• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.17 no.5
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• pp.515-520
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• 2004

We report on the development of a Piezoelectric valvc that is designed to have a high reliability for fluid control systems, such as mass flow control, transportation and chemical analysis. The valve was fabricated using a MCA(multilayer ceramic actuator), which has a low consumption power, high resolution and accurate control. The fabricated valve is composed of MCA, a valve actuator die and an seat die. The design of the actuator dic was done by FEM(finite element method) modeling, respectively. And, the valve seat die with 6 trenches was made. and the actuator die, which possible to optimize control to MCA, was fabricated. After Si-wafer direct bonding between the seat die and the actuator die, MCA was also anodic bonded to the scat/actuator die structure. PDMS(poly dimethylsiloxane) sealing pad was fabricated to minimize a leak-rate. It was also bonded to scat die and stainless steel package. The flow rate was 9.13 sccm at a supplied voltage of 100 V with a 50 % duty ratio and non-linearity was 2.24 % FS. From these results, the fabricated MCA valve is suitable for a variety of flow control equipments, a medical bio-system, semiconductor fabrication process, automobile and air transportation industry with low cost, batch recess and mass production.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.33 no.4
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• pp.276-280
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• 2020

A linear piezoelectric actuator that utilizes the elliptical motion of the two tips of the actuator is proposed. This device is easy to fabricate owing to its simple structure, consisting of three piezo ceramic benders and is suitable for use in micro robotic applications. A π-shaped structure, which was composed of four piezo ceramic benders, was constructed. Two of the benders were positioned on the center of the actuator, and the joints were attached at the ends of the cantilever. The other two benders were positioned on the side of the actuator and were attached between the joint and the tips. The actuator structure was designed to obtain the first bending mode of the horizontal vibration and the vertical vibration at the same frequency, resulting in elliptical motions at the tips. When two sinusoidal wave voltages with a 90-degree phase difference were applied to the two pairs of the actuator benders, elliptical motions were obtained at the tips. The driving characteristics of the prototype actuator were then measured using a laser doppler vibrometer.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.390-391
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• 2006

This paper describes the design, fabrication and characteristics of a micromachined piezoelectric valve utilizing a multilayer ceramic actuator (MCA). The micromachined MCA valve, which uses a buckling effect, consists of three separate structures: the MCA, the valve actuator die and the seat die. The valve seat die with 6 trenches was made, and the actuator die, which is driven by the MCA under optimized conditions, was also fabricated. After Si wafer direct bonding between the seat die and the actuator die, the MCA was also anodically bonded to the seat/actuator die structure. A polydimethylsiloxane (PDMS) sealing pad was fabricated to minimize the leak rate. Finally, the PDMS sealing pad was also bonded to the seat die and the stainless steel package. The MCA valve shows a flow rate of 9.13 sccm at an applied DC voltage of 100 V with a 50% duty cycle and a maximum non-linearity of 2.24% FS. Therefore, the fabricated MCA valve is suitable for a variety of flow control equipment, as a medical bio-system and in the automobile industry.

• Proceedings of the Acoustical Society of Korea Conference
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• spring
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• pp.263-266
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• 2004

This paper describes an intelligent piezoelectric traffic sensor which can be detected the over-weighted vehicles In motion. Based on finite element analysis for the sensor, the sensitivity was analyzed and the design was optimized. Studied parameters are the material properties of constitutional parts, the geometry of the sensor, the weight of the vehicle, and the speed of the vehicle. To verify the simulated results, we manufactured the sensor having the optimized geometry and the sensitivity was measured in the range from 0.5 to 3 ton of tensile and compressive stress. The measured results shows that the sensitivity and linearity of the sensor are closely agree with the designed values.

• Electrical & Electronic Materials
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• v.10 no.2
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• pp.172-178
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• 1997

다른 부품 업체와 마찬가지로 이 분야에 있어서 국내 기업은 아직 시작 단계에 있으면서도 다른 선진사의 높은 기술 상태의 부품을 만들지 않으면 경쟁이 되지 않기 때문에 어려움이 많다. 또 압전 세라믹스 주파수 소자의 설계와 제작에 경험 있는 전문가도 별로 없기 때문에 시스템 업계가 요구하는 경향에 맞춰 부가가치가 높은 신 제품을 내놓기도 아직 힘든 상태이다. 통신기기와 전자기기에 있어서 이 부품의 중요성을 고려한다면 본 궤도에 도달할 때까지 외부의 지원이 필요하리라 생각된다. 아울러 전기와 재료 두 분야에 걸쳐 있는 본 압전 세라믹스 주파수 소자의 특성을 감안한다면 전기공학 전문가와 재료공학 전문가의 협력이 양산과 설계 과정에서 부딪치는 문제의 해결의 지름길이 될 수 있을 것이다.

