• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2013년도 춘계학술대회 논문집
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• pp.179-180
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• 2013

• 반도체디스플레이기술학회지
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• 제11권3호
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• pp.7-11
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• 2012

Among various wet cleaning methods, megasonic and jet spray gained their popularity in single wafer cleaning process for the efficient removal of particulate contaminants from the wafer surface. In the present study, we evaluated these two cleaning methods for particle removal efficiency (PRE) and pattern damage on the aluminum layered wafer surface. Also the effect of $CO_2$ dissolved water in jet spray cleaning is assessed by measuring PRE. It is observed that the jet spray cleaning process is more effective in terms of PRE and pattern damage compared to megasonic cleaning and the mixing of $CO_2$ in the water during jet sprays further increases the PRE. We believe that the outcome of the present study is useful for the semiconductor cleaning process engineers and researchers.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
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• pp.362-363
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• 2006

Ozonized DI water was supplied to make alkaline cleaning solutions to replace SCI chemicals in a bath with and without recirculation. With recirculation, low dissolved ozone and low pH cause lower particle removal efficiency (PRE) of 75%. However, direct supply of ozonized water with $NH_4OH$ to a bath without recirculation resulted in higher PRE over 93 %.

• 한국정밀공학회지
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• 제31권12호
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• pp.1107-1113
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• 2014

In this article, the megasonic cleaning system for cleaning micro/nano particles from flat panel display (FPD) surfaces was developed. A piezoelectric actuator and a waveguide were designed by finite element method (FEM) analysis. The calculated peak frequency value of the quartz waveguide was 1002 kHz, which agreed well with the measured value of 1003 kHz. The average acoustic pressure of the megasonic cleaning system was 43.1 kPa, which is three times greater than that of the conventional type of 13.9 kPa. Particle removal efficiency (PRE) tests were performed, and the cleaning efficiency of the developed system was proven to be 99%. The power consumption of the developed system was 64% lower than that of the commercial system. These results show that the developed megasonic cleaning system can be an effective solution in particle removing from FPD substrate with higher energy efficiency and lower chemical and ultra pure water (UPW) consumption.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2011년도 춘계학술발표대회
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• pp.34.2-34.2
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• 2011

The demand for Ru has been increasing in the electronic, chemical and semiconductor industry. Chemical mechanical planarization (CMP) is one of the fabrication processes for electrode formation and barrier layer removal. The abrasive particles can be easily contaminated on the top surface during the CMP process. This can induce adverse effects on subsequent patterning and film deposition processes. In this study, a post Ru CMP cleaning solution was formulated by using sodium periodate as an etchant and citric acid to modify the zeta potential of alumina particles and Ru surfaces. Ru film (150 nm thickness) was deposited on tetraethylorthosilicate (TEOS) films by the atomic layer deposition method. Ru wafers were cut into $2.0{\times}2.0$ cm pieces for the surface analysis and used for estimating PRE. A laser zeta potential analyzer (LEZA-600, Otsuka Electronics Co., Japan) was used to obtain the zeta potentials of alumina particles and the Ru surface. A contact angle analyzer (Phoenix 300, SEO, Korea) was used to measure the contact angle of the Ru surface. The adhesion force between an alumina particle and Ru wafer surface was measured by an atomic force microscope (AFM, XE-100, Park Systems, Korea). In a solution with citric acid, the zeta potential of the alumina surface was changed to a negative value due to the adsorption of negative citrate ions. However, the hydrous Ru oxide, which has positive surface charge, could be formed on Ru surface in citric acid solution at pH 6 and 8. At pH 6 and 8, relatively low particle removal efficiency was observed in citric acid solution due to the attractive force between the Ru surface and particles. At pH 10, the lowest adhesion force and highest cleaning efficiency were measured due to the repulsive force between the contaminated alumina particle and the Ru surface. The highest PRE was achieved in citric acid solution with NaIO4 below 0.01 M at pH 10.

• 한국입자에어로졸학회지
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• 제9권4호
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• pp.247-252
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• 2013

Removal of water contents in a gas is needed in industrial field of gas processing related on energy production/conversion, and environmental treatment. Inertial separators are economic devices for separating droplets from the gas stream. For design and incorporation of inertial pre-treatment separator, characteristics of removal of water contents with various operation conditions are needed. In this study, removal efficiency of water droplets at various flowrates (5-14 SCMM) and relative humidity (R.H.) conditions (40%, and 90%) has been investigated. At low R.H. condition, the removal characteristic is similar to the removal of solid particles. But, droplet growth resulting from the condensation of water vapor at high R.H. condition, is significant and it made increase in removal efficiency of droplet phase of water contents. For rapid removal of water contents, an effective method to enhancing condensation growth of water droplets is highly needed.

