• Journal of Korean Society of Environmental Engineers
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• v.37 no.1
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• pp.7-13
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• 2015

In this study, the effective treatment reducing geosmin and dosage of PAC was suggested when taste & odor compounds flow in. The removal efficiency of geosmin was evaluated with types of chlorination. In case of low geosmin concentration below 25 ng/L, removal efficiency of geosmin was estimated at 46% by combined treatment of pre and intermediate-chlorination. But, in the exclusive intermediate-chlorination treatment, removal efficiency of geosmin was increased to 57%. In the medium geosmin concentration (25~79 ng/L), removal efficiency of geosmin was estimated at 59% by combined treatment. But, in the exclusive intermediate-chlorination treatment, removal efficiency of geosmin was increased to 87%. When high geosmin concentration above 80 ng/L flows in, removal efficiency of geosmin was estimated at 69% by combined treatment. However, in the exclusive intermediate-chlorination treatment, removal efficiency of geosmin was increased to 95%. Then, the exclusive intermediate-chlorination has an important effect on removal of geosmin. After correlation of geosmin concentration and dosage of PAC was analyzed, the coefficient of determination was estimated at 0.96. And, the proper PAC dosage chart was proposed. Also, at a initial occurrence of geosmin, when the combined treatment by intermediate-chlorination and PAC was applied, particle-bound geosmin should be removed continuously. Finally, it is proved that the combined treatment was effective to remove the geosmin by threshold levels as well as to reduce the dosage of PAC.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.529-529
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• 2007

Ruthenium (Ru) is a white metal and belongs to platinum group which is very stable chemically and has a high work function. It has been widely studied to apply Ru as an electrode material in memory devices and a Cu diffusion barrier metal for Cu interconnection due to good electrical conductivity and adhesion property to Cu layer. To planarize deposited Ru layer, chemical mechanical planarization(CMP) was suggested. However, abrasive particle can induce particle contamination on the Ru layer surface during CMP process. In this study, zeta potentials of Ru and interaction force of alumina particles with Ru substrate were measured as a function of pH. The etch rate and oxidation behavior were measured as a function of chemical concentration of several organic acids and other acidic and alkaline chemicals. PRE (particle removal efficiency) was also evaluated in cleaning chemical.

• Journal of the Korean Society of Marine Environment & Safety
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• v.24 no.2
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• pp.196-202
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• 2018

In this study, we investigated phosphate removal efficiency according to pretreatment (pyrolysis temperature, pyrolysis time, particle size) of oyster shells as a basic study for their recycling. And XAFS analysis and isothermal adsorption experiments were performed to investigate the phosphate removal characteristics of oyster shells. As a result, the removal efficiency was good at $600^{\circ}C$ pyrolysis temperature with 6 hour pyrolysis time and 0.355 ~ 0.075 mm particle size. Isothermal adsorption experiments showed that the Langmuir model is suitable for adsorption of oyster shells. XAFS analysis showed that calcium phosphate formed on the oyster shell pyrolyzed at $600^{\circ}C$. In other words, it was confirmed that the formation of calcium phosphate by the calcium ion elution of the oyster shell contributes to the decrease of phosphate concentration.

• Journal of Korean Society of Environmental Engineers
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• v.36 no.2
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• pp.84-95
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• 2014

Recently, as a variety of techniques of CMF (Compressed media filter) that has advantages of high porosity and compressibility have been developed in the U.S. and Japan. Therefore, the interest of intensive wastewater treatment using CMF has grown. This study examined the feasibility of CMF with varying sewage water quality to determine the optimum operating conditions. A preliminary tracer test that investigated the filtering process under various compression and flow rate conditions was performed. In a high compression condition, different porosities were applied to each depth of the column. Therefore, a distinct difference between a theoretical value and results of tracer test was observed. For the TSS (Total suspended solid) removal and particle size distribution of CMF for pre-treatment water under the various compression conditions, the compression ratio of 30 percent as the optimal condition showed greater than 70% removal efficiency. In addition, the compression ratio of >15% was required to remove small-sized particles. Also, an additional process such as coagulation is necessary to increase the removal efficiency for < $10{\mu}m$ particles, since these small particles significantly influence the effluent concentration. Modeling results showed that as the compression rate was increased, TSS removal efficiency in accordance with each particle size in the initial filtration was noticeably observed. The modeling results according to the depth of column targeting $10{\mu}m$ particles having the largest percentage in particle size distribution showed that 150-300 mm in filter media layer was the most active with respect to the filtering.

