• Journal of the Korean Ceramic Society
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• v.53 no.2
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• pp.171-177
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• 2016

Rhombohedral $Ba(Ti_{0.92}Zr_{0.08})O_3$ single crystals are fabricated using the cost-effective solid-state single crystal growth (SSCG) method; their dielectric and piezoelectric properties are also characterized. Measurements show that (001) $Ba(Ti_{0.92}Zr_{0.08})O_3$ single crystals have an electromechanical coupling factor ($k_{33}$) higher than 0.85, piezoelectric charge constant ($d_{33}$) of about 950 [pC/N], and piezoelectric voltage constant ($g_{33}$) higher than 40 [${\times}10^{-3}Vm/N$]. Especially the $d_{33}$ of (001) $Ba(Ti_{0.92}Zr_{0.08})O_3$ single crystals was by about six times higher than that of their ceramics. Because their electromechanical coupling factor ($k_{33}$) and piezoelectric voltage constant ($d_{33}$, $g_{33}$) are higher than those of soft PZT ceramics, it is expected that rhombohedral (001) $Ba(Ti_{0.92}Zr_{0.08})O_3$ single crystals can be used as "lead-free" piezoelectric materials in many piezoelectric applications such as actuator, sensor, and transducer.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2003.11a
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• pp.1053-1058
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• 2003

Piezoelectric under water acoustic transducer is a kind of device for under water detection working as not only an actuator but also a sensor. The technique that can predict acoustical characteristics of transducer is important for robust design of transducer in harsh underwater environment. This paper represents the development of software for analyzing dynamic characteristics of piezoelectric acoustic transducers based on finite element method. Modal and transient analysis modulo for acoustic transducers are developed TWO dimensional model for Tonpilz transducer is used for the test of the developed nodal and transient analysis modules. and comparison is made with a commercial code, ANSYS.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.05a
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• pp.196-200
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• 2005

Piezoelectric underwater acoustic transducer is a kind of device for underwater detection working as not only an actuator but also a sensor. The technique that can predict acoustical characteristics of transducer is important for robust design of transducer in harsh underwater environment. This paper represents the dynamic analysis of piezoelectric acoustic transducers based on finite element method through USAP software. Two dimensional model of Tonpilz transducer and three dimensional model of Flextensional transducer are generated for the dynamic analysis and some results obtained by USAP are compared with those by ANSYS.

• Journal of Institute of Control, Robotics and Systems
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• v.3 no.4
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• pp.343-349
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• 1997

In a lightly damped cantilever beam, most of the vibration energy is found around natural frequencies. Based on this, a phase delay control for suppressing vibration of the beam is proposed in this paper. This controller is designed to behave like a velocity feedback controller at the frequencies of modes to be controlled. Also, this controller is designed in consideration with uncontrolled modes for robust stability and improving of the sensitivity function of the control system. This phase delay control is applied to vibration suppression of a cantilever beam with a pair of a piezoelectric actuator and a piezoelectric sensor. Experimental results showed that the phase delay control functions efficiently.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.469-470
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• 2006

Piezoelectric transformers based on lead zirconate titanate(PZT) have been received considerable interest because of their wide potential applications in transformer, oscillator, resonance sensor, actuator, acoustic transducer, as well as active slider for hard disk drives. However, for the applications which need a small power supply such as thin and flat displays, micro-robot, micro-system, it is especially necessary to integrate the passive components because they typically need more than 2/3 of the space of the conventional circuit. So, we have fabricated the piezoelectric micro-transformer to supply energy for micro-systems using PZT thin films and MEMS technologies.

