with Transmission Electron Microscopy(TEM). The TEM analysis indicated that $MoO_3$ was dispersed into the grain boundary, resulting in the increase of the hardness and density of the coating. Worn surfaces were investigated by scanning electron microscopy and chemistry of the worn surfaces was analyzed using a X-ray Photoelectron Spectrometer(XPS). The results showed that the friction coefficient of the $MoO_3$-added coatings was lower than that without $MoO_3$ addition. The larger protecting layers were observed at the worn surface of plasma spray coated specimens with $MoO_3$ composition in the protecting layer appears to be more favorable in reducing the friction.

Heat or radiofrequency plasma glow discharge treatment of a titanium alloy stimulates osteoblast gene expression in the MC3T3 osteoprogenitor cell line

  • Rapuano, Bruce E.;Hackshaw, Kyle;Macdonald, Daniel E.
    • Journal of Periodontal and Implant Science
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    • v.42 no.3
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    • pp.95-104
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    • 2012
  • Purpose: The purpose of this study was to determine whether increasing the Ti6Al4V surface oxide negative charge through heat ($600^{\circ}C$) or radiofrequency plasma glow discharge (RFGD) pretreatment, with or without a subsequent coating with fibronectin, stimulated osteoblast gene marker expression in the MC3T3 osteoprogenitor cell line. Methods: Quantitative real-time polymerase chain reaction was used to measure changes over time in the mRNA levels for osteoblast gene markers, including alkaline phosphatase, bone sialoprotein, collagen type I (${\alpha}1$), osteocalcin, osteopontin and parathyroid hormone-related peptide (PTH-rP), and the osteoblast precursor genes Runx2 and osterix. Results: Osteoprogenitors began to differentiate earlier on disks that were pretreated with heat or RFGD. The pretreatments increased gene marker expression in the absence of a fibronectin coating. However, pretreatments increased osteoblast gene expression for fibronectin-coated disks more than uncoated disks, suggesting a surface oxide-mediated specific enhancement of fibronectin's bioactivity. Heat pretreatment had greater effects on the mRNA expression of genes for PTH-rP, alkaline phosphatase and osteocalcin while RFGD pretreatment had greater effects on osteopontin and bone sialoprotein gene expression. Conclusions: The results suggest that heat and RFGD pretreatments of the Ti6Al4V surface oxide stimulated osteoblast differentiation through an enhancement of (a) coated fibronectin's bioactivity and (b) the bioactivities of other serum or matrix proteins. The quantitative differences in the effects of the two pretreatments on osteoblast gene marker expression may have arisen from the unique physico-chemical characteristics of each resultant oxide surface. Therefore, engineering the Ti6Al4V surface oxide to become more negatively charged can be used to accelerate osteoblast differentiation through fibronectin-dependent and independent mechanisms.

Effect of Na2P2O7 Electrolyte and Al Alloy Composition on Physical and Crystallographical Properties of PEO Coating Layer : II. Crystallographic Analysis of PEO Layer (플라즈마 전해 산화 코팅에 있어서 인산염 전해액과 모재 성분 변화가 Al 산화피막 물성에 미치는 영향 II. PEO 층의 결정상 분석)

  • Kim, Bae-Yeon;Kim, Jeong-Gon;Lee, Deuk-Yong;Kim, Yong-Nam;Jeon, Min-Seok;Kim, Sung-Youp;Kim, Kwang-Youp
    • Journal of the Korean Ceramic Society
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    • v.49 no.3
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    • pp.247-252
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    • 2012
  • Crystal structure and chemical compositions of Plasma electrolytic oxidized layer of A-1100, A-2024, A-5052, A-6061, A-6063, A-7075, ACD-7B and ACD-12 were investigated. The electrolyte for plasma electrolytic oxidation was mixture of distilled water, $Na_2P_2O_7$, Cu, Cr metal salts and KOH. ${\eta}$-Alumina, as well as ${\alpha}$-alumina, was main crystal phase. Another crystals such as $(Al_{0.948}Cr_{0.052})_2O_3$ and $(Al_{0.9}Cr_{0.1})_2O_3$ were also formed in the oxide layer. It was thought that the effect of electrolyte compositions on the physical properties and crystal system of PEO layers was greater than the effect of Al alloy composition variation.

Effect of Na2P2O7 Electrolyte and Al Alloy Composition on Physical and Crystallographical Properties of PEO Coating Layer : I. Physical Properties of PEO Layer (플라즈마 전해 산화 코팅에 있어서 인산염 전해액과 모재 성분 변화가 Al 산화피막 물성에 미치는 영향 I. PEO층의 물성)

  • Kim, Bae-Yeon;Kim, Jeong-Gon;Lee, Deuk-Yong;Jeon, Min-Seok;Kim, Yong-Nam;Kim, Sung-Youp;Kim, Kwang-Youp
    • Journal of the Korean Ceramic Society
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    • v.49 no.3
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    • pp.241-246
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    • 2012
  • Physical properties of plasma electrolytic oxidized layers of 8 different kinds of Al alloys, A-1100, A-2024, A-5052, A-6061, A-6063, A-7075, ACD-7B and ACD-12 were investigated. The electrolyte for plasma electrolytic oxidation was mixture of distilled water, $Na_2P_2O_7$, KOH and some metal salts. Growth rate of oxide layer was slower in $Na_2P_2O_7$ electrolyte system than in $Na_2SiO_3$ system, and Ra50 surface roughness of oxidized layer was below $1.2{\mu}m$. Surface hardness in $Na_2P_2O_7$ electrolyte system is higher than in $Na_2SiO_3$ system, and roughness was lower in $Na_2P_2O_7$ electrolyte system than in $Na_2SiO_3$ system.

