• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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• pp.390-391
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• 2006

This paper describes the design, fabrication and characteristics of a micromachined piezoelectric valve utilizing a multilayer ceramic actuator (MCA). The micromachined MCA valve, which uses a buckling effect, consists of three separate structures: the MCA, the valve actuator die and the seat die. The valve seat die with 6 trenches was made, and the actuator die, which is driven by the MCA under optimized conditions, was also fabricated. After Si wafer direct bonding between the seat die and the actuator die, the MCA was also anodically bonded to the seat/actuator die structure. A polydimethylsiloxane (PDMS) sealing pad was fabricated to minimize the leak rate. Finally, the PDMS sealing pad was also bonded to the seat die and the stainless steel package. The MCA valve shows a flow rate of 9.13 sccm at an applied DC voltage of 100 V with a 50% duty cycle and a maximum non-linearity of 2.24% FS. Therefore, the fabricated MCA valve is suitable for a variety of flow control equipment, as a medical bio-system and in the automobile industry.

• 한국항공우주학회지
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• 제43권11호
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• pp.963-970
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• 2015

본 연구에서는 압전유압펌프의 챔버부, 체크밸브, 부하, 펌프구동제어기 등 유압펌프 전체 구성품의 해석 모델링을 통하여 브레이크용 소형 압전유압펌프의 가압 동특성을 해석하였다. 가압 동특성을 해석하기 위해 먼저 적층형 압전작동기가 챔버내에서 압력을 형성하는 과정을 모델링하였다. 체크밸브 개도에 따른 유량계수 식을 얻기 위해, 유한요소코드 해석을 통해 체크밸브 압력분포 및 유동결과를 얻은 후 체크밸브 유량계수식을 커브 피팅으로 유도하였다. 또한 부하압력을 피드백 받아 작동기 입력전압을 제어하여 부하압력이 입력명령 압력을 잘 추종하도록 펌프구동제어기를 설계하였다. 시뮬레이션 결과 브레이크 작동에 필요한 정상작동압력까지 도달하는데 걸리는 시간은 약 0.03ms 정도이다. 본 연구에서 얻어진 해석 시뮬레이션 결과는 실제 실험결과와 비교를 통해 타당성을 검증하였다.

• 유공압시스템학회논문집
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• 제3권2호
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• pp.1-6
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• 2006

The pressure regulator which is used for controlling the reducing pressure in the piezoelectrically driven pneumatic valve has been studied. The pneumatic valve of this study object is 2-stage type and consists of a piezoelectric actuator, a controller, a poppet valve and a pressure regulator. Nominal flow of 50 lpm, maximum operating pressure of 0.9MPa and frequency characteristic of 10Hz and over are required in this pneumatic valve, but the pressure regulator is needed because piezoelectric actuator has no ability to control the pressure of 0.9MPa directly. In this study, bimorph type PZT actuator of $25.2mm(L){\times}7.2mm(W){\times}0.5mm(H)$ with constant of $-220{\times}10-12$ CN-1 was proposed and investigated. Maximum operating force of 0.052 N and maximum displacement of $63{\mu}m$ were gotten from the fabricated PZT actuator. From the analysis results, the orifice diameter of 0.6mm for a piezoelectric actuator was derived and then the pressure regulator which can be operated under 0.15 MPa easily was designed and manufactured. Performance and effects of design parameters were simulated by the Simulink of Matlab software, and it was confirmed that the performance characteristics of manufactured pressure regulator are superior in the common use pressure range of 0.5 MPa to 0.7 MPa. The results show that the proposed pressure regulator is suitable for the pneumatic valve with a PZT actuator.

• 설비공학논문집
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• 제19권5호
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• pp.411-417
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• 2007

This study has been conducted to investigate pumping characteristics of diffuser/nozzle based piezoelectric micropumps. The micropumps include a piezo disk (an actuator), a chamber and a set of diffuser and nozzle. Flow in the current micropumps is controlled by a set of diffuser and nozzle, not by a nap valve. The diffuser/nozzle based micropumps are more reliable in operation and are easier in manufacturing than the flap valve based micropumps. The flow rates of the piezoelectric micropumps have been closely analyzed with a numerical calculation. It has been found that the positions of the inlet and outlet of the micropump can influence the performance of the diffuser/nozzle based piezoelectric micropumps. This study may provide fundamental understanding for the design and analysis of the piezoelectric micropumps.

