• 제목/요약/키워드: plasma application

검색결과 908건 처리시간 0.028초

게이트 절연막의 표면처리에 의한 비정질 인듐갈륨징크옥사이드 박막트랜지스터의 계면 상태 조절 (Interface State Control of Amorphous InGaZnO Thin Film Transistor by Surface Treatment of Gate Insulator)

  • 김보슬;김도형;이상렬
    • 한국전기전자재료학회논문지
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    • 제24권9호
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    • pp.693-696
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    • 2011
  • Recently, amorphous oxide semiconductors (AOSs) based thin-film transistors (TFTs) have received considerable attention for application in the next generation displays industry. The research trends of AOSs based TFTs investigation have focused on the high device performance. The electrical properties of the TFTs are influenced by trap density. In particular, the threshold voltage ($V_{th}$) and subthreshold swing (SS) essentially depend on the semiconductor/gate-insulator interface trap. In this article, we investigated the effects of Ar plasma-treated $SiO_2$ insulator on the interfacial property and the device performances of amorphous indium gallium zinc oxide (a-IGZO) TFTs. We report on the improvement in interfacial characteristics between a-IGZO channel layer and gate insulator depending on Ar power in plasma process, since the change of treatment power could result in different plasma damage on the interface.

자기펄스성형법 및 통전가압소결법의 연속공정을 이용한 고밀도 나노 알루미나 세라믹의 제조 (Fabrication of Nanostructured Alumina by the Combined Processes of Magnetic Pulsed Compaction (MPC) and Spark Plasma Sintering (SPS))

  • 이종극;홍순직;이민구;이창규
    • 한국분말재료학회지
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    • 제12권5호
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    • pp.345-350
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    • 2005
  • In this study the nanostructured ${\alpha}-Al_{2}O_3$ ceramics have been fabricated by the combined application of magnetic pulsed compaction (MPC) and subsequent spark plasma sintering (SPS), and their density and hardness properties were investigated. The ${\alpha}-Al_{2}O_3$ prepared by the combined processes showed an increase by $8.4\%$ in density, approaching the value close to the true density, and an enhancement by $210\~400\;Hv$ in hardness, compared to those fabricated by MPC or static compaction method followed by sintering treatment.

병태동물(病態動物)에서의 약물(藥物)의 Hepatic Clearance에 관한 연구(硏究) I -병태가토(病態家兎)에서의 Bromphenol Blue의 간담수송(肝膽輸送)- (Hepatic Drug Clearance of Animal in Disease States I -Hepato-biliary Transport of Bromphenol Blue in Acute $CCl_4$ Intoxicated Rabbits-)

  • 우종학;김신근;이민화;한건
    • Journal of Pharmaceutical Investigation
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    • 제10권1호
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    • pp.13-23
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    • 1980
  • Bromphenol blue (BPB) was studied with rabbits in normal and disease states to understand the basic principles of hepato-biliary transport process, and the effect of disease states on the drug disposition. The time course of plasma concentration and of biliary excretion was studied in normal and $CCl_4$ intoxicated rabbits. A conspicuous retention of BPB clearance from the plasma was observed, and the slope of the first-phase of plasma curve was decreased in the intoxicated rabbits. The shape of biliary excretion was same in normal and intoxicated states, but the amount of BPB excreted into bile in the intoxicated states was much smaller than in normal states. A relationship was found which enables one to predict the pattern of uptake of BPB by the liver, and the pattern of excretion into the bile in normal states, but was not in $CCl_4$ intoxicated states. It may be that the application of this experiments would extend the effect of disease states on the drug disposition.

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Yttirum Oxyfluoride 원료의 고상합성 및 서스펜션 플라즈마 스프레이 코팅 응용 (Solid-State Synthesis of Yttirum Oxyfluoride Powders and Their Application to Suspension Plasma Spray Coating)

  • 박상준;김형순;이성민
    • 한국재료학회지
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    • 제27권12호
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    • pp.710-715
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    • 2017
  • We synthesized YOF(yttirum oxyfluoride) powders through solid state reactions using $Y_2O_3$ and $YF_3$ as raw materials. The synthesis of crystalline YOF was started at $300^{\circ}C$ and completed at $500^{\circ}C$. The atmosphere during synthesis had a negligible effect on the synthesis of the YOF powder under the investigated temperature range. The particle size distribution of the YOF was nearly identical to that of the mixed $Y_2O_3$ and $YF_3$ powders. When the synthesized YOF powders were used as a raw material for the suspension plasma spray(SPS) coating, the crystalline phases of the coated layer consisted of YOF and $Y_2O_3$, indicating that oxidation or evaporation of YOF powders occurred during the coating process. Based on thermogravimetric analysis, the crystalline formation appeared to be affected by the evaporation of fluoride because of the high vapor pressure of the YOF material.

