• Proceedings of the Korean Society of Precision Engineering Conference
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• 2013.05a
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• pp.179-180
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• 2013

• Journal of the Semiconductor & Display Technology
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• v.11 no.3
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• pp.7-11
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• 2012

Among various wet cleaning methods, megasonic and jet spray gained their popularity in single wafer cleaning process for the efficient removal of particulate contaminants from the wafer surface. In the present study, we evaluated these two cleaning methods for particle removal efficiency (PRE) and pattern damage on the aluminum layered wafer surface. Also the effect of $CO_2$ dissolved water in jet spray cleaning is assessed by measuring PRE. It is observed that the jet spray cleaning process is more effective in terms of PRE and pattern damage compared to megasonic cleaning and the mixing of $CO_2$ in the water during jet sprays further increases the PRE. We believe that the outcome of the present study is useful for the semiconductor cleaning process engineers and researchers.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.11a
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• pp.362-363
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• 2006

Ozonized DI water was supplied to make alkaline cleaning solutions to replace SCI chemicals in a bath with and without recirculation. With recirculation, low dissolved ozone and low pH cause lower particle removal efficiency (PRE) of 75%. However, direct supply of ozonized water with $NH_4OH$ to a bath without recirculation resulted in higher PRE over 93 %.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.12
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• pp.1107-1113
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• 2014

In this article, the megasonic cleaning system for cleaning micro/nano particles from flat panel display (FPD) surfaces was developed. A piezoelectric actuator and a waveguide were designed by finite element method (FEM) analysis. The calculated peak frequency value of the quartz waveguide was 1002 kHz, which agreed well with the measured value of 1003 kHz. The average acoustic pressure of the megasonic cleaning system was 43.1 kPa, which is three times greater than that of the conventional type of 13.9 kPa. Particle removal efficiency (PRE) tests were performed, and the cleaning efficiency of the developed system was proven to be 99%. The power consumption of the developed system was 64% lower than that of the commercial system. These results show that the developed megasonic cleaning system can be an effective solution in particle removing from FPD substrate with higher energy efficiency and lower chemical and ultra pure water (UPW) consumption.

• Proceedings of the Materials Research Society of Korea Conference
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• 2011.05a
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• pp.34.2-34.2
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• 2011

The demand for Ru has been increasing in the electronic, chemical and semiconductor industry. Chemical mechanical planarization (CMP) is one of the fabrication processes for electrode formation and barrier layer removal. The abrasive particles can be easily contaminated on the top surface during the CMP process. This can induce adverse effects on subsequent patterning and film deposition processes. In this study, a post Ru CMP cleaning solution was formulated by using sodium periodate as an etchant and citric acid to modify the zeta potential of alumina particles and Ru surfaces. Ru film (150 nm thickness) was deposited on tetraethylorthosilicate (TEOS) films by the atomic layer deposition method. Ru wafers were cut into $2.0{\times}2.0$ cm pieces for the surface analysis and used for estimating PRE. A laser zeta potential analyzer (LEZA-600, Otsuka Electronics Co., Japan) was used to obtain the zeta potentials of alumina particles and the Ru surface. A contact angle analyzer (Phoenix 300, SEO, Korea) was used to measure the contact angle of the Ru surface. The adhesion force between an alumina particle and Ru wafer surface was measured by an atomic force microscope (AFM, XE-100, Park Systems, Korea). In a solution with citric acid, the zeta potential of the alumina surface was changed to a negative value due to the adsorption of negative citrate ions. However, the hydrous Ru oxide, which has positive surface charge, could be formed on Ru surface in citric acid solution at pH 6 and 8. At pH 6 and 8, relatively low particle removal efficiency was observed in citric acid solution due to the attractive force between the Ru surface and particles. At pH 10, the lowest adhesion force and highest cleaning efficiency were measured due to the repulsive force between the contaminated alumina particle and the Ru surface. The highest PRE was achieved in citric acid solution with NaIO4 below 0.01 M at pH 10.

• Particle and aerosol research
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• v.9 no.4
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• pp.247-252
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• 2013

Removal of water contents in a gas is needed in industrial field of gas processing related on energy production/conversion, and environmental treatment. Inertial separators are economic devices for separating droplets from the gas stream. For design and incorporation of inertial pre-treatment separator, characteristics of removal of water contents with various operation conditions are needed. In this study, removal efficiency of water droplets at various flowrates (5-14 SCMM) and relative humidity (R.H.) conditions (40%, and 90%) has been investigated. At low R.H. condition, the removal characteristic is similar to the removal of solid particles. But, droplet growth resulting from the condensation of water vapor at high R.H. condition, is significant and it made increase in removal efficiency of droplet phase of water contents. For rapid removal of water contents, an effective method to enhancing condensation growth of water droplets is highly needed.

