• 한국마이크로전자및패키징학회:학술대회논문집
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• 한국마이크로전자및패키징학회 2003년도 기술심포지움 논문집
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• pp.256-259
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• 2003

To develop cleaning process various particles should be deposited on wafer surfaces to measure particle removal efficiencies. The purpose of the article in to evaluate, removal efficient)r of silica and alumina particles from wafer surfaces when they are deposited by dry and wet method. Dry deposition in air and wet spray deposition using solutions are used. van der Waals are considered to calculate the adhesion force of particles on surfaces. Higher adhesion force is measured on alumina particles on silicon when particles are deposited in air.

• Korean Chemical Engineering Research
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• 제46권3호
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• pp.639-645
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• 2008

십자형 응집-한외여과 막분리 공정 운전시 응집조건에 따른 영향을 살펴보면 급속교반-UF 공정과 응집-침전-UF 공정에서 투과 flux의 변화는 크게 나타나지 않았으며 UF막의 막오염 억제 측면에서는 응집전처리공정으로서 1분간의 짧은 급속혼화만으로도 충분한 것으로 나타났다. 교반강도에 따른 투과 flux의 변화결과 교반강도에 따라 형성되는 floc의 크기가 거의 유사하게 형성되어 교반강도에 따른 영향은 나타나지 않았다. 응집제 주입량에 따른 투과 flux변화를 살펴보면 응집제 주입량이 증가함에 따라 유기물의 제거가 크게 일어나 유기물 부하의 감소와 floc의 크기가 증가함에 따라 다공성 케이크층의 형성에 따른 막저항의 감소로 인하여 투과 flux가 향상되었다. 막의 재질과 전처리 응집공정적용에 따른 여과메카니즘 분석결과 막의 재질에 따라서는 친수성 재질의 막에 비하여 소수성 재질의 막의 경우 막의 공극속으로 입자의 침투가 발생하여 침적 흡착되는 현상과 막의 표면에서 형성되는 cake층에 의한 투과 flux 감소가 주원인이 되었으며 응집공정을 전처리공정으로 적용시 UF단독공정에 비하여 막오염 발생이 저감되었다.

• 한국입자에어로졸학회지
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• 제15권4호
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• pp.139-148
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• 2019

This study was performed for the application of a high-speed centrifugal cyclone to shale gas mining process. This device uses the centrifugal force to control particles similar to typical cyclones, and the disk located inside the cyclone is forced to rotate using a motor. The pressure difference occurred during the rotating of disk. Hence, inflow rate was generated without a blower fan. In addition, flow rate increased with elevating rpm of motor. The installing the disk in multiple stages on the inner rotor increased the instantaneous disk outlet flow. Hence, the control efficiency of oil particle increased from 1.05% to 31.2%. By modifying the structure of the disk so that the air flow to the opposite direction of the cyclone, the control efficiency of oil particles increased to 81.5%. By increasing the capacity of the motor and the size of the disk, the flow rate was increased to 2.5 ㎥/min because the rpm of motor and pressure difference increased. As rpm of motor increased, the cut-off diameter (d_pc) became smaller. Unlike the Lapple's equation, d_pc was inversely proportional to the effective number of rotations (N_e). The control efficiency was maintained even if the concentration of oil particles increased, for this reason, the higher the oil concentration, the more particles were accumulated and controlled.

• 한국지하수토양환경학회지:지하수토양환경
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• 제12권3호
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• pp.17-22
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• 2007

납으로 오염된 실제 토양을 처리하기 위해 토양세척기술의 적용성을 평가하였다. 세척제로는 염산을 사용하였으며, 0.2 M 염산을 사용하여 고액비 1:3으로 하여 10분간 접촉하여 2회 세척하여준 결과 96%의 제거율을 보였다. 세척액과 토양의 접촉시간을 5분에서 120분까지 증가하였을 때, 제거효율은 69.3%에서 81.9%로 증가하였다. 입경별 토양세척 효율은 온도와 교반시간에 영향을 받았으며, 20분 이상 교반하여 준다면, 0.075 mm 이하, 0.075 mm-2.0 mm, 2.0-4.0 mm 의 입경별 토양에서는 모두 99%의 제거효율을 보였다. 이상의 결과는 본 연구에 사용된 납 오염 토양은 토양세척기술을 적용하여 효과적으로 처리할 수 있는 것을 의미한다.