• Journal of Soil and Groundwater Environment
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• v.18 no.7
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• pp.1-11
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• 2013

The actively soil pollution by the toxic heavy-metals like the arsenic, cadmium, lead due to the industrialization and economic activity. The uses the electrokinetic remediation of contaminated soil has many researches against the fine soil having a small size in the on going. However, it is the actual condition which the research result that is not effective due to the low surface charge of the particle and high permeability shows in the electrokinetic remediation in comparison with the fine soil in the case of the sandy soil in which the particle size is large. In this research, the electrokinetic remediation and ultrasonic wave fetch strategy is compound applied against the sandy soil polluted by the arsenic, cadmium, and lead removal efficiency of the sandy soil through the comparison with the existing electrokinetic remediation tries to be evaluated. First of all, desorption of contaminants in soil by ultrasonic extraction in the Pre-Test conducted to see desorption effective 5~15%. After that, By conducted Batch-Test results frequency output century 200 Khz, reaction time 30 min, contaminated soil used in experiment was 500 g. Removal efficiency of arsenic, cadmium, lead are 25.55%, 8.01%, 34.90%. But, As, Cd, Pb remediation efficiency less than 1% in EK1(control group).

• Journal of the Semiconductor & Display Technology
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• v.22 no.2
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• pp.17-23
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• 2023

In semiconductor manufacturing processes, a cleaning process is important that can remove sub-micron particles. Conventional wet cleaning methods using chemical have limits in removing nano-particles. Thus, physical forces of a mechanical vibration up to 1 MHz frequency, was tried to aid in detaching them from the substrates. In this article, we developed a 1 MHz quartz megasonic for a bare wafer cleaning using finite element analysis. At first, a 1 MHz megasonic prototype was manufactured. Using the results, a main product which can improve a particle removal performance, was analyzed and designed. The maximum impedance frequency was 992 kHz, which agreed well with the experimental value of 986 kHz (0.6% error). Acoustic pressure distributions were measured, and the result showed that maximum / average was 400.0~432.4%, and standard deviation / average was 46.4~47.3%. Finally, submicron particles were deposited and cleaned for the assessment of the system performance. As a result, the particle removal efficiency (PRE) was proved to be 92% with 11 W power. Reflecting these results, the developed product might be used in the semiconductor cleaning process.

• Journal of Korean Society of Water and Wastewater
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• v.19 no.2
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• pp.135-143
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• 2005

It was evaluated that the effect of turbidity removal by Pore Controllable Fiber Filter(PCF) installed in NS(Naksang) small water treatmant plant(system) using under flow water as raw water in the study. The results of the study are as the followings. Firstly, the removal efficiency of turbidity by PCF without coagulation(in operation mode not using coagulants) was mostly below 20 percent. On the other hand, when operation using proper coagulants, that of turbidity was mostly over 80 percent. Secondly, slow sand filtration after PCF, total turbidity removal efficiency of final treated water was 84.3 percent, and the contribution by PCF was 57.1 percent and that of slow sand filtration was 27.7 percent. Therefore the introduction of PCF as pre-treatment process would be helpful to reduce the loading of high turbidity of slow sand filtration. Thirdly, the results of particle counter measurements showed that when operated PCF with coagulants, fine flocs captured or adsorbed at the pore of PCF were flow out into the effluents from 120 minutes after backwashing because of the increase of headloss of PCF. Therefore the decision of backwashing time should made consideration into the outflow of fine flocs from PCF. Fourth, coagulant dosages on PCF at the same turbidity was largely variable because of the effect of the raw water characteristics and the turbidity increase velocity at rainy days, therefore flexible coagulant dosages should be considered rather than fixed coagulant dosage by the influent jar-test result.

