• 제목/요약/키워드: p-floating layer

검색결과 17건 처리시간 0.023초

Fabrication and characterization of $WSi_2$ nanocrystals memory device with $SiO_2$ / $HfO_2$ / $Al_2O_3$ tunnel layer

  • Lee, Hyo-Jun;Lee, Dong-Uk;Kim, Eun-Kyu;Son, Jung-Woo;Cho, Won-Ju
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.134-134
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    • 2011
  • High-k dielectric materials such as $HfO_2$, $ZrO_2$ and $Al_2O_3$ increase gate capacitance and reduce gate leakage current in MOSFET structures. This behavior suggests that high-k materials will be promise candidates to substitute as a tunnel barrier. Furthermore, stack structure of low-k and high-k tunnel barrier named variable oxide thickness (VARIOT) is more efficient.[1] In this study, we fabricated the $WSi_2$ nanocrystals nonvolatile memory device with $SiO_2/HfO_2/Al_2O_3$ tunnel layer. The $WSi_2$ nano-floating gate capacitors were fabricated on p-type Si (100) wafers. After wafer cleaning, the phosphorus in-situ doped poly-Si layer with a thickness of 100 nm was deposited on isolated active region to confine source and drain. Then, on the gate region defined by using reactive ion etching, the barrier engineered multi-stack tunnel layers of $SiO_2/HfO_2/Al_2O_3$ (2 nm/1 nm/3 nm) were deposited the gate region on Si substrate by using atomic layer deposition. To fabricate $WSi_2$ nanocrystals, the ultrathin $WSi_2$ film with a thickness of 3-4 nm was deposited on the multi-stack tunnel layer by using direct current magnetron sputtering system [2]. Subsequently, the first post annealing process was carried out at $900^{\circ}C$ for 1 min by using rapid thermal annealing system in nitrogen gas ambient. The 15-nm-thick $SiO_2$ control layer was deposited by using ultra-high vacuum magnetron sputtering. For $SiO_2$ layer density, the second post annealing process was carried out at $900^{\circ}C$ for 30 seconds by using rapid thermal annealing system in nitrogen gas ambient. The aluminum gate electrodes of 200-nm thickness were formed by thermal evaporation. The electrical properties of devices were measured by using a HP 4156A precision semiconductor parameter analyzer with HP 41501A pulse generator, an Agillent 81104A 80MHz pulse/pattern generator and an Agillent E5250A low leakage switch mainframe. We will discuss the electrical properties for application next generation non-volatile memory device.

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Memory Characteristics of High Density Self-assembled FePt Nano-dots Floating Gate with High-k $Al_2O_3$ Blocking Oxide

  • Lee, Gae-Hun;Lee, Jung-Min;Yang, Hyung-Jun;Kim, Kyoung-Rok;Song, Yun-Heub
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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    • pp.388-388
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    • 2012
  • In this letter, We have investigated cell characteristics of the alloy FePt-NDs charge trapping memory capacitors with high-k $Al_2O_3$ dielectrics as a blocking oxide. The capacitance versus voltage (C-V) curves obtained from a representative MOS capacitor embedded with FePt-NDs synthesized by the post deposition annealing (PDA) treatment process exhibit the window of flat-band voltage shift, which indicates the presence of charge storages in the FePt-NDs. It is shown that NDs memory with high-k $Al_2O_3$ as a blocking oxide has performance in large memory window and low leakage current when the diameter of ND is below 2 nm. Moreover, high-k $Al_2O_3$ as a blocking oxide increases the electric field across the tunnel oxide, while reducing the electric field across the blocking layer. From this result, this device can achieve lower P/E voltage and lower leakage current. As a result, a FePt-NDs device with high-k $Al_2O_3$ as a blocking oxide obtained a~7V reduction in the programming voltages with 7.8 V memory.