• 멤브레인
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• 제27권1호
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• pp.77-83
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• 2017

무기실리카 입자로 구성된 고탁도 원수를 처리하는 침지식 정밀여과 운전에서 휴민산과 2가 양이온의 존재유무에 따라 시간에 따른 파울링 저항을 관찰하였다. 공기폭기로 인한 무기실리카 입자의 파울링 감소효과는 휴민산과 칼슘이 혼합으로 존재 시 감소하였다. 파울링층의 전자현미경 관찰결과 칼슘의 존재 시 휴민산의 무기실리카 입자 표면흡착이 관찰되었다. 이는 멤브레인 표면에 조밀한 파울링층을 형성시켜 공기폭기 효과를 감소시킨 것으로 판단된다. 용액의 조성에 따른 고탁도 원수의 탁도 제거율에는 큰 변화가 없었으나 공기폭기량에 따라 칼슘과 무기실리카 입자의 혼합 존재 시 유기물질의 제거율은 80% 이상으로 증가하였다. 이는 공기폭기 하에 무기실리카 입자 표면에 흡착된 일부 휴민산들이 멤브레인 표면으로부터 함께 역수송 되어 유기물질 제거율을 증가시킨 것으로 사료된다.

• 환경생물
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• 제25권2호
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• pp.81-87
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• 2007

수화현상의 대표적 원인 생물인 남조류의 M. aeruginosa와 대조구로서 녹조류인 C. zofingiensis를 인공 배양하여 분말세라믹 투여에 따른 선택적 조류 제거 가능성에 대해 실험하였다. 0.05 mm의 분말세라믹을 투여에 따른 M. aeruginosa 및 C. zofingiensis의 침전효율은 각각 82와 63%였으며, 입자크기 0.1과 1 mm의 경우에서 는 M. aeruginosa는 각각 69와 34%, C. zofingiensis는 각각 52와 44%의 침전효율을 나타냄으로써, 분말세라믹 처리에 따른 침전효율의 차이를 나타내는 것을 확인하였다. 또한 Microcystis sp.에 의한 수화현상이 빈번한 수역의 현장시료를 대상으로 분말세라믹 처리에 따른 조류 제거효과를 실험한 결과 입자크기 0.05 mm, 투여농도 $1\;g\;L^{-1}$의 조건에서 24시간 후 약 67%의 Microcystis sp. 제거효과를 나타내었다. 분말세라믹의 수화현장에 적용가능성 여부를 확인하기 위하여 소규모 enclosure에서 분말세라믹 처리 농도에 따른 Microcystis sp. 제거효과 실험한 결과 입자크기 0.05 mm,투여농도 $1\;g\;L^{-1}$의 조건에서 24시간 후 약 69%의 Microcystis sp.의 제거효과를 나타내었으며, 이러한 연구결과로 보아 Microcystis sp.에 의해 수화가 발생한 현장에 분말세라믹을 적용하여 독성 남조류를 효율적으로 제거할 수 있을 것으로 기대된다.

• 한국정밀공학회지
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• 제30권11호
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• pp.1193-1201
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• 2013

Improved far field type(improved type) megasonic applicable to the cleaning equipment of single wafer processing type has been developed. In this study, to improve the uniformity of acoustic pressure distribution(APD), we utilize far field with relatively uniform APD, piezoelectric ceramic with a triangle hole in its center to prevent standing wave resulted from radial mode, and reflected wave from the wall of waveguide. On the basis of these methods, two analysis models of improved type were designed to which piezoelectric ceramic of different shape of electrode attached, and APD were analyzed by means of finite element method, and then one of them was selected by analysis results, finally, the selected model was fabricated. Test results show that the fabricated is better in the uniformity of APD than the imported and the conventional, also the fabricated shows high particle removal efficiency of 92.3% using DI water alone as a cleaning solution.

