• 제목/요약/키워드: p a-SiC:H

검색결과 615건 처리시간 0.031초

4H-SiC 기판 위에 RF Sputter로 증착된 NiO 박막의 후열처리 효과 (Post-annealing Effect of NiO Thin Film Grown by RF Sputtering System on 4H-SiC Substrate)

  • 문수영;김민영;변동욱;이건희;구상모
    • 한국전기전자재료학회논문지
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    • 제36권2호
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    • pp.170-174
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    • 2023
  • Nickel oxide is a nonstoichiometric transparent conductive oxide with p-type conductivity, a wide-band energy gap of 3.4~4.0 eV, and excellent chemical stability, making it a very important candidate as a material for bipolar devices. P-type conductivity in Transparent Conductive Oxides (TCO) is controlled by the oxygen vacancy concentration. During the TCO film deposition process, additional oxygen diffusing into the NiO structure causes the formation of Ni 3p ions and Ni vacancies. This eventually affects the hole concentration of the p-type oxide thin film. In this work, the surface morphology and the electrical characteristics were confirmed in accordance with the annealing atmosphere of the nickel oxide thin film.

스위칭 손실을 줄인 1700 V 4H-SiC Double Trench MOSFET 구조 (A Novel 1700V 4H-SiC Double Trench MOSFET Structure for Low Switching Loss)

  • 나재엽;정항산;김광수
    • 전기전자학회논문지
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    • 제25권1호
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    • pp.15-24
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    • 2021
  • 본 논문에서는 CDT(Conventional Double Trench) MOSFET보다 스위칭 시간과 손실이 적은 1700 V EPDT(Extended P+ shielding floating gate Double Trench) MOSFET 구조를 제안하였다. 제안한 EPDT MOSFET 구조는 CDT MOSFET에서 소스 Trench의 P+ shielding 영역을 늘리고 게이트를 N+와 플로팅 P- 폴리실리콘 게이트로 나누었다. Sentaurus TCAD 시뮬레이션을 통해 두 구조를 비교한 결과 온 저항은 거의 차이가 없었으나 Crss(게이트-드레인 간 커패시턴스)는 게이트에 0 V 인가 시에는 CDT MOSFET 대비 32.54 % 줄었고 7 V 인가 시에는 65.5 % 감소하였다. 결과적으로 스위칭 시간 및 손실은 각각 45 %, 32.6 % 줄어 스위칭 특성이 크게 개선되었다.

800V급 4H-SiC DMOSFET 전력 소자 구조 최적화 시뮬레이션 (A simulation study on the structural optimization of a 800V 4H-SiC Power DMOSFET)

  • 최창용;강민석;방욱;김상철;김남균;구상모
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2009년도 춘계학술대회 논문집
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    • pp.35-36
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    • 2009
  • In this work, we demonstrate 800V 4H-SiC power DMOSFETs with several structural alterations to obtain a low threshold voltage ($V_{TH}$) and a high figure of merit ($V_B^2/R_{SP,ON}$). To optimize the device performance, we consider four design parameters; (a) the doping concentration ($N_{CSL}$) of current spreading layer (CSL) beneath the p-base region, (b) the thickness of p-base ($t_{BASE}$), (c) the doping concentration ($N_J$) and width ($W_J$) of a JFET region, (d) the doping concentration ($N_{EPI}$) and thickness ($t_{EPI}$) of epi-layer. These parameters are optimized using 2D numerical simulation and the 4H-SiC DMOSFET structure results in a threshold voltage ($V_{TH}$) below ~3.8V, and high figure of merit ($V_B^2/R_{SP,ON}$>${\sim}200MW/cm^2$) for a power MOSFET in $V_B$-800V range.

