• Title/Summary/Keyword: plasma application

Search Result 908, Processing Time 0.023 seconds

Application and Progress of Plasma-assisted Chemical Vapor Deposition Process (플라즈마 화학증착법의 발전과 응용)

  • 김선규
    • Journal of Welding and Joining
    • /
    • v.15 no.5
    • /
    • pp.21-24
    • /
    • 1997
  • 화학증착법은 고융점의 경질재료, 고온재료, 고순도와 완벽한 결정성을 필요로 하는 반도체, 초전도체 및 투명전도체 등의 전자재료의 제조와 신소재 개발 등에 이용되고 있다. 그러나 1000.deg.C 부근의 고온에서 증착반응이 이루어짐으로 그 응용범위가 제한되어 있다. 이러한 제한점을 해결하기 위하여 증착온도를 낮추기 위한 방법으로 비교적 저온에서 분해가 가능한 금속유기 화합물을 반응물로 사용하여 증착반응 온도를 낮출 수가 있으며, 실제로 III-V 또는 II-VI 반도체 제조에는 금속유기 화합물에 의한 화학증착법을 이용하고 있으나, 고가의 금속유기 화합물을 사용하여야 하며 금속유기 화합물의 불안정성, 유독성 때문에 사용에 제한을 받고 있다. 최근에는 플라즈마를 부수에너지원으로 공급하여 줌으로써 증착반응의 온도를 더욱 낮추는 연구가 진행되고 있다.

  • PDF

Effects of Hangbisan, an Oriental Medicine, on Body Weight Gain in Diet-Induced Obese (DID) rats

  • Chae, Myoung-Hee;No, Jin-Gu;Jhon, Deok-Young
    • Food Science and Biotechnology
    • /
    • v.15 no.1
    • /
    • pp.158-161
    • /
    • 2006
  • This study was designed to determine possible weight loss effects of Hangbisan, an oriental medicine, on Sprague-Dawley (SD) rats. SD rats that were fed a high-fat diet for 6 weeks to induce obesity and subsequently fed with a basic diet containing 10%(w/w) Hangbisan or 10%(w/w) cellulose for 8 weeks. The Hangbisan fed rats demonstrated a significantly (p<0.05) reduced weight gain compared to the cellulose fed rats as well as a reduced level of plasma cholesterol and triglycerides and an increased level of (HDL)-cholesterol. These results suggest that dietary Hangbisan has an anti-obesity effect in the high-fat diet-induced obesity (DIG) rat and therefore a potential use as an anti-obesity agent in the application of oriental medicine compounds.

Application of Pseud-superplastic PM Process to Ti-Al Intermetallic Compound for MEMS Parts

  • Miyano, Naoki;Kumagai, Yusuke;Yoshimoto, Masayoshi;Nishimura, Yuta;Tanaka, Shigeo;Ameyama, Kei
    • Proceedings of the Korean Powder Metallurgy Institute Conference
    • /
    • 2006.09b
    • /
    • pp.1292-1293
    • /
    • 2006
  • A non-equilibrium powder metallurgy processing such as an MA/SPS (Mechanical Alloying / Spark Plasma Sintering) process is examined in a Ti-48moll%Al. TiAl intermetallic compound is a potential light-weight/high-temperature structural material. One of the major problems, however, limiting the practical use of the material is its poor workability. From this point, the powder metallurgy (PM) processing route has been attractive alternative of the conventional processing for such material The MA/SPS process is able to apply to a LIGA process. Optimization of the pseudo-superplasticity enables to fabricate micro-parts made of fine grained ceramics composites of TiAl by the LIGA process.

  • PDF

Optical and Electrical Properties of $Ti_xSi_{1-x}O_y$ Films

  • Lim, Jung-Wook;Yun, Sun-Jin;Kim, Je-Ha
    • ETRI Journal
    • /
    • v.31 no.6
    • /
    • pp.675-679
    • /
    • 2009
  • $Ti_xSi_{1-x}O_y$ (TSO) thin films are fabricated using plasma-enhanced atomic layer deposition. The Ti content in the TSO films is controlled by adjusting the sub-cycle ratio of $TiO_2$ and $SiO_2$. The refractive indices of $SiO_2$ and $TiO_2$ are 1.4 and 2.4, respectively. Hence, tailoring of the refractivity indices from 1.4 to 2.4 is feasible. The controllability of the refractive index and film thickness enables application of an antireflection coating layer to TSO films for use as a thin film solar cell. The TSO coating layer on an Si wafer dramatically reduces reflectivity compared to a bare Si wafer. In the measurement of the current-voltage characteristics, a nonlinear coefficient of 13.6 is obtained in the TSO films.

Dry Etching Properties of PAR (poly-arylate) Substrate for Flexible Display Application (플렉시블 디스플레이 응용을 위한 폴리아릴레이트 기판의 식각 특성)

  • Hwanga, Jin-Ho
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
    • /
    • v.29 no.12
    • /
    • pp.824-828
    • /
    • 2016
  • In this study, effects of ICP (inductively coupled plasma) treatment on PAR thin film have been investigated. A maximum etch rate of the PAR thin films and the selectivity of PAR to PR were obtained as 110 nm/minand 1.1 in the $CF_4/O_2$ (5:15 sccm) gas mixture. We present the surface properties of PAR thin film with various treatment conditions. The surface morphology and cross section of the PAR thin film was observed by AFM (atomic force microscopy) and FE-SEM (filed emission scanning electron microscopy).