• Journal of the Korean Vacuum Society
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• v.21 no.6
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• pp.287-294
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• 2012

In the high vacuum condition of the space, outgassing from any assembly of satellite can contaminate satellites, especially second surface mirror and optical lens, it cause satellite to fail in own missions. Therefore, all unit shall be check for compatibility with vacuum using CVCM (Collected Volatile Condensable Material) and TML (Total Mass Loss) in advance. CVCM and TML of the PZT-5 piezoelectric ceramic vibrator has less than 0.1% and 1.0% respectively. Also, it has less than 500 $ng/cm^2/hr$ of Thermoelectric Quartz Crystal Microbalance for vacuum bake-out test using high temperature(more than $80^{\circ}C$) and high vacuum (less than $5.0{\times}10^{-3}$ Pa). Thus, piezoelectric ceramic vibrator may be employed in the vacuum environments. Finally, it can be confirmed that the characteristics change of the piezoelectric ceramic vibrator is less than 1% under vacuum environments.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.11a
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• pp.212-213
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• 2005

In this study, in order to develop low temperature sintering piezoelectric actuator, $Pb_{0.985}Bi_{0.01}(Mg_{1/2}W_{1/2})_{0.03}(Ni_{1/3}Nb_{2/3})_{0.13}(Zr_{0.50},Ti_{0.50})_{0.84}$ (PMW-PNN-PZT) ceramic systems were fabricated using $CaCO_3-Li_2CO_3$, sintering aid through a post-annealing process. The sinterability of PMW-PNN-PZT ceranics was remarkably enhanced by liquid phase sintering of $CaCO_3$ and $Li_2CO_3$. But, it was confimed form the X-ray diffraction pattern that the secondary phase along grain boundaries, deteriorated the piezoelectric properties. The secondary phase along grain boundaries was significantly removed by annealing after sintering. The 0.2wt% $Li_2CO_3$-0.25wt% $CaCO_3$-added PMW-PNN-PZT ceramics post-annealed at 900$^{\circ}C$ for 90min exhibited the excellent electromechanical coupling factor($k_p$) of 63.3% and piezoelectric constant($d_{33}$) of 452pC/N, respectively, for multilayer piezoelectricactuatorapplication.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.24 no.8
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• pp.632-635
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• 2011

Additions (ZnO, CuO) doped $0.98(Na_{0.5}K_{0.5})NbO_3-0.02Li(Sb_{0.17}Ta_{0.83})O_3$ (0.98NKN-0.02LST-x) lead free piezoelectric ceramics have been fabricated by ordinary sintering technique. The effects of additions doping on the dielectric, piezoelectric, and ferroelectric properties of the ceramics were mainly investigated. X-ray diffraction of the sample appeared orthorhombic phase. The specimen doped with additions exhibits enhanced electrical properties ($d_{33}$= 153 pC/N). These results indicate that the 0.98NKN-0.02LST-x ceramics is a promising candidate for lead-free piezoelectric ceramics for applications such as piezoelectric actuators, harmonic oscillator and so on.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.11a
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• pp.210-211
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• 2005

[ $(K_{0.5}Na_{0.5})NbO_3$ ](KNN) 세라믹스의 소결 특성과 압전 특성을 높이기 위해 B-site에 Sb를 치환하여 Sb함량에 따른 특성을 측정 하였다. Sb 의 함량을 0mol $\sim$ 0.1mol 까지 첨가한 결과 소결 밀도는 Sb의 첨가량이 많아질수록 증가하다 Sb-0.08mol에서 4.40g/$cm^3$으로 가장 높은 밀도를 가졌으며, 여기서의 전기기계 결합 계수가(Kp) 0.45로 높은 값을 나타내었다. 상전 이 온도는 375$^{\circ}C$로 순수한 KNN 의 420$^{\circ}C$ 보다 약 45$^{\circ}C$정도 떨어졌으나 orthorhombic에 서 tetragonal 로 바뀌는 전이 온도는 KNN이 220$^{\circ}C$, KNNS 가 225$^{\circ}C$로 크게 변하지 않았다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.327-328
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• 2006

본 연구에서는 0-3 타입의 압전 세라믹 - 고분자 복합소재를 제조하기 위해서 $Pb(Zr_{0.54}Ti_{0.48})O_3$ + 0.2 wt% $Cr_2O_3$ + 1 wt% $Nb_2O_5$ 조성을 기본 조성으로 하여, 세라믹-고분자 첨가량에 따른 복합소재의 전기적 특성과 여러 분극조건, 즉 분극온도, 분극시간, 분극전압 변화에 의한 압전 특성을 고찰하였다. 세라믹 첨가비율이 증가함에 따라 유전상수와 압전상수($d_{33}$)는 증가하였으며, 전압상수($g_{33}$)는 급격히 감소하는 경향을 보였으며, 분극시간과 분극전압도 전기적 특성에 영향을 주는 것을 확인하였다. 분극전압 5KV 인가한 고분자 15% 첨가한 복합 소재에서 유전상수 13, 압전상수 $d_{33}$ 23(${\ast}10^{-12}C/N$), 전압상수 $g_{33}$ 170($10^{-3}v.m/N$)의 우수한 특성을 나타내었다.