• Journal of Power System Engineering
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• v.7 no.3
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• pp.69-73
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• 2003

In this paper, the relation between displacement of piezoelectric disk and electric field was proposed. From Navier-Stokes equation and Reynold's equation, the relation between flow and gap of plate was determined. This models were further verified by experiments. Based on theoretical study and experimental verification, the proposed model between flow rate and voltage can be used in the design of mass flow controller in gas supplying system.

• Journal of the Korean Society for Nondestructive Testing
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• v.21 no.4
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• pp.434-438
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• 2001

Piezoelectric torsional transducers have been fabricated to generate torsional waves in a rod. The principle of generating torsional wane is based on the use of the circumferential shear motion derived by axial voltage exerted on the piezoelectric disk poled in the circumferential direction. The natural frequency or the piezoelctric torsional dish has been reduced by fabricating Langevin-type torsional transducers. The natural frequecies of the fabricated transducers have been measured and have shown good agreement with the characteristics predicted by analysis.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2012.10a
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• pp.663-664
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• 2012

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2002.10b
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• pp.275-276
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• 2002

Active-head sliders with a unimorph piezoelectric actuator for flying height control were experimentally evaluated. It was found that the normalized stroke of the actuator is 5.2 to 6 nm/V/mm without flying over the disk. However, the normalized adjustment range of flying height is about 1.6 nm/V/mm when the active-head slider is flying over the disk. This value is smaller than the measured value when the slider is not flying, because of the air pressure generated at the active pad when the pad approaches the disk surface.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.339-340
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• 2006

In this paper, disk-type ultrasonic motor using radial and bending vibration modes is newly designed and fabricated to measure its characteristics. As the diameter of elastic body increases, the resonant frequency decreases and its resonant frequency is about 92kHz when the physical dimensions of piezoelectric ceramic and elastic body are 28mm of diameter and 2mm of thickness, and 32mm of diameter and 2mm of thickness, respectively. When the applied voltage is 20Vpp. its speed and torque are 200rpm and 1N, respectively.

• Proceedings of the Materials Research Society of Korea Conference
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• 2009.11a
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• pp.31.1-31.1
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• 2009

In an approach to acclimate ourselves torecent ecological consciousness trend, a lead-free piezoelectric material, bismuth sodium titanate (abbreviated as BNT) based bismuth sodium barium titanate (abbreviated as BNT-BT), was considered as an environment-friendly alternative for a lead based piezoelectric system. Ceramic specimens of0.94[(BixNa0.5)TiO3]-0.06[BaTiO3] (x = 0.500~0.515) compositions were prepared by a modified mixed oxide method. To increase the chemical homogeneity andre action activity, high energy mechanical milling machine and pre-milled nanosized powder has been used. In this method (BixNa0.5)TiO3 (x=0.500~0.515) andBaTiO3 were prepared separately from pre-milled constituent materials at low calcination temperature and then separately prepared BNTX (X=1, 2, 3 and 4) and BT were mixed by high energy mechanical milling machine. Without further calcination step the mixed powders were pressed into disk shape and sintered at $1110^{\circ}C$. Microstructures, phase structures and electrical properties of the ceramic specimens were systematically investigated. Highly dense ceramic specimens with homogenous grains were prepared in spite of relatively low sintering temperature. Phase structures were not significantly influenced by the excess amount Bi. Large variation on the piezoelectric and dielectric properties was detected at relative high excess Bi amounts. When $x{\leq}0.505$, the specimens exhibit insignificant variation in piezoelectric and dielectric constant though depolarization temperature is found to be decreased. Considerable amount of decrease in piezoelectric and dielectric properties are observed with higher excess of Bi amounts ($x{\geq}0.505$). This research indicates the advantages of high energy mechanical milling and importance of proper maintenance of Bi stoichiometry.

• International Journal of Precision Engineering and Manufacturing
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• v.8 no.2
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• pp.44-48
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• 2007

In recent years, the size of plane substrates and semiconductor wafers has increased. As conventional contact transportation systems composed of, for example, carrier rollers, belt conveyers, and robot hands carry these longer and wider substrates, the increased weight results in increased potential for fracture. A noncontact transportation system is required to solve this problem. We propose a new noncontact transportation system combining acoustic viscous and aerostatic forces to provide damage-free transport. In this system, substrates are supported by aerostatic force and transported by acoustic viscous streaming induced by traveling wave deformation of a disk-type stator. A ring-type piezoelectric transducer bonded on the stator excites vibration. A stator with a high Q piezoelectric transducer can generate traveling vibrations with amplitude of $3.2{\mu}m$. Prior to constructing a carrying road for substrates, we clarified the basic properties of this technique and stator vibration characteristics experimentally. We constructed the experimental equipment using a rotational disk with a 95-mm diameter. Electric power was 70 W at an input voltage of 200 Vpp. A rotational torque of $8.5\times10^{-5}Nm$ was obtained when clearance between the stator and disk was $120{\mu}m$. Finally, we constructed a noncontact transport apparatus for polycrystalline silicon wafers $(150(W)\times150(L)\times0.3(t))$, producing a carrying speed of 59.2 mm/s at a clearance of 0.3 mm between the stator and wafer. The carrying force when four stators acted on the wafer was $2\times10^{-3}N$. Thus, the new noncontact transportation system was demonstrated to be effective.

• Journal of the Korean Society for Nondestructive Testing
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• v.12 no.4
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• pp.9-17
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• 1993

Three types of piezoelectric sensors to detect acoustic emission signals were developed and characterized. Epicentral displacement and velocity of a plate to have infinite boundary were calculated by convolution between a Green's function and a simulated source time function to show parabolic rising characteristic. The sensor calibration system set up was composed of a steel plate, a glass capillary, an indentor and a load cell indicator The transient elastic signals were detected by the sensors. The results were compared with the theoretical results and Fast Fourier Transformed. As the results, the sensor fabricated using a disk shape of a piezoelectric PZT element showed resonant characteristics. The sensors fabricated using a conical shape PZT element and a PVDF polymer film showed the wide band characteristics for particle displacement and velocity, respectively. The calculated results showed good agreements with the transient responses in the cases of the wide band sensors and it was confirmed that the simulated source time function had been properly assumed.

• Proceedings of the KIEE Conference
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• 1992.07b
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• pp.753-756
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• 1992

The piezoelectric ceramics of PMS-PZT was made in the radial mode disk. As the results, in the application of filter required conditions: that is, higher-values for piezoelectric properties($K_p$, $Q_m$) and lower-values for stabilities of $F_{\tau}$(temp. coefficient, aging rate), 5PMS-51PT-44PZ composition statified well. This composition was made in the dot-ring type. Asthe results, with increasing $n^2$ both $Q_m$ and S had high values, decreasing $n^2$ both $K_p$ and BW had low values when the diameter of sintered bodies were constant. Therefore, curve of filter characteristic have sharped with increasing $n^2$ and BW broadened with decreasing $n^2$.

• Proceedings of the KSME Conference
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• 2000.04a
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• pp.475-480
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• 2000

A new positioning mechanism with Parallel type actuator using piezoelectric material and with dual type actuators using voice coil motor (VCM) and piezoactuator is proposed for optical disk drive or near-field recording type drive, and high speed position and vibration control are investigated. Parallel type bimorph piezoactuator is used as a fine motion actuator with self-sensing technique, which allows a piezoelectric material to concurrently sense and actuate in a closed loop frame work, and positive position feedback control algorithm is adopted to further control residual vibration. For positioning control of VCM, PID control algorithm is adopted.