• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.187-188
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• 2008

An ultrasonic motor of high torque with a new configuration for application in automobiles is proposed. The newly designed stator is a two sided vibrator consisting of a toothed metal disk with a piezoelectric ceramic ring bonded on both faces of the disk which generates a flexural traveling wave along the circumference of disk. In this configuration, the displacement on the surface of stator may not be confined. It also produces a large vibrating force and amplitude because the vibrator is sandwiched by two piezoelectric plates. It is possible to increase the torque by improving the vibration characteristics. To compute the vibration mode of the motor of diameter 48 mm, the finite element method was used. A 6th mode was chosen as the operation mode with a resonance frequency of about 64.4 kHz. According to this design and measured its performance, a prototype was fabricated. The performance measurement of the prototype motor showed that its stall torque was about 1.8 Nm and efficiency was 37% at 60% of the maximum torque.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.04b
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• pp.129-132
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• 2004

This paper describes the design, fabrication and characteristics of a piezoelectric valve using MCA(Multilayer ceramic actuator). The MCA valve, which has the buckling effect, consists of three separate structures; MCA, a valve actuator die and an a seat die. The design of the actuator die was done by FEM modeling and displacement measurement, respectively. The valve seat die with 6 trenches was made, and the actuator die, which is driven to MCA under optimized conditions, was also fabricated. After Si-wafer direct bonding between the seat die and the actuator die, MCA was also anodic bonded to the seat/actuator die structure. PDMS sealing pad was fabricated to minimize a leak-rate. It was also bonded to seat die and SUS package. The MCA valve shows a flow rate of 9.13 sccm at a supplied voltage of 100 V with a 50 % duty cycle, maximum non-linearity was 2.24 % FS and leak rate was $3.03{\times}10^{-8}\;pa{\cdot}m^3/cm^2$. Therefore, the fabricated MCA valve is suitable for a variety of flow control equipment, a medical bio-system, automobile and air transportation industry.

• Electrical & Electronic Materials
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• v.9 no.7
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• pp.652-659
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• 1996

Sintering characteristics and electrical properties of xPb(Mg$_{1}$8/Te$_{1}$8/Mn$_{1}$4/Nb$_{1}$2/) $O_{3}$-(1-x) Pb (Zr$_{1}$2/ $Ti_{1}$2/) $O_{3}$ (x=0.075, 0.1, 0.125) ceramics are investigated. A sintering temperature of ceramics could be reduced to 950.deg. C by a reaction between PbO and B site compound material. The physical properties of 0.1Pb(Mg, Te, Mn, Nb) $O_{3}$ - 0.9Pb(Zr, Ti) $O_{3}$ bulk ceramic with 3wt% glass frit(0.857PbO-0.143W $O_{3}$) were following : den = 7.95 g/cm$^{3}$, T$_{c}$=340.deg. C, .epsilon.$_{33}$= 754, k$_{31}$=0.3 and Q.=1780. The 3-layer piezoelectric transformer by using a tape casting method showed a good monolithic structure, and its voltage setup ratio was 2.5 times higher than that of a single device by using bulk ceramics.s.s.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.339-340
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• 2006

In this paper, disk-type ultrasonic motor using radial and bending vibration modes is newly designed and fabricated to measure its characteristics. As the diameter of elastic body increases, the resonant frequency decreases and its resonant frequency is about 92kHz when the physical dimensions of piezoelectric ceramic and elastic body are 28mm of diameter and 2mm of thickness, and 32mm of diameter and 2mm of thickness, respectively. When the applied voltage is 20Vpp. its speed and torque are 200rpm and 1N, respectively.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.9 no.1
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• pp.74-79
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• 1999

Langasite($La_3Ga_5SiO_14$) is a new piezoelectric material which is similar to quartz, LN($LiNbO_3$) and LT($LiTaO_3$) in its acoustic behavior. In this study, pure Langasite and Lagnasite family groups were synthesized by the solid state reactions in air. The diffusion species for synthesis were investigated and the sintered body was studied on dielectric property to comparison of characteristics. Also, Langasite single crystals were grown by self-designed Czochralski system and characterized.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.10 no.6
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• pp.394-399
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• 2000

Langasite (LGS) is a material hoped to meet needs required of new base materials for future communication devices (e.g.SAW filters). In this study, synthesis of new materials was pursued by developing new compounds with the host structure of Langasite in hopes to obtain materials with improved characteristics; compounds including $La_3$$Ta_{0.5}$$Ga_{5.5}$$O_{14}$(LTG)and $La_3$$Nb_{0.25}$$Ta_{0.25}$$Ga_{5.5}$$O_{14}$(LNTG) were synthesized by solid state reactions. Characteristics of the compound synthesized in question were determined. The single crystals of Langasite-type were grown using the Czochralski method. The growth conditions for LTG and LNTG were studied and were found to be similar to those of LGS. The growth characteristics of LNTG were observed by studying etch pit formation density along the crystal length.

