A Study of Flow Characteristics using Reynold's Equation on Mass Flow Controller Actuated by Piezoelectric Material

압전체로 구동되는 질량흐름 제어기에서 레이놀즈 방정식을 이용한 유량 특성 연구

In this paper, the relation between displacement of piezoelectric disk and electric field was proposed. From Navier-Stokes equation and Reynold's equation, the relation between flow and gap of plate was determined. This models were further verified by experiments. Based on theoretical study and experimental verification, the proposed model between flow rate and voltage can be used in the design of mass flow controller in gas supplying system.