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The a-Si:H/poly-Si Heterojunction Solar Cells

  • Kim, Sang-Su;Kim, do-Young;Lim, Dong-Gun;Junsin Yi;Lee, Jae-Choon;Lim, Koeng-Su
    • Journal of Electrical Engineering and information Science
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    • 제2권5호
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    • pp.65-71
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    • 1997
  • We present heterojunction solar cells with a structure of metal/a-Si:H(n-i-p)/poly-Si(n-p)/metal for the terrestrial applications. This cell consists fo two component cells: a top n-i-p junction a-Si:Hi cell with wide-bandgap 1.8eV and a bottom n-p junction poly-Si cell with narrow-bandgap 1.1eV. The efficiency influencing factors of the solar cell were investigated in terms of simulation an experiment. Three main topics of the investigated study were the bottom cell with n-p junction poly-Si, the top a-Si:H cell with n-i-p junction, and the interface layer effects of heterojunction cell. The efficiency of bottom cell was improved with a pretreatment temperature of 900$^{\circ}C$, surface polishing, emitter thickness of 0.43$\mu\textrm{m}$, top Yb metal, and grid finger shading of 7% coverage. The process optimized cell showed a conversion efficiency about 16%. Top cell was grown by suing a photo-CVD system which gave an ion damage free and good p/i-a-Si:H layer interface. The heterojunction interface effect was examined with three different surface states; a chemical passivation, thermal oxide passivation, and Yb metal. the oxide passivated cell exhibited the higher photocurrent generation and better spectral response.

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수소제조를 위한 메탄올의 수증기 개질반응 (Steam Reforming of Methanol for the Production of Hydrogen)

  • 김상채;정찬홍;유의연
    • 공업화학
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    • 제7권2호
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    • pp.261-268
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    • 1996
  • Copper 담지량을 0~50wt% 범위에서 달리한 $Cu/SiO_2$ 촉매를 kneading법으로 제조하였다. 이 촉매들을 $400{\sim}900^{\circ}C$에서 소성하였고 반응전에 수소분위기하에서 $150{\sim}300^{\circ}C$에서 환원하였다. 메탄올의 수증기 개질반응을 반응온도; $200{\sim}400^{\circ}C$, 수증기/메탄올 몰비; 0.4~1.6, 그리고 접촉시간(W/F); 3~25g.-cat.hr./mol 범위에서 수행하였다. 촉매의 특성은 IR, BET와 XRD를 사용하여 조사하였다. 촉매의 precursor로 copper nitrate를 사용할때 촉매제조시의 pH가 촉매의 활성에 큰 영향을 미쳤으나 pH, 소성온도 및 환원온도는 생성물분포에 영향을 미치지 않았다. 최적담지량, 소성온도 및 환원온도는 각각 40wt%, $700^{\circ}C$ 그리고 $300^{\circ}C$였다. 수소생성을 위한 최적반응온도는 $275^{\circ}C$였고 수소의 양과 질을 저하하는 메탄의 생성은 이 온도까지 억제되었다. $Cu/SiO_2$ 촉매계에서 반응활성종은 $Cu^{\circ}-Cu_2O$임을 추정할 수 있었다.

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PIN形 非晶質 硅素 太陽電池의 製作 및 特性 (Fabrication and Characteristics of PIN Type Amorphous Silicon Solar Cell)

  • 박창배;오상광;마대영;김기완
    • 대한전자공학회논문지
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    • 제26권6호
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    • pp.30-37
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    • 1989
  • Silane($SiH_4$), methane($CH_4$), diborane(B_2H_6)그리고 phosphine($PH_3$)을 이용하여 rf글로방전분해법으로 PIN형 a-SiC:H/a-Si:H 이종접합 태양전지를 제작하였다. $SnO_2/ITO$층 형성치 태양전지의 효율은 ITO 투명전극만의 경우보다 1.5% 향상되었다. 제작조건은 P층의 경우 $CH_4/SiH_4$의 비를 5로 하고 두께는 $100{\AA}$이었다. I층은 P층위에 증착하였으나 진성이 아니고 N형에 가깝다. 이 I층을 진성으로 바꾸기 위해서 0.3ppm의 $B_2H_6$$SiH_4$에 혼합하여 5000${\AA}$증착했다. 또한 N층은 $PH_4/SiH_4$의 비를 $10^{-2}$로 하여 $400{\AA}$ 증착시켰다. 그 결과 입사강도가 15mW/$cm^2$일 때 개방전압 $V_{oc}=O'$단락전류밀도 $J_{sc=14.6mA/cm^2}$, 충진율 FF=58.2%, 그리고 효율 ${eta}=8.0%$를 나타내었다. 빛의 반사에 의한 손실을 감소시키기 위하여 $MgF_2$를 유리기판위에 도포하였다. 이에 의한 효율은 0.5% 향상되어 전체적인 효율은 8.5%였다.