Influence of the Duty Cycle on the Characteristics of Al2O3 Coatings Formed on the Al-1050 by Plasma Electrolytic Oxidation (Al-1050 위에 플라즈마 전해 산화법으로 형성된 Al2O3 피막 특성에 미치는 듀티사이클의 영향)

  • Nam, Kyung-Su;Moon, Jung-In;Kongsy, Phimmavong;Song, Jeong-Hwan;Lim, Dae-Young
    • Journal of the Korean Ceramic Society
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    • v.50 no.2
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    • pp.108-115
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    • 2013
  • Oxide coatings were prepared on Al-1050 substrates by an environment-friendly plasma electrolytic oxidation (PEO) process using an electrolytic solution of $Na_2SiO_3$ (8 g/L) and NaOH (3 g/L). The effects of three different duty cycles (20%, 40%, and 60%) and frequencies (50 Hz, 200 Hz, and 800 Hz) on the structure and micro-hardness of the oxide coatings were investigated. XRD analysis revealed that the oxides were mainly composed of ${\alpha}-Al_2O_3$, ${\gamma}-Al_2O_3$, and mullite. The proportion of each crystalline phase depended on various electrical parameters, such as duty cycle and frequency. SEM images indicated that the oxide coatings formed at a 60% duty cycle exhibited relatively coarser surfaces with larger pore sizes and sintering particles. However, the oxides prepared at a 20% duty cycle showed relatively smooth surfaces. The PEO treatment also resulted in a strong adhesion between the oxide coating and the substrate. The oxide coatings were found to improve the micro-hardness with the increase of duty cycle. The structural and physical properties of the oxide coatings were affected by the duty cycles.

Fabrication of Graphene p-n Junction Field Effect Transistors on Patterned Self-Assembled Monolayers/Substrate

  • Cho, Jumi;Jung, Daesung;Kim, Yooseok;Song, Wooseok;Adhikari, Prashanta Dhoj;An, Ki-Seok;Park, Chong-Yun
    • Applied Science and Convergence Technology
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    • v.24 no.3
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    • pp.53-59
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    • 2015
  • The field-effect transistors (FETs) with a graphene-based p-n junction channel were fabricated using the patterned self-assembled monolayers (SAMs). The self-assembled 3-aminopropyltriethoxysilane (APTES) monolayer deposited on $SiO_2$/Si substrate was patterned by hydrogen plasma using selective coating poly-methylmethacrylate (PMMA) as mask. The APTES-SAMS on the $SiO_2$ surface were patterned using selective coating of PMMA. The APTES-SAMs of the region uncovered with PMMA was removed by hydrogen plasma. The graphene synthesized by thermal chemical vapor deposition was transferred onto the patterned APTES-SAM/$SiO_2$ substrate. Both p-type and n-type graphene on the patterned SAM/$SiO_2$ substrate were fabricated. The graphene-based p-n junction was studied using Raman spectroscopy and X-ray photoelectron spectroscopy. To implement low voltage operation device, via ionic liquid ($BmimPF_6$) gate dielectric material, graphene-based p-n junction field effect transistors was fabricated, showing two significant separated Dirac points as a signature for formation of a p-n junction in the graphene channel.

High Temperature Combustion Behavior of Carbon/Carbon Composites Coated with SiC (탄화규소로 도포된 탄소/탄소 복합재의 고온 연소거동)

  • Choi, Don-Mook;Kim, Joung-Il
    • Journal of the Korean Society of Hazard Mitigation
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    • v.1 no.1 s.1
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    • pp.127-138
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    • 2001
  • Although Carbon/Carbon Composites(CFRCs) have excellent mechanical properties at high temperature, the disadvantage of combustion in air restricts their applications. Thus a lot of investments have been studied to improve the drawback of CFRCs. In this study, SiC used as a thermal protective coating material possesses almost the same expansion coefficient compared to that of carbon, so SiC was coated on 4D (directional) CFRCs by Pack-Cementation process. For the 4D CFRCs coated with SiC, optical microscopy observations were performed to estimate the coating mechanism involved and TGA tests were also performed to evaluate the improvement of combustion resistance. And their high temperature combustion properties were investigated by the arc torch plasma test. From the results, it is found that the mechanical properties and high temperature combustion properties of the 4D(directional) CFRCs coated with SiC were much better than bare 4D CFRCs.

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