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낙동강 하류에서 수서무척추동물에 의한 정수식물의 낙엽분해 (Leaf Litter Breakdown of Emergent Macrophytes by Aquatic Invertebrates in the Lower Nakdong River)

  • 김구연;주기재;김현우;신건성;윤해순
    • 생태와환경
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    • 제35권3호통권99호
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    • pp.172-180
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    • 2002
  • 큰 강의 하류에서 우점하는 정수식물의 분해 기작을 알기 위하여 1998년 11월부터 1999년 9월까지 낙동강하류의 수변에 분포하는 정수식물 중 우점종인 갈대와준우점종인 줄 및 애기부들의 낙엽분해속도(개방망과 폐쇄망, 부유층과 침수층)를 비교하고, 수서 무척추동물의 낙엽분해 기여도를 조사하였다. 낙엽주머니에서 채집된 수서 무척추동물은 11과 11종이었으며 평균 밀도는 $222\;ind./m^2$ (n= 792)였다. 우점종은 평균 밀도의 약 68% 이상을 차지하는 파리목 깔따구과의 Chironomus sp.(깔따구속)로 수집-모으는 기능군(collector-gather)이 우점하였다. 수서 무척추동물의 서식 밀도는 개방망보다 폐쇄망에서 높게 나타났으며 부유층과 침수층에서는 큰차이가 없었다. 낙엽주머니 내 깔따구과의 평균 밀도는 줄($180\;ind./m^2$, n= 264), 애기부들($187\;ind./m^2$, n= 264), 갈대 ($95\;ind./m^2$, n= 264) 순이었고 부유층보다 침수층에서, 개방망보다 폐쇄망에서 다소 많이 출현하였다. 50%분해에 소요되는 기간은 줄이 가장 짧고 다음은 애기부들 그리고 갈대 순으로 나타났다. 실험결과 분해율은 줄이 가장 높았으며, 애기부들이 갈대보다 조금 더 빨리 분해되었다. 그리고 3종의 낙엽 모두 분해율이 침수층에서보다 부유층에서 더 빠르게 분해되었다. 개방망과 폐쇄망에서는 분해율의 차이가 나타나지 않았다.

Experimental investigation on effect of ion cyclotron resonance heating on density fluctuation in SOL at EAST

  • Li, Y.C.;Li, M.H.;Wang, M.;Liu, L.;Zhang, X.J.;Qin, C.M.;Wang, Y.F.;Wu, C.B.;Liu, L.N.;Xu, J.C.;Ding, B.J.;Lin, X.D.;Shan, J.F.;Liu, F.K.;Zhao, Y.P.;Zhang, T.;Gao, X.
    • Nuclear Engineering and Technology
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    • 제54권1호
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    • pp.207-219
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    • 2022
  • The suppression of high-intensity blob structures in the scrape-off layer (SOL) by ion-cyclotron range of frequencies (ICRF) power, leading to a decrease in the turbulent fluctuation level, is observed first in the Experimental Advanced Superconducting Tokamak (EAST) experiment. This suppression effect from ICRF power injection is global in the whole SOL at EAST, i.e. blob structures both in the regions that are magnetically connected to the active ICRF launcher and in the regions that are not connected to the active ICRF launcher could be suppressed by ICRF power. However, more ICRF power is required to reach the full blob structure suppression effect in the regions that are magnetically unconnected to the active launcher than in the regions that are magnetically connected to the active launcher. Studies show that a possible reason for the blob suppression could be the enhanced Er × B shear flow in the SOL, which is supported by the shaper radial gradient in the floating potential profiles sensed by the divertor probe arrays with increasing ICRF power. The local RF wave power unabsorbed by the core plasma is responsible for the modification of potential profiles in the SOL regions.

양식해태의 유통에 관한 조사 연구 (A Study on Marketing of Cultured Laver Products)