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전해석출에 의한 단계적 Ni-SiC 복합코팅층 제조공정에 관한연 (A Study on the Graded Ni-SiC Composite Coating by Electrodeposition)

  • 김선규
    • 한국표면공학회지
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    • 제30권5호
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    • pp.347-354
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    • 1997
  • Composite plating is a method of co-depositing fine particles of metallic, non-metallic compound or polymers in the plated layer to improve material properties such as were-resistance, lubrication, or corrosion resistance. Graded Ni-Sic composite coating were produced in this research. Prior to produce Graded Ni-SiC composite coatings, effects of particle size, particle content, pH of electrolyte, temperature, current density, stirring rate on the amount of SiC deposited in the Ni layer were investigated. By manipulating current density and plating time properties of these coating were evaluated by micro-indentation hardness test.

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수광층의 카바이드 함량 변화에 따른 실리콘 이종접합 태양전지 특성 변화 (Enhancing Solar Cell Properties of Heterojunction Solar Cell in Amorphous Silicon Carbide)

  • 김현성;김상호;이영석;정준희;김용준;다오빈 아이;이준신
    • 한국전기전자재료학회논문지
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    • 제29권6호
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    • pp.376-379
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    • 2016
  • In this paper, the efficiency improvement of the heterojunction with intrinsic thin layer (HIT) solar cells is obtained by optimization process of p-type a-SiC:H as emitter. The optoelectronic of p-type a-SiC:H layers including the optical band-gap and conductivity under the methane gas content variation is conducted in detail. A significant increase in the Jsc by $1mA/cm^2$ and Voc by 30 mV are attributed to enhanced photon-absorption due to broader band-gap of p-a-SiC:H and reduced band-offsets at p-side interface, respectively of HIT solar cells.

Investigations on Microcrystalline Silicon Films for Solar Cell Application

  • Hwang, Hae-Sook;Park, Min-Gyu;Ruh, Hyun;Yu, Hyun-Ung
    • Bulletin of the Korean Chemical Society
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    • 제31권10호
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    • pp.2909-2912
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    • 2010
  • Hydrogenated microcrystalline silicon (${\mu}c$-Si:H) thin film for solar cells is prepared by plasma-enhanced chemical vapor deposition and physical properties of the ${\mu}c$-Si:H p-layer has been investigated. With respect to stable efficiency, this film is expected to surpass the performance of conventional amorphous silicon based solar cells and very soon be a close competitor to other thin film photovoltaic materials. Silicon in various structural forms has a direct effect on the efficiency of solar cell devices with different electron mobility and photon conversion. A Raman microscope is adopted to study the degree of crystallinity of Si film by analyzing the integrated intensity peaks at 480, 510 and $520\;cm^{-1}$, which corresponds to the amorphous phase (a-Si:H), microcrystalline (${\mu}c$-Si:H) and large crystals (c-Si), respectively. The crystal volume fraction is calculated from the ratio of the crystalline and the amorphous phase. The results are compared with high-resolution transmission electron microscopy (HR-TEM) for the determination of crystallinity factor. Optical properties such as refractive index, extinction coefficient, and band gap are studied with reflectance spectra.

Ni-SiC 복합도금층의 내마모성에 관한 연구 (A study on the wear resistance of Ni-SiC composite plating)

  • 김성호;한혜원;장현구
    • 한국표면공학회지
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    • 제29권1호
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    • pp.26-35
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    • 1996
  • The Ni-SiC composite plating was performed in a Watt nickel solution and the wear resistance of the composite layer was studied on a pin-on-flat type wear tester. The volume losses and friction coefficients were measured. It was found that the quantity of SiC powder in the composite layers was affected by SiC concentration, pH, temperature, and agitation speed in the Watt nickel solution. The hardness and wear resistance of the coatings increased with SiC content. The quantity of SiC powder in the coating from a nickel sulfamate solution is larger than that of the Watt nickel solution, because the amount of nickel ions absorbed on the SiC powder in the nickel sulfamate solution is greater than that in the Watt's solution.

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