• Journal of Sensor Science and Technology
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• v.15 no.1
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• pp.47-52
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• 2006

This paper describes the design, fabrication and characteristics of a buckling microvalve using a MCA (multilayer ceramic actuator). The mechanical and fluidic analysis are done by finite element method. The designed structure is normally closed microvalve using buckling effect, which is consist of three separate structures; a valve seat die, an actuator die and a small piezoelectric actuator. The flow rate of the fabricated MCA valve was 0-8.13 ml/min at the applied pressure of 0-50 kPa. Maximum non-linearity was 2.24 % FS at a duty cycle of 50 %. The maximum pressure was 230 kPa and the leak rate was $3.03{\times}10^{-8}\;Pa{\cdot}m^{3}/cm^{2}$ at a supply voltage of 100 V.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.11 no.5
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• pp.65-72
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• 2002

In this study, actuator, sensor, guide, power transmission element and control method are considered for ultra-precision positioning apparatus. Through previous process, single plane X-Y stage with ultra-precision positioning is manufactured. Global stage for the purpose of materialization with robust system, is combined by using AC servo motor and ball screw and rolling guide. And ultra-precision positioning system is developed by micro stage with elastic hinge type and piezo element. global servo and micro servo for the purpose of materialization positioning accuracy with nm(nanometer) are controlled simultaneously by using incremental encoder and laser interferometer as displacement measurement sensor. Through previous process, ultra-precision positioning system(100mm stroke and $\pm$ l0nm positioning accuracy) with single plane X-Y stage are materialized.

• Smart Structures and Systems
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• v.1 no.3
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• pp.283-308
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• 2005

This paper features about the modeling and design of a fast output sampling feedback controller for a smart Timoshenko beam system for a SISO case by considering the first 3 vibratory modes. The beam structure is modeled in state space form using FEM technique and the Timoshenko beam theory by dividing the beam into 4 finite elements and placing the piezoelectric sensor/actuator at one location as a collocated pair, i.e., as surface mounted sensor/actuator, say, at FE position 2. State space models are developed for various aspect ratios by considering the shear effects and the axial displacements. The effects of changing the aspect ratio on the master structure is observed and the performance of the designed FOS controller on the beam system is evaluated for vibration control.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.246-250
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• 2003

In this study, two new types of micro-grippers in which micro-fingers are actuated by piezoelectric multi-layer benders and stacks are introduced for the manipulation of micrometer-sized objects. First, we constructed a 3-chopstick-mechanism tungsten gripper, which is composed of three chopsticks: two are designed to grip micro-objects, and tile third is used to help grasp and release the objects through overcoming especially electrostatic force among some surface effects including electrostatic, van der Waals forces and surface tension. Second, a 2-chopstick-mechanism silicon micro-gripper that uses an integrated force sensor to control the gripping force was developed. The micro-gripper is composed of a piezoelectric multilayer bender for actuating the gripper fingers, silicon fingertips fabricated by use of silicon-based micromachining, and supplementary supports. The micro-gripper is referred to as a hybrid-type micro-gripper because it is composed of two main components; micro-fingertips fabricated using micromachining technology to integrate a very sensitive force sensor for measuring the gripping force, and piezoelectric gripper finger actuators that are capable of large gripping forces and moving strokes. The gripping force signal was found to have a sensitivity of 667 N/V. To the design of each of components of both of the grippers. a systematic design approach was applied, which made it possible to establish the functional requirements and design parameters of the micro-grippers. The micro-grippers were installed on a manual manipulator to assess its performance in tasks such as moving micro-objects from one position to a desired position. The experiment showed that the micro-grippers function effectively.

• Journal of Sensor Science and Technology
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• v.14 no.5
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• pp.302-307
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• 2005

Precision displacement of less than a few nm resolution was measured in real-time using fiber optic EFPI sensor. The novel method for real-time processing of analyzing EFPI output signal was developed and verified. Linearity in the mean values of interferometric light intensity among adjacent fringes was shown and verified the sinusoidal approximation algorithm that estimates past and coming fringe values. Real-time signal processing program was developed and the intensity signal of the EFPI sensor was transformed to the phase shift with this program. The resolution below $0.36{\sim}8.6$ nm in the displacement range of $0{\sim}300{\mu}m$ was obtained. The nano-positioner with a piezoelectric actuator and the EFPI sensor system was designed and tested. The positioner successfully reached to the desired destination within 1 nm accuracy.