  • 유충열
    • 수산경영론집
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    • 제4권1_2호
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    • pp.19-57
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    • 1973
  • Laver io one of the most necessary and seasonal items in Korean food from oldtimes. Laver is lagely eaten in dried form, and its supply depends entirely upon culture weeds. The history of laver culture in Korea about sixty or seventy years is older than in Japan. Significance of laver culture is divided into two aspects, one is food supply in the nation, and the other is export to other countries. Houses engaged in laver culture are about foully thousands, and laver production in 1972 is estimated as 1, 3 bitten sheets. (1 sheet is a dried laver of 20 cm sq, in the shape of paper) Especcially meaning of layer production is the concentration of labour input, and systematic management of labour. From around 1920, the method of laver culture was introduced by Japanese Imperialism for mono culture in shallow seas, and mass products of laver is provided to Japan market, DOMESTIC MARKET Fundamental consume function calculates at below, $D_{(68_71)}$=16354 $Y^{0.471}$ $P^{-1.0662}$ where D is total layer demand, Y income variable, P price variable. It means income elasticity is 476. in the whole country, and price elasticity is 1, 07. But generally income elasticity is higher in urban area than in rural area, as shown at 1, 3 in Seoul city. Expence of laver in house expenditure is mutually correlated with another expence, See Table 12 about the relative function. See Table 14 and 16 about the relation between the gathering and the changes of price in auction, wholesale and retail price support system is for two effects, one of which is constraint of the upper price, the other is rise of the lower price. Before the system control, the equation in three year average calculated as below, $Y_{b}$ =18, 907.7455+15435.9364 t (r=0.89) where the origin t=0 is the November and the units are month. Post the system control, $Y_{p}$ =30, 047.9636+1, 631.1721t (r=0.97) therefore, this system has an effect only on the rise of lower price, Average annual margins of laver products at four market levels according to the consumer spent is below. EXPORTING MARKET Japanese demand function of laver products is, Log D=5, 289+1, 108 Log Y-1, 395 Log P (r=0.987) where D is Japanese laver demand, Y income variable, P price variable. according to which income elasticity is 1. 1 and price elasticity is 1.4. Laver production in 1970 tile highest record till then, is estimated as six billion sheets. But the recent improvement of laver culture techniques, the production of seeds and freezing storage of seeds has been stabilized. Futher new culture farms have been developed by means of break- water fences or by floating culture method. These improvements have been backed up with increased demand of laver products. Import quantity and price of Korean laver products are restrained by three organizations, that is producer, distributor and consumer. This relationship calculated by regression equation shows that import is influenced only producer organization, at the sacrifice of consumer profit. For increase to export of laver products, we urgently require to open foreign trade of laver products for Japanese consumer, .and Japan has political responsibility to solve Korean laver structure. But with long run timeseries, as regards Japanese production and import quantity, importing function shows increasing trend as below, 250 million sheets <3, 947.1674+0.005 $L_{g}$ >) 600 million sheets where $L_{q}$ is relative production quantity of laver in Japan. (unit; 100 thousand sheets) Our Export effort should be put on the highly processed products whithin the restraind quote.ote.

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밭 관개의 계획용수량 및 시설용량의 정립에 관한 연구 -증발산량 실측에 의한 밭용수량의 추정에 관하여- (Study on the Establishment of Project Duty of Water and Facility Capacity in Upland Irrigation - On the Estimation of Duty of Water for the Upland Crops by the Measurement of Evapotranspiration -)