Effect of process pressure on properties of carbon nanotubes prepared by MPECVD (마이크로웨이브를 이용한 탄소나노튜브의 성장시 플라즈마 압력의 효과)

  • Choi, Sung-Hun;Lee, Jae-Hyeong;Yang, Jong-Seok;Park, Dae-Hee
    • Proceedings of the KIEE Conference
    • /
    • 2006.10a
    • /
    • pp.73-74
    • /
    • 2006
  • Carbon nanotubes (CNTs) have recently attracted great attention because of their excellent physical properties, such as high mechanical strength, thermal stability, and electronic properties. These useful properties of carbon nanotubes make themselves good candidates for various application field, such as a transistor, battery, field emission display, nanoscale inter-connects, and so on. Gas-phase techniques offer the unique ability to synthesize well-oriented arrays of CNTs. However, it is seldom reported that the pressure influences on the growth of CNTs under low substrate temperature. In this work, the effect of the working pressure and the influence of the catalyst preparation on the properties of CNTs grown by microwave plasma chemical vapor deposition (MPCVD) were investigated.

  • PDF

An Energy Recovery Circuit for AC Plasma Display Panel with Serially Coupled Load Capacitance-SER1

  • Yang, Jin-Ho;Whang, Ki-Woong;Kang, Kyoung-Ho;Kim, Young-Sang;Kim, Hee-Hwan;Park, Chang-Bae
    • Journal of Information Display
    • /
    • v.2 no.4
    • /
    • pp.63-67
    • /
    • 2001
  • The switching power loss due to the panel capacitance during sustain period in AC PDP driving system can be minimized by using the energy recovery circuits. We proposed a new energy recovery circuit, SER1 (Seoul national univ. Energy Recovery circuit 1st). The experimental results of its application to a 42-inch surface discharge type AC PDP showed superior performance of SER1 in energy recovery efficiency and low distortion voltage waveform. Energy recovery efficiency of SER1 was measured up to 92.3 %, and the power dissipation during the sustain period was reduced by 15.2 W in 2000 pulse/frame compared with serial LC resonance energy recovery circuit.

  • PDF

The Optimum Phosphor Thickness to Obtain the Highest Luminance and Luminous Efficiency in ac PDP

  • Heo, Jeong-Eun;Kim, Young-Kee;Park, Hun-Gun;Park, Chung-Hoo
    • Journal of Information Display
    • /
    • v.2 no.1
    • /
    • pp.14-19
    • /
    • 2001
  • Plasma display panel(PDP) have gained great attention due to their potential application to large-area display including HDTV. The luminance and luminous efficiency of PDP, however, should be improved to realize this goal. In this study, we examined experimentally the effects of phosphor thickness and discharge gap on the luminance and luminous efficiency of ac PDP. For the rib height of 110 ${\mu}m$, whereas the optimum phosphor thickness was about 30 ${\mu}m$. The optimum thickness of green phosphor was about 50 ${\mu}m$ for the rib height of $120{\sim}160\;{\mu}m$.

  • PDF

Emerging roles of exosomes in cancer invasion and metastasis

  • Soung, Young Hwa;Nguyen, Thalia;Cao, Hans;Lee, Janet;Chung, Jun
    • BMB Reports
    • /
    • v.49 no.1
    • /
    • pp.18-25
    • /
    • 2016
  • Recent evidence has indicated that nano-sized vesicles called "exosomes" mediate the interaction between cancer cells and their microenvironment and play a critical role in the development of cancers. Exosomes contain cargo consisting of proteins, lipids, mRNAs, and microRNAs that can be delivered to different types of cells in nascent as well as distant locations. Cancer cell-derived exosomes (CCEs) have been identified in body fluids such as urine, plasma, and saliva from patients with cancer. Although their content depends on tumor type and stage, CCEs merit consideration as prognostic and diagnostic markers, as vehicles for drug delivery, and as potential therapeutic targets because they could transport various oncogenic elements. In this review, we summarize recent advances regarding the role of CCEs in cancer invasion and metastasis, as well as its potential clinical applications. [BMB Reports 2016; 49(1): 18-25]

A Study on the Radiative Heat Transfer Characteristics in the Fluidized Particles Layer (유동입자층에서의 복사열전달 특성에 관한 연구)

  • 김금무;김용모;김경근
    • Journal of Advanced Marine Engineering and Technology
    • /
    • v.18 no.4
    • /
    • pp.33-42
    • /
    • 1994
  • The radiative heat transfer analysis in the fluidized particles layer has important application in many technological areas such as combustion chambers at high pressure and temperature, plasma generators for nuclear fusion, MHD generator using pulverized coal and the liquid droplet radiator used to reject wasted heat from a power plant operating in space. To accurately model the radiation properties of the fluidized particles layer, it is necessary to know the radiation interchange factors of particles in each layer. But the solutions are usually not possible for the equations of radiative heat transfer because it has an inherent difficulty in treating the governing intergo- differential equations, which are derived from the remote effects of radiative heat transfer. In this study, the analysis uses the Monte Carlo simulation method with optical depth model to calculate the radiation interchange factors of particles in each layer with wall and with each other.

  • PDF