• Journal of the Korean Ceramic Society
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• v.38 no.11
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• pp.980-986
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• 2001

Bragg reflector type FBAR was fabricated on the Si(100) substrate. We measured a frequency response of the resonator at 5.2 GHz and analyzed it by numerical calculation considering actual acoustic losses of each layer in the structure. We fabricated nine layer Bragg reflector of W-SiO$_2$pairs using r.f. sputtering method and fabricated AlN piezoelectric and Al electrodes using pulsed dc sputtering. The return loss(S$_{11}$) of the fabricated Bragg reflector type FBAR was 12 dB at 5.38 GHz and the series resonance frequency(f$_{s}$) was 5.376 GHz and the parallel resonance frequency(f$_{p}$) was 5.3865 GHz. Effective electro-mechanical coupling constant (K$_{eff{^2}}$) and Quality factors(Q$_{s}$), the Figures of Merit of the resonator, were about 0.48% and 411, respectively. We extracted acoustic parameters of AlN piezoelectric and reflection coefficient of the Bragg reflector by numerical calculation. We could know that material acoustic impedance and wave velocity of AlN piezoelectric decreased for intrinsic value and the electromechanical coupling constant(K$_2$) value was very low owing to the poor quality of the AlN piezoelectric. Reflection coefficient of Bragg reflector was 0.99966 and reflection band was very wide from 2.5 to 9.5 GHz.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.37 no.4
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• pp.433-438
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• 2024

Piezoelectric ceramics play an important role in various electronic applications. However, traditional ceramics are difficult to be used in some complicated structures, due to their low flexibility and high brittleness. To solve this problem, this study prepared and investigated ceramic/polymer composites that can utilize a good flexibility of polymers. Polyvinylidene fluoride-trifluoroethylene (PVDF-TrFE) and 0.77(Bi_1/2Na_1/2)TiO₃-0.23SrTiO₃ (BNST23) ceramics were selected to fabricate the composites. Ceramic/polymer composites were prepared using various volume fractions of BNST23 ceramics. The distribution of piezoceramic particles in BNST23/PVDF-TrFE composites was investigated using optical microscopy (OM) and scanning electron microscopy (SEM). The dielectric and piezoelectric properties of the composites were significantly influenced by the volume fraction of the piezoelectric ceramics. As a result, the highest piezoelectric constant (d₃₃) of 56 pC/N was obtained in a composites with 70% volume fraction of BNST23 ceramics. Accordingly, it is expected that BNST23/PVDF-TrFE composites can be applied to various sensor applications.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.11a
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• pp.245-246
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• 2006

A propyl alcohol based sol-gel method was used as to replace the 2-methoxyethanol with 1,1,1 tris (hydroxymethyl) ethane for preparation of pzt piezoelectric ceramic. The powder obtained by this sol-gel process were calcined at $900^{\circ}C$ and followed by the sintering at $1100^{\circ}C$ for ca2 hrs as to reach a pyrochlore-free crystal phase. The characterization of synthesized material was carried out by the XRD analysis and the surface morphology were determined by high resolution scanning electronmicroscopy. Further, the prepared small sized pzt thin powders are likely to be used m various applications.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1998.06a
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• pp.33-36
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• 1998

This paper is a study on a linear ultrasonic motor with a first longitudinal$(L_1)$ and fourth bending $(B_4)$ double-mode rectangular plate. The stator vibrator is composed of an elastic material plate and of a piezo-ceramic element having a motion by electrical excitation. Each strain vector differs by $90^{\circ}$ generate travelling wave with the elliptical displacement motion of a point on the surface. To magnify displacement of longitudinal direction in elliptical displacement motion, the motor has a mechanism of the.displacement enlargement. In this paper, the vibration shape of the stator is simulated using the finite element method. A detailed model considered of the piezoelectric effect and of the exact geometry of the stator is used to calculate the displacement. The position of displacement mechanism is decided by the maximum displacement.