  • 김시원;김선주
    • 한국농공학회지
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    • 제30권4호
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    • pp.23-44
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    • 1988
  • The evaportranspiration of upland crops was measured by four types of lysimeter and water consumption characteristics together with the optimum irrigation point by the crops was defind. Among the evapotranspiration estimation formulas, the constant of wind function in the modified Penman equation was corrected to agree with the meteorological conditions of Korea. The evapotranspiration of the crops in the project standard year was estimated according to the cropping system of the project area in Chungju, and from the estimated evapotras - spiration, net duty of water per one time and irrigation in tervals were investigated. The results obtained are summarized as follows: 1. The evapotranspiration of the same crop measured at the same plot was slightly different by the lysimetric methods, and among the four types of lysimeter, the accuracy of the floating lysimeter was the highest. 2. The yields among the watering treatments showed the significance of 5% in the expe- riment with red cabbage and Chinese cabbage, and significance of 1% in the crisphead lettuce, and the optimum irrigation point for the tested crops was defined ad pF 2.0 by the least squre difference test. 3. The evapotranspiration of the crops in the mid-season stage showed maximum among the growing stages, and the average daily evapotranspiration by the crops over the growing seasons of cabbage, crisphead lettuce, Chinese cabbage, summer cucumber, tornato, salary and autumn cucumber was 4.18mm, 4.77mm, 3.9qrnm, 5.68mnn, joonim, 4.26mm and 3.3qrnn, respectively. 4. From the investigated soil moisture extration pattern(SMEP) of the crisphead lettuce, cucumber and tomato, the proportion of the first layer in the initial stage showed over so%, and the SMEP of the lowest fourth layer during the late-season stage in the experiment cabbage and Chinese cabbage was 15.8% and 16.9, respectively, with showed that the root elongated th the lowest soil layer. 5. The total available moisture(TAM) of clay loam was 21.2-23.3mm and that of sandy loam was 16.1 - 19.0mm under the optimum irrigation point of pF. 2.0, and the total readily available moisture( TRAM) of the crops cultivated in the clay loam soil was larger than that cultivated in the sandy loam soil, and the TRAM during the mid-and late-season were larger than that of the inital and crop development stage. 6. The estimated evapotranspration by the corrected Pennam equation, whkh corrected the constant of the wind function in the modified Penman equation, was nearly agreed with the actually measured evaporanspiration of grass. 7. Among the several evaportranspiration estimation methods, the evapotranspiration es- timated by the corrected Pennam equation was closed to the actual evapotranspiration of reference crop (grass) evapotranspiration, therefore it is suggested to use the corrected Penman equation to determine the duty of water of corps. 8. The average crop coefficient (Kc) of cabbage by the corrected Penman equation was 0.94 and that of crisphead lettuce, summer cucumber, tomato, salary, Chinese cabbage and autumn cucumber was 1.07, 1.22, 1.02, 1.01, 1.35, 1.09, respectively 9. The estimated total evapotranspiration of cabbage in the project area( Chungju) by the corrected Penman equation was 223.9mm and that of crisphead lettuce, Chinese cabbage, summer cucumber, tomato, salary and auturun cucumber was 215.7mm, 205.9mm, 359.Omrn, 300.9mm, 332.lmm and 202.7mm, respectively. 10. The net duty of water per one time of the crops cultivated in the sandy loam soil, and the net duty of water per one time in the mid-season & late-season showed larger than that of the initial stage. 11. The shortest irrigation interval of cabbage in the project area was 4.2 days, and that of crisphead lettuce, Chinese cabbage, cucumber, tomato and salary was 1.2days, 2.3days, 1.8days, 2.2days and 2.7days, respectively.

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박실늪의 식생 구조와 환경 요인 (Vegetation structure and environmental factors in Paksil-nup Wetland, Hapcheon)

  • 김철수;이팔홍;손성곤;오경환
    • 한국습지학회지
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    • 제2권1호
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    • pp.31-40
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    • 2000
  • 자연늪의 육상화 과정에서 자연늪의 환경과 식물 군집의 특징을 구명하고자 경상남도 합천군 황강변에 위치한 박실늪에서 1990년 8월부터 1998년 9월까지 식물상, 식생 구조 및 저토 환경 요인을 조사한 결과는 다음과 같다. 퇴적에 따른 수평적 저토 환경은 pH 4.36~4.34, 전기전도도 $19.0{\sim}1260.0\;{\mu}mho\;cm^{-1}$, 유기물량 0.01~6.35%, 총질소량 0.001~0.14%, 유효인량 0.01~0.31 mg/100g, 치환성 칼륨 1.01~13.98 ppm, 치환성 칼슘 16.75~143.80 ppm, 치환성 마그네슘 0.93~14.85 ppm, 치환성 나트륨 0.21~3.86 ppm 등이었고, 입경 조성은 모래 13.0~93.3%, 미사 5.4~71.7%, 점토 0.5~37.5% 등으로서 조사 지소에 따라 차이가 있었다. 조사 지역에서 채집된 수생 및 습생 관속식물은 72과 182속 223종 36변종 2품종 총 261종류였다. 이들은 Sculthorpe (1967)의 생활형으로 분류한 결과 수생식물은 45종류로 그 중 정수식물이 27종류 (60%), 침수식물 8종류 (18%), 부수식물 6종류 (13%) 및 부엽식물 4종류 (9%)의 순이었고, 습생식물은 216종류였다. 교목과 관목층의 중요치는 선버들, 왕버들, 키버들 등의 순이었고, 초본층에서는 마름, 고마리, 달뿌리풀, 부들, 나도미꾸리낚시, 줄 등의 순이었다. 식생의 군총 분석 결과 7종으로 구성된 조하대 군총과 19종으로 구성된 진연안대 군총으로 뚜렷하게 구분되었다. 군집 분류에 의해 7개 군집으로 분류되었으나, 대응분석에 의한 식분 서열 분석 결과와는 일치하지 않았으며, PCA 분석 결과 이들의 분포에 영향을 주는 환경 요인은 고도 경사, 즉 수심 및 조토의 입경이었다.

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