대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2006년도 추계학술대회 논문집 전기물성,응용부문
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- Pages.73-74
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- 2006
마이크로웨이브를 이용한 탄소나노튜브의 성장시 플라즈마 압력의 효과
Effect of process pressure on properties of carbon nanotubes prepared by MPECVD
- Choi, Sung-Hun (Kunsan National Univ.) ;
- Lee, Jae-Hyeong (Kunsan National Univ.) ;
- Yang, Jong-Seok (Wonkwang Univ.) ;
- Park, Dae-Hee (Wonkwang Univ.)
- 발행 : 2006.10.27
초록
Carbon nanotubes (CNTs) have recently attracted great attention because of their excellent physical properties, such as high mechanical strength, thermal stability, and electronic properties. These useful properties of carbon nanotubes make themselves good candidates for various application field, such as a transistor, battery, field emission display, nanoscale inter-connects, and so on. Gas-phase techniques offer the unique ability to synthesize well-oriented arrays of CNTs. However, it is seldom reported that the pressure influences on the growth of CNTs under low substrate temperature. In this work, the effect of the working pressure and the influence of the catalyst preparation on the properties of CNTs grown by microwave plasma chemical vapor deposition (MPCVD) were investigated.
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