• Bulletin of the Korean Chemical Society
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• v.30 no.3
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• pp.595-598
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• 2009

The authors describe an analytical method to determine total chlorine in a sanitizer liquid, incorporating a lab-made He-rf-plasma within a PDMS polymer microchip. Helium was used instead of Ar to produce a plasma to achieve efficient Cl excitation. A quartz tube 1 mm i.d. was embedded in the central channel of the polymer microchip to protect it from damage. Rotational temperature of the He-microchip plasma was in the range 1350-3600 K, as estimated from the spectrum of the OH radical. Chlorine was generated in a volatilization reaction vessel containing potassium permanganate in combination of sulfuric acid and then introduced into the polymer microchip plasma (PMP). Atomic emission lines of Cl at 438.2 nm and 837.7 nm were used for analysis; no emission was observed for Ar plasma. The achieved limit of detection was 0.81 ${\mu}g\;mL^{-1}$ (rf powers of 30-70 W), which was sensitive enough to analyze sanitizers that typically contained 100-200 ${\mu}g\;mL^{-1}$ of free chlorine in chlorinated water. This study demonstrates the usefulness of the devised PMP system in the food sciences and related industries.

• Corrosion Science and Technology
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• v.17 no.3
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• pp.91-100
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• 2018

Development of biodegradable implants for treatment of complex bone fractures has recently become one of the priority areas in biomedical materials research. Multifunctional corrosion resistant and bioactive coatings containing hydroxyapatite $Ca_{10}(PO_4)_6(OH)_2$ and magnesium oxide MgO were obtained on Mg-Mn-Ce magnesium alloy by plasma electrolytic oxidation. The phase and elemental composition, morphology, and anticorrosion properties of the coatings were investigated by scanning electron microscopy, energy dispersive spectroscopy, potentiodynamic polarization, and electrochemical impedance spectroscopy. The PEO-layers were post-treated using superdispersed polytetrafluoroethylene powder. The duplex treatment considerably reduced the corrosion rate (>4 orders of magnitude) of the magnesium alloy. The use of composite coatings in inducing bioactivity and controlling the corrosion degradation of resorbable Mg implants are considered promising. We also applied the plasma electrolytic oxidation method for the formation of the composite bioinert coatings on the titanium nickelide surface in order to improve its electrochemical properties and to change the morphological structure. It was shown that formed coatings significantly reduced the quantity of nickel ions released into the organism.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.07a
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• pp.3-6
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• 2002

Plasma processing plays a significant role in semiconductor devices technology. Development of new plasma systems, such as high-density plasma reactors, required development of plasma theory to understand a whole process mechanism and to be able to explain and to predict processing results. A most important task in this way is to establish interconnections between input process parameters (working gas, pressure, flow rate, input power density) and various plasma subsystems (electron gas, volume and heterogeneous gas chemistry, transport), which are closely connected one with other. It will allow select optimal ways for processes optimization.

• Journal of the Semiconductor & Display Technology
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• v.16 no.2
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• pp.75-78
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• 2017

We reports improved monitoring performance of Self plasma-optical emission spectroscopy (SP-OES) by augmenting a by-pass tube to a conventional straight (or single) tube type self plasma reactor. SP-OES has been used as a tool for the monitoring of plasma chemistry indirectly in plasma process system. The benefits of SP-OES are low cost and easy installation, but some semiconductor industries who adopted commercialized SP-OES product experiencing less sensitivity and slow sensor response. OH out-gas chemistry monitoring was performed to have a direct comparison of a conventional single type tube and a by-pass type tube, and fluid dynamic simulation on the improved hardware design was also followed. It is observed faster pumping out of OH from the chamber in the by-pass type SP-OES.

• Journal of Industrial and Engineering Chemistry
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• v.67
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• pp.380-387
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• 2018

Finding poly(amidoxime) (PAO) based adsorbent with better performance in U(VI) extraction from seawater is a hot research topic. By employing plasma treatment, the bi-functionalized adsorbents containing amidoxime and phosphate (labelled as $PO_4/PAO$) were successfully synthesized. The obtained $PO_4/PAO$ was characterized and applied for the potential extraction of U(VI) from aqueous solution. The results show that $-PO_4$ enhanced the hydrophilicity of PAO. $PO_4/PAO$ possesses good selective sorption ability for U(VI) and excellent reusability. The findings is helpful to understand optimizing performance of PAO based adsorbents for uranium extraction from seawater.