• 항공우주시스템공학회지
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• 제12권2호
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• pp.7-14
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• 2018

본 연구에서는 소형 압전유압펌프가 적용된 브레이크 시스템의 부하압 개선을 위해 체크밸브에 대한 연구를 수행하였다. 가압 과정에서 부하의 정상상태 압력은 챔버압과 부하압이 체크밸브에 작용하는 단면적 비에 영향을 받는다. 체크밸브 유로 덮개는 역류 방지를 위해 유로의 단면적보다 넓게 제작되었기 때문에 단면적 비 조절을 위해 박판 스프링 형 체크밸브에 부가질량을 부착하는 방식을 제안하였다. 부가질량 부착에 의한 부하압 개선 효과를 확인하기 위해 상용코드를 이용하여 소형 압전유압펌프가 적용된 단순 브레이크 시스템의 모델링을 수행하였다. 모델링의 검증을 위해 부가질량이 부착되지 않은 박판 스프링 형 체크밸브를 적용한 펌프의 가압 실험결과와 시뮬레이션 결과를 비교하였다. 검증된 아메심 모델링에 부가질량을 추가하였고 시뮬레이션을 통해 단면적 비 조절에 의한 고 부하압 형성 효과를 확인하였다. 부가질량 추가에 따른 소형 압전유압펌프 구성품을 새롭게 설계/제작한 후 브레이크 시스템의 가압 성능 실험을 수행하여 부하압 35% 의 성능 개선을 확인하였다.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2004년도 추계학술대회
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• pp.951-955
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• 2004

Piezoelectric(PZT) actuator can substitute for solenoid which is used in fluid control field because it has faster response times and no possibility of explosion. Besides, it is available in a high temperature and it has low energy consumption. In this study, pneumatic micro valve, bimorph type PZT actuator using the softner type PZT, carbon plate as a shim and its controller circuit were suggested and investigated. Performance tests and characteristics analysis, such as displacement, force, hysteresis and frequency properties, were carried out. The displacement of the actuator measured at the end point was 63 ${\mu}m$., force of the actuator was 0.052 N and maximum operating frequency was 15Hz. Also, characteristics of the micro valve with PZT actuator were evaluated in a testing system. The results show that the suggested PZT actuator is suitable for micro valve.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 춘계학술대회 논문집 반도체 재료 센서 박막재료 전자세라믹스
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• pp.129-132
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• 2004

This paper describes the design, fabrication and characteristics of a piezoelectric valve using MCA(Multilayer ceramic actuator). The MCA valve, which has the buckling effect, consists of three separate structures; MCA, a valve actuator die and an a seat die. The design of the actuator die was done by FEM modeling and displacement measurement, respectively. The valve seat die with 6 trenches was made, and the actuator die, which is driven to MCA under optimized conditions, was also fabricated. After Si-wafer direct bonding between the seat die and the actuator die, MCA was also anodic bonded to the seat/actuator die structure. PDMS sealing pad was fabricated to minimize a leak-rate. It was also bonded to seat die and SUS package. The MCA valve shows a flow rate of 9.13 sccm at a supplied voltage of 100 V with a 50 % duty cycle, maximum non-linearity was 2.24 % FS and leak rate was $3.03{\times}10^{-8}\;pa{\cdot}m^3/cm^2$. Therefore, the fabricated MCA valve is suitable for a variety of flow control equipment, a medical bio-system, automobile and air transportation industry.

• 센서학회지
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• 제13권3호
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• pp.230-235
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• 2004

This paper describes the design, fabrication and characteristics of a piezoelectric valve using MCA(Multilayer ceramic actuator). The MCA valve, which has the buckling effect, consists of three separate structures; MCA, a valve actuator die and an a seat die. The design of the actuator die was done by FEM modeling and displacement measurement, respectively. The valve seat die with 6 trenches was made, and the actuator die, which is driven to MCA under optimized conditions, was also fabricated. After Si-wafer direct bonding between the seat die and the actuator die, MCA was also anodic bonded to the seat/actuator die structure. PDMS sealing pad was fabricated to minimize a leak-rate. It was also bonded to seat die and SUS package. The MCA valve shows a flow rate of 9.13 seem at a supplied voltage of 100 V with a 50% duty cycle, maximum non-linearity was 2.24% FS and leak rate was $3.03{\times}10^{-8}pa{\codt}m^{3}/cm^{2}$. Therefore, the fabricated MCA valve is suitable for a variety of flow control equipment, a medical bio-system, automobile and air transportation industry.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2005년도 춘계학술대회 논문집
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• pp.229-232
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• 2005

This paper presents the design and fabrication of backflow prevented Micropump using the metal membrane. The Micropump is consisted of the lower plate, metal membrane, upper plate and the piezoelectric-element. The lower plate includes the micro channel and the inlet, outlet of the Micropump. The upper plate includes the micro channel and connects the piezoelectric-element. These plate are fabricated on the Pyrex glass wafer by sandblasting process. The metal membrane does roll of check valve that is prevented backflow of the Micropump. The metal membrane is fabricated on the stainless steel by laser machining. Piezoelectric-element is actuated the Micropump and controlled flowing of fluid. The Micropump is fabricated by bonding process of these multi-layer.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 춘계학술대회 논문집
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• pp.93-94
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• 2010