• 한국재료학회지
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• 제18권6호
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• pp.307-312
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• 2008

In this study, a new cleaning process with a low cost of ownership (CoO) was developed with ozonated DI water ($DIO_3$). An ozone concentration of 40 ppm at room temperature was used to remove organic wax film and particles. Wax residues thicker than $200\;{\AA}$ remained after only a commercial dewaxer treatment. A $DIO_3$ treatment in place of a dewaxer showed a low removal rate on a thick wax layer of $8000\;{\AA}$ due to the diffusion-limited reaction of ozone. A dewaxer was combined with a $DIO_3$ rinse to reduce the wax removal time and remove wax residue completely. Replacing DI rinse with the $DIO_3$ rinse resulted in a surface with a contact angle of less than $5^{\circ}$, which indicates no further cleaning steps would be required. The particle removal efficiency (PRE) was further improved by combining a SC-1 cleaning step with the $DIO_3$ rinsing process. A reduction in the process time was obtained by introducing $DIO_3$ cleaning with a dewaxing process.

• 한국대기환경학회지
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• 제27권3호
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• pp.272-280
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• 2011

A novel particle removal system for air handling unit (AHU) of subway station was evaluated experimentally. The novel system was designed in order to minimize the maintenance cost by applying axial-flow cyclones. The system consists of multiple cyclone units and dust trap. Based on our previous numerical study, it was found to be effective for removal $1\sim10{\mu}m$ sized dust particles. In this study, we manufactured the mock-up model and evaluated the model experimentally. Liquid and solid test particles were generated for evaluating collection efficiency of the system and the pressure drop was monitored. The collection efficiency was varied from 41.2% to 85.9% with increasing the sizes of particle from 1 to $6.5{\mu}m$ by particle count ratio of inlet and outlet. The pressure drop was maintained constant less than $20mmH_2O$. In addition, the collection efficiency was estimated by total mass for solid test particles. It was found that the collection efficiency was 65.7% by particle mass ratio of inlet and outlet. It shows that present system can replace current pre-filters used in subway HVAC system for removing particulate matters with minimal operational cost.

• 상하수도학회지
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• 제23권6호
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• pp.719-726
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• 2009

One of the alternative runoff management measures is on-site runoff mitigation, such as rainwater retention tank and infiltration facilities especially the latter that is possible to manage simultaneously runoff quality and quantity as a perspective of water-cycle. This study was conducted to develop a particle separator, inclined-pipe settling system, that could improve particle removal efficiency of road runoff as a pre-treatment device of stormwater infiltration. Solid particles larger than $100{\mu}m$ are separated by simple sedimentation; however, the significant amount of pollutants with a diameter less than $100{\mu}m$ remain in suspension. Without any treatment in that case of the runoff into infiltrate, groundwater would be deteriorated and also infiltration rate would be decreased by clogging. Therefore, we suggest optimal design parameters (inclined angle, pipe length, and surface loading rate) of inclined-pipe settling system which can be designed to effectively remove particles diameter smaller then $70{\mu}m$. Thus, the results showed TSS removal efficiency more than 80% with a particle diameter between $20{\mu}m$ and $70{\mu}m$, 100% above particle diameter $70{\mu}m$ for the inflow rate $0.018 m^3/m^2{\cdot}hr$ with pipe inclined at angle $15^{\circ}$.

• 대한환경공학회지
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• 제37권1호
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• pp.7-13
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• 2015

본 연구에서는 맛 냄새 물질 발생시 표준정수처리공정에서 지오스민과 활성탄 주입량을 효과적으로 저감하는 방안을 제시하였다. 염소처리방식에 따른 지오스민 제거효율을 평가한 결과, 저농도(< 25 ng/L)의 경우 전염소와 중간염소를 동시에 운영할 경우 지오스민 제거율은 46%인 반면, 중간염소로 운영한 공정의 지오스민 제거율은 57%로 나타났다. 중농도(25~79 ng/L)에서는 전염소와 중간염소로 운영한 지오스민 제거율은 59%, 중간염소로 운영한 지오스민 제거율은 87%로 나타났다. 고농도(> 80 ng/L)에서도 전염소와 중간염소를 동시에 운영한 지오스민 제거율은 67%인 반면 중간염소로 운영한 지오스민 제거율은 95%로 나타나 중간염소로 운영시 제거율이 높아지는 것으로 나타났다. 지오스민 농도별 측정결과와 활성탄 투입량의 상관성을 분석한 결과, 결정계수($R^2$)는 0.96 으로 나타나 적합한 분말활성탄 조견표를 제안하였다. 또한, 지오스민 물질발생 초기에 중간염소와 활성탄을 동시에 투입 시 원수농도가 급격히 증가하여도 지오스민의 입자성 물질을 지속적으로 제거할 수 있어 활성탄 저감 뿐만 아니라 정수 기대농도도 만족할 수 있었다.