• Journal of Korean Society of Environmental Engineers
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• v.39 no.7
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• pp.385-390
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• 2017

This study investigated removal characteristic of soluble Cs in water by RPT (Radioactivity pollutant treatment) with coagulation and sedimentation. The RPT conducted with various chemical and natural coagulants to remove the soluble Cs which consisted pre-adsorption, Sedimentation and post-adsorption. Natural absorbent included Illite and zeolite. Especially, Illite divided LPI (Large Particle Illite) and SPI (Small Particle Illite) by grain size. Also, Chemical coagulants included high basicity PAC (poly aluminum chloride). The adsorbent had a plate structure mainly composed of quartz, albite and muscovite. The surface area were $4.201m^2/g$ and $4.227m^2/g$ and the particle sizes were $197.4-840.9{\mu}m$ and $3.28-53.57{\mu}m$, respectively. The adsorption efficiency of the natural Illite was 82.8% for LPI and 85.6% for SPI. The removal efficiency of turbidity, which was an indirect indicator of adsorbent recovery, was 96.4% and 98.3%, respectively.

• Journal of Korean Society of Environmental Engineers
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• v.32 no.1
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• pp.53-60
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• 2010

In the present study, experiments have been performed to investigate the possibility of removing Cochlodinium polykrikoides using the dredged sediment from a coastal fishery and then to derive the optimal conditions; the amount and particle size of dredged sediment besprinkled into water, the thermal treatment, the types and amounts of additives, and the depth profile of Cochlodinium polykrikoides. Results showed that the optimal amount of dredged sediment besprinkled into water was 6~10 g/L, and the removal efficiency of Cochlodinium polykrikoides after the reaction time for 60 min was 73~93%. Note that, in the real sea water, it is necessary to besprinkle 6~10 $kg/m^3$ of dry dredged sediment on a unit area (1 $m^2$). With decreasing particle size, Cochlodinium polykrikoides could be more efficiently removed. The removal efficiency was 93% with the dredged sediment smaller than 100 ${\mu}m$, whereas it was 51% with that of 100 ${\mu}m$ ${\mu}m$. Since most of dredged sediment (over 90%) was smaller than 100 ${\mu}m$, high efficiency could be obtained by besprinkling only the dredged sediment without pre-treatment. CaO was found to be an effective additive in promoting the removal efficiency (up to 99%). The optimal amount of additive was 5~10%, however, it was necessary to use as small amount of an additive as possible in order to avoid the sharp increase in pH. The removal efficiency increased with increasing depth profile of Cochlodinium polykrikoides. The removal efficiency was 83% at 5 cm depth, whereas it was 93% at 50 cm depth. In the sea water, red tide occurred within 3 m depth, and furthermore most Cochlodinium polykrikoides existed within 1 m depth. It was, therefore, expected that higher removal efficiency of Cochlodinium polykrikoides could be obtained when the dredged sediment was besprinkled into the sea water. The removal efficiency of Cochlodinium polykrikoides was up to 93% when the dredged sediment (<100 ${\mu}m$) was besprinkled into water at the ratio of 10 g/L. This result was comparable to that obtained with loess (90~97%). All the results in the present study indicated that the dredged sediment from a coastal fishery could be successfully used as a substitute of loess for removing the red tide alga.

• Journal of the Semiconductor & Display Technology
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• v.22 no.3
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• pp.21-27
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• 2023

In this article, a plate-type megasonic cleaning system with cooling pins is proposed for the sliced ingot, which is a raw material of silicon (Si) wafers. The megasonic system is operated with a lead zirconate titanate (PZT) actuator, which has high electric resistance, thus when it is being operated, it dissipates much heat. So this article proposes a megasonic system with cooling pins. In the design process, finite element analysis was performed and the results were used for the design of the waveguide. The frequency with the maximum impedance value was 998 kHz, which agreed well with the measured value of 997 kHz with 0.1 % error. Based on the results, the 1 MHz waveguide was fabricated. Acoustic pressures were measured, and analyzed. Finally, cleaning tests were performed, and 90 % particle removal efficiency (PRE) was achieved over 10 W power. These results imply that the developed 1 MHz megasonic will effectively clean sliced ingot wafer surfaces.