• Korean Journal of Materials Research
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• v.18 no.6
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• pp.307-312
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• 2008

In this study, a new cleaning process with a low cost of ownership (CoO) was developed with ozonated DI water ($DIO_3$). An ozone concentration of 40 ppm at room temperature was used to remove organic wax film and particles. Wax residues thicker than $200\;{\AA}$ remained after only a commercial dewaxer treatment. A $DIO_3$ treatment in place of a dewaxer showed a low removal rate on a thick wax layer of $8000\;{\AA}$ due to the diffusion-limited reaction of ozone. A dewaxer was combined with a $DIO_3$ rinse to reduce the wax removal time and remove wax residue completely. Replacing DI rinse with the $DIO_3$ rinse resulted in a surface with a contact angle of less than $5^{\circ}$, which indicates no further cleaning steps would be required. The particle removal efficiency (PRE) was further improved by combining a SC-1 cleaning step with the $DIO_3$ rinsing process. A reduction in the process time was obtained by introducing $DIO_3$ cleaning with a dewaxing process.

• Journal of Korean Society for Atmospheric Environment
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• v.27 no.3
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• pp.272-280
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• 2011

A novel particle removal system for air handling unit (AHU) of subway station was evaluated experimentally. The novel system was designed in order to minimize the maintenance cost by applying axial-flow cyclones. The system consists of multiple cyclone units and dust trap. Based on our previous numerical study, it was found to be effective for removal $1\sim10{\mu}m$ sized dust particles. In this study, we manufactured the mock-up model and evaluated the model experimentally. Liquid and solid test particles were generated for evaluating collection efficiency of the system and the pressure drop was monitored. The collection efficiency was varied from 41.2% to 85.9% with increasing the sizes of particle from 1 to $6.5{\mu}m$ by particle count ratio of inlet and outlet. The pressure drop was maintained constant less than $20mmH_2O$. In addition, the collection efficiency was estimated by total mass for solid test particles. It was found that the collection efficiency was 65.7% by particle mass ratio of inlet and outlet. It shows that present system can replace current pre-filters used in subway HVAC system for removing particulate matters with minimal operational cost.

• Journal of Korean Society of Water and Wastewater
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• v.23 no.6
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• pp.719-726
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• 2009

One of the alternative runoff management measures is on-site runoff mitigation, such as rainwater retention tank and infiltration facilities especially the latter that is possible to manage simultaneously runoff quality and quantity as a perspective of water-cycle. This study was conducted to develop a particle separator, inclined-pipe settling system, that could improve particle removal efficiency of road runoff as a pre-treatment device of stormwater infiltration. Solid particles larger than $100{\mu}m$ are separated by simple sedimentation; however, the significant amount of pollutants with a diameter less than $100{\mu}m$ remain in suspension. Without any treatment in that case of the runoff into infiltrate, groundwater would be deteriorated and also infiltration rate would be decreased by clogging. Therefore, we suggest optimal design parameters (inclined angle, pipe length, and surface loading rate) of inclined-pipe settling system which can be designed to effectively remove particles diameter smaller then $70{\mu}m$. Thus, the results showed TSS removal efficiency more than 80% with a particle diameter between $20{\mu}m$ and $70{\mu}m$, 100% above particle diameter $70{\mu}m$ for the inflow rate $0.018 m^3/m^2{\cdot}hr$ with pipe inclined at angle $15^{\circ}$.

• Journal of Korean Society of Environmental Engineers
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• v.37 no.1
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• pp.7-13
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• 2015

In this study, the effective treatment reducing geosmin and dosage of PAC was suggested when taste & odor compounds flow in. The removal efficiency of geosmin was evaluated with types of chlorination. In case of low geosmin concentration below 25 ng/L, removal efficiency of geosmin was estimated at 46% by combined treatment of pre and intermediate-chlorination. But, in the exclusive intermediate-chlorination treatment, removal efficiency of geosmin was increased to 57%. In the medium geosmin concentration (25~79 ng/L), removal efficiency of geosmin was estimated at 59% by combined treatment. But, in the exclusive intermediate-chlorination treatment, removal efficiency of geosmin was increased to 87%. When high geosmin concentration above 80 ng/L flows in, removal efficiency of geosmin was estimated at 69% by combined treatment. However, in the exclusive intermediate-chlorination treatment, removal efficiency of geosmin was increased to 95%. Then, the exclusive intermediate-chlorination has an important effect on removal of geosmin. After correlation of geosmin concentration and dosage of PAC was analyzed, the coefficient of determination was estimated at 0.96. And, the proper PAC dosage chart was proposed. Also, at a initial occurrence of geosmin, when the combined treatment by intermediate-chlorination and PAC was applied, particle-bound geosmin should be removed continuously. Finally, it is proved that the combined treatment was effective to remove the geosmin by threshold levels as well as to reduce the dosage of PAC.