• Applied Chemistry for Engineering
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• v.35 no.1
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• pp.8-15
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• 2024

In this study, nitrogen plasma treatment was performed in 5, 10, and 15 minutes to improve the tetracycline adsorption performance of activated carbon. All nitrogen plasma-treated activated carbons showed improved tetracycline adsorption compared to untreated activated carbons. The nitrogen functional groups in activated carbon lead to chemisorption with tetracycline via π-π interactions and hydrogen bonding. In particular, in the nitrogen plasma treatment at 80 W and 50 kHz, the activated carbon treated for 10 minutes had the best adsorption performance. At this time, the nitrogen content on the surface of the activated carbon was 2.03% and the specific surface area increased to 1,483 m²/g. As a result, nitrogen plasma treatment of activated carbon improved its physical and chemical adsorption capabilities. In addition, since the adsorption experimental results were in good agreement with the Langmuir isotherm and pseudo-second order model, it was determined that the adsorption of tetracycline on the nitrogen plasma-treated activated carbon was dominated by chemical adsorption through a monolayer. As a result, nitrogen plasma-treated activated carbon can be used as an adsorbent to efficiently remove tetracycline from water due to the synergistic effect of physical adsorption and proactive chemical adsorption.

• 한국연소학회:학술대회논문집
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• 2006.04a
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• pp.144-148
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• 2006

Characteristics of a plasma reactor for partial oxidation of methane, especially focused on the role and effectiveness of plasma chemistry, is investigated. Partial oxidation of methane is investigated using a rotating arc which is a three dimensional version of a typical glidingarc. The rotating arc has both the characteristics of equilibrium and non-equilibrium plasma. Non-equilibrium characteristics of the rotating gliding arc can be increased by rotating an elongated arc string attached at both the tip of inner electrode and the edge of outer electrode. In this way, plasma chemistry can be enhanced and hydrogen selectivity can reach almost 100% that is much higher than thermal equilibrium condition. As a result, the present study enables the strategic approach of the plasma reforming process by means of appropriate reactor design to maximize plasma effect and resulting in maximized reaction efficiency.

• Proceedings of the Korean Vacuum Society Conference
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• 2004.08a
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• pp.226-226
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• 2004

• Applied Chemistry for Engineering
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• v.33 no.2
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• pp.229-233
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• 2022

In this study, a gas-liquid hybrid atmospheric pressure plasma reactor of the dielectric barrier discharge method was fabricated and characterized. The solubility of copper oxide in the organic acid solution was increased when argon having a larger atomic weight than helium was used during plasma discharge. There was no significant effect of mixing organic acid solutions under plasma discharge treatment on the variation of copper oxide's solubility. As the applied voltage for plasma discharge and the concentration of the organic acid solution increased, the dissolution and removal power of the copper oxide layer increased. Solubility of copper oxide was more affected by the concentration in organic acid solution rather than the variation of plasma applied voltage. The usefulness of hybrid plasma reactor for the surface cleaning process was confirmed.

• Journal of Surface Science and Engineering
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• v.36 no.1
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• pp.14-21
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• 2003

Thin films of ZrO$_2$ and TiO$_2$ were deposited on Si(100) substrates using RF magnetron sputtering technique. To study an influence of the sputtering parameters, systematic experiments were carried out in this work. XRD data show that the $ZrO_2$ films were mainly grown in the [111] orientation at the annealing temperature between 800 and $1000^{\circ}C$ while the crystal growth direction was changed to be [012] at above $1000^{\circ}C$. FT-IR spectra show that the oxygen stretching peaks become strong due to $SiO_2$ layer formation between film layers and silicon surface after annealing, and proved that a diffusion caused by either oxygen atoms of $ZrO_2$ layers or air into the interface during annealing. Different crystal growth directions were observed with the various deposition parameters such as annealing temperature, RF power magnitude, and added $O_2$ amounts. The growth rate of $TiO_2$ thin films was increased with RF power magnitude up to 150 watt, and was then decreased due to a sputtering effect. The maximum growth rate observed at 150 watt was 1500 nm/hr. Highly oriented, crack-free, stoichiometric polycrystalline $TiO_2$<110> thin film with Rutile phase was obtained after annealing at $1000^{\circ}C$ for 1 hour.