Reduction of surface roughness during high speed thinning of silicon wafer

  • Heo, W.;Ahn, J.H.;Lee, N.E.
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2009년도 제38회 동계학술대회 초록집
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    • pp.392-392
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    • 2010
  • In this study, high-speed chemical dry thinning process of Si wafer and evolution of surface roughness were investigated. Direct injection of NO gas into the reactor during the supply of F radicals from $NF_3$ remote plasmas was very effective in increasing the Si thinning rate due to the NO-induced enhancement of surface reaction but thinned Si surface became roughened significantly. Addition of Ar gas, together with NO gas, decreased root mean square (RMS) surface roughness of thinned Si wafer significantly. The process regime for the thinning rate enhancement with reduced surface roughness was extended at higher Ar gas flow rate. Si wafer thinning rate as high as $22.8\;{\mu}m/min$ and root-mean-squared (RMS) surface roughness as small as 0.75 nm could be obtained. It is expected that high-speed chemical dry thinning process has possibility of application to ultra-thin Si wafer thinning with no mechanical damage.

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아르곤 저온 플라즈마 처리에 의한 CTA 필름의 접착성 연구 (A Study on Adhesive Properties of Cellulose Triacetate Film by Argon Low Temperature Plasma Treatment)

  • 구강;박영미
    • 한국염색가공학회지
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    • 제16권5호
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    • pp.28-34
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    • 2004
  • The polarizing film application exploits the unique physicochemical properties between PVA(Poly vinyl alcohol) film and CTA(Cellulose triacetate) film. However, hardly any research was aimed at improving the adhesion characteristics of the CTA film by radio frequency(RF) plasma treatment at argon(Ar) gaseous state. In this report, we deal with surface treatment technology for protective CTA film developed specifically for high adhesion applications. After Ar plasma, surface of the films is analyzed by atomic force microscopy(AFM), roughness parameter and peel strength. Furthermore, the wetting properties of the CTA film were studied by contact angle analysis. Results obtained for CTA films treated with a glow discharge showed that this technique is sensitive to newly created physical functions. The roughness and peel strength value increased with an increase in treatment time for initial treatment, but showed decreasing trend for continuous treatment time. The result of contact angle measurement refer that the hydrophilicity of surface was increased. AFM studies indicated that no considerable change of surface morphology occurred up to 3 minutes of treatment time, but a considerable uneven of surface structure resulted from treating time after 5 minutes.

방전플라즈마 소결 공정을 이용한 WC-6wt.%Co 소결체 제조 및 기계적 특성 평가 (Fabrication and Mechanical Properties of ultra fine WC-6wt.%Co by Spark Plasma Sintering Process)

  • 박현국;이승민;윤희준;방기상;오익현
    • 대한금속재료학회지
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    • 제49권1호
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    • pp.40-45
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    • 2011
  • Using the spark plasma sintering process (SPS process), the WC-6wt.%Co hard materials were densified using an ultra fine WC-Co powder. The WC-Co was almost completely dense with a relative density of up to 100% after the simultaneous application of a pressure of 60 MPa and the DC pulse current for 3 min without any significant change in the grain size. The average grain size of WC that was produced through this experiment was about $0.2{\sim}0.8{\mu}m$. The hardness and fracture toughness were about $1816kg/mm^2$ and $15.1MPa{\cdot}m^{1/2}$, respectively, for 60 MPa at $1200^{\circ}C$.

방전플라즈마 소결 공정을 이용한 WC-Co-B4C 소재의 기계적 특성평가 (Mechanical Property Evaluation of WC-Co-B4C Hard Materials by a Spark Plasma Sintering Process)

  • 이정한;박현국
    • 한국재료학회지
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    • 제31권7호
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    • pp.397-402
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    • 2021
  • In this study, binderless-WC, WC-6 wt%Co, WC-6wt% 1 and 2.5 B4C materials are fabricated by spark plasma sintering process (SPS process). Each fabricated WC material is almost completely dense, with a relative density up to 99.5 % after the simultaneous application of pressure of 60 MPa. The WC added Co and Co-B4C materials resulted in crystalline growth. The WC with HCP crystal structure has respective interfacial energy (basal facet direction: 1.07 ~ 1.34 J·m-2, prismatic direction: 1.43 ~ 3.02 J·m-2) that depends on the grain growth direction. It is confirmed that the continuous grain growth, biased by the basal facet, which has relatively low energy, is promoted at the WC/Co interface. As abnormal grain growth takes place, the grain size increases more than twice from 0.37 to 0.8 um. It is found through analysis that the hardness property also greatly decreases from about 2661.4 to 1721.4 kg/mm2, along with the grain growth.

