• Journal of the Semiconductor & Display Technology
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• v.10 no.1
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• pp.17-22
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• 2011

LEDs(Light Emitting Diodes) are becoming widely used and increasingly in demand. Quality inspection of the LEDs has become more important. Two-dimensional inspection systems are limited in inspection capability, so threedimensional(3-D) inspection systems are needed. In this paper, a cost-effective and simple 3-D measurement system of LED packages using phase measuring profilometry(PMP) is proposed. The proposed system uses a pico projector to project sinusoidal fringe patterns and to shift phases instead of piezocrystal. It was evaluated using extremely accurate gauge blocks, yielding excellent repeatability of about 12 um(3-sigma). 3-D measurements of various LED packages were performed to demonstrate the applicability and efficiency of the proposed system.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.19 no.6
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• pp.1485-1492
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• 2015

This paper proposes a double frequency method using FTP(Fourier Transform Profilometry) in fringe projection techniques for 3D measurement systems. In fringe projection techniques, fringe pattern images are projected and captured, and then object is measured by analysing phase. PMP(Phase Measuring Profilometry) for analysing phase provides high-resolution and is robust to object's reflection and background intensities. However, the measurement range is narrow due to 2π ambiguity. In order to overcome this problem, a double frequency method is often used. This method can widen the range of measurement while maintaining the high-resolution, but the measurement time is taken about twice due to grab 2 times number of images. The proposed double frequency method using FTP requires an additional image for resolving 2π ambiguity. The proposed method effectively reduces the measurement time while maintaining the same accuracy.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.421-424
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• 2002

The 3-D measurement using a sinusoidal grating pattern projection is very attractive because of its high measuring speed and high sensitivity. When a sinusoidal amplitude grating was projected on an object, the surface-height distribution of the object is translated into a phase distribution of the deformed grating image. The phase-acquisition algorithms are so sufficiently simple that high-resolution phase maps using a CCD camera can be generated in a short time. The PMP technique is discussed, and the analysis of the systematic errors, the calibration procedure designed to determined the optimal setting of the measurement parameters is illustrated. Results of measurements and calibrations on the measurement plane objects are described.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.20 no.10
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• pp.1973-1979
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• 2016

As technologies evolve, diverse 3D measurement techniques using cameras and pattern projectors have been developed continuously. In 3D measurement, high accuracy, fast speed, and easy implementation are very important factors. Recently, 3D measurement using multi-frequency fringe patterns for absolute phase computation has been widely used in the fringe projection profilometry. This paper proposes an improved method to compute the object's absolute phase using the reference plane's absolute phase and phase difference between the object and the reference plane. This method finds the object's absolute phase by adding the difference between the reference plane's wrapped phase and the object's wrapped phase to the reference plane's absolute phase already obtained in the calibration stage. Through this method, there is no need to obtain multi-frequency fringe patterns about new object for the absolute phase computation. Instead, we only need the object's phase difference relative to the reference planes's phase in the measurement stage.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.21 no.12
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• pp.2285-2290
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• 2017

Automation systems are evolving in many areas of industry in recent years. At the same time, the necessity of the height inspection of the object by the 3D measurement is gradually increasing. Among the various 3D measurement methods, this paper discusses phase measuring profilometry(PMP). The PMP is a method of obtaining the height of an object using the phase value of the fringe pattern. Since the PMP is an algorithm requiring a large amount of computation, a method for efficiently solving the problem is needed. In this paper, we propose to use CUDA from NVIDIA to solve this problem. We also propose using pinned memory and streams provided by CUDA. This can greatly improve the measurement speed while maintaining accuracy. Finally, we demonstrate the performance of the proposed method through experiments.

• Journal of the Optical Society of Korea
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• v.12 no.4
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• pp.281-287
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• 2008

An acousto-optic tunable filter based 3-D micro surface profile measurement using an equally spaced 5 spectral phase shifting is described. The 5-bucket spectral phase shifting method is compared with a Fourier-transform method in the spectral domain. It can provide a fast measurement capability while maintaining high accuracy since it needs only 5 pieces of spectrally phase shifted imaging data and a simple calculation in comparison with the Fourier transform method that requires full wavelength scanning data and relatively complicated computation. The 3-D profile data of micro objects can be obtained in a few seconds with an accuracy of ${\sim}10nm$. The 3-D profile method also has an inherent benefit in terms of being speckle-free in measuring diffuse micro objects by employing an incoherent light source. Those simplicity and practical applicability is expected to have diverse applications in 3-D micro profilometry such as semiconductors and micro-biology.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.6
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• pp.210-217
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• 2000

Noncontact measuring methodology of 3-dimensional profile using CCD camera are very attractive because of it's high measuring speed and it's high sensitivity. Especially when projecting a grid pattern over the object, the captured image have 3 dimensional information of the object. Projection moire extract 3-D information with another grid pattern in front of CCD camera. However phase measuring profilometry(PMP) obtain similar results without additional grid pattern. In this paper, the projection moire are compared with the PMP mathematically, and it is shown that PMP can generate moire image with simple mathematical computations. Experimental works are also carried out showing the same results. It is shown that using a single gird pattern, moire image can be obtained directly without any mathematical operation when some conditions are satisfied.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.20 no.6
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• pp.598-603
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• 2019

Three-dimensional shape measurement technology is used in various industries. Among them, optical three-dimensional shape measurement techniques based on the optical trigonometry are mainly used in the field of semiconductor product inspection, where large quantities of three-dimensional shape measurements are made daily in factories and fine measurements are also required. The light source and the drive circuit, which are components of three-dimensional measurement equipment based on this optical trigonometry, produce heat generated by prolonged operation, and may be exposed to conditions where the ambient temperature is not constant, resulting in temperature-induced measurement errors. In this study, the compensation method of the Thermal Errors for Phase Measuring Profilometry is proposed. Three-Dimensional Shape Measurement Equipment based on Phase Measuring Profilometry is implemented to measure the height of an object and ambient temperature for 10 Hours, and a regression line was obtained line by making simple linear regression using measured temperature and height values. This regression line was used to correct the error of the height measurement according to the temperature, and thermal error was from 139.88 um(Micrometer) to 13.12 um.

• Annual Conference of KIPS
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• 2011.11a
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• pp.223-226
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• 2011

반도체 공정에서 부품의 결함을 찾는 것은 완제품의 품질 개선을 위해 중요하다. 현재까지 많은 비전 알고리즘들이 부품의 결함을 찾기 위해 적용되고 있다. 그러나 이런 알고리즘 대부분은 2D 방식의 검사 방식에 머물고 있다. 그러나 이런 2D방식의 검사 방법은 반도체 칩의 Lead나 Pad 그리고 Solder Joint와 같이 3D 정보에 의해 불량 유무를 판결해야 하는 곳에 적용하기 어렵다. 이에 본 논문에서는 PMP(Phase Measuring Profilometry)방법에 의해 반도체 칩의 Lead부분을 검사하기 위한 시스템 구성과 방법을 제안한다.

• Journal of the Optical Society of Korea
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• v.13 no.4
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• pp.464-467
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• 2009

The grating projection method with phase-shifting technique is very useful in measuring the 3-dimensional (3D) shape with high accuracy and speed. In this work, we have developed an ultra high-speed digital laser grating projection system using a high-power laser diode and a highsensitivity CMOS camera. With our system, the optical measurement required to find out the profile of a 3D object could be carried out within 2.6 ms, which is a significant ($\sim$10 times) improvement compared with those of the previous studies.