• Title/Summary/Keyword: plasma ALE

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ECR Plasma Pretreatment on Sapphire and Silicon Substrates for ZnO ALE (ZnO ALE를 위한 Si, sapphire기판의 ECR 플라즈마 전처리)

  • Lim Jongmin;Shin Kyoungchul;Lee Chongmu
    • Korean Journal of Materials Research
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    • v.14 no.5
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    • pp.363-367
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    • 2004
  • Recently ZnO epitaxial layers have been widely studied as a semiconductor material for optoelectronic devices. Sapphire and silicon are commonly selected as substrate materials for ZnO epitaxial growth. In this communication, we report the effect of the ECR plasma pretreatment of sapphire and silicon substrates on the nucleation in the ZnO ALE (atomic layer epitaxy). It was found that ECR plasma pretreatment reduces the incubation period of the ZnO nucleation. Oxygen ECR plasma enhances ZnO nucleation most effectively since it increases the hydroxyl group density at the substrate surface. The nucleation enhancing effect of the oxygen ECR plasma treatment is stronger on the sapphire substrate than on the silicon substrate since the saturation density of the hydroxyl group is lower at the sapphire surface than that at the silicon surface.

A review : atomic layer etching of metals

  • Yun Jong Jang;Hong Seong Gil;Gyoung Chan Kim;Ju Young Kim;Chang Woo Park;Do Seong Pyun;Ji Yeon Lee;Geun Young Yeom
    • Journal of the Korean institute of surface engineering
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    • v.57 no.3
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    • pp.125-139
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    • 2024
  • As the limits of semiconductor integration are approached, the challenges in semiconductor processes have intensified. And, for the production of semiconductors with dimensions under a few nanometers and to resolve the issues related to nanoscale device fabrication, research on atomic layer etching (ALE) technology has been conducted. The investigation related to ALE encompasses not only silicon and dielectric materials but also metallic materials. Particularly, there is an increasing need for ALE in next-generation metal materials that could replace copper in interconnect materials. This brief review will summarize the concept and methods of ALE and describe recent studies on potential next-generation metal replacements for copper, along with their ALE processes.

Effect of Ash Tree Leaf Extract on Acetaminophen-Induced Hepatotoxicity in Mice

  • Jeon, Jeong-Ryae;Choi, Joon-Hyuk
    • Food Science and Biotechnology
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    • v.15 no.5
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    • pp.752-755
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    • 2006
  • This study was carried out to investigate the effects of ash tree leaf extract (ALE) on acetaminophen (APAP)-induced hepatotoxicity in mice. Hepatoprotective effects were detected by biochemical analysis of hepatic enzymes and histopathological examination of the liver. BALB/c mice were divided into three groups: 'normal' control mice, APAP-treated control mice, and mice pretreated with ALE and treated with APAP. A single dose of APAP markedly increased levels of plasma aspartate aminotransferase (AST) and alanine aminotransferase (ALT). Light micrographs of liver cells stained with hematoxylin and eosin showed that APAP induced severe centrilobular necrosis, degeneration, and infiltration by inflammatory cells. Moreover, APAP caused the numbers of TUNEL-positive hepatocytes to increase and caused glycogen content to decrease as observed by Periodic acid-Schiff stain. However, pretreatment with ALE for 7 days prior to the administration of APAP significantly decreased plasma levels of AST and ALT. Histological findings demonstrated that ALE pretreatment alleviated APAP-induced liver damage, and induced the regeneration of liver tissue and restoration of glycogen. These results indicate that ash tree leaf extract exerts a protective effect against APAP-hepatotoxicity induced injury.

Application of Laser Ablation Inductively Coupled Plasma Mass Spectrometry for Characterization of U-7Mo/Al-5Si Dispersion Fuels

  • Lee, Jeongmook;Park, Jai Il;Youn, Young-Sang;Ha, Yeong-Keong;Kim, Jong-Yun
    • Nuclear Engineering and Technology
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    • v.49 no.3
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    • pp.645-650
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    • 2017
  • This technical note demonstrates the feasibility of using laser ablation inductively coupled plasma mass spectrometry for the characterization of U-7Mo/Ale5Si dispersion fuel. Our measurements show 5.0% Relative Standard Deviation (RSD) for the reproducibility of measured $^{98}Mo/^{238}U$ ratios in fuel particles from spot analysis, and 3.4% RSD for $^{98}Mo/^{238}U$ ratios in a NIST-SRM 612 glass standard. Line scanning allows for the distinction of U-7Mo fuel particles from the Al-5Si matrix. Each mass spectrum peak indicates the presence of U-7Mo fuel particles, and the time width of each peak corresponds to the size of that fuel particle. The size of the fuel particles is estimated from the time width of the mass spectrum peak for $^{98}Mo$ by considering the scan rate used during the line scan. This preliminary application clearly demonstrates that laser ablation inductively coupled plasma mass spectrometry can directly identify isotope ratios and sizes of the fuel particles in U-Mo/Al dispersion fuel. Once optimized further, this instrument will be a powerful tool for investigating irradiated dispersion fuels in terms of fission product distributions in fuel matrices, and the changes in fuel particle size or shape after irradiation.

Effects of Allium Hookeri Extracts on Glucose Metabolism in Type II Diabetic Mice (당뇨병 마우스(db/db) 모델에서 삼채(Allium Hookeri) 부위별 추출물의 항당뇨 효능 연구)

  • Kim, Nam-Seok;Choi, Bong-Kyoum;Lee, Seon-Hye;Jang, Hwan-Hee;Kim, Jung-Bong;Kim, Haeng-Ran;Choe, Jeong-Sook;Cho, Yong-Sik;Kim, You-Suk;Yang, Jae-Heon;Kim, Young-Soo;Kim, Hyun-Ju;Kim, Dae-Keun;Lee, Chang-Hyun;Lee, Sung-Hyen
    • Korean Journal of Pharmacognosy
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    • v.47 no.2
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    • pp.158-164
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    • 2016
  • This study was conducted to verify the potential of Allium hookeri to control blood glucose metabolism in diabetes model. We fed the experimental diets(ALE, ARE) supplemented with the extract of Allium hookeri leaf or root at 1% of diet to the diabetic mice (C57BLKS/J, db/db) for 8 weeks. Hetero and control mice were fed the control diet without any extract of Allium hookeri leaf or root. At 8th week of feeding the diets, we measured body weight, blood glucose, HbA1c, and plasma insulin levels and conducted an oral glucose tolerance test (OGTT) and staining insulin immunoreactive cells in islets of pancreas. ARE group treated with the root of A. hookeri showed significantly lower blood glucose levels than the Cont group at 120 min in the OGTT. However, HbA1c level was significantly reduced in both ALE and ARE groups, and higher serum insulin levels and increased density of insulin immunoreactive cells compared with the Cont group were found in these 2 groups. Based on these results, A. hookeri is considered to be effective in improving glucose tolerance by partially affecting insulin secretion and it may be used to prevent and treat diabetic disease.