• Journal of Pharmaceutical Investigation
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• 제31권4호
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• pp.257-263
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• 2001

The microspheres have been developed as a new drug delivery system. Although many particulate drug carriers, such as liposome, niosome and emulsion, have been introduced, injectable and biodegradable microspheres appears to be a particularly ideal delivery system because the local anesthesia is not necessary for the insertion of large implants and for the removal of the device after the drug release is finished. Biodegradable microspheres with nicotine and triamcinolone acetonide are prepared and evaluated. As biodegradible polymers, PLA (M.W. 15,000, PLA-0015), PLGA (M.W. 17,000, RG 502) and PLGA (M.W. 8,600, RG 502H) are used. This study attempted to prepare and evaluate the nicotine and triamcinolone acetonide-incorporated microspheres, which were prepared by two methods, solvent-evaporation and spray-drying methods. The microspheres, as a disperse system for injections, were evaluated by particle size, size distribution, entrapment efficiency, and in vitro drug release patterns. The differences of preparation method, partition coefficient, types of polymer, and preparation conditions of microspheres influence the particle size, entrapment efficiency, and in vitro drug release patterns.

• Membrane and Water Treatment
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• 제9권3호
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• pp.181-188
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• 2018

A sidestream contains the filtrate or concentrate from the belt filter press, filter backwash and supernatant from sludge digesters. The sidestream flow, which heads back into the sewage treatment train, is about 1-3% less than the influent flow. However, the sidestream can increase the nutrient load since it contains high concentrations of phosphorus and nitrogen. In this study, the removal of PO4-P with organic matter characteristics and bacteriological changes during the sidestream treatment via ladle furnace (LF) slag was investigated. The sidestream used in this study consisted of 11-14% PO4-P and 3.2-3.6% soluble chemical oxygen demand in influent loading rates. LF slag, which had a relatively high $Ca^{2+}$ release compared to other slags, was used to remove $PO_4-P$ from the sidestream. The phosphate removal rates increased as the slag particle size decreased 19.1% (2.0-4.0 mm, 25.2% (1.0-2.0 mm) and 79.9% (0.5-1.0 mm). The removal rates of dissolved organic carbon, soluble chemical oxygen demand, color and aromatic organic matter ($UV_{254}$) were 17.6, 41.7, 90.2 and 77.3%, respectively. Fluorescence excitation-emission matrices and liquid chromatography-organic carbon detection demonstrated that the sidestream treatment via LF slag was effective in the removal of biopolymers. However, the removal of dissolved organic matter was not significant during the treatment. The intact bacterial biomass decreased from $1.64{\times}10^8cells/mL$ to $1.05{\times}10^8cells/mL$. The use of LF slag was effective for the removal of phosphate and the removal efficiency of phosphate was greater than 80% for up to 100 bed volumes.

• 상하수도학회지
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• 제18권5호
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• pp.619-627
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• 2004

Purposes of this study were to examine closely the extracellular polymeric substances (EPS) which was a membrane fouling contaminant, to control detected EPS by powdered activated carbon (PAC) dosage etc. and to evaluate the possibility of practical reuse facility. With high removal efficiency of general pollutants, when the PAC is added to MBR, improvement of removal efficiency of $COD_{cr}$, and color was expected and treated wastewater can be reused. It was judged that the correlation between EPS and membrane fouling was very high. Carbohydrate and DNA in the EPS were judged to be cause of membrane fouling. If EPS could be controled, not only membrane fouling would be decreased but also operation time would be extended. In experiment of powdered activated carbon (PAC), characteristics of the best PAC for membrane fouling control were the particle size of $7{\mu}m$, lodine Number of 1,050, surface area of peat of $1,150m^2/g$. In lab test, operation time of MBR by PAC dosage of 200mg/gVSS was longer than one of MBR by without PAC dosage. Because EPS, especially carbohydrate and DNA, was controled successfully by PAC, membrane fouling in MBR could be decreased.