플라즈마 질화처리한 사출금형소재의 비정질 탄소계 박막 증착에 따른 기계적 특성 향상 효과 (The effect of mechanical properties of carbon-based thin film on plasma nitrided injection mold steel )

  • 김혜민;김대욱
    • 한국표면공학회지
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    • 제56권5호
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    • pp.328-334
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    • 2023
  • The carbon-based films have various properties, which have been widely applied in industrial application. However, it has critical drawback for poor adhesion between films and metal substrate. In the present work, we have deposited carbon-based films on injection mold steel by plasma assisted chemical vapor deposition (PACVD). In order to improve adhesion, prior to film deposition, the substrate was nitriding-treated using PACVD. And its effect on the adhesion was investigated. Due to the pre-nitriding, the amorphous carbon nitride (a-CN:H) films presented 10 times higher adhesion (34.9 N) than that of un-nitirided. In addition, a friction coefficient was decreased from 0.29 to 0.15 for the amorphous carbon (a-C:H) due to improved adhesion. The obtained results demonstrated that pre-nitriding considerably improved the adhesion, and the relationship among adhesion, hardness, and surface roughness was discussed in detail.

Preliminary study on the use of near infrared spectroscopy for determination of plasma deuterium oxide in dairy cattle

  • Purnomoadi, Agung;Nonaka, Itoko;Higuchi, Kouji;Enishi, Osamu;Amari, Masahiro;Terada, Fuminori
    • 한국근적외분광분석학회:학술대회논문집
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    • 한국근적외분광분석학회 2001년도 NIR-2001
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    • pp.4101-4101
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    • 2001
  • Information of body composition (fat and protein) in living animal is important to determine the nutrients requirement. Deuterium oxide (D2O) dilution techniques, as one of isotope dilution techniques have been useful for the prediction of body composition. However, the determination of D2O concentration is time consuming and complicated. Therefore this study was conducted to develop a new method to predict D2O concentration in plasma using near infrared spectroscopy technique (NIRS). Four dairy cows in early lactation were used. They were fed total mixed ration containing conr silage, timothy hay, and concentrates to make 17.0%CP and 14.0 MJDE/kgDM. Dosing D2O was at week 1,3 and 5 after parturition. After dosing D2O, the blood was collected from hour 0 to 72. Blood samples were then centrifuge at 3,000 rpm for 10 minutes to obtain plasma. D2O concentration was analyzed by gas chromatograph (deuterium oxide analyzable system, HK102, Shokotsusyou) after extracted from plasma by liophilization. Plasma sample was scanned by NIRS using Pacific Scientific (Neotec) model 6500 (Perstorp Analytical, Silver Spring, MD) in the range of wavelength from 1100 to 2500 nm. Calibration equation was developed using multiple linear regression. Sample from one animal (cow #550; n: 74) was used for developing the calibration while the rest three animals were used for validating the equation. The range, R and SEC of the calibration set samples were 135-925 ppm, 0.93 and 48.1 ppm, respectively. Validation of the calibration equation for three individual cows was done and the average of NIR predicted value of D2O at each collection time from three weeks injection showed a high correlation. The range, r and 53 of plasma from cow #474 were 322-840 ppm,0.93 and 53.1; cow #478 were 146-951 ppm,0.95 and 39.8; cow #942 were 313-885 ppm,0.95 and 37.2, respectively. Judgement of accuracy based on ratio of standard deviation and standard error in validation set samples (RPD) for cow #474, #478 and #942 were 2.2,4.3 and 3.4, respectively. The error in application due to the variation between individual was considered smaller than the bias from collection period, however, this prediction can be overcome with correction of standard zero-minute concentration of blood. The results of this preliminary study on the use of NIRS for determination of D2O in plasma showed very promising as shown by a convenient and satisfy accuracy. Further study on various physiological stage of animal should be done.

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