• Journal of the Institute of Electronics Engineers of Korea SD
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• v.41 no.12
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• pp.13-19
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• 2004

We have been studied on the high concentration ozonized water production technology which substitute for the SPM wet cleaning solution process as the PR strip process after the photolithography process in the semiconductor and flat panel display manufacturing. In this work, we have developed the surface discharge type ozone generator which has the characteristics of the 12 ［wt%］ ozone concentration at the oxygen gas flow of 0.5［ℓ/min］ oxygen per cell and also developed the high efficiency ozone contactor for the mixing ozone gas with deionized water. As the production test results of the ozonized water, we obtained the ozonized water concentration above 80［ppm］ at the 10［wt%］ ozone gas concentration, and also had a good result of the PR strip rate of 147［nm/min］. at the 70［ppm］ ozonized water.

• Proceedings of the Materials Research Society of Korea Conference
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• 1996.11a
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• pp.154-154
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• 1996

• Proceedings of the KIEE Conference
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• 1999.07e
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• pp.2001-2003
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• 1999

Recently the ozone generation system is well used for cleaning the contaminated water by using the strong oxidization effects of ozone. Ozone generation system is composed of ozone generation device, air or oxygen supply device and high voltage apply device. In this paper, commercial frequency was applied to the wire typed conductor. The ozone concentration was measured with air or oxygen as a supplied gas, which can be used as basic data for the development of ozonizer system.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2013.05a
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• pp.1005-1006
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• 2013

• Journal of the Korea Institute of Military Science and Technology
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• v.11 no.2
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• pp.101-108
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• 2008

This study attempted to develop the technology by gaseous ozone for decontaminating building affected by a model of biological weapon agent(Bacillus subtilis spores) instead of Bacillus anthracis spore. The use of ozone is attractive method from a practical point of view of decontamination procedure since it has strong oxidation power but no residue after application. We examined the disinfection efficiency of gaseous ozone to Bacillus subtilis spores which suspension was sprayed on different material surfaces and dried. Three different types of gaseous ozone was applied : dry ozone, dry ozone with humidified air, and water bubbled wet ozone. Dry ozone(1500ppm) failed to achieve any significant inactivation for 2hrs. However, six log reduction of B. subtilis spore was achieved within 30min by 1500ppm of water bubbled wet ozone. This result shows the noticeable inactivation efficiency by gaseous ozone compared with previous studies. Good performance by wet ozone was also found for military material surface.(i.e. : gas mask hood, protective garments, army peinted metal surface).

• Journal of the Korean Society of Food Science and Nutrition
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• v.20 no.5
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• pp.483-487
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• 1991

The utilization of ozone as a disinfectant for removing poultry meat microorganisms and then cleaning the poultry rinse water was investigated. When microbial suspensions were treated with ozone at 2, 500ppm/min for 40min, microorganisms were not detectable perfectly. The bacteriocidal effect of ozone by temperature was enhanced greater at 7$^{\circ}C$ than $25^{\circ}C$. All poultry meat microorganisms were killed by ozone treatment at 1, 530ppm for 50min. The pathogenic bacteria such as Salmonella sp. were more vulnerable and not detected by ozone treatment for 20min. Ozonation of the suspension for 20min and 50min increased light transmission at 500nm to 58% and 145%, respectively. The order of COD removal was ozone treatment(21%), coagulant((Al)2SO4) treatment(41%), ozone treatment after coagulant treatment(54%).

• Korean Journal of Materials Research
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• v.8 no.6
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• pp.532-537
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• 1998

The purpose of this study was to investigate the behavior of ozone in DI water and the reaction with wafers during the semiconductor wet cleaning process. The solubility of ozone in DI water was not only dependent on the temperature but also directly proportional to the input concentration of ozone. The lower the initial ozone concentration and the temperature, the longer the half-life time of ozone. The reaction order of ozone in DI water was calculated to be around 1.5. The redox potential reached a saturation value in 5min and slightly increased as the input ozone concentrations increased. The completely hydrophilic surface was created in Imin when HF etched silicon wafer was cleaned in ozonized DI water containing higher ozone concentrations than 2ppm. Spectroscopic ellipsometry measurements showed that the chemical oxide formed by ozonized DI water was measured to be thicker than that by piranha solution. The wafers contaminated with a non-ionic surfactant were more effectively cleaned in ozonized DI water than in piranha and ozonized piranha solutions.

• Clean Technology
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• v.7 no.4
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• pp.225-242
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• 2001

Cleaning process is necessary for machining parts or manufacturing finished products in the industry. Most of domestic and foreign companies are now trying to adopt environment-friendly aqueous cleaning agents instead of CFC-113 and 1,1,1-TCE which are ozone-depleting substances. However, the aqueous cleaning system has a disadvantage due to its generation of lots of waste water since the system utilizes water in cleaning and rinsing processes. Thus, it is very important that monitoring and recycling technologies of the cleaning solution and the rinse water should be introduced in the aqueous cleaning system in order to minimize generation of waste water and to maintain its cleaning performance for a quite long time. In this paper, the cleaning agents utilized in the aqueous cleaning system and cutting oils which are main contaminants were examined and analyzed. And the monitoring and recycling technologies of the aqueous cleaning system which can be employed in the industrial fields were also reviewed and evaluated.

• Journal of Environmental Health Sciences
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• v.27 no.1
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• pp.1-7
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• 2001

Ammonia is used in the manufacture of fertilizers, refrigerants, stabilizers and many household cleaning agents. These wide applications resulted in ammonia contamination in water. Ammonia can be removed from water by physical, biological, and chemical methods. Ozonation is effictive in the treatment of water with low concentration of ammonia. This study is undertaken to provide kinetic data for the ozonation of ammonia with or without hydrogen peroxide. The results were as follows; The destruction rate of ammonia increased gradually with the influent hydrogen peroxide concentration up to 0.23 mM and inhibited in the range of 0.23~11.4mM, and the maximum removal rate of ammonia achieved at 0.23mM of hydrogen peroxide, and the overall kinetics was first order. The combination effect of hydrogen and ozone to oxide ammonia in aqueous solution was better than ozone alone. The reacted ammonia was converted completely to nitrate ion.

• Journal of environmental and Sanitary engineering
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• v.17 no.2
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• pp.1-10
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• 2002

Ammonia is used in the manufacture of fertilizers, refrigerants, stabilizers and many household cleaning agents. The wide applications result in ammonia contamination in water. Ammonia can be removed from water by physical, biological, and chemical methods. Especially ozonation is effective in the treatment of water with low concentration of ammonia. Therefore, this study is undertaken to provide kinetic data for the ozonation of ammonia with bromide. The results were as follows; Ammonia oxidized by ozone with bromide catalysis. The denitrification rate of the ammonia increased proportionally to the concentration of bromide, and the overall reaction order was zero. It was also found that the effect of bromide ion concentration on the denitrification can be expressed by Monod type equation and there was no more effect above a proper bromide ion concentration. The reacted ammonia was converted completely to nitrate ion without bromide, but the denitrification of ammonia by ozone was conducted in the presence of bromide.